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Novellus Sabre 3D Copper Electrochemical deposition for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Novellus Sabre 3D Copper Electrochemical deposition.
Please click on the "Send More Details" button at the end of the Sabre 3D description, if you'd like to get more details, photos and specifications of this Copper Electrochemical deposition, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Novellus Sabre 3D Copper Electrochemical deposition is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Novellus Sabre 3D Equipment Details

SDI ID: 102335
Manufacturer: Novellus
Model: Sabre 3D
Description: Copper Electrochemical deposition
Version: 300 mm
Vintage: 01.06.2017
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
System Configuration
3PLA6  
#Product Sabre3d
#Version Ver_1.70_B132
Proteus Info:  
Version 5.07
Build 119
QNX Operating System Info:  
Version 4.25
Windows Operating System Info:  
OS Microsoft Windows XP
Version 5.1
Build 2600
Service Pack Service Pack 3
Node IP Addresses:  
UI Computer 192.168.1.3
Node-1 192.168.9.20
Node-2 192.168.0.1
Node-3 192.168.0.1
Node-4 Not Available
Footprint Info:  
Front End Installed
Back End Robot Installed
Wafer Aligner Installed
CDM For APT Module Installed
CDM For XMM Module Installed
PPT Module 1 Not Installed
PPT Module 2 Installed
PPT Module 3 Not Installed
PPT Module 4 Installed
Plate A Duet 1 Installed
Plate A Duet 2 Installed
Plate A Duet 3 Not Installed
Plate A Duet 4 Not Installed
Plate B Duet 1 Not Installed
Plate B Duet 2 Not Installed
Plate B Duet 3 Not Installed
Plate B Duet 4 Not Installed
Bath Module 1 Installed
Bath Module 2 Not Installed
Bath Module 3 Not Installed
Bath Module 4 Not Installed
Bath Module 5 Not Installed
Bath Module 6 Not Installed
Bath Module 7 Not Installed
Bath Module 8 Not Installed
Plate A Flow Distribution 1 Installed
Plate A Flow Distribution 2 Installed
Plate A Flow Distribution 3 Not Installed
Plate A Flow Distribution 4 Not Installed
Plate B Flow Distribution 1 Not Installed
Plate B Flow Distribution 2 Not Installed
Plate B Flow Distribution 3 Not Installed
Plate B Flow Distribution 4 Not Installed
PMA Bath Configuration AANN
PMB Bath Configuration None
CE-System Settings:  
Front End Wafer Handler Option Pod Loader with Buttons and Lights - PS
Wafer Size 300 mm wafers
Wafer Fiducial Notched wafers
System IO Card Input Polarity Standard polarity
Signal Tower Installed
EIOC Support EIOC Installed
GEM and Data Server Status Advanced FA
Host Connection Type HSMS
Automated Material Handling System SEMI E84 Installed
Uninterruptible Power Supply (UPS) Option Not Installed
Wafer History Installed
Proteus Configuration Installed
Facilities Chemical Interface Installed
Front end Robot Type Single Arm
Back end Robot Type One Dual Arm
Data Server Timestamp Source Real Time Clock
Fan Filter Unit Information Not Installed
Wafer Aligner Installed by CWS Wafer Size Detection
Clamshell Lift Controller Single
CE-Module Front End Settings:  
IOC Type Ethernet Based IOC
Wafers per Cassette 25 Wafers
Automated Cassette Transfer SEMI E84
Active Wafer Centering Installed
CA Mode Event Mode
Number of Load Ports Three Load Ports
Robot type Traverser (slide axis) -- Vacuum
Pod Loader Communication Type Ethernet
Fixloader Command Mode Extended mode with Pod Present Sensor
Fixloader Hardware Type Standard with Pod Present Sensor
AMHS Setting Default
RFID Communication Type Serial Port Com/Ioc
PPT1 AWC Enabled Checking Firmware Not Installed
PPT2 AWC Enabled Checking Firmware Installed
Pod Loader Map Source Robot
Pod Loader Wafer Size 330mm
CE-Module CDM For APT Module Settings:  
ADM Process Delivery Process DI only
CE-Module CDM For XMM Module Settings:  
PCDM Module Type SRD configuration Module
CE-Module PPT Module 1 Settings:  
Not Found: Module is not available  
CE-Module PPT Module 2 Settings:  
Wafer Size 330mm
Wafer Type Notch
PPT Module Type Post Treatment Module
Super Cell Configuration SRD
PPT Tank Type ADM Process DI only
Valve Position Sensors Installed
DI Flow Meters Installed
CE-Module PPT Module 4 Settings:  
Wafer Size 330mm
Wafer Type Notch
PPT Module Type Post Treatment Module
Super Cell Configuration SRD
EBR installation Type EBR not installed
EBR Syringe Pump Type SyringePump Not Installed
Active Wafer Detection AWD installed
Valve Position Sensors Installed
DI Flow Meters Installed
N2 Dry Installed
EBR Flow Meters Type Not installed
SRD Vacuum Grip Chuck Not installed
CE-Module Plate A Duet 1 Settings:  
Wafer Size 330mm
Wafer Type Notch
Cup And Contact Rinse Configuration Cup And Contact Rinse Installed
Separate Anode Chamber (SAC) Cascaded SAC
Plating Power Supply Control Type Serial Control Installed
Number of Power Supplies Installed Single Power Supply Installed
Cell Flow Meter Configuration 5-50 Liter Cell Flow Meters Installed
EIOC Type Installed 88 I/O EIOC Installed
Valve Position Sensors Installed
SAC Flow Meter Installed
SAC Pump Type Standard
CE-Module Plate A Duet 2 Settings:  
Wafer Size 330mm
Wafer Type Notch
Cup And Contact Rinse Configuration Cup And Contact Rinse Installed
Separate Anode Chamber (SAC) Cascaded SAC
Plating Power Supply Control Type Serial Control Installed
Number of Power Supplies Installed Single Power Supply Installed
Cell Flow Meter Configuration 5-50 Liter Cell Flow Meters Installed
EIOC Type Installed 88 I/O EIOC Installed
Valve Position Sensors Installed
SAC Flow Meter Installed
SAC Pump Type Standard
CE-Module Bath Module 1 Settings:  
Online Chemical Monitoring System CMS Installed
CMS Communication Protocol Enhanced CMS Command Set
Chemical Package Copper
Dosing Algorithm Multi Specie Dosing
Number of Species 5 Species
Seperate Anode Chamber (SAC) Cascaded SAC
Chemistry Tray Container Type Bottles
Delivery choice for Feed A Bulk
Delivery choice for Feed B Bottle
Delivery choice for Feed C Bottle
Delivery choice for Feed D Bottle
Organic Dosing 3 Containers
Bottle Empty Sensors Not Installed
Bottle 1 Component Feed C
Bottle 2 Component Feed B
Bottle 3 Component Feed D
Heater Chiller Neslab Heater Chiller
VMS Facility Request Channel Channel 1
Organic Dose Delivery Pump
Dose Pump Flow Switch Installed
EIOC1 Type Installed 88 I/O EIOC Installed
Number of Central Recirculation Pumps 1 Recirculation Pump
Recirculation Pump Type Renner Recirc Pump
Bath Module 1 Installed
CE-Module Plate A Flow Distribution 1 Settings:  
FDM Flow Meter Configuration 0-80 LPM Flow Meter Installed
FDM Pump Configuration Independant Pump Installed
Pump Recirculation Option Central Recirc
CE-Module Plate A Flow Distribution 2 Settings:  
FDM Flow Meter Configuration 0-80 LPM Flow Meter Installed
FDM Pump Configuration Independant Pump Installed
Pump Recirculation Option Central Recirc
System Configuration
3PLA6  
#Product Sabre3d
#Version Ver_1.70_B132
Proteus Info:  
Version 5.07
Build 119
QNX Operating System Info:  
Version 4.25
Windows Operating System Info:  
OS Microsoft Windows XP
Version 5.1
Build 2600
Service Pack Service Pack 3
Node IP Addresses:  
UI Computer 192.168.1.3
Node-1 192.168.9.20
Node-2 192.168.0.1
Node-3 192.168.0.1
Node-4 Not Available
Footprint Info:  
Front End Installed
Back End Robot Installed
Wafer Aligner Installed
CDM For APT Module Installed
CDM For XMM Module Installed
PPT Module 1 Not Installed
PPT Module 2 Installed
PPT Module 3 Not Installed
PPT Module 4 Installed
Plate A Duet 1 Installed
Plate A Duet 2 Installed
Plate A Duet 3 Not Installed
Plate A Duet 4 Not Installed
Plate B Duet 1 Not Installed
Plate B Duet 2 Not Installed
Plate B Duet 3 Not Installed
Plate B Duet 4 Not Installed
Bath Module 1 Installed
Bath Module 2 Not Installed
Bath Module 3 Not Installed
Bath Module 4 Not Installed
Bath Module 5 Not Installed
Bath Module 6 Not Installed
Bath Module 7 Not Installed
Bath Module 8 Not Installed
Plate A Flow Distribution 1 Installed
Plate A Flow Distribution 2 Installed
Plate A Flow Distribution 3 Not Installed
Plate A Flow Distribution 4 Not Installed
Plate B Flow Distribution 1 Not Installed
Plate B Flow Distribution 2 Not Installed
Plate B Flow Distribution 3 Not Installed
Plate B Flow Distribution 4 Not Installed
PMA Bath Configuration AANN
PMB Bath Configuration None
CE-System Settings:  
Front End Wafer Handler Option Pod Loader with Buttons and Lights - PS
Wafer Size 300 mm wafers
Wafer Fiducial Notched wafers
System IO Card Input Polarity Standard polarity
Signal Tower Installed
EIOC Support EIOC Installed
GEM and Data Server Status Advanced FA
Host Connection Type HSMS
Automated Material Handling System SEMI E84 Installed
Uninterruptible Power Supply (UPS) Option Not Installed
Wafer History Installed
Proteus Configuration Installed
Facilities Chemical Interface Installed
Front end Robot Type Single Arm
Back end Robot Type One Dual Arm
Data Server Timestamp Source Real Time Clock
Fan Filter Unit Information Not Installed
Wafer Aligner Installed by CWS Wafer Size Detection
Clamshell Lift Controller Single
CE-Module Front End Settings:  
IOC Type Ethernet Based IOC
Wafers per Cassette 25 Wafers
Automated Cassette Transfer SEMI E84
Active Wafer Centering Installed
CA Mode Event Mode
Number of Load Ports Three Load Ports
Robot type Traverser (slide axis) -- Vacuum
Pod Loader Communication Type Ethernet
Fixloader Command Mode Extended mode with Pod Present Sensor
Fixloader Hardware Type Standard with Pod Present Sensor
AMHS Setting Default
RFID Communication Type Serial Port Com/Ioc
PPT1 AWC Enabled Checking Firmware Not Installed
PPT2 AWC Enabled Checking Firmware Installed
Pod Loader Map Source Robot
Pod Loader Wafer Size 330mm
CE-Module CDM For APT Module Settings:  
ADM Process Delivery Process DI only
CE-Module CDM For XMM Module Settings:  
PCDM Module Type SRD configuration Module
CE-Module PPT Module 1 Settings:  
Not Found: Module is not available  
CE-Module PPT Module 2 Settings:  
Wafer Size 330mm
Wafer Type Notch
PPT Module Type Post Treatment Module
Super Cell Configuration SRD
PPT Tank Type ADM Process DI only
Valve Position Sensors Installed
DI Flow Meters Installed
CE-Module PPT Module 4 Settings:  
Wafer Size 330mm
Wafer Type Notch
PPT Module Type Post Treatment Module
Super Cell Configuration SRD
EBR installation Type EBR not installed
EBR Syringe Pump Type SyringePump Not Installed
Active Wafer Detection AWD installed
Valve Position Sensors Installed
DI Flow Meters Installed
N2 Dry Installed
EBR Flow Meters Type Not installed
SRD Vacuum Grip Chuck Not installed
CE-Module Plate A Duet 1 Settings:  
Wafer Size 330mm
Wafer Type Notch
Cup And Contact Rinse Configuration Cup And Contact Rinse Installed
Separate Anode Chamber (SAC) Cascaded SAC
Plating Power Supply Control Type Serial Control Installed
Number of Power Supplies Installed Single Power Supply Installed
Cell Flow Meter Configuration 5-50 Liter Cell Flow Meters Installed
EIOC Type Installed 88 I/O EIOC Installed
Valve Position Sensors Installed
SAC Flow Meter Installed
SAC Pump Type Standard
CE-Module Plate A Duet 2 Settings:  
Wafer Size 330mm
Wafer Type Notch
Cup And Contact Rinse Configuration Cup And Contact Rinse Installed
Separate Anode Chamber (SAC) Cascaded SAC
Plating Power Supply Control Type Serial Control Installed
Number of Power Supplies Installed Single Power Supply Installed
Cell Flow Meter Configuration 5-50 Liter Cell Flow Meters Installed
EIOC Type Installed 88 I/O EIOC Installed
Valve Position Sensors Installed
SAC Flow Meter Installed
SAC Pump Type Standard
CE-Module Bath Module 1 Settings:  
Online Chemical Monitoring System CMS Installed
CMS Communication Protocol Enhanced CMS Command Set
Chemical Package Copper
Dosing Algorithm Multi Specie Dosing
Number of Species 5 Species
Seperate Anode Chamber (SAC) Cascaded SAC
Chemistry Tray Container Type Bottles
Delivery choice for Feed A Bulk
Delivery choice for Feed B Bottle
Delivery choice for Feed C Bottle
Delivery choice for Feed D Bottle
Organic Dosing 3 Containers
Bottle Empty Sensors Not Installed
Bottle 1 Component Feed C
Bottle 2 Component Feed B
Bottle 3 Component Feed D
Heater Chiller Neslab Heater Chiller
VMS Facility Request Channel Channel 1
Organic Dose Delivery Pump
Dose Pump Flow Switch Installed
EIOC1 Type Installed 88 I/O EIOC Installed
Number of Central Recirculation Pumps 1 Recirculation Pump
Recirculation Pump Type Renner Recirc Pump
Bath Module 1 Installed
CE-Module Plate A Flow Distribution 1 Settings:  
FDM Flow Meter Configuration 0-80 LPM Flow Meter Installed
FDM Pump Configuration Independant Pump Installed
Pump Recirculation Option Central Recirc
CE-Module Plate A Flow Distribution 2 Settings:  
FDM Flow Meter Configuration 0-80 LPM Flow Meter Installed
FDM Pump Configuration Independant Pump Installed
Pump Recirculation Option Central Recirc
Categories:
Attachments: 3 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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