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SEZ DV-34 Single Wafer Processing - Etch/Clean for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used SEZ DV-34 Single Wafer Processing - Etch/Clean.
Please click on the "Send More Details" button at the end of the DV-34 description, if you'd like to get more details, photos and specifications of this Single Wafer Processing - Etch/Clean, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SEZ DV-34 Single Wafer Processing - Etch/Clean is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


SEZ DV-34 Equipment Details

SDI ID: 102768
Manufacturer: SEZ
Model: DV-34
Description: Single Wafer Processing - Etch/Clean
Version: 300 mm
Vintage: 01.06.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: Inquire
Sales Price: Inquire
Comments:
Process: SWC Process module: HF; Poly (HF+HNO3)Transfer station: ASYST load port; Brooks robot(Dual arm robot)Sub-unit: CDS (Chemistry Dispense System)Transfer Configuration-Carrier transferCarier port*3, Tag reader *3Port door*3, motor*3Safty light curtain*2Wafer transferBrooks robot:Dual arm robotRobot linear moduleFlip station*2: left & rightMain bodyLeft ECO:motor*2Right ECO:motor*2ECO linear modulechuck: motor*1elevator: motor*1dispenser*4, motor*4 & cylinder*2Tank: HFMixture 1: HFProcess tank material: PVDFBuffer tank material : PVDFProcess temp: 60℃Heating method: in-line heater (6KW)Exhaust method: Manual damperProcess Pump: rotary pump LEVITRONIX (48V -PFA-LV)Return Punmp: Diaphragm pump, model 110Tank level sensor: ifm electronic (KN5115)Drain method: pump drain (membrane pump A 10 TTZ )Drain line: 2 linesChemistry tube material: PFATank: PolyMixture 1:HF2: HNO3Mixing ratio: HF+HNO3Process tank material: PVDFBuffer tank material : PVDFProcess temp: 25℃Heating method: in-line heater (6KW)Exhaust method: Manual damperConcentration meter: HORIBA (CS-153)Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)Return Punmp: Diaphragm pump, model 110dosing pump: METERING PUMP (PZ10)Paddle wheel: Flowmeter, paddle wheel Tank level sensor: ifm electronic (KN5115)Drain method: pump drain (membrane pump A 10 TTZ )Drain line: 2 linesChemistry tube material: PFA 
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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
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