SDI fabsurplus.com is pleased to announce the availability of the following listed used OXFORD 800+ RIE (Reactive Ion Etcher).
Please click on the "Get Quote" button at the end of the 800+ description, if you'd like to get a quotation, photos and specifications of this RIE (Reactive Ion Etcher), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This OXFORD 800+ RIE (Reactive Ion Etcher) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||RIE (Reactive Ion Etcher)|
|Sales Condition:||as is where is|
De-installed, warehoused. Can be inspected by appointment.
Please refer to the attached photos for details.
Parallel Plate - Reactor
Plasma Enhanced Chemical Vapour Deposition (PECVD) system is lightly used.
13 MHz supply with automatic matching
Frequency mixing 50 - 460 KHz for stress control
automatic pressure control
400 °C Aluminium substrate electrode with PID control, 460 mm
Mass Flow controlled gas lines in a sealable and purgable gas pod
Roots/ rotary pump
Process: The OPT application lab supports the user of our equipment throughout the lifetime of the system with advise and with new processes if needed. Typically our systems are capable running a variety of processes without the need of hardware changes. New processes are permanently under development/ characterisation, so that they can be run on our existing equipment.
Quality: OPT is qualified according ISO 9001 since 1995. In 1993 a TQM programs was started and the position of a dedicated quality manager was created.
Safety: The soft- and hardware is designed to ensure a safe system operation even with untrained personal.
Software: All the OPT Systems have dedicated programmable logic controllers to ensure a safe operation. The user interface is via a standard PC. OPT writes the software in house in close contact with our process engineers to ensure maximum flexibility. The software operates under Windows to allow easy communication with other software (for evaluation the datalog files or network integration etc) and to give the users a familiar environment.
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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