VARIAN VIISION 200 Plus High Current Implanter for Sale

The equipment is still installed in the cleanroom. The equipment is sold FCA incoterms.

The equipment is currently operational, and will be made available for removal in July 2024. Condition: Good.1. The system has been used for standard implants with Boron, Phosphorus and Arsenic.
2. The model of the extraction supression PSU is E19002470 Rev 2.
3. The system's old-style Kollmorgen spin amplifier has been upgraded.
4. Any mechanical backing pumps shown are not included.
5. The system will be provided with turbo and cryo pumps which have been de-contaminated and overhauled.
6. Upon release from production, the system will be decontaminated and deinstalled, and provided FCA terms.
7. The video camera monitoring system shown in the photos is not included
8. At the following link, you will find 2 short videos showing the beamline of the machine, to give an overview of the system condition:-

https://youtube.com/shorts/-AAm5a_mpU4?feature=share.

https://youtu.be/W2mB5iXecCs

The VIISion 200 high current ion implanter has a number of enhancements to increase the generation and improve the transport of ions with high efficiency whilst minimizing heavy metals and particles. Some features are: dual filament ion source, constant current extraction with variable z axis, suppression voltage, a very high resolution high bandwidth mass analyser , a mass defining slit that rotates, variable gap acceleration system , full Faraday in front of wafer. This enhanced beam line is produced in 200 keV and 80 keV versions. In this case, the Varian Viision is the 200 keV version.

Machine-Specific configuration:-
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-Implant Disc:18 Site, Silicon Coated
-Two-dimensional beam profiler
-CE-Mark: yes
-Average Uptime: 85%
-Computer System: 147MHz Main & ES CPU
-Software: 6.24
-Backup Disc: SSD Drive
-Cleanroom Monitor: TFT
-Remote Service Monitor: TFT / in house manufactured

Gasbox Configuration:-
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String #1 - SDS MKS-P2A 10 sccm Arsenic
String #2 - SDS MKS-P2A 10 sccm Phosporus
String #3 - HP Unit UFC-8100 10 sccm N2
String #4 - HP Tylan FC-2900MEP 5 sccm BF3
-External Inert Gas Feed and Purge
 
Source/Beamline Configuration:-
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-Source Chamber Shield Kit: yes 1 included
-Bernas: yes 1 Spare available
-Mass Slit Shield Retrofit no

Implant Configuration:-
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-New Infranor Amplifier Xtra Pulse: yes
-Spin Amp Kollmorgen Servo Star S700: yes

Vacuum System Configuration:-
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-Terminal Rough Pump: Edwards, not included (Available at extra cost)
-Terminal Differential Pump: Varian Membrane Pump
-Source turbo: Pfeiffer 1500
-Beamline Turbo: Pfeiffer 1200
-Endstation Manifold Turbo Pump: Pfeiffer 250
-Endstation Rough Pump: Edwards, not included (Available at extra cost)
-Endstation Differential Pump: Busch Membrane Pump
-Cryo Compressor (2x): CTI 9600
-Cryo Pump (4x): CTI 250F
-4th cryo pump installed: yes
-Rough Pump: Edwards, not included (Available at extra cost)