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KLA-Tencor SP1-DLS Darkfield Non-Patterned Wafer Inspection for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor SP1-DLS Darkfield Non-Patterned Wafer Inspection.
Please click on the "Send More Details" button at the end of the SP1-DLS description, if you'd like to get more details, photos and specifications of this Darkfield Non-Patterned Wafer Inspection, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor SP1-DLS Darkfield Non-Patterned Wafer Inspection is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


KLA-Tencor SP1-DLS Equipment Details

SDI ID: 103268
Manufacturer: KLA-Tencor
Model: SP1-DLS
Description: Darkfield Non-Patterned Wafer Inspection
Version: 300 mm
Vintage: 01.03.2005
Quantity: 1
Sales Condition: as is all rebuilt
Lead Time: 3 months
Sales Price: Inquire
Comments:

System Specification

Tool Type:

KLA Tencor SP1 DLS Defect Inspection

Quantity:

One Systems Available

Wafer Size:

300mm DUAL FOUP Handler
- Can be reconfigured with Open 200mm Handler.
- Can be reconfigured with Dual SMIF 200mm loaders.

Software Version:

V4.10 - Build 6224

Available software Options

DIC  (DIC Optics not installed)

DIC Calibration (DIC Optics not installed)

E40

E87

E90

E94

Enhanced Edge Exclusion

GEM / SECS (Comm Port)

GEM / SECS (HSMS)

Haze Analysis

Haze Normalization

Oblique

XY Coordinates

 

Condition:

Fully refurbished and demonstrated operating within OEM specifications using NIST certified PSL wafers (204nm)
The refurbishment includes all required parts such as:
- New DLS laser.
- New PMTs.
- Power supplies calibrated or replaced as needed.
- Refurbished spindle motor
- Mechanical assemblies checked, cleaned, lubricated, rebuilt, or replaced as needed.
- Electronic assemblies tested to meet performance specifications or replaced as needed.
- New BSC and wave plate optical assemblies, all other optics assemblies cleaned and aligned to meet performance specifications or replaced as needed.

Availability:

System (without BrightField option) available for demonstration in Sept 2021 (COVID19 situation dependent could also be August 2021)

Location:

 

Additional Services:

Full installation & qualification

Full level 3 CSE maintenance training, detailed maintenance manuals and maintenance tooling for optics adjustments

Categories:
Attachments: 9 Files
Send Me More Details about this item.



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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