Applied Materials Mirra 3400 Ontrak CMP Polisher with Cleaning System for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Mirra 3400 Ontrak CMP Polisher with Cleaning System.
Please click on the "Get Quote" button at the end of the Mirra 3400 Ontrak description, if you'd like to get a quotation, photos and specifications of this CMP Polisher with Cleaning System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Mirra 3400 Ontrak CMP Polisher with Cleaning System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Applied Materials Mirra 3400 Ontrak Equipment Details

SDI ID:	110767
Manufacturer:	Applied Materials
Model:	Mirra 3400 Ontrak
Description:	CMP Polisher with Cleaning System
Version:	200 mm
Vintage:	01.05.1997
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	-The equipment is still installed in the fab. -The equipment has many missing parts, and inspection is advised before purchase Wafer Specification Wafer Size 200 Wafer Shape Application Information Application System Process Type Oxide CMP Device Type Logic Device Geometry Consumed Process Materials Polish Slurry Buff Slurry Platen 1 Pad IC1010 PAD Platen 2 Pad IC1010 PAD Platen 3 Pad IC1010 PAD Pad Conditioner DDF 3 Pad Conditioner Head Snap On type Pad Conditioner Holder Magnetic Holder Factory Interface Options Cleaner Type Ontrak Synergy Cleaner S/N Cleaner Vintage 1997 Megasonics None Robot Type Rorze RR700 In Situ Removal Rate Monitor ISRM (digital) P1,2,3 In Line Metrology Not used SECS GEM Interface YES Cassette Tank Not used Cassette Type 8", 4 set Open Cass Type Integrated System Basic FABS FABS FABS/LTA S/N Calibration Tool Special Kit for Maintenance None Down force cal. None Head rebuild kit None RPM 3 Cal Kits None Fabs Lap Top Computer None Platen and Head Options Polishing Head Titan I Head , 4 ea Retaining Ring Pad Wafer Loss Sensor YES Platen Temperature Control None Slurry Delivery Options Slurry Delivery A,B line P1,2,3 Slurry Flow Rate YES Slurry Flow Monitor Yes Slurry Containment Bulkhead YES Slurry Facilities YES Slurry Loop Line YES Slurry Dispense Arm Short Arm Slurry Leak Detector YES DI Water YES High Pressure Rinse YES System S/W Status Mirra VME Type Redisys P-III type Mirra S/W PS58p0 / ISRM : 1B11h2 Cleaner Type Ontrak Synergy Cleaner S/W Fabs type Rorze SMIF FABS / LTA Fabs S/W System Safety Equipment Red Turn To Release EMO Button YES EMO Guard Ring YES System Labels YES Earthquake Brackets Not used Smoke Detector YES Electrical Requirements Line Frequency 50/60Hz Line Voltage 208VAC Uninterruptible Power Supply used / VME rack Power Lamp Yes Power Connected Lamp Yes Circuit Breaker Yes AC Outlet Box Yes Configurable IO Yes GFI Yes (100mA) Umbilicals Polisher to Controller Cable STD 30ft Controller to Monitor Cable Yes Slurry System Interface Cable Yes Factory Hookup Upper Exhaust Yes Lower Exhaust Yes Upper Exhaust Connection Yes Drain Manifold Yes Drain Adapter Yes Weight Distribution Plate(Skid pad) None User Interface Gray Area Monitor/keyboard/mouse Cleanroom Monitor/keyboard/mouse Class 1 Cart for 1 Monitor None Class 1 Cart for 2 Monitors None Class 100 Cart for 2 Monitors None Stainless Cart Gray area Mouse or Trackball Mouse Printer Not used Hard Disk Backup Not used Polisher/Fabs Light Tower Polisher Tower Mounting Type Yes Polisher Tower No of Colors 3 Polisher Tower Colors Sequence Red/Green/Yellow Cleaner Options OnTrak Cleaner YES (Synergy) DNS Cleaner Manuals CD ROM None Standard Paper Manuals None Standard Paper Manuals Qty None Cleanroom Paper Manuals None Cleanroom Paper Manuals Qty None Additional Items Additional Heads None Calibration Kit RPM3 none Downforce meter none Sonic Tension Meter none Robot calibration PC none >CD-ROM driver none Calibration Tool none Head leak check Tester none Maintenance Options Spray Gun Yes Side Panel Window Yes/Clear type Pad Conditioner Cover Yes Slurry Flow Calibration Kit none Lapping Stone none Robot Door Lock None Special Options Nylon Brush Not used EChain Teflon Sheet Not used Low Pressure Release Water
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Applied Materials Mirra 3400 Ontrak CMP Polisher with Cleaning System for Sale

Applied Materials Mirra 3400 Ontrak Equipment Details

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