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Used and Pre-owned Photolithography Equipment (Steppers and Scanners) for sale by fabsurplus.com

Please find below a list of used Lithography exposure equipment for sale by fabsurplus.com . Click on any listed item of used Lithography equipment to see further data. The dictionary definition of lithography is "a printing process that involves using a stone or metal block on which an image has been drawn" and it has been used for centuries as a printing technique. Photolithography - printing with light on a substrate - is used for printing in the fabrication of microelectronic devices. It can create very small patterns, down to the nanometer scale. When making complex devices, a wafer may get exposed using photolithography with a wafer stepper or scanner or a mask aligner many times. Precise photolithography requires extremely clean operating conditions.


SDI ID Manufacturer Model Description Version Vintage Q. ty Sales Conditions Lead Time
110685 ASML Yieldstar S100 Overlay measurement System 300 mm 01.06.2008 1 as is where is immediately
110703 ASML AT1100B Twinscan DUV Lithography exposure system 193 nm 200 mm and 300 mm 01.06.2001 1 as is where is immediately
111665 ASML PAS 5500/100D i-Line Stepper 150 mm 01.06.1996 1 as is where is immediately
113006 ASML PAS 5500/100D i-Line Stepper 200 MM 2 as is where is immediately
114082 ASML PAS 5500/100D i-Line Stepper 150 mm 1 as is where is
114084 ASML TWINSCAN XT1250D 193nm (ArF) Scanner 300 mm 01.08.2004 1 as is where is immediately
115416 ASML PAS 2500/40 i-line Stepper 3 to 6 inch 1 as is where is immediately
115600 ASML TWINSCAN AT:400D i-Line Scanner 300 mm 1 as is where is
115601 ASML TWINSCAN AT:750C 248nm (KrF) Lithography Exposure System 300 mm 01.06.2002 1 as is where is immediately
115602 ASML TWINSCAN NXT:1980Di Immersion Scanner 300 mm 1 as is where is
115603 ASML TWINSCAN NXT:1980Di Immersion Scanner 300 mm 1 as is where is
115604 ASML TWINSCAN NXT:1980Di Immersion Scanner 300 mm 1 as is where is
115605 ASML TWINSCAN NXT:2050i Immersion Scanner 300 mm 1 as is where is
115606 ASML TWINSCAN XT:400F i-Line Scanner 300 mm 1 as is where is
116630 ASML TWINSCAN NXT:1980Di Immersion Scanner 300 mm 1 as is where is immediately
116647 ASML TWINSCAN NXT:1980Di Immersion Scanner 300 mm 01.06.2022 1 as is where is immediately
113727 Beta Squared Lithography M600 Mask Aligner 150 mm 01.06.2010 1 as is where is immediately
113728 Beta Squared Lithography M700 Mask Aligner 150 mm 01.06.2010 1 as is where is immediately
116580 Beta Squared Lithography M700 Mask Aligner 150 mm 01.06.2010 1 as is where is immediately
52153 Canon Chuck Tool Chuck Tool for EX3, EX4, i4, i5 200 mm 30.04.1999 1 as is where is immediately
52262 Canon 6736A reticle handling robot for i4, iW, i5, i5+, EX3, EX4, EX5, EX6 spares 01.06.1999 1 as is where is immediately
52265 Canon video impedance adapter 5 channel video impedance adapter spares 30.06.1999 1 as is where is immediately
52338 Canon BH8-2017-01 IL3-CD-PCB for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52341 Canon BH8-1980-01 EASRCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52342 Canon BH8-1979-01 EASLCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52346 Canon BH8-2022-01, BG8-3369, BG4-8680 EXP-CD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52347 Canon BH8-1938-01BG4-9386 BG8-2694 CD90-CD PCB assembly spares 1 as is where is immediately
52348 Canon BH8-2065-02, BG4-8805, BG8-3375 CD90-INTLK board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52360 Canon Zenith ZPS-250 Multiple voltage power supply 250Watts spares 30.06.1999 1 as is where is immediately
52365 Canon Shimaden SR25-2P-N-00699609 PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 2 as is where is immediately
52366 Canon Shimaden SR25-2P-N-00699609 PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52367 Canon Chino ES-600 Chart Recorder for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52379 CANON FUJITSU DENSO 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52380 CANON Fujitsu Denso 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52381 CANON Fujitsu Denso 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52384 Canon Fujitsu Denso 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 1 as is where is immediately
52446 Canon Fujitsu Denso 4249-E922 4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52447 CANON Fujitsu Denso 4249-E923 4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 01.06.1999 1 as is where is immediately
52448 CANON FUJITSU DENSO 4248-E922 2 channels power supply module for canon fpa 3000 series spares 30.06.1999 1 as is where is immediately
52450 Canon Fuji Denso 4248-E921 2 channels power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53020 CANON Fujitsu denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53021 Canon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53023 Canon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53049 Canon BH8-1768-02 Library Sub Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 31.05.1999 1 as is where is immediately
53050 Canon BH8-1818-01 LD/PD board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53056 Canon BG9-4757, BH8--1069-01 AF DRV board for Canon FPA 1550 series spares 1 as is where is immediately
53057 Canon BG9-4760, BG83111, BH8-1071-02 SH/RH board for Canon FPA 1550 spares 30.06.1999 1 as is where is immediately
53058 Canon BG9-4761, BG8-3112, BH8-1071-01 SH/RH board FOR CANON FPA SERIES STEPPERS spares 30.06.1999 1 as is where is immediately
53059 Canon BH8-1073-01, BG9-4763, BG8-3114 PA SENSER board spares 01.06.1999 1 as is where is immediately
53060 Canon BG9-4764, BH8-1074-01 PA CCD board for Canon FPA series steppers spares 30.06.1999 1 as is where is immediately
53061 Canon BG9-4762, BG8-3113, BH8-1072-01 PA STAGE board for Canon 1550MarkIV series spares 30.06.1995 1 as is where is immediately
53062 Canon BG9-4758, BG8-3109, BH8-1070-02 SC/RC board for Canon FPA series steppers spares 30.06.1999 1 as is where is immediately
53063 Canon BG9-4759, BG8-3110, BH8-1070-02 SC/RC board for Canon fpa spares 30.06.1999 1 as is where is immediately
53066 Canon BG4-6365 PPC Pellicle Particle Checker Unit for FPA3000 series stepper iw i4 i5 ex3 ex4 ex5 ex6 spares 30.04.1997 1 as is where is immediately
53074 Canon FPA 3000 series extended reticle library extended reticle library 6 inch 01.06.1998 1 as is where is immediately
84774 Canon Chuck, 8 inch Wafer Chuck for EX3, EX4, i4, i5 200 mm 30.04.1999 1 as is where is immediately
95427 CANON FPA2500i3 i-Line Stepper 150 mm 01.05.1995 1 as is where is immediately
95428 Canon FPA-2500i2 i Line Stepper 150mm 1 as is where is immediately
106020 Canon BG3-3868-000 MBD Unit (Masking Blade Driver) for Canon FPA5000ES2/ES2+ Spares 01.06.1999 1 as is where is immediately
110623 Canon FPA-5510iX I line stepper 300 mm 1 as is where is
111523 CANON PLA-501F Mask Aligner 200 MM 1 as is where is
111694 Canon FPA-6000 ES6 248nm (KrF) Scanner 300mm 1 as is where is
114023 CANON FPA-5510iX I-LINE Stepper 300 MM 01.06.2015 1 as is where is
114395 canon FPA 2000-i1 I-line stepper 1 inquire
115644 Canon FPA-2500 i3 i-Line Stepper 200 mm 1 as is where is
115645 Canon FPA-2500 i3 i-Line Stepper 200 mm 1 as is where is
115646 Canon FPA-2500 i3 i-Line Stepper 200 mm 1 as is where is
115647 Canon FPA-3000 EX5 248nm (KrF) Stepper 200 mm 1 as is where is
115648 Canon FPA-3000 EX5 248nm (KrF) Stepper 200 mm 1 as is where is
115649 Canon FPA-3000 EX5 248nm (KrF) Stepper 200 mm 1 as is where is
115650 Canon FPA-3000 i4 i-Line Stepper 200 mm 1 as is where is
115651 Canon FPA-3000 i4 i-Line Stepper 200 mm 1 as is where is
115652 Canon FPA-3000 i4 i-Line Stepper 200 mm 1 as is where is
115653 Canon FPA-3000 i4 i-Line Stepper 200 mm 1 as is where is
115654 Canon FPA-3000 i4 i-Line Stepper 200 mm 1 as is where is
115655 Canon FPA-3000 i5 i-Line Stepper 200 mm 1 as is where is
115656 Canon FPA-3000 i5 i-Line Stepper 200 mm 1 as is where is
115657 Canon FPA-3000 i5 i-Line Stepper 200 mm 1 as is where is
115658 Canon FPA-3000 i5 i-Line Stepper 200 mm 1 as is where is
115659 Canon FPA-3000 i5+ i-Line Stepper 200 mm 1 as is where is
115660 Canon FPA-3000 i5++ i-Line Stepper 200 mm 1 as is where is
115661 Canon FPA-3000 iW i-Line Stepper 200 mm 1 as is where is
115662 Canon FPA-3030 i5+ i-Line Stepper 200 mm 1 as is where is
115663 Canon FPA-5510 iZ i-Line Wide-Field Stepper 300 mm 1 as is where is
115664 Canon FPA-6000 ES5 248nm (KrF) Scanner 300 mm 1 as is where is
115665 Canon FPA-6000 ES5 248nm (KrF) Scanner 300 mm 1 as is where is
106646 CARL ZEISS S-INDUSTRIAL 193 NM LASER FACILITIES 1 as is where is
52159 Cymer ELS 4300 Maintenance Tool kit and spare parts SPARES 01.06.1998 1 as is where is immediately
113323 Cymer XLA165 Excimer Laser, 193 nm , Dry Facilities 1 as is where is immediately
115455 CYMER XLA 165 193nm (ArF) Excimer laser Facilities 01.05.2004 1 as is where is immediately
116493 Cymer ELS-5410 Excimer laser 248 nm Laser 1 as is where is immediately
83513 Entegris RSPX-EUV-036 Reticle Direct Purge Cabinet Facilities 01.07.2010 1 as is where is immediately
113958 EVG 620 Mask Aligner (Upgraded from 420) (TSA & BSA) 150 mm 1 inquire
83515 Extraction Systems TMB 150 Photoresist Contamination Monitor System / Total Amine Analyzer Facilities 31.05.2004 1 as is where is immediately
111342 Gigaphoton G21K2-1 KrF excimer laser 248 nm Facilities 01.11.2003 1 as is where is immediately
116492 Gigaphoton GT40A2-1 Excimer laser Laser 1 as is where is immediately
110702 Heidelberg DWL-200 Laser Direct-Write Lithography System Up to 200 mm 01.06.2007 1 as is where is immediately
52301 Hitachi 545-5516 7 Channel Power Supply module spares 0 as is where is immediately
99394 KARL SUSS MA 150 Mask aligner (For spares use) 150 mm 1 as is where is immediately
108073 Karl Suss MA150 Mask Aligner 125 mm 1 as is where is
108833 KARL SUSS MA-4 Mask Aligner, IR Backside Alignment with Single Microscope, for up to 4" Wafers 1 inquire
108834 KARL SUSS MA-45 Mask Aligner, Front Side Alignment with Splitfield Microscope, for up to 4" Wafers 1 inquire
108939 Karl Suss MA 56 Mask Aligner 1 inquire 1 month
109597 Karl Suss MA150e Mask Aligner with TSA 150 mm 01.06.2007 1 inquire
109615 Karl Suss MJB4 350W Mask Aligner 100 mm 1 inquire
110609 Karl Suss MA-200 Mask Aligner with CIC1000 lamp housing 200 mm 1 as is where is immediately
110612 KARL SUSS MA56 Mask Aligner 1 as is where is immediately
110699 Karl Suss MA 150 Mask Aligner -Orange Top Type 150 mm 01.06.1995 1 as is where is immediately
112775 Karl Suss MA 150M Mask Aligner with splitfield video 150 mm 1 as is where is
114243 Karl SUSS MA200e Mask Aligner 200 mm 1 as is where is
116201 Karl Suss MA150 Mask Aligner 150 mm 1 as is where is
116202 Karl Suss MA150 Mask Aligner 150 mm 1 as is where is
116203 Karl Suss MA200 Mask Aligner 200 mm 1 as is where is
116485 Karl Suss MA 150e TSA Completely refurbished Mask Aligner 150 mm 01.06.2010 1 as is all rebuilt immediately
116490 Karl Suss MA6 Mask Aligner with back side illumination Up to 100 mm 1 as is where is immediately
116499 Karl Suss MA 200e TSA and BSA Completely refurbished Mask Aligner 150 mm / 200 mm 01.10.2024 1 as is all rebuilt immediately
116538 KARL SUSS MA8/BA8 Mask Aligner with Backside Alignment Up to 8 inch 01.11.2011 1 inquire immediately
116650 Karl Suss MA150e Mask Aligner 150 mm 01.06.2014 1 as is where is immediately
106897 Karl Suss Micro Tec MA200 Mask Aligner with CIC1000 lamp housing -suitable for spare use 200 mm 1 as is where is immediately
111601 Karl Suss Micro Tec MA150e Mask Aligner with TSA 150 mm / 100 mm 01.06.2010 1 as is all rebuilt immediately
15066 LAMBDA PHYSIK Novaline K2005 248 nm excimer laser for ASML /300 facilities 01.06.2002 1 as is where is immediately
33542 Liebherr FKV 3610 Fridge for the safe storage of photoresist facilities 1 as is where is immediately
91376 NIKON NSR-204B Scanner DUV (GIGAPHOTON G20K2 KRF laser) 200 mm 1 as is where is
91377 NIKON NSR-S204B 248 nm (KrF) excimer exposure system 200 mm 01.06.2000 1 as is where is immediately
109278 Nikon NSR2205 i14E i-line stepper 200 mm 01.05.2000 1 as is where is immediately
109536 Nikon NSR-SF100 i-line scan-field Stepper 200 mm 01.06.2003 1 as is all rebuilt immediately
110690 Nikon NSR 2205 I11D i line Stepper 200 mm 01.06.1997 1 as is where is immediately
110691 Nikon NSR 2205 I9C i line Stepper 200 mm 01.06.1994 1 as is where is immediately
110729 Nikon NSR-S204B Photo-lithography 248 NM DUV Scanner with photo-track 300 MM 01.06.2002 1 as is where is immediately
111396 Nikon R2205H Set of test reticles spares 4 as is where is immediately
113115 NIKON NSR-S203B DUV scanner with Cymer ELS-5410 200 mm 01.06.1999 1 as is where is
113320 Nikon NSR 2205 i14E2 i line Stepper 200 mm 01.12.2007 2 as is all rebuilt immediately
113881 Nikon NSR-2005i10C I-line Stepper 150 mm 01.06.1995 1 as is where is immediately
113882 Nikon Nikon NSR-2005i10C I-line Stepper 150 mm 01.06.1995 1 as is where is immediately
113883 Nikon NSR-2005i10C I-line Stepper 150 mm 01.06.1995 1 as is where is immediately
113884 Nikon NSR-2005i10C I-line Stepper 150 mm 01.06.1996 1 as is where is immediately
113885 Nikon NSR-2005i10C I-line Stepper 150 mm 01.06.1996 1 as is where is immediately
113886 Nikon NSR-2005i11D I-line Stepper 150 mm 01.06.1996 1 as is where is immediately
113887 Nikon NSR-2005i11D I-line Stepper 150 mm 01.06.1996 1 as is where is immediately
113888 Nikon NSR-2005i11D I-line Stepper 150 mm 01.06.1996 1 as is where is immediately
113889 Nikon NSR-2005i11D I-line Stepper 150 mm 01.06.1996 1 as is where is immediately
113890 Nikon Nikon NSR-2005i11D I-line Stepper 150 mm 01.06.1996 1 as is where is immediately
113891 Nikon NSR-2005i12D I-line Stepper 150 mm 01.02.2001 1 as is where is immediately
113892 Nikon NSR-2005i12D I-line Stepper 150 mm 01.06.2006 1 as is where is immediately
113893 Nikon Nikon NSR-2005i9 I-line Stepper 150 mm 01.06.1994 1 as is where is immediately
113894 Nikon Nikon NSR-2005i9 I-line Stepper 150 mm 01.06.1994 1 as is where is immediately
113895 Nikon Nikon NSR-2005i9 I-line Stepper 150 mm 01.06.1994 1 as is where is immediately
114390 Nikon NSR-SF200 DUV lithography exposure system 300 mm 1 inquire
114397 Nikon NSR-1755i7A I-line stepper 1 inquire
114398 Nikon NSR-1755i7A I-line stepper 1 inquire
114399 Nikon NSR-SF130 I-line scanner 1 inquire
114400 Nikon NSR-2205i12D I-line stepper 1 inquire
114401 Nikon NSR-2205i12C I-line stepper 1 inquire
114402 Nikon NSR-1775G7A G-line stepper 1 inquire
114403 Nikon NSR-2005i8A I-line stepper 200 mm 01.09.1992 1 as is where is immediately
114404 Nikon NSR-S305 DUV scanner 300 mm 1 inquire
114405 Nikon NSR-S208D 248 nm DUV scanner 300 MM 1 as is where is immediately
114406 Nikon NSR-S208D DUV scanner, 248 NM 300 MM 1 as is where is immediately
114407 Nikon NSR-TFHi12(i12C) I-line stepper 1 inquire
114408 Nikon NSR-TFHi14DL I-line stepper 1 inquire
114409 Nikon NSR-S203B DUV scanner 1 inquire
114410 Nikon NSR-S203B DUV scanner 1 inquire
114411 Nikon NSR-S203B DUV scanner 1 inquire
114412 Nikon NSR-S203B DUV scanner 1 inquire
114413 Nikon NSR-2205i12D I-line stepper 200 mm 01.03.1997 1 inquire immediately
114414 Nikon NSR-2205i12D I-line stepper 1 inquire
114415 Nikon NSR-2205i12D I-line stepper 1 inquire
114416 Nikon NSR-S308F DUV scanner 300 mm 1 inquire
114417 Nikon NSR-S308F DUV scanner 300 mm 1 inquire
116002 Nikon NSR-2205i12D i-Line Stepper 200 mm 1 as is where is
116003 Nikon NSR-SF140 i-Line Wide-Field Stepper 300 mm 1 as is where is
116004 Nikon NSR-SF140 i-Line Wide-Field Stepper 300 mm 1 as is where is
108856 OAI Hybralign 400 Mask Aligner, for up ro 200mm Wafers 200 MM 1 inquire
113978 OAI 806 MBA Mask Aligner 150 mm 1 inquire
113979 OAI Hybralign 200 Mask Aligner (TSA) 200 mm 1 inquire
116491 OAI Manual Mask Aligner with back side alignment Up to 100 mm 1 as is where is immediately
108852 QUINTEL 7000 Mask Aligner, with IR Backside Alignment, for up to 6" Wafers 1 inquire immediately
112912 Quintel Q804 Mask Aligner 100 mm 1 as is where is
112913 Quintel UL 7000 IR Mask Aligner 100 mm 1 as is where is
116549 Raith IonLine Plus High Resolution FIB-SEM, with Lithography capability Laboratory 01.06.2017 1 as is where is immediately
54208 SemiNet Automation Infinity SACS 251216-120-CE Semi-Automatic Carousel Boxed Wafer Stocker 200 mm 01.10.2007 1 as is where is immediately
113281 SIGMAMELTEC MRC 9000 Gen 2 Advanced Mask Cleaner Reticle / Mask 01.11.2022 1 as is where is immediately
53037 Special Optics Half silvered mirror 10" X 14" spares 1 as is where is immediately
53038 Special Optics Custom Motorized Iris 6" spares 1 as is where is immediately
53039 Special Optics Mirror, 9" X 7" spares 1 as is where is immediately
53040 Special Optics APOD #113 spares 1 as is where is immediately
53043 Special Optics Beam expander spares 1 as is where is immediately
113988 Suss MA6 Mask Aligner 150 mm 1 inquire
113989 Suss MA6/BA6 Mask Aligner 150 mm 1 inquire
113990 Suss MJB3 350W Mask Aligner 75 mm 1 inquire
113991 Suss MJB3 Mask Aligner 75 mm 1 inquire
113992 Suss MJB3 Mask Aligner 75 mm 1 inquire
106541 SUSS Microtec MA200 MASK ALIGNER 150 mm/200 mm 01.06.1999 1 as is where is immediately
108877 TAMARACK SCIENTIFIC Mask Aligner, Contact Mask Exposure System 1 inquire
114394 TEL Tokyo Electron MARK-8 Lithography coater and developer track 200 MM 1 inquire
103807 Ultratech Titan II Stepper 150 mm 1 inquire immediately
106553 Ultratech 4700 Stepper 150 mm/200 mm 01.06.1996 1 as is where is immediately
106554 Ultratech 6700 Stepper 150 mm/200 mm 1 as is where is immediately
116384 Ultratech XLS 7800 XLS Stepper 150 mm 1 as is where is


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