Applied Materials Mirra Mesa Oxide CMP system, with SMIF for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Mirra Mesa Oxide CMP system, with SMIF.
Please click on the "Get Quote" button at the end of the Mirra Mesa description, if you'd like to get a quotation, photos and specifications of this Oxide CMP system, with SMIF, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Mirra Mesa Oxide CMP system, with SMIF is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Applied Materials Mirra Mesa Equipment Details

SDI ID:

109063

Manufacturer:

Applied Materials

Model:

Mirra Mesa

Description:

Oxide CMP system, with SMIF

Version:

200 mm

Vintage:

Inquire

Quantity:

Sales Condition:

inquire

Lead Time:

1 month

Sales Price:

Inquire

Comments:

-See attached photos for current condition.

-See the pdf attached for the configuration in detail, also shown below in html:-

Wafer Size	200 mm
Purpose	CMP Chemical Mechanical Polishing
System Name	Mirra Mesa with SMIF FAB
Deatailed System requirement	MIRRA MESA CMP SYSTEM FOR OXIDE POLISHING
Basic Mirra System including:
Process	Oxide CMP
Tool type	Mirra Mesa with SMIF FAB
HSMS/Serial			HSMS, SECS II - GEM interface
Hardisk (SCSI/SSD)	RAID 2 Bay HDD (SSD)
Software		System OS	Window NT
		Polisher Software Ver	NA
		Optical endpoint	NA
		Cleaner Software Ver	NA
		Main board	Pentium III 400MHZ 128MB
Mirra Hardware configuration		Pad Conditioner (X3)	PC Base arm hub
			DDF3 Head
			Standard Universal Holder
			Clear Pad Conditioner arm Cover

		Platen	Teflon coated platen with Platen shield
		HCLU (X1)	Standard HCLU
		Robot (X1)	Wet robot with long blade
		Cross	Kollmorgen head rotation Motor (X4), NSK replacement
			Wafer Loss Sensor Assembly (X4)
		ISRM	Legacy for Platen 1,2 3
		UPA	Upper Pneumatic Assembly (Regulator) / SMC Upper Pneumatic Assembly
			Waterfall design Upper Polisher Electrical/Pneumatics
			3 Port Rotary Union include refurbishment
		Head	Standard Titan I Head
		Slurry Delivery	Slurry line setup [2 delivery lines], Platen1 & 2 (line1), Platen3 (line2 )
			-Extended rinse slurry dispense arm (2 slurry lines)
			peristaltic pump

		Controller	* Start/Stop Button on Controller
			* Smoke detector for Controller
			* 3 Poles breaker
			* 200 - 230 VAC PS
			* 100 VAC Convenience outlet
			Separate controller with 30 feets umbilicals
		Miscellaneous	Transparent skins for full machine
			* 2 sets of keyboard and mouse (PS2 type) with KVM switch system
			Through the wall configuration
			* EMO button, Blank label, CE compliant
			* Guard rings on all EMO Buttons
			* English safety labels
			* Drain 4 line system
			* Drip Pan
			* 8” Upper Exhaust Flange
			* Lower Exhaust with main exit by the top
			* Single spray Gun. Clear window in System skin.
Mesa		Megasonic	Megasonic Generator
			Megasonic Transducer Plate (New)
			Megasonic tank includes gasket, rollers replacement
			Megasonic Orion Heater includes refurbishment
			Megasonic Pump includes refurbishment
			Chemical Vessel setup (x2)
		Brush Unit 1 and 2	Chemical Vessel setup for both Brush 1 & 2
			Brush open/close assembly ( Zaytran - Fixed brush gap type)



		SRD	SRD module with lamp
		Output	Separate Output module and SRD module Exhaust
SMIF Fab Hardware Configuration		SMIF	3 SMIF port stations
			SMIF Fab with Mini Environment
			Ceramic robot blade with filter
			Patlite 4 color Light tower with buzzer (Red, Green, White, Yellow)

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Attachments: 3 Files

Filename:
AMAT_Mirra_mesa_Oxide_SMIF_200mm_configuration_July_2023.pdf
Size: 43233 bytes
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Applied Materials Mirra Mesa Oxide CMP system, with SMIF for Sale

Applied Materials Mirra Mesa Equipment Details

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