SDI fabsurplus.com is pleased to announce the availability of the following listed used KLA-Tencor SP2 Darkfield Wafer Particle Detection System.
Please click on the "Send More Details" button at the end of the SP2 description, if you'd like to get more details, photos and specifications of this Darkfield Wafer Particle Detection System, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This KLA-Tencor SP2 Darkfield Wafer Particle Detection System is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Darkfield Wafer Particle Detection System|
|Sales Condition:||as is where is|
KLA-Tencor Surfscan SP2 Specification
1. STANDARD SPECIFICATIONS
- Windows System Windows XP SP3
- Main S/W NGS 5.4 SR3 HF3
- Wafer Size 300mm SEMI Notch
- 3 AdvanTag SW CID, Phx, Shinko (load port)
- 8 user-configurable LEDs to display the loadport status
- Load/unload button for manual delivery hand-off
- Load Port Vacuum 300mm Dual FIMS
- 5 Color Light Tower (RBYGW)
- Power: 208 VAC, 3W-N
- CDA: > 28.3 Nl/min, > 6.6791 kg/cm2
- Vac: > 28.317 l/min, > -700 mm Hg
- 2mm Edge Exclusion
- Oblique Incidence Illumination (High / Standard / Low)
- Normal Incidence Illumination (High / Standard / Low)
- Enhanced XY Coordinates
- IDM SP2
- Standard Classification package
- LPD-N Classification
- LPD-ES classification
- Grading and Sorting
- Spatial Filter (20 degree)
- Spatial Filter (40 degree)
- Spatial filter (rough films)
- Spatial filter (Back)
- High Sensitivity Inspect Mode
- High Throughput Inspect Mode
- Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer.
- Haze Normalization
- Haze Analysis
- IC/OEM Mfg Surf Quality Recipe
- NFS Client
- E84 enabled for OHT & AGV/RGV
- E87 (Based on E39)
- GEM/SECS and HSMS
- E40/ E94/ E90 / E116
7. Main Computer
- Intel®Xeon™ CPU 3.20GHz
- 3.5 GB RAM Memory
- DVD- ROM
- Mouse / Keyboard / 3.5" Floppy
- NGS application software
8. FEC computer
- Intel®Pentium®4 CPU
- 512 MB RAM Memory
Please check the pictures below for more information.
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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