Plasmatherm SLR 770 Dual Chamber R.I.E. for sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Plasmatherm SLR 770 Dual Chamber R.I.E..
Please click on the "Get Quote" button at the end of the SLR 770 description, if you'd like to get a quotation, photos and specifications of this Dual Chamber R.I.E., and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Plasmatherm SLR 770 Dual Chamber R.I.E. is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Plasmatherm SLR 770 Equipment Details

SDI ID:	106759
Manufacturer:	Plasmatherm
Model:	SLR 770
Description:	Dual Chamber R.I.E.
Version:	200 mm
Vintage:	01.06.1994
Quantity:	1
Sales Condition:	as is where is
Lead Time:	immediately
Sales Price:	Inquire
Comments:	includes: -LH and RH chambers are RIE with adjustable top electrode gap. (similar to old ECR config.) Both chambers can work also as PE (Plasma Etch-Top power). RIE or PE is switched by software. Both Chambers are Low pressure feature with TMP turbo pumps. Each chamber has 8 gas lines and MFC's. Software and manuals along with Neslab HX-75 chiller are included. The load lock arm needs some work.
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Plasmatherm SLR 770 Dual Chamber R.I.E. for Sale

Plasmatherm SLR 770 Equipment Details

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