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Pre-owned and used Dry Etch Equipment for sale by fabsurplus.com

Please find below a list of pre-owned, surplus and Used Dry Etch Equipment for sale by fabsurplus.com .Click on any listed Dry Etcher to see further data.


SDI ID Manufacturer Model Description Version Vintage Q. ty Sales Conditions Lead Time
93868 Alcatel AMS 4200 Advanced Multi chamber ICP Plasma Etching System / Bosch Process 150 mm and 200 mm 01.09.2007 1 as is all rebuilt immediately
93883 Alcatel 602E Deep Trench Etcher 150 mm 01.06.1996 1 as is where is immediately
66407 AMAT Centura 5200 eMxP+ 3 chamber dry etcher 200 mm 01.06.1999 1 as is where is immediately
94110 AMEC Primo SSC AD-RIIE Dielectric Etch 300 mm 1 as is where is
78670 Applied Materials DPS AE Poly G3 Etch POLY 300 MM 01.06.2007 1 as is where is
78671 Applied Materials DPS AE Poly G3 Etch POLY 300 MM 01.06.2007 1 as is where is
79200 Applied Materials Centura 5200 IPS (Spares) qty 3 IPS Process Chambers 200 mm 3 as is where is immediately
79400 Applied Materials Centura 5200 IPS (Spares) DI-ELECTRIC ETCH Process Chamber 200 mm 1 as is where is immediately
84535 Applied Materials CENTURA 5200 DPS+METAL Dry Etch (Metal) 200 mm 01.06.2001 1 as is where is immediately
86146 Applied Materials P5000 MxP METAL(2 METAL & 1 ASP) Metal etcher 150 mm 1 as is where is
86147 Applied Materials P5000 MxP METAL(2 METAL & 1 ASP) Metal etcher 150 mm 01.06.1997 1 as is where is immediately
86711 Applied Materials P5000 2Mark II & 1ASP Metal Etcher 200 mm 01.04.1997 1 as is where is immediately
88508 Applied Materials Centura DPS2 Metal 300 MM 01.06.2005 1 as is where is
89044 Applied Materials DPS+ Metal, Centura 2 Process Chamber 200 mm 1 inquire immediately
91051 APPLIED MATERIALS CENTURA AP DPS II CHAMBER DRY ETCH - 1 as is where is
91052 APPLIED MATERIALS CENTURA E-MAX CT 3CH DRY ETCH 300 mm 1 as is where is
91061 APPLIED MATERIALS CENTURA P2 SUPER-E DRY ETCH 200 mm 01.06.1998 1 as is where is
91260 Applied Materials CENTURA 5200 MxP+ Oxide 200 mm 1 as is where is
91261 Applied Materials CENTURA 5200 MXP Metal 150 mm 1 as is where is
91262 Applied Materials CENTURA 5200 MxP+ Oxide 200 mm 1 as is where is
91263 Applied Materials CENTURA 5200 DPS POLY 200 mm 01.06.2000 1 as is where is
91264 Applied Materials CENTURA 5200 SUPER-E 200 mm 01.06.2000 1 as is where is
91269 Applied Materials CENTURA 5200 MxP Poly 200 mm 1 as is where is
91270 Applied Materials CENTURA 5200 MxP Poly 200 mm 1 as is where is
91276 Applied Materials Centura DPS II NT OS 300 mm 1 as is where is
91277 Applied Materials Centura DPS II CHAMBER Chamber only 300 mm 1 as is where is
91278 Applied Materials Centura DPS Metal ASP chamber only / Server OS 300 mm 1 as is where is
91279 Applied Materials CENTURA ENABLER Oxide Etcher /server OS PC 300 mm 01.06.2008 1 as is where is
91280 Applied Materials CENTURA ENABLER Oxide Etcher /server OS PC 300 mm 01.06.2008 1 as is where is
91281 Applied Materials CENTURA ENABLER Oxide Etcher /server OS PC 300 mm 01.06.2008 1 as is where is
91282 Applied Materials CENTURA ENABLER Oxide Etcher /server OS PC 300 mm 01.06.2008 1 as is where is
91283 Applied Materials CENTURA ENABLER Oxide Etcher /server OS PC 300 mm 01.06.2008 1 as is where is
91284 Applied Materials Etch dry chamber Only AXIOM, DPS 300 mm 1 as is where is
91285 Applied Materials Etch dry chamber Only AXIOM, DPS 300 mm 1 as is where is
91286 Applied Materials P5000 DELTA DLH 150 mm 1 as is where is
91287 Applied Materials P5000 DELTA DLH 150 mm 01.06.1993 1 as is where is
91288 Applied Materials P5000 Etch Mark II Poly 200 mm 01.06.1995 1 as is where is
91289 Applied Materials P5000 Etch Mark II OXIDE 150 mm 1 as is where is
91307 Applied Materials P5000 Etch Mark II Metal 150 mm 1 as is where is
91308 Applied Materials P5000 Mark II Etch Oxide 150 mm 1 as is where is
91311 Applied Materials P5000 Mark-II Etch Oxide 200 mm 1 as is where is
91313 Applied Materials P5000-Mark II Etch Metal 1 as is where is
91316 Applied Materials CENTURA ENABLER Oxide Etcher /server OS PC 300 mm 1 as is where is
91317 Applied Materials CENTURA ENABLER Oxide Etcher /server OS PC 300 mm 1 as is where is
91813 APPLIED MATERIALS EMAX_CT+ DRY ETCH 300 MM 01.06.2007 1 as is where is
91981 Applied Materials Centura 5200 IPS Chamber Only Oxide etch 3 as is where is immediately
92063 Applied Materials P5000 Metal Etcher with two Indexer, L/L CH, Orienter CH, two Process CH, ASP CH, 200 mm 01.06.1995 1 as is where is immediately
92064 Applied Materials P5000 Dry etcher, Poly, with 3 process chambers 200 mm 01.06.1995 1 as is where is immediately
93032 Applied Materials CENTRIS DPS MESA Dry Etch, Twin 3chamber 300 MM 01.06.2010 1 as is where is
93034 Applied Materials CENTURA ENABLER E2 Oxide Etcher /server OS PC 300 MM 01.06.2007 1 as is where is
93035 Applied Materials CENTURA ENABLER E5 Oxide Etcher /server OS PC 300 MM 01.06.2010 1 as is where is
93036 Applied Materials P5000 Etch no chamber (PLIS type) 200 mm 1 as is where is
93037 Applied Materials PRODUCER GT Fox/eHarp 300 mm 01.06.2009 1 as is where is
93896 Applied Materials ENABLER_E2 Etcher 300 mm 01.06.2009 1 as is where is
94434 Applied Materials CENTURA 5200 EMAX 200 mm 1 as is where is
94435 Applied Materials CENTURA DPS G5 1Process Chamber / 1Mesa Chamber 300 mm 1 as is where is
94508 Applied Materials Centura DPS2 Poly Poly Etch 300 mm 01.06.2006 1 as is where is
94509 Applied Materials Centura DPS2 Poly Poly Etch 300 mm 01.06.2007 1 as is where is
94511 Applied Materials Centura Enabler Oxide etch 300 mm 01.06.2010 1 as is where is
95092 APPLIED MATERIALS CENTURA P2 SUPER-E ETCH 8" 01.06.1998 1 as is where is
95259 Applied Materials Centura AP Enabler Dielectric Etch 300mm 1 as is where is
95740 Applied Materials Centura AP AdvantEdge G5 Minos Poly Polysilicon Etch 300 mm 01.11.2014 1 as is where is
95928 Applied Materials Centura Advantedge Carina Mesa Dry Etch Cluster Tool 300 mm 01.06.2013 1 as is where is immediately
96804 Applied Materials Centura AP AdvantEdge G5 Mesa Poly Polysilicon Etch 300 mm 01.01.2015 1 as is where is
96805 Applied Materials Centura AP AdvantEdge G5 Mesa T2 Poly Polysilicon Etch 300 mm 01.01.2015 1 as is where is
96806 Applied Materials Centura AP AdvantEdge G5 Mesa T2 Poly Polysilicon Etch 300 mm 01.01.2015 1 as is where is
96807 Applied Materials Centura AP AdvantEdge G5 Mesa T2 Poly Polysilicon Etch 300 MM 01.01.2015 1 as is where is
96808 Applied Materials Centura AP AdvantEdge G5 Mesa T2 Poly Polysilicon Etch 300 MM 01.01.2015 1 as is where is
96812 Applied Materials Centura AP DPS II Polysilicon Polysilicon Etch 300 mm 1 as is where is
96814 Applied Materials Centura AP eMax CT Dielectric Etch 300 mm 1 as is where is
96816 Applied Materials Centura AP eMax CT Dielectric Etch 300 mm 1 as is where is
96969 Applied Materials Centura DPS Poly Etcher 200 mm 01.06.2001 2 inquire
96970 Applied Materials Centura DPS Metal Etcher 200 mm 01.06.2002 1 inquire
96971 Applied Materials Centura DPS II Poly Etcher 200 mm 01.06.2005 1 inquire
96972 Applied Materials Centura DPS II Metal Etcher 200 mm 01.06.2005 1 inquire
97215 Applied Materials CENTURA DPS G5 MESA Polysilicon Etch 300 mm 01.07.2013 1 as is where is
97218 Applied Materials CENTURA DPS G5 Dry etch 300 mm 01.05.2008 1 as is where is
97219 Applied Materials CENTURA DPS G5 Dry Etch 300 mm 01.03.2006 1 as is where is
97520 Applied Materials Centura 4.0 eMax Dielectric Etch 300 mm 1 as is where is
97523 Applied Materials Centura AdvantEdge Mesa2 Polysilicon Etch 300 mm 1 as is where is
97524 Applied Materials Centura AP Axiom HT Chamber Metal Etch 300 mm 1 as is where is
97526 Applied Materials Centura AP eMax CT Dielectric Etch 300 mm 1 as is where is
97527 Applied Materials Centura AP Enabler Dielectric Etch 300 mm 1 as is where is
97528 Applied Materials Centura AP Enabler Dielectric Etch 300 mm 1 as is where is
97559 Applied Materials Producer Etch eXT Poly Polysilicon Etch 300 mm 01.04.2011 1 as is where is immediately
97849 Applied Materials Centura 5200 DPS2 Poly Poly Etcher 300 mm 01.06.2010 1 as is where is
98022 Applied Materials ENABLER_E2 Oxide Etch 300 mm 01.06.2009 1 as is where is
98026 Applied Materials P5000 MxP Poly CVD 200 mm 01.06.1995 1 as is where is
98068 Applied Materials Centura Carina 1 Carina CHM 300 mm 01.06.2012 1 as is where is
98069 Applied Materials Centura eMax CT+ ETCH 300 mm 01.06.2004 1 as is where is
98070 Applied Materials Centura eMax CT+ ETCH 300 mm 01.06.2007 1 as is where is
98071 Applied Materials Centura eMax CT+ Oxide Etch 300 mm 01.06.2007 1 as is where is
98072 Applied Materials Centura Enabler Oxide Etch 300 mm 01.06.2004 1 as is where is
98073 Applied Materials Centura Enabler E2 Oxide Etch 300 mm 01.06.2010 1 as is where is
98258 Applied Materials DPS G5 Dry Etch 300 mm 01.06.2006 1 as is where is
98259 Applied Materials DPS G5 Dry Etch 300 mm 01.06.2006 1 as is where is
98260 Applied Materials DPS G5 Dry Etch 300 mm 01.06.2010 1 as is where is
98261 Applied Materials DPS G5 MESA Polysilicon Etch 300 mm 01.06.2013 1 as is where is
98328 Applied Materials P5000 MxP METAL ETCH (Mainbody only) 150 mm 1 inquire
98374 Applied Materials DPS Chambers Dry Etch 300 mm 2 as is where is
98375 Applied Materials Enabler Chamber System Dry Etch 300 mm 1 as is where is
98555 Applied Materials Centura DPS II (AE) POLY POLY ETCHER 300 mm 1 as is where is
98556 Applied Materials Centura DPS II (AE) POLY POLY ETCHER 300 mm 1 as is where is
98557 Applied Materials Centura DPS II (AE) POLY POLY ETCHER 300 mm 1 as is where is
98801 Applied Materials ENDURA 2 Metal Etch 300 mm 01.05.2003 1 as is where is
98802 Applied Materials G5 Polysilicon Etch 300 mm 01.02.2008 1 as is where is
98803 Applied Materials G5-MESA-T2 Polysilicon Etch 300 mm 01.01.2014 1 as is where is
98991 Applied Materials DPS Dry Etch 300 mm 01.05.2006 1 as is where is
98992 Applied Materials DPS_G5_Mesa Dry Etch 300 mm 01.01.2006 1 as is where is
98993 Applied Materials EMAX-CT-PLUS Dry Etch 300 mm 01.07.2004 1 as is where is
98998 Applied Materials G5 Polysilicon Etch 300 mm 01.06.2012 1 as is where is
99088 Applied Materials Centura AP - Mainframe Only Metal Etch 300mm 1 as is where is
99089 Applied Materials Centura AP DPS AdvantEdge G2 Metal - Chamber Only Metal Etch 300mm 1 as is where is
99090 Applied Materials Centura AP DPS AdvantEdge G2 Metal - Chamber Only Metal Etch 300mm 1 as is where is
99091 Applied Materials Centura AP DPS AdvantEdge G2 Poly Polysilicon Etch 300mm 01.05.2006 1 as is where is
92713 FEI Dual beam 820 FIB SEM 200 mm 01.06.1997 1 as is where is immediately
69945 Gasonics AE 2001 Single wafer etch system 1
82891 Gasonics Strata Oxide Etch System 200 01.06.1997 1 as is where is immediately
81831 Hitachi M712E ECR Plasma Etcher 200mm 1 as is where is immediately
86030 HITACHI M712XT ETCHER 300 mm 1 as is where is
89915 Hitachi U-722 Etch 300mm 300mm 3 as is where is
90760 Hitachi U-702 Metal Etch 300mm 01.06.2004 1 as is where is
95816 Hitachi U-7050A Metal Etch 300 mm 1 as is where is
97013 Hitachi M712XT Dry Etcher 300 mm 01.06.2007 1 as is where is
97620 Hitachi U-7050A Metal Etch 300 mm 1 as is where is
98899 HITACHI M712XT Poly Etcher 300 mm 01.06.2007 1 as is where is
98814 IPS AKRA Metal Etch 300 mm 01.09.2010 1 as is where is
98900 KLA-Tencor FIT 3120 Particle Counter 300 mm 01.06.2004 1 as is where is
60923 LAM 4720 1 as is where is immediately
76945 LAM 590 Etcher 1
79159 Lam 4420 Dry etcher 200 mm 2 as is where is immediately
79843 LAM 4420 etch 200mm 2
91129 LAM TCP9400SE Etcher 200mm non-SMIF 01.06.2018 2 inquire 4 months
91130 LAM TCP9400SE Etcher 200mm SMIF 01.06.2018 2 inquire 4 months
71831 LAM RESEARCH A6 EXELAN OXIDE ETCHER (refurbished) 1 as is where is immediately
78676 Lam Research 2300 METAL Etch METAL 300 MM 01.06.2009 1 as is where is immediately
82252 Lam Research TCP9600SE Dry etcher 8" 1 as is where is immediately
82257 Lam Research 2300 EXELAN Dry etcher 8" 01.06.2004 1 as is where is immediately
82258 Lam Research 2300 EXELAN Dry etcher 8" 01.06.2004 1 as is where is immediately
86154 LAM Research A4 9600SE PM Dry etch Chamber 200 mm 1 as is where is
86155 LAM Research A4 TM(Alliance) DRY ETCHER – HUB 200 mm 1 as is where is
86156 LAM Research A4 TM(Alliance) DRY ETCHER – HUB 200 mm 1 as is where is
91028 Lam Research Alliance4 9400SE Etcher 150mm 01.06.1996 1 as is where is immediately
91069 Lam Research Alliance4 4420XL DRY ETCHER 150 mm 01.06.1996 1 as is where is
91070 Lam Research Alliance4 9400SE DRY ETCHER 200 mm 01.06.1996 1 as is where is
91071 Lam Research RAINBOW 4520i DRY ETCHER 200 mm 01.06.1996 1 as is where is
91318 LAM Research 2300 Exelan Chamber Only OXIDE ETCH 300 mm 01.06.2004 1 as is where is
91319 LAM Research 2300 Exelan SYSTEM OXIDE ETCH 300 mm 01.06.2003 1 as is where is
91320 LAM Research EXELAN 2300 OXIDE ETCH 300 mm 1 as is where is
91322 LAM Research LAM 4520 OXIDE ETCH 1 as is where is
91323 LAM Research LAM 4520 OXIDE ETCH 1 as is where is
91324 LAM Research LAM 4520 OXIDE ETCH 1 as is where is
91325 LAM Research LAM 4520 OXIDE ETCH 1 as is where is
91326 LAM Research LAM 4528 OXIDE ETCH 1 as is where is
91328 LAM Research STAR Chamber Only DRY ETCH 300 mm 1 as is where is
91814 LAM RESEARCH A9608PTX DRY ETCHER 200 MM 01.06.1998 1 as is where is
91914 Lam Research TCP9600 Etcher 200 MM 01.06.1995 1 as is where is immediately
92594 LAM Research 2300 Exelan Flex 45 Dielectric Etch 300 mm 01.06.2006 1 as is where is immediately
92712 Lam Research TCP 9600 Dry Etch (Metal) 200 mm 01.06.2003 1 as is where is immediately
93038 LAM Research RAINBOW4500 Etcher 125 mm 1 as is where is
94239 LAM Research 2300 Exelan Flex Cu Dielectric Etch - Used for Copper Process 300 mm 01.06.2001 1 as is where is immediately
94580 Lam Research Rainbow 4420 POLY Etcher 200mm 1 as is where is immediately
94581 Lam Research Rainbow 4520 (ENVISION) Oxide Etcher 200mm 1 as is where is immediately
95099 Lam Research A4 4520 PM ETCH 8" 1 as is where is
95243 Lam Research 9600PTX Dry Etch 200 mm 01.01.1998 1 immediately
95825 LAM Research 2300 Exelan Flex 45 Dielectric Etch 3 Chamber 300 mm 01.06.2007 1 as is where is immediately
95963 LAM Research 4420 Polysilicon Etch 200 mm 01.06.1994 1 as is where is
95964 LAM Research 4520 Oxide Etch 200 mm 01.06.1996 1 as is where is
95965 LAM Research TCP9400 Dry Etcher 200 mm 01.06.1997 1 as is where is
96880 LAM Research 2300 Exelan Flex EX+ Dielectric Etch 300 mm 1 as is where is
96882 LAM Research 2300 KIYO EX Poly - Chamber Only Polysilicon Etch 300 mm 1 as is where is
96884 LAM Research 2300 Versys KIYO 45 Polysilicon Etch 300 mm 1 as is where is
96885 LAM Research 2300 Versys KIYO Poly Polysilicon Etcher, 4 chamber 300 mm 01.06.2009 1 as is where is immediately
96887 LAM Research 2300 Versys KIYO Poly Polysilicon Etch 300 mm 1 as is where is
96888 LAM Research 2300 Versys Metal Metal Etch 300 mm 01.06.2004 1 as is where is
96980 LAM Research 4420 Poly Etcher 200 mm 01.06.1992 1 inquire
96981 LAM Research 4520 Oxide Etcher 200 mm 01.06.1992 1 inquire
97004 LAM RESEARCH 2300 Metal 45 Process Chamber (For Spares Use) 300 mm 01.06.2006 1 as is where is immediately
97094 LAM Research TCP9600 Metal Etcher 01.06.1996 1 inquire
97227 LAM Research 2300FLEX45 Dielectric Etch 300 mm 01.10.2008 1 as is where is
97228 LAM Research 2300FLEX45 Dielectric Etch 300 mm 01.07.2007 1 as is where is
97229 LAM Research 2300FLEX45 Dielectric Etch 300 mm 01.09.2007 1 as is where is
97230 LAM Research 2300FLEX45 Dielectric Etch 300 mm 01.04.2005 1 as is where is
97231 LAM Research 2300FLEX45 Dielectric Etch 300 mm 01.05.2008 1 as is where is
97232 LAM Research 2300KIYO45 Polysilicon Etch 300 mm 01.07.2007 1 as is where is
97233 LAM Research 2300KIYO45 Polysilicon Etch 300 mm 01.02.2013 1 as is where is
97234 LAM Research 2300KIYO45 Polysilicon Etch 300 mm 01.07.2010 1 as is where is
97235 LAM Research 2300KIYO45 Polysilicon Etch 300 mm 01.10.2010 1 as is where is
97236 LAM Research 2300KIYO45 Polysilicon Etch 300 mm 01.12.2010 1 as is where is
97675 LAM Research 2300 Exelan Flex 45 Dielectric Etch 300 mm 1 as is where is
97676 LAM Research 2300 Exelan Flex 45 Dielectric Etch 300 mm 1 as is where is
97677 LAM Research 2300 Exelan Flex EX Dielectric Etch 300 mm 01.06.2013 1 as is where is
97678 LAM Research 2300 Exelan Flex EX Dielectric Etch 300 mm 01.06.2010 1 as is where is
97679 LAM Research 2300 Exelan Flex EX Dielectric Etch 300 mm 1 as is where is
97680 LAM Research 2300 Exelan Flex EX Dielectric Etch 300 mm 1 as is where is
97681 LAM Research 2300 Exelan Flex EX Dielectric Etch 300 mm 1 as is where is
97682 LAM Research 2300 Exelan Flex EX+ Dielectric Etch 300 mm 1 as is where is
97683 LAM Research 2300 Exelan Flex EX+ Dielectric Etch 300 mm 1 as is where is
97686 LAM Research 2300 KIYO 45 Multi-Process Etch 300 mm 1 as is where is
97687 LAM Research 2300 KIYO MCX Metal Etch 300 mm 1 as is where is
97688 LAM Research 2300 KIYO MCX Metal Etch 300 mm 1 as is where is
97689 LAM Research 2300 KIYO Metal/HiK Metal Etch 300 mm 1 as is where is
97690 LAM Research 2300 SELIS - Chamber Only Dielectric Etch – Process Chamber 300 mm 1 as is where is
97691 LAM Research 2300 Versys KIYO Poly Polysilicon Etch 300 mm 1 as is where is
97692 LAM Research 2300 Versys KIYO Poly Polysilicon Etch 300 mm 1 as is where is
97693 LAM Research 2300e4 KIYO MCX Metal Etch 300 mm 1 as is where is immediately
97694 LAM Research 2300e4 KIYO MCX Metal Etch 300 mm 1 as is where is immediately
97695 LAM Research 2300e5 Exelan Flex FX+ - TM Only Dielectric Etch 300 mm 1 as is where is
98146 Lam Research 2300 Exelan Flex45 Oxide Etcher 300 mm 01.06.2008 1 as is where is
98279 LAM Research FLEX GX E6 OXIDE ETCH 300 mm 01.06.2008 1 as is where is
98280 LAM Research FLEX GX E6 OXIDE ETCH 300 mm 01.06.2008 1 as is where is
98345 LAM Research 2300 KIYO EXP ETCH 300 mm 01.06.2013 1 inquire
98346 LAM Research 2300 KIYO45 ETCH 300 mm 01.06.2018 1 inquire
98347 LAM Research 2300 KIYO45 ETCH 300 mm 01.06.2012 1 inquire
98348 LAM Research Alliance4 4420XL PM ETCH 150 mm 01.06.1996 1 inquire
98820 LAM Research 2300METAL-CIP Metal Etch 300 mm 01.08.2006 1 as is where is
98822 LAM Research EXTRIMA3100 Dry Etch 300 mm 01.02.2006 1 as is where is
98823 LAM Research FLEX45 Dielectric Etch 300 mm 01.07.2004 1 as is where is
98824 LAM Research 2300 KIYO-45 Dry Etch 300 mm 01.05.2003 1 as is where is
98826 LAM Research TORUS300 Dry Etch 300 mm 01.10.2010 1 as is where is
98859 LAM Research 4420 Poly Etch 200 mm 1 inquire
98888 LAM Research Alliance Exelan HPT(Process Chamber) ETCH 200mm 01.06.2001 1 as is where is
98889 LAM Research Alliance Exelan HPT(Process Chamber) ETCH 200mm 01.06.2001 1 as is where is
98892 LAM Research TORUS200 ETCH 200mm 01.06.2006 1 as is where is
98893 LAM Research TORUS200 ETCH 200mm 01.06.2006 1 as is where is
99013 LAM Research 2300 FLEX Exelan Dielectric Etch 01.08.2013 1 as is where is
99014 LAM Research 2300 FLEX Exelan Dielectric Etch 01.10.2012 1 as is where is
99015 LAM Research 2300 FLEX Exelan Dielectric Etch 01.07.2013 1 as is where is
99016 LAM Research ALTUS Metal Etch 300 mm 01.07.2005 1 as is where is
99017 LAM Research ALTUS Metal Etch 300 mm 01.09.2001 1 as is where is
99019 LAM Research ALTUS Metal Etch 300 mm 01.04.2010 1 as is where is
99020 LAM Research EXTRIMA3100 Dry Etch 01.03.2006 1 as is where is
99021 LAM Research FLEX FX EFEM Dry Etch 01.09.2012 1 as is where is
99022 LAM Research FLEX_FX Dry Etch 01.09.2013 1 as is where is
99023 LAM Research FLEX-DS Dry Etch 01.07.2005 1 as is where is
99024 LAM Research KIYO-EX Dry Etch 01.08.2007 1 as is where is
99056 LAM Research Rainbow 4520 ENV Oxide Etcher 200 mm 1 as is where is immediately
99184 LAM Research 2300 Exelan Flex Dielectric Etch 300mm 1 as is where is
99186 LAM Research 2300 Exelan Flex - Chamber Only Dielectric Etch 300mm 1 as is where is
99187 LAM Research 2300 Exelan Flex 45 Dielectric Etch 300mm 1 as is where is
99188 LAM Research 2300 Exelan Flex EX+ Dielectric Etch 300mm 1 as is where is
99189 LAM Research 2300 KIYO EX Poly - Chamber Only Polysilicon Etch 300mm 01.06.2011 1 as is where is
99190 LAM Research 2300 KIYO MCX Metal Etch 300mm 1 as is where is
99191 LAM Research 2300 KIYO MCX Metal Etch 300mm 1 as is where is
99192 LAM Research 2300 Versys KIYO Poly Polysilicon Etch 300mm 1 as is where is
99193 LAM Research 2300 Versys KIYO Poly Polysilicon Etch 300mm 01.06.2011 1 as is where is
99194 LAM Research 2300e5 KIYO 45 Polysilicon Etch 300mm 1 as is where is
99195 LAM Research 2300e5 KIYO 45 Polysilicon Etch 300mm 1 as is where is
99196 LAM Research TCP 9600CFE Metal Etch 100mm 1 as is where is
99197 LAM Research TCP 9600CFE Metal Etch 150mm 1 as is where is
93633 March Instruments Jupiter II Tabletop RIE Reactive Ion Etcher 1 as is where is
93634 March Instruments PX 500 Plasma Treatment System 1 as is where is
83977 Mattson Aspen 3 ICP Dual Chamber Asher 300 mm 01.08.2008 5 as is where is immediately
88529 Mattson Paradigme SP Light Etch 300 MM 01.06.2010 1 as is where is
93899 MATTSON PARADIGM_SI Poly-silicon etcher 300 mm 01.06.2011 1 as is where is
93900 MATTSON PARADIGM_SI Poly-silicon etcher 300 mm 01.06.2011 1 as is where is
93901 MATTSON PARADIGM_SI Poly-silicon etcher 300 mm 01.06.2012 1 as is where is
93902 MATTSON PARADIGM_SI Poly-silicon etcher 300 mm 01.06.2011 1 as is where is
98148 Mattson Aspen 3 Lite LITE ETCHER 300 mm 01.06.2006 1 as is where is
98152 Mattson ParadigmE Etch 300 mm 01.06.2012 1 as is where is
98284 MATTSON PARADIGME SI Polysilicon Etch 300 mm 1 as is where is
98829 MATTSON PARADIGME-POLY Polysilicon Etch 300 mm 01.05.2011 1 as is where is
96591 MAXIS 300L ICP Etcher 2-8 INCH 01.06.2011 1 as is where is immediately
90144 Novellus Iridia Poly Etcher 01.05.2005 1 as is where is immediately
93635 Novellus Gasonics PEP Iridia DL Plasma Asher 1 as is where is
91329 OXFORD 800+ RIE (Reactive Ion Etcher) 1 as is where is immediately
93636 Oxford Instruments 90 Plus RIE RIE Reactive Etcher with Loadlock 1 as is where is
97449 Oxford Instruments Plasmalab 100+ICP180 Inductively Coupled Plasma High Density Etching System 1 as is where is immediately
71760 Oxford Plasma Technology DP80 PE CVD UP TO 8 INCH 01.12.1989 1 as is where is immediately
78807 PLASMA ETCH BT-1 PLASMA CLEANER ASSEMBLY 01.06.2004 1 as is where is immediately
91330 Plasma Therm Wafer/ Batch 740 DUAL PLASMA ETCH AND RIE 4" 1 as is where is
91331 Plasma Therm Wafer/ Batch 740 DUAL PLASMA ETCH AND RIE 4" 1 as is where is
98421 Plasma Therm SLR 720 RIE Etcher 150/200 mm 1 as is where is
98422 Plasma Therm VLR Plasma Etch ICP 150/200 mm 2 as is where is
98423 Plasma Therm VLR Plasma Etch ICP 150/200 mm 1 as is where is
86447 Plasmatherm 790 RIE 125 mm 1 as is where is immediately
90668 Plasmatherm 790 Dry Etcher / PECVD 200 mm 01.06.1997 1 as is where is immediately
93639 Plasmatherm 790 MF Plasma RIE Reactive Ion Etch System 1 as is where is
93640 Plasmatherm SLR PECVD Plasma Enhanced Chemical Vapor Deposition System 1 as is where is
97723 Plasmatherm 790 Etch Multi-Process Etch 200 mm 1 as is where is
95112 PSK EVOLITE2 ETCH - 01.06.2011 1 as is where is
95113 PSK EVOLITE2 ETCH - 01.06.2011 1 as is where is
95114 PSK TERA21 ETCH - 01.06.2002 1 as is where is
86163 SAMCO RIE-10N RIE 200 mm 1 as is where is
86164 SAMCO RIE-10N RIE 200 mm 1 as is where is
86165 SAMCO RIE-10NR RIE 200 mm 1 as is where is
91076 SAMCO RIE-10NR ETCH 200 mm 01.06.2000 1 as is where is
93396 Shibaura CD 80 Dry Etcher 200 mm 1 inquire immediately
97738 Shibaura CDE-300 Metal Etch 300 mm 1 as is where is
87626 SPTS Multiplex ASE Dry etcher system 100 mm 01.06.1998 1 as is where is immediately
93314 SPTS Primaxx CET25-CPX DRY ETCH 200 mm 1 as is where is immediately
79584 STS 320 PC Reactive Ion Etcher 200 mm 01.06.1995 1 as is where is immediately
86527 STS Multiplex ICP Advanced Oxide Etching System 150 mm 1 as is where is immediately
95631 STS (SPTS) Multiplex ICP Deep Reactive Ion Etcher 150mm 01.12.2000 1 as is where is immediately
96620 TAINICS TE3100 ICP Etching Equipment (for GaN Etching) 2 inch and 4 inch 01.06.2011 1 as is where is immediately
83689 Tegal TEGAL 981 Nitride Etch 200 mm 1 as is where is
93039 TEGAL PLASMA 900E Plasma dry etch 100 mm 1 as is where is
93644 Tegal 803 Inline Automatic Plasma Etcher 1 as is where is
93645 Tegal 900E Cassette to Cassette Photoresist Strip/Backside Etching 100 MM 1 as is where is
63723 TEL UNITY 2E 855 DD 2XDRM CHAMBERS 200mm 01.05.1998 1 as is where is immediately
75635 TEL Tokyo Electron Unity Me SCCM (Chamber) Dry oxide etch chamber 200 mm 1 as is where is immediately
75636 TEL Tokyo Electron Unity Me SCCM 85S Oxide etcher (3 chamber) 200 mm 01.10.2003 1 as is where is immediately
82679 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
82680 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
82681 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
82682 TEL Tokyo Electron SCCM TE ETCH 300 mm 01.06.2006 1 as is where is
91017 TEL Tokyo Electron TE8500 Dry Etcher 200mm 01.06.1994 1 as is where is
91335 TEL TOKYO ELECTRON SCCM SHIN Dry ETCHER 200 mm 1 as is where is
91336 TEL TOKYO ELECTRON SCCM SHIN Dry ETCHER 200 mm 1 as is where is
91337 TEL TOKYO ELECTRON TE8500 Etcher 200 mm 01.06.2006 1 as is where is
91338 TEL TOKYO ELECTRON TE8500 Etcher 200 mm 01.06.1994 1 as is where is
91339 TEL TOKYO ELECTRON TE8500 Etcher 200 mm 01.06.1995 1 as is where is
91340 TEL TOKYO ELECTRON TE8500 Etcher 200 mm 01.06.2006 1 as is where is
91341 TEL TOKYO ELECTRON TELIUS SCCM T-3044SS DRY ETCHER 300 mm 01.06.2007 1 as is where is
91816 TEL TOKYO ELECTRON UNITY-EP DRY ETCH 01.06.2005 1 as is where is
91817 TEL TOKYO ELECTRON TE8500 DRY ETCH 01.06.1998 1 as is where is
91818 TEL TOKYO ELECTRON TE8500 DRY ETCH 01.06.1998 1 as is where is
91819 TEL TOKYO ELECTRON TE8500 DRY ETCH 01.06.1996 1 as is where is
91820 TEL TOKYO ELECTRON TE8500 DRY ETCH 01.06.1997 1 as is where is
93040 TEL TOKYO ELECTRON VIGUS MASK ETCH 300 mm 01.06.2009 1 as is where is
93041 TEL TOKYO ELECTRON VIGUS MASK ETCH 300 mm 01.06.2010 1 as is where is
93042 TEL TOKYO ELECTRON VIGUS MASK ETCH 300 mm 01.06.2010 1 as is where is
94559 TEL Tokyo Electron Telius SCCM Shin Oxide etcher 300 mm 01.06.2000 1 as is where is
96927 TEL Tokyo Electron Tactras RLSA Poly Polysilicon Etch 300 mm 01.06.2012 1 as is where is
96928 TEL Tokyo Electron Tactras Vigus Dielectric Etch 300 mm 01.10.2010 1 as is where is
96929 TEL Tokyo Electron Tactras Vigus RK3 - Chamber Only Dielectric Etch 300 mm 1 as is where is
96931 TEL Tokyo Electron Tactras Vigus RK3 - Chamber Only Dielectric Etch 300 mm 1 as is where is
96956 TEL Tokyo Electron Telius 305 DRM Dielectric Etch 300 mm 01.06.2003 1 as is where is
96958 TEL Tokyo Electron Telius SP 305 DRM Dielectric Etch 300 mm 01.06.2005 1 as is where is
97777 TEL Tokyo Electron Tactras Vigus Dielectric Etch 300 mm 01.05.2008 1 as is where is
97812 TEL Tokyo Electron Telius SP 305 DRM Dielectric Etch 300 mm 01.06.2007 1 as is where is
97813 TEL Tokyo Electron Telius SP 305 DRM Dielectric Etch 300 mm 1 as is where is
97814 TEL Tokyo Electron Telius SP 305 DRM Dielectric Etch 300 mm 1 as is where is
97817 TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch 300 mm 1 as is where is
97818 TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch 300 mm 1 as is where is
97819 TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch 300 mm 1 as is where is
98043 TEL Tokyo Electron Unity 2e 855DD (DRM Chamber) DRM Chamber 200 mm 01.06.2004 1 as is where is
98044 TEL Tokyo Electron Unity 2e 855DP (Poly Chamber) DRM Chamber 200 mm 01.06.2005 1 as is where is
98184 TEL Tokyo Electron Telius SCCM Jin Oxide etcher 300 mm 01.06.2004 1 as is where is
98185 TEL Tokyo Electron Telius SCCM Shin Oxide etcher 300 mm 01.06.2003 1 as is where is
98186 TEL Tokyo Electron Telius SCCM Shin Oxide etcher 300 mm 01.06.2004 1 as is where is
98187 TEL Tokyo Electron Telius SCCM Shin Oxide etcher 300 mm 01.06.2007 1 as is where is
98188 TEL Tokyo Electron Telius SCCM Shin Oxide etcher 300 mm 01.06.2007 1 as is where is
98195 TEL Tokyo Electron Unity2e 855SS Oxide etcher 200 mm 1 as is where is
98196 TEL Tokyo Electron Unity2e 855SS Oxide etcher 200 mm 01.06.2000 1 as is where is
98197 TEL Tokyo Electron Unity2e 855SS Oxide etcher 200 mm 1 as is where is
98198 TEL Tokyo Electron Unity2e 85ADI Oxide etcher 200 mm 01.06.2000 1 as is where is
98199 TEL Tokyo Electron Unity2e 85DI Oxide etcher 200 mm 01.06.1998 1 as is where is
98316 TEL Tokyo Electron TE8500 Oxide Etcher 200 mm 01.06.1993 1 as is where is immediately
98435 TEL Tokyo Electron SCCM Chamber Dielectric Etch 300 mm 1 as is where is
98841 TEL Tokyo Electron SCCM Dry Etch 300 mm 01.06.2005 1 as is where is
98842 TEL Tokyo Electron SCCM-SHIN Dry Etch 300 mm 01.07.2007 1 as is where is
98843 TEL Tokyo Electron TRIAS Metal Etch 300 mm 01.06.2014 1 as is where is
98844 TEL Tokyo Electron TRIAS-EX2 Metal Etch 300 mm 01.04.2014 1 as is where is
98845 TEL Tokyo Electron VESTA-NV Dry Etch 300 mm 01.08.2010 1 as is where is
98846 TEL Tokyo Electron VIGUS MK Dielectric Etch 300 mm 01.05.2009 1 as is where is
98847 TEL Tokyo Electron VIGUS RK2 Dielectric Etch 300 mm 01.08.2013 1 as is where is
99047 TEL Tokyo Electron SCCM-SHIN Dry Etch 01.04.2007 1 as is where is
99048 TEL Tokyo Electron TRIAS-EX2 Metal Etch 300 mm 01.03.2014 1 as is where is
99049 TEL Tokyo Electron VIGUS_V0 Dielectric Etch 300 mm 01.09.2008 1 as is where is
93646 Tepla America PlasmaPen Atmospheric High Density Plasma Cleaning/Etching System 1 as is where is
86679 Trion Technology Phantom II Reactive ion etcher 01.06.0200 1 as is where is immediately
93647 Trion Technology Minilock Single Wafer RIE Etcher 150 MM 1 as is where is
93648 Trion Technology Phantom II ICP Inductively Coupled Plasma Etch System 200 MM 1 as is where is
98048 UNAXIS SLR-720 RIE 150 mm 1 as is where is
98049 UNAXIS SLR-720 RIE 200 mm 1 as is where is
98849 WONIK IPS AKRA BM Metal Etch 300 mm 01.03.2003 1 as is where is


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