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Pre-owned and used Dry Etch Equipment for sale by fabsurplus.com

Please find below a list of pre-owned, surplus and Used Dry Etch Equipment for sale by fabsurplus.com .Click on any listed Dry Etcher to see further data.


SDI ID Manufacturer Model Description Version Vintage Q. ty Sales Conditions Lead Time
89924 Advantest T5335P test 300mm 01.01.1996 1 as is where is
89925 Advantest T5581 test 300mm 1 as is where is
16497 Alcan Tech Canon MAS 8000 Plasma Photoresist Stripper 200 mm 1 as is where is immediately
85823 Alcatel AMS 4200 Deep Reactive Ion Etch (DRIE) 1 as is where is
60920 AMAT Centura MxP+ Oxide 01.06.1997 1 as is where is
60921 AMAT Centura MxP+ Oxide 01.12.1997 1 as is where is
60922 AMAT Centura MxP+ Oxide 01.12.1996 1 as is where is
62209 AMAT AME 8330 1 as is where is
66409 AMAT P5000 Etch 3ch 1 as is where is
89921 AMAT VERA SEM 300mm 01.10.2002 1 as is where is
71957 Applied Materials P_5000 (2CVD / 1 ETCH) CLUSTER TOOL 8" 1 as is where is
77885 Applied Materials Centura 5200 EMAX CT PLUS 3CH OXIDE ETCH 3 CHAMBER 300 mm 01.05.2001 1 as is where is immediately
77886 Applied Materials Centura 5200 EMAX CT+ 3CH OXIDE ETCH 3 CHAMBER 300 mm 01.06.2004 1 as is where is immediately
78437 Applied Materials Carina to G5 Upgrade DRY ETCH CLUSTER TOOL, 2 CHAMBER Hi K MG Etch 300 mm 01.06.2007 1 as is where is immediately
78670 Applied Materials DPS AE Poly G3 Etch POLY 300 MM 01.06.2007 1 as is where is
78671 Applied Materials DPS AE Poly G3 Etch POLY 300 MM 01.06.2007 1 as is where is
79200 Applied Materials Centura 5200 IPS (Spares) qty 3 IPS Process Chambers 200 mm 3 as is where is immediately
79400 Applied Materials Centura 5200 IPS (Spares) DI-ELECTRIC ETCH Process Chamber 200 mm 1 as is where is immediately
79881 Applied Materials eMxP+ process chamber for oxide etching 200 mm 1 as is where is
79882 Applied Materials 5200 Centura I Phase II Oxide etcher 200 mm 1 as is where is immediately
82677 Applied Materials DPSII AE Poly G3 ETCH POLY 300 mm 01.06.2006 1 as is where is
82678 Applied Materials PRODUCER GT(Chamber) CLEAN 300 mm 1 as is where is
82849 Applied Materials Centura AP Multi-Process Etch AP 300 01.01.2001 2 as is where is immediately
83946 Applied Materials Centura 5200 Metal Etcher 200 mm 01.06.2007 1 as is where is immediately
84535 Applied Materials CENTURA 5200 DPS+METAL Dry Etch 200 mm 1 as is where is immediately
84536 Applied Materials CENTURA 5200 DPS+METAL Dry Etch 200 mm 1 as is where is immediately
84907 Applied Materials Centura Carina Chamber, Position C Etch Chamber 300 MM 1 as is where is
84913 Applied Materials DT HART Dry Etch 300 MM 01.06.2006 1 as is where is
86137 Applied Materials CENTURA 5200 MXP+/OXIDE Oxide Etcher 150 mm 01.06.1999 1 as is where is
86138 Applied Materials CENTURA DPN+ CHAMBER Dry etch Chamber 300 mm 1 as is where is
86139 Applied Materials CENTURA DPN+ CHAMBER Dry etch Chamber 300 mm 1 as is where is
86140 Applied Materials CENTURA DPN+ CHAMBER Dry etch Chamber 300 mm 01.06.2012 1 as is where is
86141 Applied Materials CENTURA DPN+ CHAMBER Dry etch Chamber 300 mm 01.06.2012 1 as is where is
86142 Applied Materials CENTURA DPN+ CHAMBER Dry etch Chamber 300 mm 1 as is where is
86143 Applied Materials CENTURA DPN+ CHAMBER Dry etch Chamber 300 mm 1 as is where is
86144 Applied Materials CENTURA_DPS G3_3CH Dry etcher 300 mm 01.06.2001 1 as is where is
86145 Applied Materials CENTURA_eMAX CT_2CH Dry etcher 300 mm 1 as is where is
86146 Applied Materials P5000 MxP METAL(2 METAL & 1 ASP) Metal etcher 150 mm 1 as is where is
86147 Applied Materials P5000 MxP METAL(2 METAL & 1 ASP) Metal etcher 150 mm 01.06.1997 1 as is where is
86148 Applied Materials P5000 MxP_METAL (Mainbody only) Metal etcher 150 mm 1 as is where is
86149 Applied Materials P5000_MXP+_POLY Poly etcher 200 mm 01.06.1995 1 as is where is
86711 Applied Materials P5000 2Mark II & 1ASP Metal Etcher 200 mm 01.04.1997 1 as is where is immediately
87128 APPLIED MATERIALS Centura DPS POLY ETCHER 200 mm 01.06.1998 1 as is where is
87129 APPLIED MATERIALS Centura MXP OXIDE ETCHER 200 mm 01.06.1997 1 as is where is
88508 Applied Materials Centura DPS2 Metal 300 MM 01.06.2005 1 as is where is
88509 Applied Materials Centura DPS2 Metal 300 MM 01.06.2005 1 as is where is
88520 Applied Materials Centura MXP Metal 150 MM 01.06.1998 1 as is where is
88521 Applied Materials Centura MXP Poly 150 MM 01.06.1996 1 as is where is
88845 Applied Materials Centura e-MAX CT+ Dry Etcher 3 chamber 300 mm 1 as is where is
88846 Applied Materials Centura DPS Metal W Metal Etch 3 Chambers 300 mm 1 as is where is
88847 Applied Materials Centura DPS Poly Etch DPS II Poly Etch System, 300mm 300 mm 1 as is where is
88848 Applied Materials Centura Etch R&D Tool configured with 4 chambers. 300 mm 1 as is where is
88987 Applied Materials 5200 Centura Axiom Strip Chamber Chamber 300 mm 01.06.2007 1 as is where is
88988 Applied Materials 5200 Centura Rev 4 4 Chamber HART Deep Trench etcher 300 mm 01.06.2001 1 as is where is
88989 Applied Materials eMax CT chamber Chamber 300 mm 01.06.2007 1 as is where is
88990 Applied Materials eMax CT plus chamber Chamber 300 mm 01.06.2002 1 as is where is
88991 Applied Materials eMax CT plus chamber Chamber 300 mm 01.06.2002 1 as is where is
88992 Applied Materials Enabler chamber Chamber 300 mm 01.06.2007 1 as is where is
89044 Applied Materials DPS+ Metal, Centura 2 Process Chamber 200 mm 1 inquire immediately
89045 Applied Materials Centura II DPS+ Dry metal etcher 200 mm 1 inquire immediately
90030 Applied Materials CENTURA DPN Dry Etch, 4 chamber 300 mm 1 as is where is
90031 Applied Materials DPS532 Dry Etch 300 mm 01.06.2005 1 as is where is
90032 Applied Materials EMAX CT+ Dry Etch 300 mm 01.10.2006 1 as is where is
90033 Applied Materials CENTURA Dry Etch 300 mm 01.06.2007 1 as is where is
90504 Applied Materials Centura AP Enabler Dielectric Etch 300 mm 1 as is where is
90505 Applied Materials Centura AP Enabler Dielectric Etch 300 mm 1 as is where is
90757 Applied Materials Centura AP AdvantEdge G5 Polysilicon Etch 300mm 01.03.2013 1 as is where is
90758 Applied Materials Centura AP AdvantEdge G5 Polysilicon Etch 300mm 01.06.2010 1 as is where is
90759 Applied Materials Enabler Dielectric Etch 300mm 01.06.2009 1 as is where is
90945 Applied Materials Centura DPS Metal etcher 200 mm 01.06.1998 1 as is where is
89923 Canon Anelva I-2300SRE Thin Film 300mm 01.01.2004 1 as is where is
87501 DRYTEK 384T Plasma Metal Etcher 1 as is where is
69945 Gasonics AE 2001 Single wafer etch system 1
82891 Gasonics Strata Oxide Etch System 200 01.06.1997 1 as is where is immediately
89926 GSI M430 Laser Repair 300mm 01.10.2003 2 as is where is
89927 GSI M435 Laser Repair 300mm 01.10.2004 1 as is where is
89917 Hamamatsu Phemos-75 150mm 01.10.1996 1 as is where is
81831 Hitachi M712E ECR Plasma Etcher 200mm 1 as is where is immediately
86030 HITACHI M712XT ETCHER 300 mm 1 as is where is
89915 Hitachi U-722 Etch 300mm 300mm 3 as is where is
90760 Hitachi U-702 Metal Etch 300mm 01.06.2004 1 as is where is
90761 Hitachi U-702 Metal Etch 300mm 01.06.2002 1 as is where is
89918 JEC PC-KM153R2 150mm 1 as is where is
36581 LAM 4528 etcher 1 inquire
60923 LAM 4720 1 as is where is immediately
76574 LAM VERSYS 2300 ETCH - POLY 4 CHAMBER 200 mm 01.03.2004 1 as is where is immediately
76945 LAM 590 Etcher 1
79159 Lam 4420 Dry etcher 200 mm 2 as is where is immediately
79843 LAM 4420 etch 200mm 2
86860 LAM Rainbow 4420 Multi-Process Etch 200 mm 1 as is where is
88527 Lam R4720 Oxide 200 MM 1 as is where is
88849 LAM Kiyo Metal Metal Etcher 01.06.2007 1 as is where is
88850 LAM TCP9608SE Metal Etcher 1 as is where is
88851 LAM TCP9608SE Metal Etcher 1 as is where is
90360 LAM Rainbow 4428XL POLY NITRIDE ETCHER (SMIF) 200 MM 01.06.1996 1 as is where is immediately
90691 LAM 2300 VERSYS DRY ETCH 300 MM 01.06.2005 1 as is where is immediately
90692 LAM 2300 VERSYS METAL DRY ETCH 300 MM 01.06.2006 1 as is where is immediately
90946 Lam 2300 Exelan Oxide Etcher 300 mm 01.06.2003 1 as is where is
71831 LAM RESEARCH A6 EXELAN OXIDE ETCHER (refurbished) 1 as is where is immediately
76573 Lam Research VERSYS 2300 poly etcher - 4 chamber 200 mm 01.01.2003 1 as is where is immediately
77173 LAM Research 9600 TCP SE metal etcher 150 mm 1 as is all rebuilt immediately
78676 Lam Research 2300 METAL Etch METAL 300 MM 01.06.2009 1 as is where is immediately
82251 Lam Research A6 Frame 9400PTX Dry etcher 8" 01.06.2000 1 as is where is immediately
82252 Lam Research TCP9600SE Dry etcher 8" 1 as is where is immediately
82253 Lam Research TCP9600SE Dry etcher 8" 01.06.1993 1 as is where is 2 months
82255 Lam Research RAINBOW 4520i Dry etcher 8" 01.06.1995 1 as is where is immediately
82257 Lam Research 2300 EXELAN Dry etcher 8" 01.06.2004 1 as is where is immediately
82258 Lam Research 2300 EXELAN Dry etcher 8" 01.06.2004 1 as is where is immediately
86150 LAM Research A4 4520 PM Dry etch Chamber 200 mm 1 as is where is
86151 LAM Research A4 9400SE PM Dry etch Chamber 200 mm 1 as is where is
86152 LAM Research A4 9400SE PM Dry etch Chamber 200 mm 1 as is where is
86153 LAM Research A4 9400SE PM Dry etch Chamber 200 mm 1 as is where is
86154 LAM Research A4 9600SE PM Dry etch Chamber 200 mm 1 as is where is
86155 LAM Research A4 TM(Alliance) DRY ETCHER – HUB 200 mm 1 as is where is
86156 LAM Research A4 TM(Alliance) DRY ETCHER – HUB 200 mm 1 as is where is
86157 LAM Research Alliance4 4420XL DRY ETCHER 200 mm 1 as is where is
86158 LAM Research Alliance4 9400SE dry etcher 200 mm 1 as is where is
86161 LAM Research TCP9400SE dry etcher 200 mm 1 as is where is
86162 LAM Research TCP9400SE dry etcher 200 mm 1 as is where is
87296 LAM Research 2300 Exelan Flex - Chamber Only Dielectric Etch 300 mm 1 as is where is
87297 LAM Research 2300 Exelan Flex FX+ Dielectric Etch 300 mm 1 as is where is
87406 Lam Research 2300 Exelan Flex 4 chamber oxide etch 300 mm 01.06.2007 1 as is where is
87407 Lam Research 2300 Exelan Flex Cu 4 chamber oxide etch- CU process 300 mm 01.06.2007 1 as is where is
87408 Lam Research 2300 Exelan Flex Cu 4 chamber oxide etch – Cu process 300 mm 01.06.2006 1 as is where is
88227 LAM Research 2300 Versys Kiyo Poly - Chamber Only Polysilicon Etch 300mm 1 as is where is
90506 LAM Research 2300 Exelan Flex 45 Dielectric Etch 01.06.2007 1 as is where is
90507 LAM Research 2300 Exelan Flex EX Lite - Chamber Only Dielectric Etch 01.06.2007 1 as is where is
90508 LAM Research 2300 Syndion TSV Polysilicon Etch 200 mm 01.06.2010 1 as is where is
90762 LAM Research 2300 Coronus Wafer Edge Cleaning - Plasma 300mm 1 as is where is
90763 LAM Research 2300 Exelan Flex Dielectric Etch 300mm 01.06.2002 1 as is where is
83977 Mattson Aspen 3 ICP Dual Cahmber Asher 300 mm 01.08.2008 5 as is where is immediately
88528 Mattson Paradigme SP Light Etch 300 MM 01.06.2010 1 as is where is
88529 Mattson Paradigme SP Light Etch 300 MM 01.06.2010 1 as is where is
88430 NIKON NSR-2005 I9C I LINE STEPPER 6 inch 01.06.1990 1 inquire
89920 Nikon NSR-S610C Stepper 300mm 01.02.2007 1 as is where is
83684 Novellus 2000 LL Etch 8" 1 as is where is
90144 Novellus Iridia Poly Etcher 01.05.2005 1 as is where is immediately
87502 OXFORD 80 Reactive Ion Etcher 1 as is where is
71760 Oxford Plasma Technology DP-80 Parallel Chamber Deposition system 01.12.1989 1 as is where is immediately
78807 PLASMA ETCH BT-1 PLASMA CLEANER ASSEMBLY 01.06.2004 1 as is where is immediately
61177 PLASMA-THERM Waf'r Batch 74 RIE/Parallel Plasma Etcher 1 as is where is
86447 Plasmatherm 790 RIE 125 mm 1 as is where is immediately
90668 Plasmatherm 790 Dry Etcher / PECVD 200 mm 01.06.1997 1 as is where is immediately
90034 PSK EVOLITE 2 ETCH 300 mm 01.09.2011 1 as is where is
90035 PSK EVOLITE 2 ETCH 300 mm 01.01.2012 1 as is where is
90036 PSK TERA21 ETCH 300 mm 01.06.2006 1 as is where is
90037 PSK EVOLITE 2 ETCH 300 mm 01.06.2012 1 as is where is
90038 PSK EVOLITE 2 ETCH 300 mm 01.05.2012 1 as is where is
90039 PSK EVOLITE 2 ETCH 300 mm 01.10.2011 1 as is where is
90040 PSK EVOLITE 2 ETCH 300 mm 01.01.2012 1 as is where is
72039 SAMCO RIE-10NR RIE 8" 01.05.2000 3 as is where is immediately
86163 SAMCO RIE-10N RIE 200 mm 1 as is where is
86164 SAMCO RIE-10N RIE 200 mm 1 as is where is
86165 SAMCO RIE-10NR RIE 200 mm 1 as is where is
89919 SAMCO FA-1 150mm 01.01.1996 1 as is where is
83688 Shibarua CDE-80N Dry Etch 8" 1 as is where is
84944 Shibaura CDE300 Isotropic dry etch 300 MM 01.06.2011 1 as is where is
89922 SONY IRG-12 DVU Review Station 300mm 01.11.2002 1 as is where is
87626 SPTS Multiplex ASE Dry etcher system 100 mm 01.06.1998 1 as is where is immediately
14584 STS 320PC Reactive Ion Etch System 1 inquire immediately
79584 STS 320 PC Reactive Ion Etcher 200 mm 01.06.1995 1 as is where is immediately
86527 STS Multiplex ICP Advanced Oxide Etching System 150 mm 1 as is where is immediately
83689 Tegal TEGAL 981 Nitride Etch 8" 1 as is where is
63723 TEL UNITY 2E 855 DD 2XDRM CHAMBERS 200mm 01.05.1998 1 as is where is immediately
77377 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77378 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77379 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77380 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77381 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77382 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77383 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77385 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77386 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77387 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
77388 TEL Telius SP Oxide Etch Oxide Etch System 200 1 as is where is
89916 Tel a-303i Furnace 300mm 01.08.2004 5 as is where is
75635 TEL Tokyo Electron Unity Me SCCM (Chamber) Dry oxide etch chamber 200 mm 1 as is where is immediately
75636 TEL Tokyo Electron Unity Me SCCM 85S Oxide etcher (3 chamber) 200 mm 01.10.2003 1 as is where is immediately
76599 TEL TOKYO ELECTRON UNITY Vera85DPATC Oxide Etcher - 2 chamber 200 mm 01.03.1997 1 as is where is immediately
82679 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
82680 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
82681 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
82682 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
83690 TEL Tokyo Electron UNITY M 85TD Oxide Etcher 200 mm 1 as is where is immediately
84929 Tel Tokyo Electron 8500PE Dry etch 200 mm 01.06.1997 1 as is where is
84930 Tel Tokyo Electron 8500PE Dry etch 200 mm 01.06.1997 1 as is where is
84931 Tel Tokyo Electron 8500PE Dry etch 200 mm 01.06.1997 1 as is where is
84932 Tel Tokyo Electron 8500PE Dry etch 200 mm 01.06.1997 1 as is where is
84933 Tel Tokyo Electron 8500PE Dry etch 200 mm 01.06.1997 1 as is where is
84934 Tel Tokyo Electron 8500PE Dry etch oxide 200 mm 01.06.1997 1 as is where is
84935 Tel Tokyo Electron 8500PE Dry Oxide Etcher 200 mm 01.06.1996 1 as is where is
84936 Tel Tokyo Electron 8500PE oxide etch 200 mm 01.06.1999 1 as is where is
84937 Tel Tokyo Electron TACTRAS Dry etch -POLY AND DIELECTRIC ETCH 300 MM 01.06.2005 1 as is where is
84938 Tel Tokyo Electron TE 8500PE dry etch – oxide 200 mm 1 as is where is
84939 Tel Tokyo Electron Telius 308S SCCM DT, CHAMBER ONLY Deep trench Si Etch process chamber 300 MM 01.06.2005 1 as is where is
84940 Tel Tokyo Electron Telius SP 304 poly Poly Etch 300 MM 01.06.2007 1 as is where is
84942 Tel Tokyo Electron Unity II, 855SS Dry Oxide etch, 2 chamber 200 mm 01.06.2003 1 as is where is
87130 TEL Tokyo Electron Unity II-855II OXIDE ETCHER 200 mm 01.06.1996 1 as is where is
87131 TEL Tokyo Electron Unity II-855II OXIDE ETCHER 200 mm 01.06.1996 1 as is where is
87132 TEL Tokyo Electron Unity IIe-655II OXIDE-ETCHER 200 mm 01.06.2002 1 as is where is
87133 TEL Tokyo Electron Unity IIe-855II OXIDE-ETCHER 200 mm 01.06.1997 1 as is where is
87134 TEL Tokyo Electron Unity IIe-855II OXIDE-ETCHER 200 mm 01.06.2000 1 as is where is
87135 TEL Tokyo Electron Unity IIe-855II OXIDE-ETCHER 200 mm 01.06.2001 1 as is where is
87136 TEL Tokyo Electron Unity IIe-855II OXIDE-ETCHER 200 mm 01.06.2002 1 as is where is
87137 TEL Tokyo Electron Unity IIe-855PP OXIDE-ETCHER 200 mm 01.06.2001 1 as is where is
87138 TEL Tokyo Electron Unity IIe-855SS OXIDE-ETCHER 200 mm 01.06.2000 1 as is where is
87625 TEL TOKYO ELECTRON Jin BEOL dielectric etch processing 300 MM 01.08.2007 1 as is where is immediately
88385 TEL TOKYO ELECTRON Unity 2E 855SS oxide etcher 200 mm 1 as is where is immediately
88401 TEL Tokyo Electron TELIUS TSP-30555SSS DRY ETCHER 12 inch 01.06.2004 1 inquire
88402 TEL Tokyo Electron TELIUS TSP-30444VVV DRY ETCHER 12 inch 01.06.2006 1 inquire
88403 TEL Tokyo Electron TELIUS TSP-30444VVV DRY ETCHER 12 inch 01.06.2006 1 inquire
88404 TEL Tokyo Electron Unity Ⅱe - 855DD DRY ETCHER 8 inch 01.06.1996 1 inquire
88405 TEL Tokyo Electron Unity Ⅱe - 888DD DRY ETCHER 8 inch 01.06.1999 1 inquire
88406 TEL Tokyo Electron Unity Ⅱe - 855DD DRY ETCHER 8 inch 01.06.1997 1 inquire
88407 TEL Tokyo Electron Unity Ⅱe - 855DD DRY ETCHER 8 inch 01.06.1997 1 inquire
88408 TEL Tokyo Electron Unity Ⅱe - 855DD DRY ETCHER 8 inch 01.06.1997 1 inquire
88409 TEL Tokyo Electron Unity Ⅱe - 855DD DRY ETCHER 8 inch 01.06.1998 1 inquire
88410 TEL Tokyo Electron Unity Ⅱe - 855DD DRY ETCHER 8 inch 01.06.1998 1 inquire
88411 TEL Tokyo Electron Unity Ⅱe - 855SS DRY ETCHER 8 inch 01.06.2000 1 inquire
88412 TEL Tokyo Electron Unity Ⅱe - 855SP DRY ETCHER 8 inch 01.06.1996 1 inquire
88413 TEL Tokyo Electron Unity Ⅱe - 855PI DRY ETCHER 8 inch 01.06.1996 1 inquire
88414 TEL Tokyo Electron Unity Ⅱe - 855SS DRY ETCHER 8 inch 01.06.2000 1 inquire
88415 TEL Tokyo Electron Unity Ⅱe - 855SS DRY ETCHER 8 inch 01.06.2003 1 inquire
88416 TEL Tokyo Electron Unity Ⅱe - 855SS DRY ETCHER 8 inch 01.06.2004 1 inquire
88417 TEL Tokyo Electron Unity Ⅱe - 85IEM DRY ETCHER 8 inch 01.06.2000 1 inquire
88418 TEL Tokyo Electron Unity Ⅱe - 855II DRY ETCHER 8 inch 01.06.1998 1 inquire
88419 TEL Tokyo Electron Unity Ⅱe - 855II DRY ETCHER 8 inch 01.06.1999 1 inquire
88420 TEL Tokyo Electron Unity Ⅱe - 855II DRY ETCHER 8 inch 01.06.2000 1 inquire
88421 TEL Tokyo Electron Unity Ⅱe- 655PD DRY ETCHER 6 inch 01.06.2006 1 inquire
88530 TEL Tokyo Electron Unity SCCM Shin Etch 300 MM 01.06.2007 1 as is where is
88531 TEL Tokyo Electron Unity SCCM Shin Etch 300 MM 01.06.2007 1 as is where is
88532 TEL Tokyo Electron Unity SCCM Shin Etch 300 MM 01.06.2004 1 as is where is
88533 TEL Tokyo Electron Unity SCCM Shin Etch 300 MM 01.06.2007 1 as is where is
88534 TEL Tokyo Electron Unity SCCM Shin Oxide Etch 300 MM 01.06.2003 1 as is where is
88852 TEL Tokyo Electron Telius SP 305 SCCM TE Dry Etcher 01.06.2007 1 as is where is
88853 TEL Tokyo Electron Telius SP SCCM DT Deep Trench Etch system 1 as is where is
90345 TEL TOKYO ELECTRON Tactras Oxide etch system, 4 chambers 300 mm 1 as is where is immediately
90510 TEL Tokyo Electron Telius 305 SCCM Dielectric Etch 300 mm 01.09.2003 1 as is where is
90511 TEL Tokyo Electron Telius SP 305 DRM Dielectric Etch 300 mm 01.06.2007 1 as is where is
90512 TEL Tokyo Electron Telius SP 305 DRM Dielectric Etch 300 mm 01.06.2006 1 as is where is
90513 TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch 300 mm 1 as is where is
90514 TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch 300 mm 01.06.2004 1 as is where is
90764 TEL Tokyo Electron Telius 305 DRM Dielectric Etch 300mm 1 as is where is
90765 TEL Tokyo Electron Telius 305 DRM Dielectric Etch 300mm 01.06.2003 1 as is where is
90766 TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch 300mm 01.02.2004 1 as is where is
91017 TEL Tokyo Electron TE8500 Dry Etcher 200mm 01.06.1994 1 as is where is
10117 TRION Minilock Single Wafer RIE Etcher with Loadlock, 200mm Wafers 200 mm 1 as is where is immediately
87503 TRION Single Wafer Plasma Etcher, 200mm Wafers 1 as is where is
86679 Trion Technology Phantom II Reactive ion etcher 01.06.0200 1 as is where is immediately
91018 ULVAC NE-550 Plasma Etcher 200mm 01.06.2003 1 as is where is
91019 ULVAC NE-550 Plasma Etcher 200mm 01.06.2006 1 as is where is
91020 UNAXIS ICP ETCHER Dry Etcher 200mm 01.06.2001 1 as is where is


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