Based on the 20 year experience
of our staff members, SDI-Fabsurplus
has been developing the capability to support and refurbish KLA-Tencor
wafer inspection , particle detection and metrology systems and install them to OEM specifications.
Since September 2011, Fabsurplus.com has further expanded it’s technical support capabilities by appointment of a lead KLA support engineer. SDI-Fabsurplus is therefore now happy to quote for refurbishment, programmed maintenance, service interventions, laser changes, training and matching worldwide on surface scan wafer particle detection products.
Example Project: Refurbishment and Turnkey Installation of a KLA AIT particle detection system
An example of a successful KLA Surfscan refurbishment project was the consignment to our client
of a KLA AIT wafer surface particle inspection system.
The system was completely refurbished at our Avezzano, Italy refurbishment centre, the functionality to OEM specifications was checked and then the system was consigned to our client and installed and tested on site.
Due to the sensitivity of KLA systems to changes in environmental conditions and particle levels, a key to our success has
been establishing a clean facility where we have control over the environmental factors in our error budget during system
This allows us to concentrate on optimising performance of the system to and beyond OEM specifications,
and will give us leeway in performance to allow for any unexpected problems we might encounter on site during system install.
In order to succeed putting into the best working environment conditions the KLA AIT,
the following were the required
actions to be taken:
1. Air Pressure, facility requirement