Nishiwaki Fab Line Sale

An SDI Fabsurplus Remarketing experience success story

One of many of SDI Fabsurplus remarketing success stories – a fine example of how SDI Fabsurplus  manages customers’ surplus assets from single items to entire facilities, following standards of quick response, professionalism and technical accuracy

SDI Fabsurplus was assigned the task to perform the sale of a complete production line at Nishiwaki, Japan.  The Fab was switched off on 10th September 2014.

About 750 tools were installed at the site. The tools were of different vintage, ranging from 1993 to 2008. read more

Refurbishing a Nikon Stepper : A SDI Success Story

The scope of the project described here was of allowing our client to see the Nikon NSR 1755i7A stepper we have in temperature controlled storage working and exposing wafers to the best possible resolution at our clean facility in Avezzano, Italy, and then crating the equipment for shipment to our customer.

Required Environment

In order to succeed putting into the best working environment conditions the Nikon Stepper, the following were the required actions to be taken:

  • temperature in clean area needed to be tabilized to 21° degrees Celsius with 1° degree tolerance.
  • A cleanroom at class 10 level, to allow easy measurement of exposed wafers without excessive contamination levels.
  • the stepper requires a supply of clean , particle free, 4ry air.
  • the stepper requires vacuum.
  • the stepper requires 18 l/min cooling water at 21° Celsius.
  • the stepper requires about 25 KW electricity supply, i.e. about 25A / phase 3 phase 5 wire.
  • read more

    Modifying and Installing an Ultratech Stepper : a success story

    The scope of the project described here was to remove an Ultratech Titan GH Line stepper taking it from operating in the cleanroom in Europe, transporting it to our client in the USA, modifying the stepper to run 5 inch reticles and 6 and 8 inch wafers ,installing it , and then subsequently demonstrating it operational to OEM specifications.

    Success in this project was achieved by careful planning at each stage, and close work together with our suppliers and our client.

    Ultratech Stepper Assessment and Removal

    At fabsurplus.com,our aim is to minimise the risk to the client and maximise the profit return by providing reliable used equipment. To this end, the initial work of the project was:-

  • Thoroughly test the Ultratech stepper prior to removal
  • Performance was measured by running auto-uniformity at various field sizes to check illumination.When auto-uniformity was run with the large aperture, it was discovered that the light pipe was 55 x 18.
  • The reticle and wafer loading system was excercised and no problems were found.
  • Short step focus was checked and verified.
  • Software was backed up to floppies.
  • read more

    Used KLA-Tencor Inspection and Metrology Equipment refurbishment capabilities

    Based on the 20 year experience of our staff members, SDI-Fabsurplus has been developing the capability to support and refurbish KLA-Tencor wafer inspection , particle detection and metrology systems and install them to OEM specifications.
    Since September 2011, Fabsurplus.com has further expanded it’s technical support capabilities by appointment of a lead KLA support engineer. SDI-Fabsurplus is therefore now happy to quote for refurbishment, programmed maintenance, service interventions, laser changes, training and matching worldwide on surface scan wafer particle detection products.

    Example Project: Refurbishment and Turnkey Installation of a KLA AIT particle detection system

    An example of a successful KLA Surfscan refurbishment project was the consignment to our client
    of a KLA AIT wafer surface particle inspection system.

    The system was completely refurbished at our Avezzano, Italy refurbishment centre, the functionality to OEM specifications was checked and then the system was consigned to our client and installed and tested on site.

    Required Environment

    Due to the sensitivity of KLA systems to changes in environmental conditions and particle levels, a key to our success has
    been establishing a clean facility where we have control over the environmental factors in our error budget during system
    refurbishment.
    This allows us to concentrate on optimising performance of the system to and beyond OEM specifications,
    and will give us leeway in performance to allow for any unexpected problems we might encounter on site during system install.

    In order to succeed putting into the best working environment conditions the KLA AIT,
    the following were the required
    actions to be taken:

     

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    1. Air Pressure, facility requirement read more