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TEL TOKYO ELECTRON MB2 730 HT HT CVD SYSTEM, 2 CHAMBER WSi Process for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL TOKYO ELECTRON MB2 730 HT HT CVD SYSTEM, 2 CHAMBER WSi Process. This TEL TOKYO ELECTRON MB2 730 HT HT CVD SYSTEM, 2 CHAMBER WSi Process is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this CVD SYSTEM, 2 CHAMBER WSi Process and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


TEL TOKYO ELECTRON MB2 730 HT HT Equipment Details

SDI ID: 21064
Manufacturer: TEL TOKYO ELECTRON
Model: MB2 730 HT HT
Description: CVD SYSTEM, 2 CHAMBER WSi Process
Version: 200 mm
Vintage: 01.09.1996
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 80,000 USD
Comments:

CAN BE OFFERED "AS IS" OR OPERATIONAL TO OEM SPECIFICATIONS Condition: very clean and completely decontaminated. No acid or corrosion is present. Current status: in the warehouse, in plastic wrapping. Can be inspected by appointment. The tool was maintained, upgraded and serviced throughout it's life by the OEM.
Location: Avezzano, Italy
Serial number: MCJ084
Model: MB2 730 HT HT
Vintage: Apr 1997
DE-INSTALL DATE: FEB 2008
System was running production until shut down   
In elect rack: 2x Ebara TMP controller (306W), CVD Utility controller
SECS/GEM: YES
CE MARK: YES  
Main Frame MBB730 (2 x Wsix Deposition chambers)   
Maintenance Table   
UI-Rack   
Additional breaker box   
MBB-730 Main Power Distribution   
Power Rack   
Edwards dual GRC, D150 qty 2       
Box with cable/Process kit/manuals   
Gases:  
N2 (Ox) 4lmin
N2 (Red) 125l/min
Ar 1000 sccm
WF6  10sccm   
ClF3 1000sccm   
DCS  1000sccm     
Other utilities:-
Voltage 208V +/- 10% 60Hz 70 KVA
Water 5Kgf/cm2 max
Water flow 20 l/min
Water temp 15-25 celcius
Exhaust volume 2.1 m3/min
Air 5.7 =/- 0.3 Kgf/cm3 220 l/min
Earth class 3 GND islotaed
Weight 2300 kg
room temp 20-25 c, humidility 40-55%

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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