SDI fabsurplus.com is pleased to announce the availability of the following listed used SEZ DV-34 Single Wafer Processing - Etch/Clean.
Please click on the "Send More Details" button at the end of the DV-34 description, if you'd like to get more details, photos and specifications of this Single Wafer Processing - Etch/Clean, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SEZ DV-34 Single Wafer Processing - Etch/Clean is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Single Wafer Processing - Etch/Clean|
|Sales Condition:||as is where is|
Process: SWC Process module: HF; Poly (HF+HNO3)Transfer station: ASYST load port; Brooks robot(Dual arm robot)Sub-unit: CDS (Chemistry Dispense System)Transfer Configuration-Carrier transferCarier port*3, Tag reader *3Port door*3, motor*3Safty light curtain*2Wafer transferBrooks robot:Dual arm robotRobot linear moduleFlip station*2: left & rightMain bodyLeft ECO:motor*2Right ECO:motor*2ECO linear modulechuck: motor*1elevator: motor*1dispenser*4, motor*4 & cylinder*2Tank: HFMixture 1: HFProcess tank material: PVDFBuffer tank material : PVDFProcess temp: 60℃Heating method: in-line heater (6KW)Exhaust method: Manual damperProcess Pump: rotary pump LEVITRONIX (48V -PFA-LV)Return Punmp: Diaphragm pump, model 110Tank level sensor: ifm electronic (KN5115)Drain method: pump drain (membrane pump A 10 TTZ )Drain line: 2 linesChemistry tube material: PFATank: PolyMixture 1:HF2: HNO3Mixing ratio: HF+HNO3Process tank material: PVDFBuffer tank material : PVDFProcess temp: 25℃Heating method: in-line heater (6KW)Exhaust method: Manual damperConcentration meter: HORIBA (CS-153)Process Pump: rotary pump LEVITRONIX (48V -PFA-LV)Return Punmp: Diaphragm pump, model 110dosing pump: METERING PUMP (PZ10)Paddle wheel: Flowmeter, paddle wheel Tank level sensor: ifm electronic (KN5115)Drain method: pump drain (membrane pump A 10 TTZ )Drain line: 2 linesChemistry tube material: PFA
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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