fabsurplus.com is pleased to announce the availability of the following listed used TEL TOKYO ELECTRON MB2 730HT CVD SYSTEM, 3 CHAMBER WSi Process. This TEL TOKYO ELECTRON MB2 730HT CVD SYSTEM, 3 CHAMBER WSi Process is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this CVD SYSTEM, 3 CHAMBER WSi Process and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Manufacturer:||TEL TOKYO ELECTRON|
|Description:||CVD SYSTEM, 3 CHAMBER WSi Process|
|Sales Condition:||as is where is|
|Sales Price (each):||85,000 USD|
LOCATION: AVEZZANO, ITALY
Model: TEL MB2 730HT
System was running production until shut down
Turned of: Nov 2007
De-installed: Dec 2007
Maintenance by : TEL
CE Mark: yes
SW Version UI V4.8HL
In elect rack: 3x Ebara TMP controller (306W), labelled for PM RH TMP, PM LH TMP, T-M TMP; CVD Utility controller
Main Frame MBB730 (3 chambers)
Additional breaker box
MBB-730 Main Power Distribution
Edwards D150 dual GRC, qty 3 , Edwards PN A55222110, 208v 3 PHASE WEIGHT 380 KG
Chiller TEL: 3
Box with cable/Process kit/manuals
N2 (ox) 4 l/min
N2 (red) 125 l/min
Ar 1500 sccm
WF6 15 sccm
ClF3 1500 sccm
DCS 1500 sccm
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