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Used and Pre-owned Photolithography Equipment (Steppers and Scanners) for sale by fabsurplus.com

Please find below a list of used Lithography exposure equipment for sale by fabsurplus.com . Click on any listed item of used Lithography equipment to see further data. The dictionary definition of lithography is "a printing process that involves using a stone or metal block on which an image has been drawn" and it has been used for centuries as a printing technique. Photolithography - printing with light on a substrate - is used for printing in the fabrication of microelectronic devices. It can create very small patterns, down to the nanometer scale. When making complex devices, a wafer may get exposed using photolithography with a wafer stepper or scanner or a mask aligner many times. Precise photolithography requires extremely clean operating conditions.


SDI ID Manufacturer Model Description Version Vintage Q. ty Sales Conditions Lead Time
108151 ASML XT1400E 193 nm DUV SCANNER(ARF) 300 mm 01.06.2005 1 as is where is immediately
108385 ASML TWINSCAN AT:850D 248nm (KrF) Scanner 300 mm 1 as is where is
108387 ASML YieldStar S-100B Overlay Measurement System 300 mm 1 as is where is
108918 ASML XT1250D ArF Lithography Scanner 300 mm 01.05.2004 1 as is where is immediately
109286 ASML Twinscan AT850B 193nm DUV Scanner 300 mm 01.11.2002 1 as is where is immediately
109551 ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included 300 mm 01.05.2004 1 as is where is immediately
109620 ASML PAS 5500/55A I-line Stepper 1 inquire
110674 ASML PAS 5500/80B i line stepper 100-200 MM 01.06.1993 1 as is where is immediately
110685 ASML Yieldstar S100 Overlay measurement System 300 mm 01.06.2008 1 as is where is immediately
110703 ASML AT1100B Twinscan DUV Lithography exposure system 193 nm 200 mm and 300 mm 01.06.2001 1 as is where is immediately
110797 ASML Twinscan XT400G i LINE SCANNER 300 mm 1 as is where is immediately
110798 ASML Twinscan XT400F i LINE SCANNER 300 mm 1 as is where is immediately
110799 ASML Twinscan XT400F i LINE SCANNER 300 mm 1 as is where is immediately
111343 ASML XT-1900-Gi Immersion Lithography System 300 mm 01.06.2009 1 as is where is immediately
52153 Canon Chuck Tool Chuck Tool for EX3, EX4, i4, i5 200 mm 30.04.1999 1 as is where is immediately
52262 Canon 6736A reticle handling robot for i4, iW, i5, i5+, EX3, EX4, EX5, EX6 spares 01.06.1999 1 as is where is immediately
52265 Canon video impedance adapter 5 channel video impedance adapter spares 30.06.1999 1 as is where is immediately
52338 Canon BH8-2017-01 IL3-CD-PCB for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52341 Canon BH8-1980-01 EASRCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52342 Canon BH8-1979-01 EASLCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52346 Canon BH8-2022-01, BG8-3369, BG4-8680 EXP-CD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52347 Canon BH8-1938-01BG4-9386 BG8-2694 CD90-CD PCB assembly spares 1 as is where is immediately
52348 Canon BH8-2065-02, BG4-8805, BG8-3375 CD90-INTLK board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52360 Canon Zenith ZPS-250 Multiple voltage power supply 250Watts spares 30.06.1999 1 as is where is immediately
52365 Canon Shimaden SR25-2P-N-00699609 PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 2 as is where is immediately
52366 Canon Shimaden SR25-2P-N-00699609 PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52367 Canon Chino ES-600 Chart Recorder for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52379 CANON FUJITSU DENSO 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52380 CANON Fujitsu Denso 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52381 CANON Fujitsu Denso 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52384 Canon Fujitsu Denso 4247-E924 1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 1 as is where is immediately
52446 Canon Fujitsu Denso 4249-E922 4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
52447 CANON Fujitsu Denso 4249-E923 4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 01.06.1999 1 as is where is immediately
52448 CANON FUJITSU DENSO 4248-E922 2 channels power supply module for canon fpa 3000 series spares 30.06.1999 1 as is where is immediately
52450 Canon Fuji Denso 4248-E921 2 channels power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53020 CANON Fujitsu denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53021 Canon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53023 Canon Fujitsu Denso 4250-E921 Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53049 Canon BH8-1768-02 Library Sub Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 31.05.1999 1 as is where is immediately
53050 Canon BH8-1818-01 LD/PD board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6 spares 30.06.1999 1 as is where is immediately
53056 Canon BG9-4757, BH8--1069-01 AF DRV board for Canon FPA 1550 series spares 1 as is where is immediately
53057 Canon BG9-4760, BG83111, BH8-1071-02 SH/RH board for Canon FPA 1550 spares 30.06.1999 1 as is where is immediately
53058 Canon BG9-4761, BG8-3112, BH8-1071-01 SH/RH board FOR CANON FPA SERIES STEPPERS spares 30.06.1999 1 as is where is immediately
53059 Canon BH8-1073-01, BG9-4763, BG8-3114 PA SENSER board spares 01.06.1999 1 as is where is immediately
53060 Canon BG9-4764, BH8-1074-01 PA CCD board for Canon FPA series steppers spares 30.06.1999 1 as is where is immediately
53061 Canon BG9-4762, BG8-3113, BH8-1072-01 PA STAGE board for Canon 1550MarkIV series spares 30.06.1995 1 as is where is immediately
53062 Canon BG9-4758, BG8-3109, BH8-1070-02 SC/RC board for Canon FPA series steppers spares 30.06.1999 1 as is where is immediately
53063 Canon BG9-4759, BG8-3110, BH8-1070-02 SC/RC board for Canon fpa spares 30.06.1999 1 as is where is immediately
53066 Canon BG4-6365 PPC Pellicle Particle Checker Unit for FPA3000 series stepper iw i4 i5 ex3 ex4 ex5 ex6 spares 30.04.1997 1 as is where is immediately
53074 Canon FPA 3000 series extended reticle library extended reticle library 6 inch 01.06.1998 1 as is where is immediately
84774 Canon Chuck, 8 inch Wafer Chuck for EX3, EX4, i4, i5 200 mm 30.04.1999 1 as is where is immediately
95427 CANON FPA2500i3 i-Line Stepper 150 mm 01.05.1995 1 inquire immediately
95428 Canon FPA-2500i2 i Line Stepper 150mm 1 as is where is immediately
106020 Canon BG3-3868-000 MBD Unit (Masking Blade Driver) for Canon FPA5000ES2/ES2+ Spares 01.06.1999 1 as is where is immediately
108919 Canon FPA-6000 ES5 248 nm (KrF) excimer exposure system 300 mm 01.05.2003 1 as is where is immediately
109020 Canon FPA 5000 ES3 KrF Scanner (Scanner) 200 mm 01.05.2001 1 as is where is immediately
109105 Canon FPA 5500 iZ i-line stepper 300 mm 01.06.2001 1 as is where is immediately
109163 Canon FPA-5500 iZa i-Line Wide-Field Stepper 300mm 1 as is where is
110623 Canon FPA-5510iX I line stepper 300 mm 1 as is where is
111523 CANON PLA-501F Mask Aligner 200 MM 1 as is where is
106646 CARL ZEISS S-INDUSTRIAL 193 NM LASER FACILITIES 1 as is where is
52159 Cymer ELS 4300 Maintenance Tool kit and spare parts SPARES 01.06.1998 1 as is where is immediately
83513 Entegris RSPX-EUV-036 Reticle Direct Purge Cabinet Facilities 01.07.2010 1 as is where is immediately
109588 EVG 620 Mask Aligner (TSA) 150 mm 1 inquire
109594 EVG 620 Mask Aligner (TSA) 150 mm 1 inquire
111585 EVG Hercules NIL 200 Nanoimprint Lithography System up to 200 mm 01.06.2016 1 as is where is immediately
83515 Extraction Systems TMB 150 Photoresist Contamination Monitor System / Total Amine Analyzer Facilities 31.05.2004 1 as is where is immediately
111342 Gigaphoton G21K2-1 KrF excimer laser 248 nm Facilities 01.11.2003 1 as is where is immediately
110702 Heidelberg DWL-200 Laser Direct-Write Lithography System Up to 200 mm 01.06.2007 1 as is where is immediately
52301 Hitachi 545-5516 7 Channel Power Supply module spares 0 as is where is immediately
111356 JEOL jbx-3040mv E-beam lithography system 200 mm 01.06.2006 1 as is where is immediately
99394 KARL SUSS MA 150 Mask aligner (For spares use) 150 mm 1 as is where is immediately
108073 Karl Suss MA150 Mask Aligner 125 mm 1 as is where is
108833 KARL SUSS MA-4 Mask Aligner, IR Backside Alignment with Single Microscope, for up to 4" Wafers 1 inquire
108834 KARL SUSS MA-45 Mask Aligner, Front Side Alignment with Splitfield Microscope, for up to 4" Wafers 1 inquire
108906 Karl SUSS MA200 Mask Aligner 150 mm, 200 mm 01.05.1995 1 as is where is
108909 Karl SUSS MA200 Mask Aligner 150 mm-200 MM 01.05.1992 1 as is where is immediately
108939 Karl Suss MA 56 Mask Aligner 1 inquire 1 month
109597 Karl Suss MA150e Mask Aligner with TSA 150 mm 01.06.2007 1 inquire
109602 Karl Suss MJB3 350W Mask Aligner 75mm 1 inquire
109603 Karl Suss MA200 Compact Mask Aligner with TSA 200 mm 01.06.2010 1 inquire
109607 Karl Suss MA200 Compact Mask Aligner with TSA 200 mm 01.06.2010 1 inquire
109612 Karl Suss MA8/BA8 Gen 3 TSA/BSA Mask Aligner 200 mm 01.06.2010 1 as is all rebuilt
109615 Karl Suss MJB4 350W Mask Aligner 100 mm 1 inquire
110609 Karl Suss MA-200 Mask Aligner with CIC1000 lamp housing 200 mm 1 as is where is immediately
110611 KARL SUSS MJB-3 Mask Aligner 1 as is where is immediately
110612 KARL SUSS MA56 Mask Aligner 1 as is where is immediately
110699 Karl Suss MA 150 Mask Aligner 150 mm 1 as is where is immediately
106897 Karl Suss Micro Tec MA200 Mask Aligner with CIC1000 lamp housing -suitable for spare use 200 mm 1 as is where is immediately
108920 Komatsu G20K4-1 248 nm (KrF) excimer laser LASER 01.05.2001 2 as is where is immediately
15066 LAMBDA PHYSIK Novaline K2005 248 nm excimer laser for ASML /300 facilities 01.06.2002 1 as is where is immediately
33542 Liebherr FKV 3610 Fridge for the safe storage of photoresist facilities 1 as is where is immediately
91376 NIKON NSR-204B Scanner DUV (GIGAPHOTON G20K2 KRF laser) 200 mm 1 as is where is
91377 NIKON NSR-204B 248 nm (KrF) excimer exposure system 200 mm 01.06.2000 1 as is where is immediately
108904 Nikon NSR-S609B ArF 193 nm scanner (Scanner) 300 mm 01.05.2005 1 as is where is immediately
108923 Nikon NES1-H04 Mini stepper 100 mm 01.05.2011 1 as is where is immediately
109051 Nikon NSR-S203B 248 nm (KrF) excimer exposure system 200 mm 01.06.1999 1 as is where is immediately
109052 Nikon NSR-S203B 248 nm (KrF) excimer exposure system 200 mm 01.06.1998 1 as is where is immediately
109057 Nikon NSR-S307E 193 nm (ArF) excimer exposure system 300 mm 1 as is where is immediately
109072 Nikon NSR-S208D 248 nm (KrF) excimer exposure system 300 mm 01.06.2010 1 as is where is immediately
109215 Nikon NSR-S308F 193nm (ArF) Scanner 300mm 1 as is where is
109278 Nikon NSR2205 i14E i-line stepper 200 mm 01.05.2000 1 as is where is immediately
109536 Nikon NSR-SF100 i-line scan-field Stepper 200 mm 01.06.2003 1 as is all rebuilt immediately
110663 Nikon NSR-SF140 I-LINE SCANNER 300 mm 1 as is where is immediately
110664 Nikon NSR-S204B 248 nm (KrF) excimer exposure system 200 mm 1 as is where is immediately
110690 Nikon NSR 2205 I11D i line Stepper 200 mm 01.06.1997 1 as is where is immediately
110691 Nikon NSR 2205 I9C i line Stepper 200 mm 01.06.1994 1 as is where is immediately
110692 Nikon NSR S204B 248 nm DUV Scanner 200 mm 1 as is where is immediately
110729 Nikon NSR-S204B Photo-lithography 248 NM DUV Scanner with photo-track 300 MM 01.06.2002 1 as is where is immediately
111339 Nikon NSR-SF200 KrF (248 nm) Excimer Scan-Field Stepper 150 mm 01.04.2003 1 as is where is immediately
111344 Nikon NSR-S208D 248 nm Lithography System 300 mm 01.06.2008 1 as is where is immediately
111345 Nikon NSR-S208D 248 nm Lithography System 300 mm 01.06.2011 2 as is where is immediately
111396 Nikon R2205H Set of test reticles spares 4 as is where is immediately
108856 OAI Hybralign 400 Mask Aligner, for up ro 200mm Wafers 200 MM 1 inquire
108852 QUINTEL 7000 Mask Aligner, with IR Backside Alignment, for up to 6" Wafers 1 inquire immediately
54208 SemiNet Automation Infinity SACS 251216-120-CE Semi-Automatic Carousel Boxed Wafer Stocker 200 mm 01.10.2007 1 as is where is immediately
53037 Special Optics Half silvered mirror 10" X 14" spares 1 as is where is immediately
53038 Special Optics Custom Motorized Iris 6" spares 1 as is where is immediately
53039 Special Optics Mirror, 9" X 7" spares 1 as is where is immediately
53040 Special Optics APOD #113 spares 1 as is where is immediately
53043 Special Optics Beam expander spares 1 as is where is immediately
106541 SUSS Microtec MA200 MASK ALIGNER 150 mm/200 mm 01.06.1999 1 as is where is immediately
108877 TAMARACK SCIENTIFIC Mask Aligner, Contact Mask Exposure System 1 inquire
103807 Ultratech Titan II Stepper 150 mm 1 inquire immediately
106553 Ultratech 4700 Stepper 150 mm/200 mm 01.06.1996 1 as is where is immediately
106554 Ultratech 6700 Stepper 150 mm/200 mm 1 as is where is immediately


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