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Brooks 241251-0007 Equipment front end module (EFEM) ASSY,JCP,2SR,S2,WE30,VGVG,XXLO,VIVIXXXX,30B,#3065 for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Brooks 241251-0007 Equipment front end module (EFEM) ASSY,JCP,2SR,S2,WE30,VGVG,XXLO,VIVIXXXX,30B,#3065.
Please click on the "Get Quote" button at the end of the 241251-0007 description, if you'd like to get a quotation, photos and specifications of this Equipment front end module (EFEM) ASSY,JCP,2SR,S2,WE30,VGVG,XXLO,VIVIXXXX,30B,#3065, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Brooks 241251-0007 Equipment front end module (EFEM) ASSY,JCP,2SR,S2,WE30,VGVG,XXLO,VIVIXXXX,30B,#3065 is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Brooks 241251-0007 Equipment Details

SDI ID: 109080
Manufacturer: Brooks
Model: 241251-0007
Description: Equipment front end module (EFEM) ASSY,JCP,2SR,S2,WE30,VGVG,XXLO,VIVIXXXX,30B,#3065
Version: 200 mm and 300 mm
Vintage: 01.06.2015
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

Equipment Front End Module (EFEM):
Description: ASSY,JCP,2SR,S2,WE30,VGVG,XXLO,VIVIXXXX,30B,#3065
P/N: 241251-0007
Original price: $150,300
Documentation, etc.

Configuration of EFEM:-
-Standard base Platform including:-
-BOLTS compliant frame
-Doors, front and rear wheels
-Solid upper rear panel
-AC Power distribution (200-240V)
-Ethernet communications
-Externally mounted removable casters
-SEMI S2, S8 and F47 compliant

Application Information
Substrate 1: 300 mm Semi Std.
Substrate 2: 200 mm Semi Pitch
Ship Config: 300 mm
Process temp: less than 100C
Substrate temp: less than 100C
Transfer plane: 1100 mm from floor
Process throughput: 60 wph

Platform Configuration
Platform layout: 2 wide
Service access: Right (standard)
Interior lighting: White (Standard)
Facilities location: Internal - Side Service
Upper Panels: Tall with Storage
FFU Option: Standard FFu (Class 1)

Automation Configuration
Drive type: Custom
Robot track: Custom
Lower EE: Vacuum S9
Substrate Aligner: Custom
Upper EE: Vacuum S9
Aligner Location: Right (Standard)
System Reach Requirement: Reach into G2-6 side-by-side Load Lock.

Load Port Configuration
Carrier Type 1: 300 mm FOUP Semi Standard
Carrier Type 2: 300 mm FOUP with Adapter
CID Comm: Vision LPM ENET
LPM #1: Vision Load Port  
E84 Option: OHT Ready (no transponder)
Carrier ID: RFID - Brooks
LPM #2: Vision Load Port  
E84 Option: OHT Ready (no transponder)
Carrier ID: Not required

Standard EFEM Options
EMO Button: left side
UI Configuration: Mount with swing arm
Carrier protection: None
Light Tower: None
UI Location: Right corner
Wafer mapping: Loadport only (Vision)
Wing Panel: None
OCR Mount Bracket: None
Ionization: Ionization with digital control
Platform coupling: None

Custom Requirements
1. This EFEM will roll up to a G2-6 Gen5-EN vacuum Back End (p/n 139750-77).
2. JCP Level 2.5 gen-5 EN Controls architecture
3. System will be a 200 mm and 300 mm bridge tool. Automation is a wafer engine with a 200mm/300mm aligner. Aligner requires right side bump out.
4. LPM#2 will be vision compatible for FOUP with Microtool adapter p/n AM-3004-3
5. Tool configured for separate and dedicated 300 mm and 200 mm EEs on wafer engine amd set up for Microtool adapter p/n AM-3004-3 on LP#2


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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