Nikon OptiStation 3200 Fully Automated Wafer Inspection Microscope for Sale

Qty 3 sets available. Price quoted is for qty 1.  Deinstalled to warehouse from working condition in the fab in March 2024.

Please refer to the attached photos for the details of these tool's condition.

Main Features of this microscope wafer inspection station include:-

-New optics
Nikon’s renowned CFI60 optics produce crisp, clear images with
high contrast and minimal flare. Longer working distances
throughout the magnification range ensure safer wafer inspection.
The darkfield signal-to-background ratio is three times higher than
in the past, ensuring significantly better imaging.

-Newly designed DUV microscope
The newly designed DUV microscope module supports 90nm and
future design rules.

-Review inspection with ADC
State-of-the-art image processing and analysis technology ensures
accurate defect detection. The user-friendly software allows for easy
setup and operation.
-Flexibility in load port positioning
Two load ports are available in the side or rear, making the
OPTISTATION-3200 adaptable to diverse fab layouts and 300mm
factory automation requirements.
-3-mode Macro inspection with high-performance illuminators
Allows surface Macro, center backside Macro, and perimeter
backside Macro inspections. The newly developed wide (WIL-100)
and line (LIL-100) illuminators offer wavelength and lighting
techniques to easily detect a variety of process defects.
-Easy operation by touch screen
Automated and motorized functions are controlled by an easily
accessible touchscreen to ensure comfortable operation while
minimizing contamination. Optimum observation settings, including
aperture and light intensity, can be preset according to objective lens
or wafer type.

Specifications
Wafer size: 300mm
Total magnification: 25x to 1,500x
Inspection modes: Brightfield, Darkfield, DIC (option),DUV (option)
Autofocus: LED illumination slit projection
Objectives:CFI60 objectives
Macro inspection:Surface Macro, center backside Macro,
perimeter backside Macro
Load port:2 FOUP, Position selectable from side or rear
Wafer transfer:Robotic handling; vacuum chuck;
noncontact pre-alignment mechanism
Operation:Touch panel GUI, mouse, keyboard
Options
DUV microscope:Hg-Xe lamp type (248nm)
Online operation:Via SECS-I or HSMS
Video capture function
2nd user interface (UIF)
OHV (SEMI E84 compliance)
Review inspection
ADC
OCR

Safety Certifications:S2-0302 compliance, CE marking
Ergonomic Certifications:S8-0701 compliance
Dimensions (W x D x H):1,625 x 2,500 x 2,300mm
(64.0 x 98.4 x 90.6 in.)