SDI fabsurplus.com is pleased to announce the availability of the following listed used Canon MPA-600 Super . This Canon MPA-600 Super is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.
|Sales Condition:||as is where is|
|Sales Price (each):||190,000 USD|
Powered Off, In Storage. Wafer size: 6”, 5”, 4” Mask size: 7”, 6”, 5” Illumination: 2KW High Pressure Mercury Lamp Exposure Wavelength: I(365nm), H(405nm), G(436nm) line Intensity: (@ 1800watts power output) 4”wafer-more than 700mw,5”wafer-more than 650mw, 6”wafer-more than 600mw Aperture sizes: 0.7, 0.6, 0.5 Exposure Uniformity: within ± 3% Auto Feeder: Single, cassette to cassette, backside wafer handling Reduction Ratio: X 1 Resolution: 1.5um Depth of Focus: > + 6um (linewidth 1.5um) Magnification: < 0.2um (PDC ON) Distortion: 3sigma < 0.5um (PDC OFF) Scanning Accuracy: < + 1.5% Scan Drive Unit: scanning the carrige unit by Linear motor drive Scan Range: 6" 162mm , 5" 138.5mm , 4" 116mm Scanning Speed: 4.0 to 150.0sec(31.3mm/sec-0.83mm/sec) LBS AA 3sigma < 0.58um (HeNe laser beam scan) TV AA 3sigma < 0.43um (TV image processing) Pre-alignment Accuracy (Range) Φ 60 um or less > 89 wfs/h (first mask mode) > 77 wfs/h (LBS AA mode) > 68 wfs/h (TVAA mode) Focus error Arc focus less Viewing Scope Light Resouce Halogan lamp viewing Lens Auto moving Erector: 1X , 2X , 5X
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