6 inch Complete MEMS Production Facility for Sale for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used 6 inch Complete MEMS Production Facility for Sale.
Please click on the "Get Quote" button at the end of the Complete description, if you'd like to get a quotation, photos and specifications of this MEMS Production Facility for Sale, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This 6 inch Complete MEMS Production Facility for Sale is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

6 inch Complete Equipment Details

SDI ID: 106039
Manufacturer: 6 inch
Model: Complete
Description: MEMS Production Facility for Sale
Version: 4 inch and 6 inch
Vintage: 01.06.2005
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

Complete MEMS production facility for sale.
-Items for sale include the entire cleanroom facility, its utilities, and equipment.
-Devices being manufactured: Pressure and Flow Sensors
-Approx. production capacity: 100 wpm
-Design rule: 1 uM
-Overall facility mq: 415
-80 m2 class 100 cleanroom

Cleanroom Equipment
All equipment is capable of processing both 4-inch wafers and
6-inch wafers, with a few tools also being capable of running
8-inch wafers. The toolset includes:
- Sputter Deposition System
- E-Beam Evaporator
- High Temperature Furnaces
- Plasma Oxygen Asher
- Solvent Bench
- Acid/Base Benches
- Photo-Resist Spinner
- Rinser/Dryer Tools (4 sets)
- Nanoscope
- Programmable Ovens
- EVG Aligners, 2 sets
- Bonder, 2 sets (anodic, thermal, fusion)
- Mega Sonic Cleaner
- Ultra Sonic cleaner/liftoff
- Screen printer for glass frit printing
- Matrix System Photo Resist Stripper
- Automated Wafer Lithography Track
- Wafer Scrubber
- EDP Reactor Cell

A full equipment list is available on request.

Machine Shop
A machine shop is included with the facility.
Main equipment:-
- CNC Milling and Drilling Machines
- 6-inch Disc Sander, 7-inch Metal Cutting Band Saw, 20-inch
Vertical Band Saw
- Lathe
- Milling and Drilling Machines (Acra & Lagun-Republic)

Centralized Utilities
- DI Water
- Pure Nitrogen
- Comprehensive Piped Waste Management System
- Compressed Air (multiple generators)
- Vacuum
- Chilled Water
- Fire and Security Monitoring System
- Dedicated Power Supply (480 V, 208 V, 3 phase)
- Uninterrupted Power Supply for the Entire Cleanroom Facility
- High-Speed Digital Telephone & Computer Network System

Process Capabilities:-
- Photolithography
- Wafer-to-wafer alignment
- Double-side alignment and photolithography
- Shadow Mask alignment
- Wet chemical processes for a variety of applications (standard wafer clean and chemical
processing for cleaning, etching, photolithography, electroplating, etc.)
- Silicon etching (EDP, KOH and HF/HN- 3 )
- Thermal Oxidation
- Boron Diffusion
- Thermal Annealing
- Evaporation
- Sputtering
- Anodic Bonding
- Pre-Fusion & Fusion Bonding
- Plasma Asher
- Mega Sonic Cleaning
- Ultrasonic cleaning
- Liftoff
- Wyk- (optical surface profilometer)
- Dektak (step measurement)
- Nanoscope (film thickness measurement)

Get Quote

Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.


The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

SDI-Fabsurplus has worked with determination and tenacity over the last 25 years to develop one of the largest semiconductor equipment databases and the best software.

We strive to provide our customers with the best equipment at the lowest prices using our unparalleled network of industry contacts.

We are truely devoted to become your professional , customer-oriented , efficient and value-for-money semiconductor equipment and parts source.

Read more about us

View all Complete Facilities for sale

Search for 6 inch items for sale

Search for Complete items for sale

Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.


sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy.

SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news

We'd love to get your feedback about our website and our services! If you can think of ways we can improve or other services you need, please feel free to send details.

Feedback Form