Kokusai DJ-853V-8BL J2 VERTICAL CVD FURNACE, HTO PROCESS for Sale

Model:KE DJ-853V J2 (Upgraded from KE DJ-853V J1)
Process: HTO
Comments:-
-Deinstalled and warehoused, can be inspected by appointment.
-The equipment will be provided in "refurbished" condition.
1 System Layout: Main, Utility
2 System Type: L Type
3 Side Maintenance: No Side Maintenance
4 System Paint Color: IVORY
5 Furnace Front Surface Finish: Painted
6 Heater Model: D4EX08455
7 Rapid Cooling Unit: Not Installed
8 N2 Load Lock: Not Installed
9 O2 Analyzer: Not Installed
10 Cassette I/O Type (Normal / SMIF): Normal
11 SMIF Maker / Model: Not Installed
12 AGV Compatibility: Unable
13 System Main Controller: CX3002D
14 Mechanical Controller: CX1220
15 Sequence Controller: CX1312
16 Gas Controller: CX3202
17 Gas Flow Chart Panel -
18 Operation Panel Installed (FRONT)
19 Signal Tower / Colors Installed 3
20 Furnace Temperature Controller: CQ1600
21 Furnace Overtemp Detector: DN-150L
22 Gas Detecter Maker / Model: Not Installed
23 Detecting Gas - N.A.
24 Host Communications: Yes
25 User Host Computer I/F: HSMS
26 Manual (Drawing, Parts list etc): Not Included

GAS SYSTEM
1 Process Gas: N2 , N2O, SiH4
2 Basic Style: Conventional (VCR type)
3 Manual Valve SAM
4 Air-Operated Valve BENKAN SCV
5 Filter MILLIPORE
6 Regulator TANAKA TORR II
7 MFC Maker / Model SAM FTM480
MFC1 : N2 50 SCCM, MFC2 : N2 10 SLM,
MFC3 : SiH4 50 SCCM, MFC4 : SiH4 50 SCCM,
MFC5 : NO 2 SLM
8 PT Sensor Maker / Model NAGANO
9 DPM Maker / Model NAGANO
10 Check Valve Not Installed
11 Baking System Not Installed
12 Liquid Source Auto-Refill Not Installed
13 Burn Controller Not Installed
14 Vaporizer Not Installed

VACUUM / EXHAUST SYSTEM
1 Pump unit: Exist
2 Pressure Control Valve: APC
3 Pressure Controlle:r APC CONTROLLER AC-2X (Tylan)
4 Pressure Sensor: THERMOVAC
5 Trap: Not Installed
6 Gas Cooler: Not Installed

WAFER / CASSETTE HANDLING
1 Wafer Type: 200 mm
2 Auto Wafer Aligner: Not Installed
3 Wafer Qty. in Cassette: 26
4 Cassette Storage: Qty. 22
5 Fork Type: 1 + 4
6 Fork-Wafer Presence Sensor: Installed
7 Fork-Variable Pitch: Installed
8 Magnetic Seal Rotation: Installed

POWER
1 Voltage (Heater): 3 Phase 200V 150A
2 Voltage (Controller Main): 1 Phase 100V 30A
3 Voltage (Clean): 1 Phase 100V 50A

PROCESS KITS
1 Quartz set N/A
2 Profile T/C Type missing
3 Flange missing