SDI fabsurplus.com is pleased to announce the availability of the following listed used JUSUNG Cyclone Plus ALD (Atomic Layer Deposition).
Please click on the "Send More Details" button at the end of the Cyclone Plus description, if you'd like to get more details, photos and specifications of this ALD (Atomic Layer Deposition), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This JUSUNG Cyclone Plus ALD (Atomic Layer Deposition) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||ALD (Atomic Layer Deposition)|
|Sales Condition:||as is where is|
1. Transfer Module · Platform- Two Load Lock- Wafer Align Chamber - Auto Door- 3 Load Port Module- 6 Sided Transfer Chamber- Controller for TMC· Cluster Tool Control · Main Power Box · Control Rack· Auto Wafer Centering systemSemi-batch ALD Al203 Reaction Chamber · Process chamber - Aluminum chamber (5 wfs loading) - Wafer up/down Ass'y- Space Divided Plasma Kit· Vacuum Ass'y· Gas Jungle Box- In-situ cleaning· New heating system· Disk RPM Control· Software & Controller· Heat Exchanger control interface· O3 generator control interface· 2 LDS SystemSemi-batch ALD Al203 Reaction Chamber· Process chamber - Aluminum chamber (5 wfs loading) - Wafer up/down Ass'y- Space Divided Plasma Kit· Vacuum Ass'y· Gas Jungle Box- In-situ cleaning· New heating system· Disk RPM Control· Software & Controller· Heat Exchanger control interface· 2LDS SystemOptions & CES· Swap Kit· O3 Generator· Auto refill system interface· 2 * Source Canister (4L) · 2* Source Canister (3.2L) · Additional cost for increasing of 03 concentration· Dry Pump FDC function· 2* Powder Trap
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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