Photolithography Equipment (Steppers and Scanners) Pre-owned and used for sale

SDI ID	Manufacturer	Model	Description	Version	Vintage	Q. ty	Sales Conditions	Lead Time
86432	ASML	PAS2500/40	wafer stepper	125 mm		1	as is where is	immediately
86433	ASML	PAS2500/40	wafer stepper	125 mm		1	as is where is	immediately
86434	ASML	PAS2500/40	wafer stepper	125 mm		1	as is where is
86435	ASML	PAS2500/40	wafer stepper	125 mm		1	as is where is
88951	ASML	BA-COMBI-4X	reticle for asml	Spares		1	inquire	immediately
88952	ASML	BA-COMBI-4X	Reticle for ASML	Spares		1	inquire	immediately
88953	ASML	BA-RASTER	Test Reticle for an ASML	Spares		1	inquire	immediately
88954	ASML	BA-SETUP-IMAGIN	Reticle for ASML	Spares		1	inquire	immediately
88955	ASML	BA-SETUP-IMAGIN	Reticle for ASML	Spares		1	inquire	immediately
88956	ASML	BA-XY-709	Test Reticle for an ASML	Spares		1	inquire	immediately
88957	ASML	COMBI-4X	Test Reticle for an ASML	Spares		1	inquire	immediately
88958	ASML	COMBI-5-21-22	Test Reticle for an ASML	Spares		1	inquire	immediately
88959	ASML	COMBI-5-21-22	Test Reticle for an ASML	Spares		1	inquire	immediately
88960	ASML	COMBI-5-21-22	Test Reticle for an ASML	Spares		1	inquire	immediately
88961	ASML	FOCAL-4X-0.25	Test Reticle for an ASML	Spares		1	inquire	immediately
88962	ASML	FOCAL-4X-0.25	Test Reticle for an ASML	Spares		1	inquire	immediately
88964	ASML	HV-IMAGIN-300	Test Reticle for an ASML	Spares		1	inquire	immediately
88965	ASML	HV-IMAGIN-300	Test Reticle for an ASML	Spares		1	inquire	immediately
88966	ASML	HV-IMAGIN-300	Test Reticle for an ASML	Spares		1	inquire	immediately
88967	ASML	HV-IMAGIN-SC-0.18-LQ	Test Reticle for an ASML	Spares		1	inquire	immediately
88968	ASML	LATEX-BIG-MEK-BASE	Test Reticle for an ASML	Spares		1	inquire	immediately
88969	ASML	LATEX-BIG-MEK-BASE	Test Reticle for an ASML	Spares		1	inquire	immediately
88970	ASML	OVERLAY 4X	Test Reticle for an ASML	Spares		1	inquire	immediately
88971	ASML	OVERLAY 4X	Test Reticle for an ASML	Spares		1	inquire	immediately
88974	ASML	RASTER 130	Test Reticle for an ASML	Spares		1	inquire	immediately
88975	ASML	RASTER 130	Test Reticle for an ASML	Spares		1	inquire	immediately
88976	ASML	RASTER 130	Test Reticle for an ASML	Spares		1	inquire	immediately
88977	ASML	RASTER-4X	Test Reticle for an ASML	Spares		1	inquire	immediately
88978	ASML	RASTER-500	Test Reticle for an ASML	Spares		1	inquire	immediately
88980	ASML	SET-UP IMAGIN SC	Test Reticle for an ASML	Spares		1	inquire	immediately
88981	ASML	SET-UP IMAGIN SC	Test Reticle for an ASML	Spares		1	inquire	immediately
94524	ASML	XT-1700Fi	Immersion Scanner	300 mm	31.05.2012	1	as is where is
97046	ASML	Yeldstar S-100	Advanced Process Control / Yield Opimization System	300 mm		1	as is where is	immediately
98265	ASML	XT760F	248 nm DUV Scanner (KrF)	300 mm	01.04.2008	1	as is where is	immediately
99287	ASML	PAS 5500 / 400C	i-line scanner	200 mm	31.05.2001	1	as is where is	immediately
101015	ASML	XT1700 Gi	Immersion Lithography System	300 mm	30.04.2006	1
101844	ASML	XT1700Fi	ArF immersion lithography system	300 mm	01.08.2006	1	as is where is	immediately
102138	ASML	XT1250D	ArF Lithography Scanner	300 mm	31.05.2004	1	as is where is
102858	ASML	PAS5500-300C	DUV Stepper - Lens Unit only	200 mm		1	as is where is	immediately
102859	ASML	XT1700Fi	Immersion Scanner (Spare Parts Only)	300 mm		1	as is where is
103790	ASML	XT1700 Fi	Immersion Lithography System	300 mm	31.05.2009	1	as is where is	immediately
106043	ASML	TWINSCAN XT1250D	193nm (ArF) Scanner - Cymer laser not included	300 mm	01.05.2004	1	as is where is	immediately
106047	ASML	AT1100B	193 nm DUV Scanner	300 mm		1	as is where is	immediately
35998	Canon	FPA5000 ES3	DUV Stepper, Step and Scan System	200 mm	31.05.2000	1	as is where is	immediately
36503	Canon	FPA5000 ES3	DUV SCANNER 248 NM (SMIF)	200 mm	31.07.2001	1	as is where is	immediately
52153	Canon	Chuck Tool	Chuck Tool for EX3, EX4, i4, i5	200 mm	30.04.1999	1	as is where is	immediately
52262	Canon	6736A	reticle handling robot for i4, iW, i5, i5+, EX3, EX4, EX5, EX6	spares	30.06.1999	1	as is where is	immediately
52265	Canon	video impedance adapter	5 channel video impedance adapter	spares	30.06.1999	1	as is where is	immediately
52338	Canon	BH8-2017-01	IL3-CD-PCB for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52341	Canon	BH8-1980-01	EASRCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52342	Canon	BH8-1979-01	EASLCD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52346	Canon	BH8-2022-01, BG8-3369, BG4-8680	EXP-CD Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52347	Canon	BH8-1938-01	A1-M1-2 board	spares		1	as is where is	immediately
52348	Canon	BH8-2065-02, BG4-8805, BG8-3375	CD90-INTLK board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52359	Canon	FPA 3000 series	HP-UX Workstation A2615A 9.05 10.20 11.00 11.00 11i	spares	31.01.1997	1	as is where is	immediately
52360	Canon	Zenith ZPS-250	Multiple voltage power supply 250Watts	spares	30.06.1999	1	as is where is	immediately
52365	Canon	Shimaden SR25-2P-N-00699609	PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	2	as is where is	immediately
52366	Canon	Shimaden SR25-2P-N-00699609	PDI CONTROLLER for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52367	Canon	Chino ES-600	Chart Recorder for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52379	CANON	FUJITSU DENSO 4247-E924	1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52380	CANON	Fujitsu Denso 4247-E924	1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52381	CANON	Fujitsu Denso 4247-E924	1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52384	Canon	Fujitsu Denso 4247-E924	1ch power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares		1	as is where is	immediately
52446	Canon	Fujitsu Denso 4249-E922	4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52447	CANON	Fujitsu Denso 4249-E923	4 channel power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
52448	CANON	FUJITSU DENSO 4248-E922	2 channels power supply module for canon fpa 3000 series	spares	30.06.1999	1	as is where is	immediately
52450	Canon	Fuji Denso 4248-E921	2 channels power supply module for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
53020	CANON	Fujitsu denso 4250-E921	Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
53021	Canon	Fujitsu Denso 4250-E921	Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
53023	Canon	Fujitsu Denso 4250-E921	Hi-Voltage power supply for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
53049	Canon	BH8-1768-02	Library Sub Board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	31.05.1999	1	as is where is	immediately
53050	Canon	BH8-1818-01	LD/PD board for Canon FPA 3000 series iw i4 i5 ex3 ex4 ex5 ex6	spares	30.06.1999	1	as is where is	immediately
53056	Canon	BG9-4757, BH8--1069-01	AF DRV board for Canon FPA 1550 series	spares		1	as is where is	immediately
53057	Canon	BG9-4760, BG83111, BH8-1071-02	SH/RH board for Canon FPA 1550	spares	30.06.1999	1	as is where is	immediately
53058	Canon	BG9-4761, BG8-3112, BH8-1071-01	SH/RH board FOR CANON FPA SERIES STEPPERS	spares	30.06.1999	1	as is where is	immediately
53059	Canon	BH8-1073-01, BG9-4763, BG8-3114	PA SENSER board	spares	30.06.1999	1	as is where is	immediately
53060	Canon	BG9-4764, BH8-1074-01	PA CCD board for Canon FPA series steppers	spares	30.06.1999	1	as is where is	immediately
53061	Canon	BG9-4762, BG8-3113, BH8-1072-01	PA STAGE board for Canon 1550MarkIV series	spares	30.06.1995	1	as is where is	immediately
53062	Canon	BG9-4758, BG8-3109, BH8-1070-02	SC/RC board for Canon FPA series steppers	spares	30.06.1999	1	as is where is	immediately
53063	Canon	BG9-4759, BG8-3110, BH8-1070-02	SC/RC board for Canon fpa	spares	30.06.1999	1	as is where is	immediately
53066	Canon	BG4-6365	PPC Pellicle Particle Checker Unit for FPA3000 series stepper iw i4 i5 ex3 ex4 ex5 ex6	spares	30.04.1997	1	as is where is	immediately
53074	Canon	FPA 3000 series extended reticle library	extended reticle library	6 inch	01.06.1998	1	as is where is	immediately
54816	CANON	FPA 5000 ES3	DUV lithography exposure system	300 mm	31.05.2001	1	as is where is	immediately
75027	Canon	FPA 5000 ES3	248 nm duv step and scan lithography exposure system	200 mm	31.03.2001	1	as is where is	immediately
84774	Canon	Chuck, 8 inch	Wafer Chuck for EX3, EX4, i4, i5	200 mm	30.04.1999	1	as is where is	immediately
90687	CANON	FPA 5000 ES6	248 NM SCANNER	300 MM	30.06.2004	1	as is where is	immediately
91369	CANON	ES2	KrF Scanner	200 mm		1	as is where is
93079	CANON	FPA-5000 ES2 (Open)	KrF Scanner (NO Laser)	200 mm		1	as is where is
93080	CANON	FPA-5000 ES2+ (Open)	KrF Scanner (NO Laser)	200 mm		1	as is where is
93081	CANON	FPA-5000 ES2+ (Open)	KrF Scanner (NO Laser)	200 mm		1	as is where is
95427	CANON	FPA2500i3	i-Line Stepper	150 mm	01.05.1995	1	as is where is	immediately
95428	Canon	FPA-2500i2	i Line Stepper	150mm		1	as is where is	immediately
95635	Canon	MPA-600FA	Aligner	150mm	31.05.1988	1	as is all rebuilt	immediately
97052	Canon	FPA 5510 iZ	i-line stepper			1		immediately
98101	Canon	FPA-5500iZ+	I-Line Stepper	300 mm	31.05.2005	1	as is where is
99848	Canon	FPA-5500iZa	I-Line Stepper			1	inquire
102155	Canon	FPA-6000 ES5	KrF	300 mm	31.05.2003	1	as is where is
102687	Canon	FPA-6000 ES5	248nm (KrF) Scanner	300 mm		1	as is where is
103726	Canon	FPA-3000 i4	i line stepper	200 mm	31.05.1995	3	as is where is	immediately
106020	Canon	BG3-3868-000	MBD Unit (Masking Blade Driver) for Canon FPA5000ES2/ES2+	Spares	30.06.1999	1	as is where is	immediately
106031	Canon	FPA5500-iZa	i-line wide field stepper	300 mm	01.06.2006	1	as is where is	immediately
106063	CANON	FPA3000IW	Wide-field i-line stepper	200 mm	01.06.2000	1	as is where is	immediately
52159	Cymer	4300	Maintenance Tool kit and spare parts	SPARES		1	as is where is	immediately
86477	Cymer	5x00 6x00 and 7x00	Electronic Paddle for the excimer laser chamber	Spares		30	inquire	immediately
100341	Cymer	XLA240	193 nm cymer laser	Facilities		3	as is where is	immediately
102467	CYMER	XLA-360	Excimer Laser		28.02.2006	1	as is where is	immediately
103218	Cymer	XLA 360	Excimer laser, 193 nm	Facilities		1	as is where is	immediately
83513	Entegris	RSPX-EUV-036	EUV Reticle stocker	Facilities	31.07.2010	1	as is where is	immediately
83515	Extraction Systems	TMB 150	Photoresist Contamination Monitor System / Total Amine Analyzer	Facilities	31.05.2004	1	as is where is	immediately
86436	Fusion	M150-PC	UV Bake	150 mm		1	as is where is
86437	Fusion	M150-PC	UV Bake	150 mm		1	as is where is
98317	Gigaphoton	GT60A4	193 NM excimer laser	Facilities	31.07.2006	1	as is where is	immediately
99854	Gigaphoton	G42A4	Laser System		31.05.2004	1	inquire
52301	Hitachi	545-5516	7 Channel Power Supply module	spares		0	as is where is	immediately
69335	Karl Suss	MA56	MASK ALIGNER			1	inquire	immediately
87628	Karl Suss	MA25	Mask Aligner	4 inch		1	as is where is	immediately
87631	Karl Suss	MBJ3	Mask Aligner	3 inch		1	as is where is	immediately
88560	Karl SUSS	MA200	Aligner	150 mm-200 MM	31.05.1992	1	as is where is
90238	KARL SUSS	MA	Mask Aligner			1	as is where is	immediately
90973	Karl SUSS	MA200	Mask Aligner	150 mm, 200 mm	31.05.1995	1	as is where is
93721	Karl Suss	MJB3	Precision High Performance Mask Alignment and Exposure System	75 MM		1	as is where is	immediately
97103	Karl Suss	MA 150 CC	Mask Aligner	100 mm and 150 mm	01.06.1997	1	as is where is	immediately
98398	Karl Suss	Ma 150CC	Top Side/Back Side Aligner	150 mm		2	as is where is
99392	KARL SUSS	MA56	Mask Aligner			1	as is where is	immediately
99394	KARL SUSS	MA 150	Mask Aligner (For spares use)	150 mm		1	as is where is	immediately
99402	KARL SUSS	MJB-3	Mask Aligner			1	as is where is	immediately
99437	Karl Suss	MA 150	Mask Aligner	150 mm	31.05.1988	1	as is where is	immediately
100707	Karl Suss	MA 45	Mask Aligner			1	as is where is
103004	Karl Suss	MA 150M	Manual Mask Aligner	150 mm		1	as is where is
103212	Karl Suss	MA150	Mask Aligner	100 mm		1	as is where is
88564	Komatsu	G20K4-1	KrF Laser	-	31.05.2001	1	as is where is
88565	Komatsu	G20K4-1	KrF Laser	-	31.05.2002	1	as is where is
93312	Komatsu	KrF excimer	248 nm laser	facilities		1	as is where is	immediately
15066	LAMBDA PHYSIK	Novaline K2005	248 nm excimer laser for ASML /300	facilities	30.06.2002	1	as is where is	immediately
95129	Leica	EBMF10.5	Electron Beam Pattern Generator	Laboratory		1	as is where is	immediately
33542	Liebherr	FKV 3610	Fridge for the safe storage of photoresist	facilities		1	as is where is	immediately
103169	Molecular Imprints	Imprio 55	Nano Imprint Lithography System	200 mm	28.02.2009	1	as is where is	immediately
71741	Nanofab	Nano150	Ion Beam Lithography / Implanter System	150 mm		1	inquire	immediately
105883	Nanofab	Nano200	Ion Beam Lithography / Implanter System	200 mm		1	inquire	immediately
77042	Nikon	NSR2205i8A	i-line Stepper, set up for SiC wafers	150 mm	31.05.1993	1	inquire	immediately
86207	Nikon	NSR-S306C	ArF Scanner	200 mm	31.05.2002	1	as is where is	immediately
88566	Nikon	NES1-H04	Mini stepper	100 mm	31.05.2011	1	as is where is
91372	NIKON	Nikon S202+	Scanner	N/a		1	as is where is
91376	NIKON	NSR-204B	Scanner DUV (GIGAPHOTON G20K2 KRF laser)	200 mm		1	as is where is
91377	NIKON	NSR-204B	Scanner DUV (GIGAPHOTON G20K2 KRF laser)	200 mm		1	as is where is
92850	Nikon	NSR-S609B	ArF 193 nm scanner (Scanner)	300 mm	31.05.2005	1	as is where is	immediately
98414	Nikon	NSR-1505G4C	5x Reduction Stepper	150 mm		1	as is where is
98415	Nikon	NSR-1505G4C	5x Reduction Stepper	150 mm		1	as is where is
98416	Nikon	NSR-1505G4C	5x Reduction Stepper	150 mm		1	as is where is
98417	Nikon	NSR-1505G4C	5x Reduction Stepper	150 mm		1	as is where is
98894	Nikon	NSR-2005i10C	PHOTO(LITHO)	150mm	31.05.1994	1	as is where is
99290	NIKON	NSR-S204B	KrF Scanner, 248 nm	200 mm	31.12.2001	1	inquire	immediately
101813	Nikon	4425i	Stepper	150mm		1	inquire	1 month
101847	Nikon	NSR 2205 i14e2	i line stepper	200 mm		1	as is where is	immediately
102489	NIKON	NSR-1505G4D	G-line Lithography Step and Repeat System		31.03.1988	1	as is where is	immediately
102592	NIKON	S205	Krf / 248 nm Scanner	300 mm		1	inquire	immediately
102620	NIKON	S204B	Wafer Stepper (Krf 248 nm)	200 mm	30.04.2000	1		immediately
103238	NIKON	NSR-S620D	193 NM immersion scanner	300 mm		1	as is where is	immediately
106044	Nikon	NSR-SF130	I-line scanner	300 mm	01.03.2005	1		immediately
106045	Nikon	NSR-SF140	I-line scanner	300 mm	01.08.2010	1		immediately
106052	Nikon	NSR2205-i12D	I-line stepper	200 mm		1	as is where is	immediately
106096	Nikon	NSR2205-i12C	I-line stepper	150 mm	01.09.1997	1	as is where is	immediately
103013	Quintel	UL 7000 IR	Mask Aligner	50-200 mm	01.05.2001	1	inquire	immediately
54208	Seminet	Infinity SACS 251216-120-CE	Semi-Automatic Carousel Boxed Reticle Stocker	facilities	31.10.2007	1	as is where is	immediately
53037	Special Optics		Half silvered mirror 10" X 14"	spares		1	as is where is	immediately
53038	Special Optics	Custom	Motorized Iris 6"	spares		1	as is where is	immediately
53039	Special Optics		Mirror, 9" X 7"	spares		1	as is where is	immediately
53040	Special Optics		APOD #113	spares		1	as is where is	immediately
53043	Special Optics		Beam expander	spares		1	as is where is	immediately
95007	SVGL	MS III	DUV LITHOGRAPHY SYSTEM, 248 NM	200 MM	31.05.1999	1	as is where is
95008	SVGL	MS III	DUV LITHOGRAPHY SYSTEM, 248 NM	200 MM	31.05.2002	1	as is where is
86118	ULTRATECH	SSP 300E2	GHI line stepper	300 mm	31.05.2004	1	as is where is	immediately
95611	Ultratech	XLS 200	Wafer Stepper	150mm / 6""	31.10.2001	1	inquire	immediately
96663	Ultratech	1500	Projection Stepper	150 mm	31.12.1995	1	as is all rebuilt	immediately
97983	Ultratech	Saturn Spectrum 3e	STEPPER (FOR SPARES USE)	300 MM		1	as is where is	immediately
98440	Ultratech	1500	Wafer Stepper (For spares use)	150 mm	31.05.1997	1	as is where is
103807	Ultratech	Titan II	Stepper	150 mm		1	inquire	immediately
101822	Ulvac	SCV-3545R	Inline Stepper		31.05.2005	1	inquire	immediately
86438	Yield Engineering Systems	YES-5	wafer prime oven	150 mm		1	as is where is
86439	Yield Engineering Systems	YES-5	wafer prime oven	150 mm		1	as is where is
86440	Yield Engineering Systems	YES-5	wafer prime oven	150 mm		1	as is where is
71497	ZENITH	ZPS-400	Multiple voltage power supply	spares		1	as is where is	immediately

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