Please find below a list of Used Photolithography Equipment (Steppers and Scanners) for sale by fabsurplus.com .Click on any listed item of Photolithography Equipment to see further data.
| SDI ID | Manufacturer | Model | Description | Version | Vintage | Q. ty | Sales Conditions | Lead Time |
|---|---|---|---|---|---|---|---|---|
| 102858 | ASML | PAS5500-300C | DUV Stepper - Lens Unit only | 200 mm | 1 | as is where is | immediately | |
| 106962 | ASML | PAS5500-400D | i-line scanner (Missing Parts) | 200 mm | 01.06.2004 | 1 | as is where is | immediately |
| 108151 | ASML | XT1400E | 193 nm DUV SCANNER(ARF) | 300 mm | 01.06.2005 | 1 | as is where is | immediately |
| 108152 | ASML | XT1700 Fi | SCANNER(ARF) | 300 mm | 01.06.2006 | 1 | as is where is | immediately |
| 108385 | ASML | TWINSCAN AT:850D | 248nm (KrF) Scanner | 300 mm | 1 | as is where is | ||
| 108386 | ASML | TWINSCAN XT:1250D | 193nm (ArF) Scanner | 300 mm | 1 | as is where is | ||
| 108387 | ASML | YieldStar S-100B | Overlay Measurement System | 300 mm | 1 | as is where is | ||
| 108388 | ASML | YieldStar S-250 | Overlay Measurement System | 300 mm | 1 | as is where is | ||
| 108389 | ASML | YieldStar S-250 | Overlay Measurement System | 300 mm | 1 | as is where is | ||
| 108917 | ASML | XT-1700Fi | Immersion Scanner | 300 mm | 01.05.2012 | 1 | as is where is | immediately |
| 108918 | ASML | XT1250D | ArF Lithography Scanner | 300 mm | 01.05.2004 | 1 | as is where is | immediately |
| 108927 | ASML | XT1700 Fi | Immersion Lithography System | 300 mm | 01.06.2007 | 1 | as is where is | immediately |
| 108928 | ASML | XT1250D | DUV Lithography exposure system 193 nm | 300 mm | 01.06.2005 | 1 | as is where is | immediately |
| 108938 | ASML | AT1100B Twinscan | DUV Lithography exposure system 193 nm | 200 mm and 300 mm | 1 | as is where is | immediately | |
| 109007 | ASML | Twinscan XT400F | i LINE SCANNER | 300 mm | 1 | as is where is | immediately | |
| 108063 | Cambridge | EBMF 10.5 | E-Beam Lithography | 1 | as is where is | |||
| 52153 | Canon | Chuck Tool | Chuck Tool for EX3, EX4, i4, i5 | 200 mm | 30.04.1999 | 1 | as is where is | immediately |
| 52262 | Canon | 6736A | reticle handling robot for i4, iW, i5, i5+, EX3, EX4, EX5, EX6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52265 | Canon | video impedance adapter | 5 channel video impedance adapter | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52338 | Canon | BH8-2017-01 | IL3-CD-PCB for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52341 | Canon | BH8-1980-01 | EASRCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52342 | Canon | BH8-1979-01 | EASLCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52346 | Canon | BH8-2022-01, BG8-3369, BG4-8680 | EXP-CD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52347 | Canon | BH8-1938-01BG4-9386 BG8-2694 | CD90-CD PCB assembly | spares | 1 | as is where is | immediately | |
| 52348 | Canon | BH8-2065-02, BG4-8805, BG8-3375 | CD90-INTLK board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52359 | Canon | FPA 3000 series | HP-UX Workstation A2615A 9.05 10.20 11.00 11.00 11i | spares | 31.01.1997 | 1 | as is where is | immediately |
| 52360 | Canon | Zenith ZPS-250 | Multiple voltage power supply 250Watts | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52365 | Canon | Shimaden SR25-2P-N-00699609 | PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 2 | as is where is | immediately |
| 52366 | Canon | Shimaden SR25-2P-N-00699609 | PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52367 | Canon | Chino ES-600 | Chart Recorder for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52379 | CANON | FUJITSU DENSO 4247-E924 | 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52380 | CANON | Fujitsu Denso 4247-E924 | 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52381 | CANON | Fujitsu Denso 4247-E924 | 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52384 | Canon | Fujitsu Denso 4247-E924 | 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 1 | as is where is | immediately | |
| 52446 | Canon | Fujitsu Denso 4249-E922 | 4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52447 | CANON | Fujitsu Denso 4249-E923 | 4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 01.06.1999 | 1 | as is where is | immediately |
| 52448 | CANON | FUJITSU DENSO 4248-E922 | 2 channels power supply module for canon fpa 3000 series | spares | 30.06.1999 | 1 | as is where is | immediately |
| 52450 | Canon | Fuji Denso 4248-E921 | 2 channels power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53020 | CANON | Fujitsu denso 4250-E921 | Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53021 | Canon | Fujitsu Denso 4250-E921 | Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53023 | Canon | Fujitsu Denso 4250-E921 | Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53049 | Canon | BH8-1768-02 | Library Sub Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 31.05.1999 | 1 | as is where is | immediately |
| 53050 | Canon | BH8-1818-01 | LD/PD board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53056 | Canon | BG9-4757, BH8--1069-01 | AF DRV board for Canon FPA 1550 series | spares | 1 | as is where is | immediately | |
| 53057 | Canon | BG9-4760, BG83111, BH8-1071-02 | SH/RH board for Canon FPA 1550 | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53058 | Canon | BG9-4761, BG8-3112, BH8-1071-01 | SH/RH board FOR CANON FPA SERIES STEPPERS | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53059 | Canon | BH8-1073-01, BG9-4763, BG8-3114 | PA SENSER board | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53060 | Canon | BG9-4764, BH8-1074-01 | PA CCD board for Canon FPA series steppers | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53061 | Canon | BG9-4762, BG8-3113, BH8-1072-01 | PA STAGE board for Canon 1550MarkIV series | spares | 30.06.1995 | 1 | as is where is | immediately |
| 53062 | Canon | BG9-4758, BG8-3109, BH8-1070-02 | SC/RC board for Canon FPA series steppers | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53063 | Canon | BG9-4759, BG8-3110, BH8-1070-02 | SC/RC board for Canon fpa | spares | 30.06.1999 | 1 | as is where is | immediately |
| 53066 | Canon | BG4-6365 | PPC Pellicle Particle Checker Unit for FPA3000 series stepper iw i4 i5 ex3 ex4 ex5 ex6 | spares | 30.04.1997 | 1 | as is where is | immediately |
| 53074 | Canon | FPA 3000 series extended reticle library | extended reticle library | 6 inch | 01.06.1998 | 1 | as is where is | immediately |
| 84774 | Canon | Chuck, 8 inch | Wafer Chuck for EX3, EX4, i4, i5 | 200 mm | 30.04.1999 | 1 | as is where is | immediately |
| 95427 | CANON | FPA2500i3 | i-Line Stepper | 150 mm | 01.05.1995 | 1 | inquire | immediately |
| 95428 | Canon | FPA-2500i2 | i Line Stepper | 150mm | 1 | as is where is | immediately | |
| 106020 | Canon | BG3-3868-000 | MBD Unit (Masking Blade Driver) for Canon FPA5000ES2/ES2+ | Spares | 01.06.1999 | 1 | as is where is | immediately |
| 108395 | Canon | FPA-6000 ES5 | 248nm (KrF) Scanner | 300 mm | 1 | as is where is | ||
| 108919 | Canon | FPA-6000 ES5 | 248 nm (KrF) excimer exposure system | 300 mm | 01.05.2003 | 1 | as is where is | immediately |
| 109020 | Canon | FPA 5000 ES3 | KrF Scanner (Scanner) | 200 mm | 01.05.2001 | 1 | as is where is | immediately |
| 106646 | CARL ZEISS | S-INDUSTRIAL | 193 NM LASER | FACILITIES | 1 | as is where is | ||
| 52159 | Cymer | 4300 | Maintenance Tool kit and spare parts | SPARES | 1 | as is where is | immediately | |
| 102467 | CYMER | XLA-360 | Excimer Laser | 28.02.2006 | 1 | as is where is | immediately | |
| 103218 | Cymer | XLA 360 | Excimer laser, 193 nm | Facilities | 1 | as is where is | immediately | |
| 108940 | Cymer | Nanolith 7600 | 193 nm excimer laser | Facilities | 1 | as is where is | immediately | |
| 108963 | Cymer | XLA 160+/165 | 193 nm excimer laser | Facilities | 1 | as is where is | immediately | |
| 83513 | Entegris | RSPX-EUV-036 | Reticle Direct Purge Cabinet | Facilities | 01.07.2010 | 1 | as is where is | immediately |
| 83515 | Extraction Systems | TMB 150 | Photoresist Contamination Monitor System / Total Amine Analyzer | Facilities | 31.05.2004 | 1 | as is where is | immediately |
| 107000 | FEI | Sirion | FE SEM with e-beam lithography capability and EDX | up to 2.5 inch diameter | 01.06.2002 | 1 | as is where is | immediately |
| 98317 | Gigaphoton | GT60A4 | 193 NM excimer laser | Facilities | 31.07.2006 | 1 | as is where is | immediately |
| 106855 | Gigaphoton | A700GK-1 | 248 nm (KrF) excimer laser | Facilities | 01.10.2007 | 1 | as is where is | immediately |
| 52301 | Hitachi | 545-5516 | 7 Channel Power Supply module | spares | 0 | as is where is | immediately | |
| 108414 | Hitachi | HL-800D | E-beam Lithography System | 1 | as is where is | |||
| 99392 | KARL SUSS | MA56 | Mask Aligner | 1 | as is where is | immediately | ||
| 99394 | KARL SUSS | MA 150 | Mask Aligner (Spare Parts) | 150 mm | 1 | as is where is | immediately | |
| 99402 | KARL SUSS | MJB-3 | Mask Aligner | 1 | as is where is | immediately | ||
| 106853 | KARL SUSS | MA200e | Fully Automated mask Aligner with TSA (Refurbished) | 200 mm | 01.11.2022 | 1 | as is all rebuilt | immediately |
| 106854 | Karl Suss | MA8 BA8 | Mask Aligner with BSA | up to 8 inch | 01.06.2011 | 1 | as is where is | immediately |
| 108073 | Karl Suss | MA150 | Mask Aligner | 125 mm | 1 | as is where is | ||
| 108833 | KARL SUSS | MA-4 | Mask Aligner, IR Backside Alignment with Single Microscope, for up to 4" Wafers | 1 | inquire | |||
| 108834 | KARL SUSS | MA-45 | Mask Aligner, Front Side Alignment with Splitfield Microscope, for up to 4" Wafers | 1 | inquire | |||
| 108906 | Karl SUSS | MA200 | Mask Aligner | 150 mm, 200 mm | 01.05.1995 | 1 | as is where is | |
| 108909 | Karl SUSS | MA200 | Mask Aligner | 150 mm-200 MM | 01.05.1992 | 1 | as is where is | immediately |
| 108939 | Karl Suss | MA 56 | Mask Aligner | 1 | inquire | 1 month | ||
| 108944 | KARL SUSS | MA 25 | Mask Aligner with TSA and BSA | 100 mm and 125 mm | 01.06.2000 | 1 | inquire | immediately |
| 108945 | KARL SUSS | MA45 | Mask Aligner | Up to 100 mm | 1 | inquire | immediately | |
| 109001 | Karl Suss | MJB 3 | Mask Aligner | Up to 75 mm | 1 | as is where is | immediately | |
| 106897 | Karl Suss Micro Tec | MA200 | Mask Aligner with CIC1000 lamp housing | 200 mm | 1 | as is where is | immediately | |
| 108920 | Komatsu | G20K4-1 | 248 nm (KrF) excimer laser | LASER | 01.05.2001 | 2 | as is where is | immediately |
| 15066 | LAMBDA PHYSIK | Novaline K2005 | 248 nm excimer laser for ASML /300 | facilities | 30.06.2002 | 1 | as is where is | immediately |
| 33542 | Liebherr | FKV 3610 | Fridge for the safe storage of photoresist | facilities | 1 | as is where is | immediately | |
| 108852 | NEUTRONIX/QUINTEL | 7000 | Mask Aligner, with IR Backside Alignment, for up to 6" Wafers | 1 | inquire | |||
| 91376 | NIKON | NSR-204B | Scanner DUV (GIGAPHOTON G20K2 KRF laser) | 200 mm | 1 | as is where is | ||
| 91377 | NIKON | NSR-204B | Scanner DUV (GIGAPHOTON G20K2 KRF laser) | 200 mm | 1 | as is where is | ||
| 103238 | NIKON | NSR-S620D | 193 NM immersion scanner (EXCIMER LASER NOT INCLUDED) | 300 mm | 1 | as is where is | immediately | |
| 108091 | Nikon | NSR-S207 | DUV scanner 248 nm | 300 mm | 1 | as is where is | ||
| 108468 | Nikon | NSR-2005i8A | i-Line Stepper | 200 MM | 1 | as is where is | ||
| 108469 | Nikon | NSR-4425i | i-Line Wide-Field Stepper | 200 MM | 1 | as is where is | ||
| 108470 | Nikon | NSR-S308F | 193nm (ArF) Scanner | 300 mm | 1 | as is where is | ||
| 108904 | Nikon | NSR-S609B | ArF 193 nm scanner (Scanner) | 300 mm | 01.05.2005 | 1 | as is where is | immediately |
| 108923 | Nikon | NES1-H04 | Mini stepper | 100 mm | 01.05.2011 | 1 | as is where is | immediately |
| 108924 | Nikon | NSR-S207D | 248 nm (KrF) excimer exposure system | 300 mm | 1 | as is where is | immediately | |
| 108926 | Nikon | NSR-S204B | 248 nm (KrF) excimer exposure system | 200 mm | 01.06.2000 | 1 | as is where is | immediately |
| 108856 | OAI | Hybralign 400 | Mask Aligner, for up ro 200mm Wafers | 200 MM | 1 | inquire | ||
| 54208 | SemiNet Automation | Infinity SACS 251216-120-CE | Semi-Automatic Carousel Boxed Wafer Stocker | 200 mm | 01.10.2007 | 1 | as is where is | immediately |
| 53037 | Special Optics | Half silvered mirror 10" X 14" | spares | 1 | as is where is | immediately | ||
| 53038 | Special Optics | Custom | Motorized Iris 6" | spares | 1 | as is where is | immediately | |
| 53039 | Special Optics | Mirror, 9" X 7" | spares | 1 | as is where is | immediately | ||
| 53040 | Special Optics | APOD #113 | spares | 1 | as is where is | immediately | ||
| 53043 | Special Optics | Beam expander | spares | 1 | as is where is | immediately | ||
| 106541 | SUSS Microtec | MA200 | MASK ALIGNER | 150 mm/200 mm | 01.06.1999 | 1 | as is where is | immediately |
| 108877 | TAMARACK SCIENTIFIC | Mask Aligner, Contact Mask Exposure System | 1 | inquire | ||||
| 86118 | ULTRATECH | SSP 300E2 | GHI line stepper | 300 mm | 31.05.2004 | 1 | as is where is | immediately |
| 103807 | Ultratech | Titan II | Stepper | 150 mm | 1 | inquire | immediately | |
| 106553 | Ultratech | 4700 | Stepper | 150 mm/200 mm | 01.06.1996 | 1 | as is where is | immediately |
| 106554 | Ultratech | 6700 | Stepper | 150 mm/200 mm | 1 | as is where is | immediately | |
| 106556 | Ultratech | Saturn Spectrum 3e | GHI line stepper | 150 mm/200 mm | 01.06.2003 | 1 | as is where is | immediately |
| 108640 | Ultratech | Saturn Spectrum 3 | GHI line stepper | 150 mm/200 mm | 1 | as is where is | immediately |