SDI fabsurplus.com is pleased to announce the availability of the following listed used Canon MPA-600 Super .
Please click on the "Send More Details" button at the end of the MPA-600 Super description, if you'd like to get more details, photos and specifications of this , and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Canon MPA-600 Super is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Sales Condition:||as is where is|
|Sales Price:||190,000 USD|
Powered Off, In Storage. Wafer size: 6”, 5”, 4” Mask size: 7”, 6”, 5” Illumination: 2KW High Pressure Mercury Lamp Exposure Wavelength: I(365nm), H(405nm), G(436nm) line Intensity: (@ 1800watts power output) 4”wafer-more than 700mw,5”wafer-more than 650mw, 6”wafer-more than 600mw Aperture sizes: 0.7, 0.6, 0.5 Exposure Uniformity: within ± 3% Auto Feeder: Single, cassette to cassette, backside wafer handling Reduction Ratio: X 1 Resolution: 1.5um Depth of Focus: > + 6um (linewidth 1.5um) Magnification: < 0.2um (PDC ON) Distortion: 3sigma < 0.5um (PDC OFF) Scanning Accuracy: < + 1.5% Scan Drive Unit: scanning the carrige unit by Linear motor drive Scan Range: 6" 162mm , 5" 138.5mm , 4" 116mm Scanning Speed: 4.0 to 150.0sec(31.3mm/sec-0.83mm/sec) LBS AA 3sigma < 0.58um (HeNe laser beam scan) TV AA 3sigma < 0.43um (TV image processing) Pre-alignment Accuracy (Range) Φ 60 um or less > 89 wfs/h (first mask mode) > 77 wfs/h (LBS AA mode) > 68 wfs/h (TVAA mode) Focus error Arc focus less Viewing Scope Light Resouce Halogan lamp viewing Lens Auto moving Erector: 1X , 2X , 5X
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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