fabsurplus.com




Cymer XLA 360 Excimer laser, 193 nm for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Cymer XLA 360 Excimer laser, 193 nm.
Please click on the "Send More Details" button at the end of the XLA 360 description, if you'd like to get more details, photos and specifications of this Excimer laser, 193 nm, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Cymer XLA 360 Excimer laser, 193 nm is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Cymer XLA 360 Equipment Details

SDI ID: 103218
Manufacturer: Cymer
Model: XLA 360
Description: Excimer laser, 193 nm
Version: Facilities
Vintage: Inquire
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Deinstalled and warehoused.

-Can be inspected by appointment

-Was used with an ASML XT 1700iF immersion scanner.

The XLA 360 is a 193nm argon fluoride (ArF) laser light source using a Master Oscillator Power Amplifier platform. This allows ultra line-narrowed bandwidth and up to 90W of output power at a 6kHz repetition rate.

Features Ultra line-narrowed spectral bandwidth of <0.12 pm FWHM.
Suitable for high contrast imaging for litho tools with an numerical aperture (NA) up to > 1.3.

Key benefits:
    Highest repetition rate capability (6kHz)
    Tightest bandwidth (<=0.12pm FWHM/<= 0.25pm E95)
    High power
    Wide process window
    Capability to enable resolution enhancement techniques (RET) without reducing throughput
    Accurate on-board E95 metrology coupled with Advanced Spectral Control for tightest process control/Optical Proximity Effects

Categories:
Send Me More Details about this item.



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.

Read more about us






View all FAB Litho Exposure for sale

Search for Cymer items for sale

Search for XLA 360 items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form