SDI fabsurplus.com is pleased to announce the availability of the following listed used Kokusai DJ-853V-8BL J2 VERTICAL CVD FURNACE, HTO PROCESS.
Please click on the "Get Quote" button at the end of the DJ-853V-8BL J2 description, if you'd like to get a quotation, photos and specifications of this VERTICAL CVD FURNACE, HTO PROCESS, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Kokusai DJ-853V-8BL J2 VERTICAL CVD FURNACE, HTO PROCESS is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Kokusai DJ-853V-8BL J2 Equipment Details

SDI ID: 108007
Manufacturer: Kokusai
Model: DJ-853V-8BL J2
Version: 200 mm
Vintage: 01.09.2000
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

Model:KE DJ-853V J2 (Upgraded from KE DJ-853V J1)
Process: HTO
-Deinstalled and warehoused, can be inspected by appointment.
-The equipment will be provided in "refurbished" condition.
1 System Layout: Main, Utility
2 System Type: L Type
3 Side Maintenance: No Side Maintenance
4 System Paint Color: IVORY
5 Furnace Front Surface Finish: Painted
6 Heater Model: D4EX08455
7 Rapid Cooling Unit: Not Installed
8 N2 Load Lock: Not Installed
9 O2 Analyzer: Not Installed
10 Cassette I/O Type (Normal / SMIF): Normal
11 SMIF Maker / Model: Not Installed
12 AGV Compatibility: Unable
13 System Main Controller: CX3002D
14 Mechanical Controller: CX1220
15 Sequence Controller: CX1312
16 Gas Controller: CX3202
17 Gas Flow Chart Panel -
18 Operation Panel Installed (FRONT)
19 Signal Tower / Colors Installed 3
20 Furnace Temperature Controller: CQ1600
21 Furnace Overtemp Detector: DN-150L
22 Gas Detecter Maker / Model: Not Installed
23 Detecting Gas - N.A.
24 Host Communications: Yes
25 User Host Computer I/F: HSMS
26 Manual (Drawing, Parts list etc): Not Included

1 Process Gas: N2 , N2O, SiH4
2 Basic Style: Conventional (VCR type)
3 Manual Valve SAM
4 Air-Operated Valve BENKAN SCV
6 Regulator TANAKA TORR II
7 MFC Maker / Model SAM FTM480
MFC1 : N2 50 SCCM, MFC2 : N2 10 SLM,
MFC3 : SiH4 50 SCCM, MFC4 : SiH4 50 SCCM,
8 PT Sensor Maker / Model NAGANO
9 DPM Maker / Model NAGANO
10 Check Valve Not Installed
11 Baking System Not Installed
12 Liquid Source Auto-Refill Not Installed
13 Burn Controller Not Installed
14 Vaporizer Not Installed

1 Pump unit: Exist
2 Pressure Control Valve: APC
3 Pressure Controlle:r APC CONTROLLER AC-2X (Tylan)
4 Pressure Sensor: THERMOVAC
5 Trap: Not Installed
6 Gas Cooler: Not Installed

1 Wafer Type: 200 mm
2 Auto Wafer Aligner: Not Installed
3 Wafer Qty. in Cassette: 26
4 Cassette Storage: Qty. 22
5 Fork Type: 1 + 4
6 Fork-Wafer Presence Sensor: Installed
7 Fork-Variable Pitch: Installed
8 Magnetic Seal Rotation: Installed

1 Voltage (Heater): 3 Phase 200V 150A
2 Voltage (Controller Main): 1 Phase 100V 30A
3 Voltage (Clean): 1 Phase 100V 50A

1 Quartz set N/A
2 Profile T/C Type missing
3 Flange missing

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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