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ASML Twinscan AT850B 193nm DUV Scanner for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ASML Twinscan AT850B 193nm DUV Scanner.
Please click on the "Get Quote" button at the end of the Twinscan AT850B description, if you'd like to get a quotation, photos and specifications of this 193nm DUV Scanner, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASML Twinscan AT850B 193nm DUV Scanner is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ASML Twinscan AT850B Equipment Details

SDI ID: 109286
Manufacturer: ASML
Model: Twinscan AT850B
Description: 193nm DUV Scanner
Version: 300 mm
Vintage: 01.11.2002
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-This machine is a KrF (248 nm) Step & Scan 300 mm dual-stage lithography system capable of 110 nm resolution.
-Carl Zeiss Starlith 850 projection optics.
-Numerical aperture (NA) 0.80.
-Throughput 95 of 300 mm wafers per hour.
-The "Twinscan" platform, with two stages working together, allows wafer alignment and leveling to take place wat the same time as another wafer is being exposed,which increases productivity and accuracy. The separation of the alignment and leveling stage from the exposure operation reduces overhead time while improving accuracy.
-Designed for 110 nm design rule
-Has CE mark
-Detailed configuration is available on request.
-Recent lens data is available on request.
-Light-source Type:Cymer Laser: ELS6610K 20W, 8mJ, 2.5kHz
-Further photos available on request.


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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