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Lam 2300 Exelan Flex 45 Poly etcher, 4 chamber for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Lam 2300 Exelan Flex 45 Poly etcher, 4 chamber.
Please click on the "Get Quote" button at the end of the 2300 Exelan Flex 45 description, if you'd like to get a quotation, photos and specifications of this Poly etcher, 4 chamber, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Lam 2300 Exelan Flex 45 Poly etcher, 4 chamber is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Lam 2300 Exelan Flex 45 Equipment Details

SDI ID: 106852
Manufacturer: Lam
Model: 2300 Exelan Flex 45
Description: Poly etcher, 4 chamber
Version: 300 mm
Vintage: 01.07.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

DEINSTALLED AND WAREHOUSED. CAN BE INSPECTED BY APPOINTMENT. PLEASE REFER TO THE ATTACHED PHOTOS TO KNOW THE CURRENT CONDITION.
Qty 4 chambers fitted
Chamber Type: Lam 2300 Exelan Flex 45
Platform type:V2
Loadport type: Brooks 002-7200-33 qty 3
with 810-810480-102, tag reader p/n TCL-I2-FL6M-01
ATM Robot: Brooks 118150,END effector 116581
TM Robot: Brooks 18000-37
Pump: Edwards EXP180N P/N A419-48212

Process Module Config:
CPU:Lam 650-048878-001
VIOP:Lam 810-099175-009
Lam 605-707109-002
Power Supply: Lam 810-006490-006
Lam 685-801852-015
ESC: YES
Node 1 Mother 710-802901-004
Node 1 node 810-800256-005
Node 1 waf det 810-800156-001
Node 2 Mother 710-802902-019
Node 2 node 810-800256-005
Interlock Board: 810-800031-401
Anafaze board: 778-9000046-405

Upper 5-Phase driver board:Vexta
Upper Stepping Board: 810-801237-005
Upper Stepping Motor: Vexta D9CL-12.7F
Hoist Module: 853-802298-006
Hoist PCB: 810-802205-002

ESC PSU ESC Filter Bicep: 810-006490-006
ESC PSU Current Monitor Board: LAM
ESC PSU Bicep board: 810-495659-307
RF Match: 853-040482-301
He UPC: MKS, Lam p/n 797-800733-001
AC Rack: 853-044612-003
Turbo pump: Edwards STP-A2203X3 Lam p/n 796-001604-001
VAT Controller: 65048-PHS2-ADR2 Lam p/n 714-023334-003
Manometer CMI: MKS 628801TDE1B
Manometer CM2: MKS 625A-14059
Manometer CM3: MKS 625A-14059
ISO Valve Roughing ZD-tech Lam p/n 796-001604-001
ISO Valve Turbo    ZD-tech Lam p/n 796-001604-001
Chiller flow meter: Proteus 98008SA10F3P2 Lam p/n 711-001032-014
Backside He Regulator and valve: Veriflow SQMICRO302PFSMM
Turbo N2 Regulator and valve: Veriflow SQMICRO302PTS2.13
Optical Endpoint Module: 685-801852-015
Optical Endpoint Optical Cable: x684-802260-003
TC and RTD cable: TC_833-801411-403 and RTD: 679-022427-002
Gas line vacuum delivery: Lam p/n 839-801852-015
Gas line center: Lam p/n 839-035037-001
Gas line edge: Lam p/n 839-035036-001
Gas line N2: Lam p/n 839-802569-003
Gas line H2: Lam p/n 839-802752-003

Gas Box Config:
PM1
Control Boards
Mother 810-031325-003
Node 810-013872-002
Lan 810-802799-115
Gas box type: IGS
Gas line qty: 17
MFC Types:
Horiba SEC2700 qty 67
Horiba SECZ313M
B.S. Helium He UPC MKS LAM p/n 797-800733-003
MFC 1 HORIBA SECZ313M 50
MFC 2 HORIBA SECZ313M 50
MFC 3 HORIBA SECZ313M 50
MFC 4 HORIBA SECZ313M 100
MFC 5 HORIBA SECZ313M 100
MFC 6 HORIBA SECZ313M 200
MFC 7 HORIBA SECZ313M 50
MFC 8 HORIBA SECZ313M 300
MFC 9 HORIBA SECZ313M 3000
MFC 10 HORIBA SECZ313M 50
MFC 11 HORIBA SECZ313M 1000
MFC 12 HORIBA SECZ313M 300
MFC 13 HORIBA SECZ313M 50
MFC 14 HORIBA SECZ313M 1000
MFC 15 HORIBA SECZ313M 500
MFC 16 HORIBA SECZ313M 30
MFC 17 HORIBA SECZ313M 10
Valves type: Veriflow SM930LP1NCS102

PM2
Control Boards
Mother 810-031325-003
Node 810-013872-002
Lan 810-802799-115
Gas box type: IGS
Gas line qty: 17
MFC Types:
Horiba SEC2700 qty 67
Horiba SECZ313M
B.S. Helium He UPC MKS LAM p/n 797-800733-003
MFC 1 HORIBA SECZ313M 50
MFC 2 HORIBA SECZ313M 50
MFC 3 HORIBA SECZ313M 50
MFC 4 HORIBA SECZ313M 100
MFC 5 HORIBA SECZ313M 100
MFC 6 HORIBA SECZ313M 200
MFC 7 HORIBA SECZ313M 50
MFC 8 HORIBA SECZ313M 300
MFC 9 HORIBA SECZ313M 3000
MFC 10 HORIBA SECZ313M 50
MFC 11 HORIBA SECZ313M 1000
MFC 12 HORIBA SECZ313M 200
MFC 13 HORIBA SECZ313M 50
MFC 14 HORIBA SECZ313M 1000
MFC 15 HORIBA SECZ313M 100
MFC 16 HORIBA SECZ313M 30
MFC 17 HORIBA SECZ313M 10
Valves type: Veriflow SM930LP1NCS102

PM3
Control Boards
Mother 810-031325-003
Node 810-013872-002
Lan 810-802799-115
Gas box type: IGS
Gas line qty: 17
MFC Types:
Horiba SEC2700 qty 67
Horiba SECZ313M
B.S. Helium He UPC MKS LAM p/n 797-800733-003
MFC 1 HORIBA SECZ313M 50
MFC 2 HORIBA SECZ313M 50
MFC 3 HORIBA SECZ313M 50
MFC 4 HORIBA SECZ313M 100
MFC 5 HORIBA SECZ313M 100
MFC 6 HORIBA SECZ700 200
MFC 7 HORIBA SECZ313M 50
MFC 8 HORIBA SECZ313M 300
MFC 9 HORIBA SECZ313M 3000
MFC 10 HORIBA SECZ313M 50
MFC 11 HORIBA SECZ313M 1000
MFC 12 HORIBA SECZ313M 200
MFC 13 HORIBA SECZ313M 50
MFC 14 HORIBA SECZ313M 1000
MFC 15 HORIBA SECZ313M 100
MFC 16 HORIBA SECZ313M 30
MFC 17 HORIBA SECZ313M 10
Valves type: Veriflow SM930LP1NCS102

PM4
Control Boards
Mother 810-031325-003
Node 810-013872-002
Lan 810-802799-115
Gas box type: IGS
Gas line qty: 17
MFC Types:
Horiba SEC2700 qty 67
Horiba SECZ313M
B.S. Helium He UPC MKS LAM p/n 797-800733-003
MFC 1 HORIBA SECZ313M 50
MFC 2 HORIBA SECZ313M 50
MFC 3 HORIBA SECZ313M 50
MFC 4 HORIBA SECZ313M 100
MFC 5 HORIBA SECZ313M 100
MFC 6 HORIBA SECZ700 200
MFC 7 HORIBA SECZ313M 50
MFC 8 HORIBA SECZ313M 300
MFC 9 HORIBA SECZ313M 3000
MFC 10 HORIBA SECZ313M 50
MFC 11 HORIBA SECZ313M 1000
MFC 12 HORIBA SECZ313M 200
MFC 13 HORIBA SECZ313M 50
MFC 14 HORIBA SECZ313M 1000
MFC 15 HORIBA SECZ313M 100
MFC 16 HORIBA SECZ313M 30
MFC 17 HORIBA SECZ313M 10
Valves type: Veriflow SM930LP1NCS102


Vacuum Gauges
Process Vac: 0.1 Torr MKS
Chamber Vac: 1 Torr MKS
Foreline Vac: 10 Torr MKS
TM Vac: MKS
Airlock 1 Vac Gauge MKS 944AOPLD
Airlock 2 Vac Gauge MKS 944AOPLD
Airlock 1 Heating Gauge MKS HPM-2002-OBM-LM
Airlock 2 heating Gauge MKS HPM-2002-OBM-LM
Pumps
Chamber Pump: Edwards STP-A2203C3
Pump controller: Edwards SCU 1500/SCU 1600

RF Generators / Matches
2 MHz RF Generator: AE 2500SF P/N 2500SF . Lam p/n 684-013298-004
27 MHz RF Generator: AE Lam p/n 684-041942-004
60 MHz RF Generator: AE Lam p/n 684-040774-001

AC RACK
AC POWER CABLE 853-023843-025
UPS 853-022991-005
EMO CABLE 833-014957-100
DC POWER SUPPLY MAGNETEK MG3-1F-3FE
UI PC 853-900986R010
RSU CONTROLLER KAWASAKI 108358


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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