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Lam Research 9600 PTX Dry etcher with 2 CH PTX etch and 2 CH Strip for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Lam Research 9600 PTX Dry etcher with 2 CH PTX etch and 2 CH Strip.
Please click on the "Get Quote" button at the end of the 9600 PTX description, if you'd like to get a quotation, photos and specifications of this Dry etcher with 2 CH PTX etch and 2 CH Strip, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Lam Research 9600 PTX Dry etcher with 2 CH PTX etch and 2 CH Strip is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Lam Research 9600 PTX Equipment Details

SDI ID: 105777
Manufacturer: Lam Research
Model: 9600 PTX
Description: Dry etcher with 2 CH PTX etch and 2 CH Strip
Version: 200 mm
Vintage: Inquire
Quantity: 1
Sales Condition: inquire
Lead Time: 4 months
Sales Price: Inquire
Comments:

-Fully refurbished Lam 9600 PTX system, fitted with 2Ch PTX etch, and 2 chamber strip.

Configuration:-

  Description Part number QTY(EA) Remarks Comments
Robot Robot refurb Mag 7 1 Refurbished Comply
End Effectors with 8in Moly/Button Pads 856-430110-001 2 NEW Comply
Aligner Assy Motor   1 Refurbished Comply
Aligner controller   1 Refurbished Comply
Video emit assy   1 Refurbished Comply
Coolport CoolPort station   1   Comply
UI Software and server (CPU unit) with version TBD   1    
LCD Monitor   2   Comply
Computer Rack   2 Customized Stainless steel rack Comply Either Ballroom or TTW
Mux PCB     Refurbished Comply
TM TM Cover Lid   1 Refurbished Comply
Cabling   1 set Refurbished Comply
Solenoid Single/Double     Refurbished Comply
Convectron   5 Refurbished Comply
Heated rainbow gate door   6 sets Refurbished Comply (Not heated)
VCE VCE (lip seal type)   2 Refurbished Comply
VCE net filter NW40(mesh)   4 Refurbished Comply
VCE map sensor   4 Refurbished Comply
ASSY,ROTATE,VCE-6   1 Refurbished Comply
MCC2   1 Refurbished Comply
Vaccum FSI 0-rings (blue color)   1 set New Comply
KF l6wing NUT clamp   6 New Comply
KF 25wing NUT clamp   6 New Comply
KF 40wing NUT clamp   6 New Comply
KF 50wing NUT clamp   6 New Comply
Flexible hose(7") for facility inlet   6 New Comply
Flexible hose(10") for facility inlet   6 New Comply
Foreline Heater Jacket/cartridge   1 set New Comply
Dry pumps   2 sets 1 for TM,1 load lock, new/refurb Customer Purchase
Dry pumps   4 sets 1 for each chamber, new refurb Customer Purchase
Dry scrubber   1 set   Customer Purchase
  Quantity doubles for 2 etch chambers  
Etch chamber (1set)
Quantity doubles for 2 chambers
Description Part number QTY Remarks Comments






RF
Top RF Match PTX 853-032294-002 1 Refurbished Comply
Bot RF Match PTX 853-330951-021 1 Refurbished Comply
Top RF generator 660-024637-026 1 Refurbished Comply
Bot RF generator 660-024637-028 1 Refurbished Comply
ASSY,HSG,CAP DIV/PEAK DET   2   Comply
ASSY,CA,RF MTCH/ESC FLTR/PK DT   1   Comply
ASSY,CA,LWR MTCH,PK DET   1   Comply
ASSY CABLE LOWER RF MATCH D-S   1   Comply
ESC power supply 853-025054-018 1   Comply
Endpoint Endpoint detector PTX ASSY,END PT DET (703/261) 853-540066-005 1   Comply
Endpoint detector cable   lset   Comply






Pressure
Chm Manometer E29B-22205 2 Refurbished Comply
Gas cal manometer 625B-23852 2 Refurbished Comply
Foreline manometer 625A-14059 1 Refurbished Comply
Helium manometer 20T   2 Refurbished Comply
Strip manometer 10T   2 Refurbished Comply
Strip manometer 100T   1 Refurbished Comply
BOC turbo pump -refurb STPA 1303A lset Refurbished Comply
VAT 65 pendulum valve   1 Refurbished Comply
VAT- lower chamber adaptor   1 Refurbished Comply
         
TCU/Chiller TCU     Customer Spec  
TCU Hose (1/2")     Customer Spec  
TCU Hose Insulator     Customer Spec  
           




Bottom Electrode
Bottom Electrode Assy   1 Refurbished Comply
ESC,NOTCHED 718-043893-801 1 Refurbished Comply
Lifter Cylinder   1 NEW Comply
Bellow   2 sets NEW Comply
4 pins   1 NEW Comply
BASR   2 sets Refurbished Comply
5866RC1 J 1 C4J4EA pressure controller
( He 20sccm 1/4VCR 15pin)
  2 Refurbished Comply
Gas 8 Ch Gas box refurbished   2sets with SST 316L VCR gaskets and 60psi check valve  
MFC Customer Spec Digital 20    
Etch chm, No. Gas      
1 CL2 1 Size TBD - customer spec  
2 BCL3 1 Size TBD - customer spec  
3 SF6 1 Size TBD - customer spec  
4 2 1 Size TBD - customer spec  
5 N2 1 Size TBD - customer spec  
6 Ar 1 Size TBD - customer spec  
7 N2 1 Size TBD - customer spec  
8 CHF3 1 Size TBD - customer spec




Process Kit
ESC   1 NEW Customer Spec
GDP   1 NEW Customer Spec
Liner chamber transistion manifold adapter   1 NEW Customer Spec
Endpoint Window Frame   1 NEW Customer Spec
Chamber liner   1 NEW Customer Spec
others HSG, REAC CHAMBER, A6 715-031986-006 2 NEW Customer Spec
PL, WDO CHMBR, CAPTIVE HDW, A6 715-032012-004 2 NEW
INSR, GTV, AL, ANZD, ALLI6 715-442066-002 2 NEW
Heater Jacket/cartridge   20 Refurbished Customer Spec
Solenoid Single/Double     Refurbished Customer Spec
Slit Door Heater   2 Refurbished Customer Spec
Interconnect Helium   2 Refurbished Customer Spec
Interconnect N2   2 Refurbished Customer Spec
Small 0-ring for Nylon Tube for Helium Cooling     NEW Comply
Gate Door cylinderRefurbish   6 Refurbished Customer Spec
mid chm TC J-type   10 NEW Comply
Lower Electrode TC J-type 839-032633-002 2 NEW Comply
ESC Lower Electrode Plug   2 NEW Comply
Gas feed flexible hose   2 NEW Comply
      Quantity doubles for 2 etch chambers
strip chamber (1 set)
QTY doubles for 2 chambers
Description Part number QTY Remarks
Microwave magnetron   1 Refurbished MKS
Applicator   1 Refurbished MKS
Smart match   1 Refurbished MKS
Control Module   1 Refurbished MKS
PS1 power supply for microwave   1 Refurbished MKS
lower electrode 839-000066-001 1  
Quartz baffle plate Customer Spec 1 NEW Process Kit
Pressure Strip manometer 10T   2 Refurbished
Strip manometer 100T   1 Refurbished
chamber parts WVDS tank and vapor refurbish(square tank) 856-461431-001 1  
Housing Lower Chamber STP MDL, MTL 715-460214-003 1
VAT Controller for stripper 796-093088-007 1  
TC,J-Type Probe 666-099760-001  
Assy.LvI.SW tank 853-461154-001 2  
ceramice center ring(Azring)   1 customized strip center ring
Lifter pin assy   2  


Gas
Facility Interconnect   1 set  
PCW Protection Cover   1  
Vapor MFC CUSTOMER SPEC   1  
Strip chm,No. Gas    
1 O2 1 Size TBD - customer spec
2 N2 1 Size TBD - customer spec
3 Spare 1  

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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