SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centura AP Enabler Dielectric Etch - Etch/Ash/Clean – OXIDE Plasma Processing.
Please click on the "Send More Details" button at the end of the Centura AP Enabler description, if you'd like to get more details, photos and specifications of this Dielectric Etch - Etch/Ash/Clean – OXIDE Plasma Processing, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Centura AP Enabler Dielectric Etch - Etch/Ash/Clean – OXIDE Plasma Processing is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Model:||Centura AP Enabler|
|Description:||Dielectric Etch - Etch/Ash/Clean – OXIDE Plasma Processing|
|Sales Condition:||as is where is|
Process: OXFrom original tool PO, please inspect to verifySoftware Revision: B2.8_79FI Software: FB4.70_12GEM Software: 7.20_17Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, NotchOnline Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)Inter Face: 3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant MENV and FMS assembliesInterface A: Hardware related to EDACorrosion Resistant FI & SWLL: N/ALoader Mod Corrosion Prevent: N/AStandard SWLL: Side Storage Pod (Left/Right)OCR: KIT, YAT BACKSIDE OCR, 300MM 5.3FIFacility Plate: N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switchFacility Plate: Manual Valve : Supplied by customer in floorFacility Plate: Pressure Gauge : Supplied by customer on regulator in floorTransfer Pressure Monitor: 10 Torr Manometer and 1SLM N2 APC, kitTransfer Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analogLoad Lock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analogTransfer Chamber Blade Kit: Transfer Chamber Accelerator Blade KitLL ISO-Slit Valve Grp Elast.: AP Chemraz 513 ElastomerAtmospheric Robot: KAWASAKI A3Mainframe Robot: VXP with Dual bladeWafer Pass Through: Not availableLoadport type: Enhanced 25 wafer FOUPLoadports: Loadport SystemOpen Cassettes Supported: N/AWater Leak Detector: ConfiguredEMO Type: Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.System Monitors: Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the wall flat panel (optional)Cable Length: RF Cable : 2 cables 75 ft; 1Short CableCable Length: Mnitor Cable : 25 Ft 16ft effectiveCable Length: Pump Cable Length : 75 ft interface cableSignal Tower: Red/Yellow/Green/Blue ( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUGInter Lock: On board interlocks to dissable RFand gas flow at 1/2 atmos., and lid or gas panel door open.Inter Locks: On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.Certificate of Cleanliness: N/ARemote UPS Interface: N/AScrubber Interlock: N/AEtch Common AC Rack: Lean AC RackChiller (wall/source): NX20A(ZT150 /FC-3283 coolant)0190-17815Chiller (Dual Zone Cathode): NX20A (ZT130 /FC-3283coolant)Coolant: Galden ZT-130 for Cathode Galden ZT-150 for Wall/SourceChiller Hose Length: 75'RF Gen TOP (162Mhz Source): 3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER COOLED (0190-29389)RF Gen #1 Bottom (13Mhz Bias): RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT) 0190-15319RF Gen #2 Bottom (2 Mhz Bias): RF GEN PLASMA 9KW 2MHZ ENI)0190-29586RF Match: Y (0190-25187)IPUP Type: Alcatel A100L (0190-01042)Process Chb.1,2,3,&4: (IAEF) Enabler (Front End-E5)Endpoint type (Eye-D): Endpoint type (Eye-D)(0246-00196)Plasma State Monitor: Plasma State Monitor (1 per system) (0190-17948)Spectrograph: EyeD HP Spectrongraph (0190-28658)ESC type (Dual Zone): ESC type (Dual Zone) (0010-33416)Cathode Base: Non-Anodized (0041-05779)Cathode N2 Purge: Cathode N2 Purge – YesL-collar Si Insert Ring: L-collar Single Crystal Si Insert Ring 1.5mm stepTMP: Shimadzu D3403M, 3000 litreTMP Back Pressure Monitor: 51A11TGA2BA003 (MKS) Foreline TransducerDry Pump: N(ESR80WN (EBARA) ; customer Supply)Final Valve, Heater: N/AWfib: Y(Wfib - Mod (Restriction at RTN))APC: VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSORSlit Valves: Anodized (AL) 513 ChemrzPressure Monitor: 1,000 mt HeadPressure Monitor: 100 mt HeadPressure Monitor: Transducer 100 Torr Cal TankPressure Monitor: Chamber ATM Switch : 51A13TGA2AA720 (MKS)Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Switch flow through 600TorrChamber Controller Module: SBC C400MHZ, 3U CPCI, 256MB RAMFES Server: FES ServerNSR# 621632-0: Enabler Chamber FRCII, ratio 1000/1000NSR# 621638-0: Chamber First in Fab for IADB Enabler ChamberNSR# 621638-0: Transforma run to run optionThottle Gate Valve (TGV): Throttle Gate Valve (TGV) – CeramicGas line 1- C4F6 100 sccm UNIT IFC-125Gas line 2- CH2F2 100 sccm UNIT IFC-125Gas line 3- CO 500 sccm UNIT IFC-125Gas line 4- O2_M 300 sccm UNIT-125Gas line 5- SO2 200 sccm UNIT IFC-125Gas line 6- CF4 200 sccm UNIT IFC-125Gas line 7 - O2_IGI 20 sccm UNIT-125Gas line 8 - AR_IGI 500 sccm UNIT-125Gas line 9- O2_L 50 sccm UNIT-125Gas line 10- O2_H 5000 sccm UNIT-125Gas line 11- Ar 2000 sccm UNIT-125Gas line 12- N2 200 sccm UNIT-125Gas line 13- CHF3 200 sccm UNIT-125Gas line 14- C4F8 100 sccm UNIT-125Gas Pallet Type: NextGenGas Pallet: ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GENRegulators: Regulator on SLD (Inlet to Gas Pannel, 1 per unique gas, 12 max, VCR connection)Valves: CKDTransducers: Transducers inside MFC'sFlow Ratio Controller (NSTU): Flow Ratio Controller (NTSU)IGI Interlock: N/AFilters: MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)Gas Leak Detection Port: External Connection PointGas Panel Exhaust: Top ExhaustGas Panel Facilities Hook Up: Single Line DropPiping: Standard high purity stainless & Exhaust through Gas boxFinal Pressure Switch: At 600 Torr coming from gas pallet, At chambers swithch pressure signal 10 torr half atmospherePurge: N2 (Process Grade N2)L-collar Single Crystal Si: L-COLLAR,Si-SIC 1.5MM STEP,E5(0200-08167) Source Bottom Ring: QUARTZ RING SOURCE, E5(0200-07362)Quartz Barrier Ring: Quartz Barrier Ring (0200-03170)TGV o-ring: ORING ID 9.975 CSD .210 KALREZ (3700-04177)TGV Hard Stop – Ceramic: TGV Hard Stop – CeramicTGV Pads: TGV Pades (0041-03304)Source Chiller Bypass: Source Chiller BypassAnnular Baffle Heated: Annular Baffle HeatedCover, Lower Liner: Cover, Lower LinerUpper Liner: SUPPORT LINER (0040-37601)Process Kit: Process KitShowerhead Assy: SHOWER HEAD ASSY,HEATED,SiC,CENTER(0041-31209)Aluminum shims: POLYMER SHIMS ASSY, 5519-SD WITH MYLAR COVER, E5 CIP2(0045-00452)Plasma Containment Door: Plasma Containment DoorDamage/Missing parts list
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