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Oerlikon Clusterline 200 PVD cluster tool with 6 chambers (Used for Al, Ti, NiV and AG) for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Oerlikon Clusterline 200 PVD cluster tool with 6 chambers (Used for Al, Ti, NiV and AG).
Please click on the "Get Quote" button at the end of the Clusterline 200 description, if you'd like to get a quotation, photos and specifications of this PVD cluster tool with 6 chambers (Used for Al, Ti, NiV and AG), and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Oerlikon Clusterline 200 PVD cluster tool with 6 chambers (Used for Al, Ti, NiV and AG) is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Oerlikon Clusterline 200 Equipment Details

SDI ID: 103439
Manufacturer: Oerlikon
Model: Clusterline 200
Description: PVD cluster tool with 6 chambers (Used for Al, Ti, NiV and AG)
Version: 200 mm
Vintage: 01.05.2005
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Professionally De-installed, warehoused. Can be inspected by appointment.Please refer to the attached photos for details of current condition.

Configuration:-
Tool model: CLN200-1
Transport module: Brooks MX800 with Magnatran 7 Robot
Chambers
-Fitted with  6 process chambers
-PM2 chamber - Etch chamber
-PM1, PM3, PM4, PM5 and PM6 - PVD chambers
-One PVD chamber has a heated chuck (not currently working)
-Substances sputtered: Al, Ti, NiV and Ag
-Magnet Types:-
PM1 MB300DL
PM3 MB300DG
PM4 MN300DK
PM5 MB300DL
PM6 MB300DF

The equipment includes the following parts:-

-CTI Cryogenics Compressor Model 9600 qty 3 p.n 8135901G001
-PM1 NiSb
-PM2 Etch with AE PDX 1250 and AE RFX 600A
-PM3 Al
-PM4 Ti
-PM5 NiV
-PM6 Ag
-MC Server 102428276 FSK 12458
-CTC Server 102428276 FSK 12453
-Brooks p/n 002-9700-95
-CTI Onboard 8 Chamber Cryopumps p/n 8116139G001R with Onboard module
-Brooks Magnatran 7 Robot Model 003-1600-27
-Brooks Facet Node Breakout 002-2692-01
-Brooks LoadLock Node 002-2901-01
-VAT gate valves
-Loadlock turbo pumps: Pfeiffer TMH 261
-PMC II 102471819
-AE Pinnacle RFG p/n 3152415-105N 12 KW
-AE Pinnacle RFG p/n 3152391-102M 20 KW
-AE Pinnacle RFG p/n 3152391-102Q 20 KW
-AE Pinnacle RFG p/n 3152415-105N 12 KW
-AE Pinnacle RFG p/n 3152415-105N 12 KW


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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