SDI fabsurplus.com is pleased to announce the availability of the following listed used Kokusai DJ-853V-8BL J3 VERTICAL CVD FURNACE, NITRIDE PROCESS.
Please click on the "Get Quote" button at the end of the DJ-853V-8BL J3 description, if you'd like to get a quotation, photos and specifications of this VERTICAL CVD FURNACE, NITRIDE PROCESS, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Kokusai DJ-853V-8BL J3 VERTICAL CVD FURNACE, NITRIDE PROCESS is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Kokusai DJ-853V-8BL J3 Equipment Details

SDI ID: 109026
Manufacturer: Kokusai
Model: DJ-853V-8BL J3
Version: 150 mm
Vintage: 01.06.2000
Quantity: 1
Sales Condition: as is all rebuilt
Lead Time: immediately
Sales Price: Inquire

-Deinstalled and warehoused, can be inspected by appointment.
-The equipment will be provided in "refurbished" condition.
1 System Layout Main & Utility: Integrated
2 System Type: L Type
3 Side Maintenance: No Side Maintenance
4 System Paint Color: IVORY
5 Furnace Front Surface Finish: Painted
6 Heater Model: D4EX 18104-2
7 Rapid Cooling Unit: Not Installed
8 N2 Load Lock: Not Installed
9 O2 Analyzer: Not Installed
10 Cassette I/O Type (Normal / SMIF): Normal
11 SMIF Maker / Model: Not Installed
12 AGV Compatibility: Unable
13 System Main Controller: CX3002B
14 Mechanical Controller: CX1223
15 Sequence Controller; OMRON CS1G
16 Gas Controller: CX3202
17 Gas Flow Chart Pannel Not Installed
18 Operation Pannel Installed
19 Signal Tower / Colors Installed: 4 colors
20 Furnace Temperature Controller: CQ1600
21 Furnace Overtemp Detector DN-150V
22 Gas Detecter Maker / Model: Not Installed
23 Detecting Gas - NA
24 Host Communications: Yes
25 User Host Computer I/F: HSMS
26 Manual (Drawing, Parts list etc): Not Included

1 Process Gas: N2 , NH3, DCS
2 Integrated Gas System: Block style
3 Manual Valve FUJIKIN
4 Air-Operated Valve FUJIKIN
5 Filter: MILLIPORE ( Ni )
6 Regulator: VERIFLOW
7 MFC Maker / Model: STEC / SEC-7330
8 PT Sensor Maker / Model: NAGANO
9 DPM Maker / Model: NAGANO
10 Check Valve Not Installed
11 Baking System Not Installed
12 Liquid Source Auto-Refill Not Installed
13 Burn Controller Not Installed
14 Veporizer Not Installed

1 Pump: Not Included
2 Pressure Control Valve: CKD
3 Pressure Controller: CKD
4 Pressure Sensor: INFICON
5 Trap: Installed
6 Gas Cooler: Not Installed

1 Wafer Type: 150 mm
2 Auto Wafer Aligner: Not Installed
3 Wafer Qty. in Cassette: 25
4 Cassette Storage Qty.: 18
5 Fork Type: 1 + 4 (VAC) Tweezer type
6 Fork-Wafer Presence Sensor: Installed
7 Fork-Variable Pitch: Installed
8 Magnetic Seal Rotation: Not Installed

1 Boat Type / Pitch N/A
2 Boat Material N/A
3 Cap Pedestal Material N/A
4 Outer Tube N/A
5 Inner Tube N/A
6 SIC Liner Tube N/A
7 Process Tube N/A
8 External Torch N/A
9 Profile T/C Type N/A

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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