SDI fabsurplus.com is pleased to announce the availability of the following listed used ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included.
Please click on the "Get Quote" button at the end of the TWINSCAN XT1250D description, if you'd like to get a quotation, photos and specifications of this 193nm (ArF) Scanner - Cymer laser not included, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASML TWINSCAN XT1250D 193nm (ArF) Scanner - Cymer laser not included is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
SDI ID: | 109551 |
---|---|
Manufacturer: | ASML |
Model: | TWINSCAN XT1250D |
Description: | 193nm (ArF) Scanner - Cymer laser not included |
Version: | 300 mm |
Vintage: | 01.05.2004 |
Quantity: | 1 |
Sales Condition: | as is where is |
Lead Time: | immediately |
Sales Price: | Inquire |
Comments: | ASML TWINSCAN XT 1250D ArF SCANNER Please note: The Cymer laser from this tool has been sold. So, it would be necessary to purchase another Cymer laser to replace it with. The Cymer laser is a completely separate sub-system from the main equipment. Hence, adding another laser to the system will not present technical problems. LENS DATA (SEE ALSO ATTACHED DOCUMENT) :-
Operator:ASML Machine:6xxx Release:4.1.0 Date:16/07/2015 Time:16:10
Report Filename : EMCA.68 Report Path : TM/Projection/StrayLightMonitoring/EMCA.log/ Machine Type : 1250D
Testname : Straylight At Multiple Opaque Squares Start Time : Thu, 16 Jul 2015 16:07:37 096389us +0800 Stop Time : Thu, 16 Jul 2015 16:10:47 841204us +0800 Execution Time : 00:03:10 Test Run Result : Finished Test Status : Test is Finished Comment :
+----------------------------------+------------+-----------+----------+ | Step | Start Time | Stop Time | Status | +==================================+============+===========+==========+ | Prepare machine | 16:07:37 | 16:09:15 | Finished | | Perform TIS measurements | 16:09:15 | 16:10:08 | Finished | | Perform Spot sensor measurements | 16:10:08 | 16:10:27 | Finished | | Create testlog | 16:10:27 | 16:10:40 | Finished | | Unload reticle | 16:10:40 | 16:10:46 | Finished | | Calculate stray light | 16:10:46 | 16:10:47 | Finished | +----------------------------------+------------+-----------+----------+ +----------------+ | Execution Time | +================+ | 00:01:37 | | 00:00:53 | | 00:00:18 | | 00:00:13 | | 00:00:05 | | 00:00:01 | +----------------+
Main Results Test Log Name : 6xxx Machine Number : 6xxx Machine Type : 1250D Lens Number : 0122xxxx ELLE ID : Measurement Time : 07/16/2015 16:10 Comment : Pupil Shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Reticle ID : 45563154P009 Number of Cycles : 1 Attenuator Factor : 0.600 Chuck ID : CHUCK_ID_1 TIS Plate ID : PLATE_1 PGA gain : PGA_GAIN_10DB Number of Samples : 100 Defocus : 0.000 [um] Rema Usage TIS : Homed Number of Laser Pulses : 50 Laser Frequency : 4000 [Hz] Energy : 11.25 [mJ] Rema Usage Spot Sensor : Homed Dark Current : 576 [bits] Reference Blocksize : 33 [um] Straylight at ref. blocksize : 1.35 [%] Max. Straylight position X : -3.55 [mm] Y : 6.60 [mm]
Detailled Results +----------------+-----------+----------+-------------+----------+ | position | | | | | |--------+-------+ | | | | | X | Y | sensor | pad size | Stray Light | used ref | | [mm] | [mm] | | [um] | [%] | | +========+=======+===========+==========+=============+==========+ | -10.25 | 7.00 | TIS Ratio | 108 | 0.84 | 1 | | -10.25 | 6.40 | TIS Ratio | 68 | 0.88 | 1 | | -10.55 | 7.00 | TIS Ratio | 48 | 1.03 | 1 | | -10.55 | 6.80 | TIS Ratio | 36 | 1.02 | 1 | | -10.55 | 6.60 | TIS Ratio | 33 | 1.04 | 1 | | -10.55 | 6.40 | TIS Ratio | 30 | 1.12 | 1 | | -10.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 | | -10.50 | 10.80 | TIS Ratio | 1100 | 0.49 | 3 | | -10.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 | | -6.75 | 7.00 | TIS Ratio | 108 | 0.85 | 4 | | -6.75 | 6.40 | TIS Ratio | 68 | 0.91 | 4 | | -7.05 | 7.00 | TIS Ratio | 48 | 1.00 | 4 | | -7.05 | 6.80 | TIS Ratio | 36 | 1.04 | 4 | | -7.05 | 6.60 | TIS Ratio | 33 | 0.97 | 4 | | -7.05 | 6.40 | TIS Ratio | 30 | 1.12 | 4 | | -7.00 | 8.30 | TIS Ratio | 0 | 0.00 | 0 | | -7.00 | 10.80 | TIS Ratio | 1100 | 0.53 | 6 | | -7.00 | 8.45 | TIS Ratio | 0 | 0.00 | 0 | | -3.25 | 7.00 | TIS Ratio | 108 | 1.01 | 7 | | -3.25 | 6.40 | TIS Ratio | 68 | 1.26 | 7 | | -3.55 | 7.00 | TIS Ratio | 48 | 1.17 | 7 | | -3.55 | 6.80 | TIS Ratio | 36 | 1.25 | 7 | | -3.55 | 6.60 | TIS Ratio | 33 | 1.35 | 7 | | -3.55 | 6.40 | TIS Ratio | 30 | 1.28 | 7 | | -3.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 | | -3.50 | 10.80 | TIS Ratio | 1100 | 0.60 | 9 | | -3.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 | | 0.25 | 7.00 | TIS Ratio | 108 | 0.70 | 10 | | 0.25 | 6.40 | TIS Ratio | 68 | 0.92 | 10 | | -0.05 | 7.00 | TIS Ratio | 48 | 0.97 | 10 | | -0.05 | 6.80 | TIS Ratio | 36 | 1.01 | 10 | | -0.05 | 6.60 | TIS Ratio | 33 | 1.22 | 10 | | -0.05 | 6.40 | TIS Ratio | 30 | 1.17 | 10 | | 0.00 | 8.30 | TIS Ratio | 0 | 0.00 | 0 | | 0.00 | 10.80 | TIS Ratio | 1100 | 0.57 | 12 | | 0.00 | 8.45 | TIS Ratio | 0 | 0.00 | 0 | | 3.75 | 7.00 | TIS Ratio | 108 | 0.71 | 13 | | 3.75 | 6.40 | TIS Ratio | 68 | 0.88 | 13 | | 3.45 | 7.00 | TIS Ratio | 48 | 0.89 | 13 | | 3.45 | 6.80 | TIS Ratio | 36 | 0.99 | 13 | | 3.45 | 6.60 | TIS Ratio | 33 | 1.02 | 13 | | 3.45 | 6.40 | TIS Ratio | 30 | 1.13 | 13 | | 3.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 | | 3.50 | 10.80 | TIS Ratio | 1100 | 0.57 | 15 | | 3.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 | | 7.25 | 7.00 | TIS Ratio | 108 | 0.87 | 16 | | 7.25 | 6.40 | TIS Ratio | 68 | 0.92 | 16 | | 6.95 | 7.00 | TIS Ratio | 48 | 1.00 | 16 | | 6.95 | 6.80 | TIS Ratio | 36 | 1.01 | 16 | | 6.95 | 6.60 | TIS Ratio | 33 | 0.99 | 16 | | 6.95 | 6.40 | TIS Ratio | 30 | 1.12 | 16 | | 7.00 | 8.30 | TIS Ratio | 0 | 0.00 | 0 | | 7.00 | 10.80 | TIS Ratio | 1100 | 0.45 | 18 | | 7.00 | 8.45 | TIS Ratio | 0 | 0.00 | 0 | | 10.75 | 7.00 | TIS Ratio | 108 | 0.49 | 19 | | 10.75 | 6.40 | TIS Ratio | 68 | 0.43 | 19 | | 10.45 | 7.00 | TIS Ratio | 48 | 0.67 | 19 | | 10.45 | 6.80 | TIS Ratio | 36 | 0.66 | 19 | | 10.45 | 6.60 | TIS Ratio | 33 | 0.74 | 19 | | 10.45 | 6.40 | TIS Ratio | 30 | 0.89 | 19 | | 10.50 | 8.30 | TIS Ratio | 0 | 0.00 | 0 | | 10.50 | 10.80 | TIS Ratio | 1100 | 0.39 | 21 | | 10.50 | 8.45 | TIS Ratio | 0 | 0.00 | 0 | | -10.50 | 10.80 | Spot | 1100 | 0.49 | 2 | | -10.50 | 9.60 | Spot | 0 | 0.00 | 0 | | -7.00 | 10.80 | Spot | 1100 | 0.53 | 5 | | -7.00 | 9.60 | Spot | 0 | 0.00 | 0 | | -3.50 | 10.80 | Spot | 1100 | 0.60 | 8 | | -3.50 | 9.60 | Spot | 0 | 0.00 | 0 | | 0.00 | 10.80 | Spot | 1100 | 0.57 | 11 | | 0.00 | 9.60 | Spot | 0 | 0.00 | 0 | | 3.50 | 10.80 | Spot | 1100 | 0.57 | 14 | | 3.50 | 9.60 | Spot | 0 | 0.00 | 0 | | 7.00 | 10.80 | Spot | 1100 | 0.45 | 17 | | 7.00 | 9.60 | Spot | 0 | 0.00 | 0 | | 10.50 | 10.80 | Spot | 1100 | 0.39 | 20 | | 10.50 | 9.60 | Spot | 0 | 0.00 | 0 | +--------+-------+-----------+----------+-------------+----------+ +--------+----------+--------+--------+--------+-------+ | | | | | | | | | | | | | | | ref id | used cal | cal id | Av TIS | cal | Av SS | +========+==========+========+========+========+=======+ | 0 | 1 | 0 | 282.9 | -265.6 | 0.00 | | 0 | 1 | 0 | 283.6 | -265.6 | 0.00 | | 0 | 1 | 0 | 286.8 | -265.6 | 0.00 | | 0 | 1 | 0 | 286.6 | -265.6 | 0.00 | | 0 | 1 | 0 | 287.0 | -265.6 | 0.00 | | 0 | 1 | 0 | 288.5 | -265.6 | 0.00 | | 1 | 1 | 0 | 2319.6 | 0.0 | 0.00 | | 0 | 1 | 1 | 275.7 | -265.6 | 0.00 | | 3 | 0 | 1 | 2331.2 | 0.0 | 0.00 | | 0 | 2 | 0 | 285.3 | -267.8 | 0.00 | | 0 | 2 | 0 | 286.6 | -267.8 | 0.00 | | 0 | 2 | 0 | 288.3 | -267.8 | 0.00 | | 0 | 2 | 0 | 289.2 | -267.8 | 0.00 | | 0 | 2 | 0 | 287.7 | -267.8 | 0.00 | | 0 | 2 | 0 | 290.8 | -267.8 | 0.00 | | 4 | 2 | 0 | 2328.0 | 0.0 | 0.00 | | 0 | 2 | 2 | 278.6 | -267.8 | 0.00 | | 6 | 0 | 2 | 2309.5 | 0.0 | 0.00 | | 0 | 3 | 0 | 285.0 | -264.7 | 0.00 | | 0 | 3 | 0 | 290.1 | -264.7 | 0.00 | | 0 | 3 | 0 | 288.4 | -264.7 | 0.00 | | 0 | 3 | 0 | 290.0 | -264.7 | 0.00 | | 0 | 3 | 0 | 292.0 | -264.7 | 0.00 | | 0 | 3 | 0 | 290.5 | -264.7 | 0.00 | | 7 | 3 | 0 | 2281.4 | 0.0 | 0.00 | | 0 | 3 | 3 | 277.0 | -264.7 | 0.00 | | 9 | 0 | 3 | 2301.2 | 0.0 | 0.00 | | 0 | 4 | 0 | 277.3 | -263.1 | 0.00 | | 0 | 4 | 0 | 281.8 | -263.1 | 0.00 | | 0 | 4 | 0 | 282.7 | -263.1 | 0.00 | | 0 | 4 | 0 | 283.5 | -263.1 | 0.00 | | 0 | 4 | 0 | 287.8 | -263.1 | 0.00 | | 0 | 4 | 0 | 286.7 | -263.1 | 0.00 | | 10 | 4 | 0 | 2282.6 | 0.0 | 0.00 | | 0 | 4 | 4 | 274.5 | -263.1 | 0.00 | | 12 | 0 | 4 | 2251.7 | 0.0 | 0.00 | | 0 | 5 | 0 | 278.2 | -264.0 | 0.00 | | 0 | 5 | 0 | 281.6 | -264.0 | 0.00 | | 0 | 5 | 0 | 281.8 | -264.0 | 0.00 | | 0 | 5 | 0 | 283.8 | -264.0 | 0.00 | | 0 | 5 | 0 | 284.3 | -264.0 | 0.00 | | 0 | 5 | 0 | 286.6 | -264.0 | 0.00 | | 13 | 5 | 0 | 2262.3 | 0.0 | 0.00 | | 0 | 5 | 5 | 275.5 | -264.0 | 0.00 | | 15 | 0 | 5 | 2286.1 | 0.0 | 0.00 | | 0 | 6 | 0 | 277.1 | -259.4 | 0.00 | | 0 | 6 | 0 | 278.1 | -259.4 | 0.00 | | 0 | 6 | 0 | 279.8 | -259.4 | 0.00 | | 0 | 6 | 0 | 279.9 | -259.4 | 0.00 | | 0 | 6 | 0 | 279.6 | -259.4 | 0.00 | | 0 | 6 | 0 | 282.1 | -259.4 | 0.00 | | 16 | 6 | 0 | 2294.1 | 0.0 | 0.00 | | 0 | 6 | 6 | 268.4 | -259.4 | 0.00 | | 18 | 0 | 6 | 2267.8 | 0.0 | 0.00 | | 0 | 7 | 0 | 273.6 | -263.5 | 0.00 | | 0 | 7 | 0 | 272.2 | -263.5 | 0.00 | | 0 | 7 | 0 | 277.1 | -263.5 | 0.00 | | 0 | 7 | 0 | 276.9 | -263.5 | 0.00 | | 0 | 7 | 0 | 278.5 | -263.5 | 0.00 | | 0 | 7 | 0 | 281.6 | -263.5 | 0.00 | | 19 | 7 | 0 | 2295.2 | 0.0 | 0.00 | | 0 | 7 | 7 | 271.4 | -263.5 | 0.00 | | 21 | 0 | 7 | 2289.7 | 0.0 | 0.00 | | 0 | 0 | 1 | 0.0 | 0.0 | 0.00 | | 2 | 0 | 1 | 0.0 | 0.0 | 0.91 | | 0 | 0 | 2 | 0.0 | 0.0 | 0.00 | | 5 | 0 | 2 | 0.0 | 0.0 | 0.91 | | 0 | 0 | 3 | 0.0 | 0.0 | 0.01 | | 8 | 0 | 3 | 0.0 | 0.0 | 0.92 | | 0 | 0 | 4 | 0.0 | 0.0 | 0.01 | | 11 | 0 | 4 | 0.0 | 0.0 | 0.91 | | 0 | 0 | 5 | 0.0 | 0.0 | 0.01 | | 14 | 0 | 5 | 0.0 | 0.0 | 0.91 | | 0 | 0 | 6 | 0.0 | 0.0 | 0.00 | | 17 | 0 | 6 | 0.0 | 0.0 | 0.92 | | 0 | 0 | 7 | 0.0 | 0.0 | 0.00 | | 20 | 0 | 7 | 0.0 | 0.0 | 0.92 | +--------+----------+--------+--------+--------+-------+
Operator:ASML Machine:6xxx Release:4.1.0 Date:13/05/2015 Time:21:07
Report Filename : EMZQ.76 Report Path : TM/Projection/AberrationsQualification/ILIAS/EMZQ.log/ Machine Type : 1250D
Testname : Ilias Lens Qualification Start Time : Wed, 13 May 2015 20:03:24 088689us +0800 Stop Time : Wed, 13 May 2015 21:07:27 542791us +0800 Execution Time : 01:04:03 Test Run Result : Finished Test Status : Test is Finished Results Validation : N.A. Measurement Quality : N.A. Comment :
+----------------------+------------+-----------+----------+----------------+ | Step | Start Time | Stop Time | Status | Execution Time | +======================+============+===========+==========+================+ | Initialize Data | 20:03:24 | 20:03:25 | Finished | 00:00:01 | | Prepare Machine | 20:03:25 | 20:06:04 | Finished | 00:02:39 | | Perform Measurements | 20:06:04 | 21:06:35 | Finished | 01:00:30 | | Model | 21:06:35 | 21:07:27 | Finished | 00:00:52 | +----------------------+------------+-----------+----------+----------------+
Scenario Inputs
Selected Scenario : Manual Verification Set : No Verification Overrule Inputs : Yes Manual Scenario Selected : Yes
Test Info Machine ID : 6xxx Machine type : 1250D Lens ID : 0122xxxx ELLE ID : 000000 Testlog : ZSQF_6xxx_20150513_2006_manual.tlg Date and time of measurement : 05/13/2015 20:06 Reticle ID : 45564101P111 Measurements layout : UV13X2 Clearout reticle : Yes Chuck ID : Chuck 2 Number of cycles : 1 Number of Y positions : 5 Lens Temperature : 22.00 [C] Lens Pressure : 984.00 [mbar] Lens Stability
Zernike delta over measurement time +------+--------+-------+----------+ | | Delta | Spec. | In Spec. | | | [nm] | [nm] | | +======+========+=======+==========+ | Z5 | -0.104 | 2.000 | Yes | | Z7 | -0.221 | 2.000 | Yes | | Z9 | 0.095 | 2.000 | Yes | | Z14 | -0.049 | 2.000 | Yes | | Z16 | 0.054 | 2.000 | Yes | +------+--------+-------+----------+
RMS values +-------------+---------+------------------+-----------------------+ | | | After Correction | Deltas | | | +---------+--------+-------+-------+-------+ | | Current | NEXZ | +SA | NEXZ | SA | Both | | | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +=============+=========+=========+========+=======+=======+=======+ | Spherical | 0.92 | 0.94 | 0.94 | -0.02 | 0.00 | -0.02 | | Coma | 0.78 | 0.63 | 0.63 | 0.14 | 0.01 | 0.15 | | Astigmatism | 1.10 | 1.10 | 1.10 | 0.00 | 0.00 | 0.00 | | 3-foil | 0.55 | 0.56 | 0.57 | -0.01 | -0.00 | -0.01 | | (Z5->Z37) | 2.27 | 2.29 | 2.28 | -0.01 | 0.01 | -0.01 | | (Z38->) | 0.99 | 0.99 | 0.99 | 0.00 | 0.00 | 0.00 | +-------------+---------+---------+--------+-------+-------+-------+
Measured Zernike distributions (integrated)
+-----+---------------+-------------------+---------------------+ | | Offset | Tilt in X | Curv in X | | +-------+-------+---------+---------+----------+----------+ | | Value | Range | Value | Range | Value | Range | | | [nm] | [nm] | [nm/cm] | [nm/cm] | [nm/cm2] | [nm/cm2] | +=====+=======+=======+=========+=========+==========+==========+ | Z5 | -3.24 | 3.21 | -0.30 | 0.43 | 2.72 | 0.78 | | Z6 | 0.70 | 0.57 | -0.24 | 0.44 | -0.20 | 1.28 | | Z7 | 0.48 | 0.39 | 0.67 | 0.23 | -0.51 | 0.45 | | Z8 | -0.49 | 2.89 | 0.22 | 0.51 | 0.62 | 2.11 | | Z9 | -0.45 | 0.78 | -0.20 | 0.08 | 0.83 | 0.41 | | Z14 | -0.07 | 0.23 | -0.08 | 0.38 | 0.39 | 0.25 | | Z15 | -0.13 | 0.88 | 0.07 | 0.24 | 0.08 | 0.53 | | Z16 | -0.59 | 0.83 | -0.43 | 0.15 | 0.95 | 0.48 | +-----+-------+-------+---------+---------+----------+----------+
Non-integrated non-correctable aberration data (cycle averaged) +-----+-------+------+ | | Min | Max | | | [nm] | [nm] | +=====+=======+======+ | Z5 | -4.80 | 3.87 | | Z6 | -1.06 | 2.46 | | Z7 | -1.90 | 1.12 | | Z8 | -2.46 | 1.72 | | Z9 | -1.04 | 1.30 | | Z10 | -1.75 | 1.03 | | Z11 | -1.78 | 2.18 | | Z12 | -0.29 | 3.93 | | Z13 | -1.77 | 1.48 | | Z14 | -1.65 | 1.38 | | Z15 | -1.14 | 0.83 | | Z16 | -2.03 | 1.29 | | Z17 | -3.41 | 0.09 | | Z18 | -1.13 | 1.38 | | Z19 | -1.20 | 2.14 | | Z20 | -1.34 | 0.81 | | Z21 | -2.50 | 2.00 | | Z22 | -2.96 | 2.25 | | Z23 | -0.81 | 1.77 | | Z24 | -0.87 | 0.76 | | Z25 | -1.56 | 1.58 | | Z26 | -0.83 | 0.84 | | Z27 | -0.98 | 0.85 | | Z28 | 0.28 | 2.48 | | Z29 | -1.27 | 0.89 | | Z30 | -1.05 | 1.38 | | Z31 | -1.18 | 1.00 | | Z32 | -0.63 | 0.92 | | Z33 | -1.07 | 0.86 | | Z34 | -0.97 | 1.69 | | Z35 | -0.64 | 0.75 | | Z36 | -1.09 | 0.72 | | Z37 | 1.30 | 2.83 | +-----+-------+------+
Integrated non-correctable aberration (cycle averaged, scan integrated) +-----+-------+-------+ | | Min | Max | | | [nm] | [nm] | +=====+=======+=======+ | Z5 | -3.51 | 1.49 | | Z6 | -0.07 | 0.85 | | Z7 | -0.70 | 0.71 | | Z8 | -0.43 | 0.87 | | Z9 | -0.75 | 0.78 | | Z10 | -0.97 | 0.22 | | Z11 | -0.72 | 0.50 | | Z12 | 0.81 | 3.30 | | Z13 | -1.08 | 0.03 | | Z14 | -1.36 | 1.20 | | Z15 | -0.17 | 0.20 | | Z16 | -1.37 | 1.05 | | Z17 | -2.74 | -1.71 | | Z18 | -0.35 | 0.70 | | Z19 | -0.86 | 1.23 | | Z20 | -0.45 | 0.10 | | Z21 | -1.57 | 1.15 | | Z22 | -0.53 | -0.24 | | Z23 | -0.55 | 1.40 | | Z24 | -0.14 | 0.15 | | Z25 | -1.34 | 1.30 | | Z26 | -0.52 | 0.50 | | Z27 | -0.62 | 0.23 | | Z28 | 1.04 | 2.01 | | Z29 | -0.06 | 0.28 | | Z30 | -0.78 | 1.11 | | Z31 | -0.30 | 0.09 | | Z32 | -0.23 | 0.47 | | Z33 | -0.29 | 0.08 | | Z34 | -0.70 | 1.43 | | Z35 | -0.10 | 0.15 | | Z36 | -0.88 | 0.53 | | Z37 | 1.56 | 2.20 | +-----+-------+-------+
Integrated non-correctable aberration (cycle averaged, scan integrated)
+----+--------+------+------+------+-------+-------+-------+ | | X | Z2 | Z3 | Z4 | Z5 | Z6 | Z7 | | | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+======+======+======+=======+=======+=======+ | 0 | -12.72 | | | | 1.49 | 0.80 | -0.70 | | 1 | -10.60 | | | | 0.70 | 0.39 | -0.21 | | 2 | -8.48 | | | | -0.63 | 0.55 | -0.16 | | 3 | -6.36 | | | | -1.82 | 0.42 | -0.00 | | 4 | -4.24 | | | | -3.17 | 0.52 | 0.57 | | 5 | -2.12 | | | | -3.51 | 0.57 | 0.71 | | 6 | -0.00 | | | | -3.51 | 0.79 | 0.39 | | 7 | 2.12 | | | | -3.37 | 0.62 | -0.25 | | 8 | 4.24 | | | | -2.69 | 0.81 | 0.01 | | 9 | 6.36 | | | | -1.77 | 0.85 | 0.16 | | 10 | 8.48 | | | | -0.54 | 0.67 | -0.02 | | 11 | 10.60 | | | | 0.70 | 0.51 | -0.19 | | 12 | 12.72 | | | | 0.14 | -0.07 | -0.48 | +----+--------+------+------+------+-------+-------+-------+
+----+--------+-------+-------+-------+-------+------+-------+ | | X | Z8 | Z9 | Z10 | Z11 | Z12 | Z13 | | | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+======+=======+ | 0 | -12.72 | 0.33 | 0.76 | -0.97 | 0.32 | 0.94 | -0.06 | | 1 | -10.60 | 0.17 | 0.57 | 0.08 | 0.50 | 0.81 | 0.03 | | 2 | -8.48 | -0.15 | 0.04 | 0.22 | 0.13 | 1.12 | 0.01 | | 3 | -6.36 | -0.41 | -0.75 | 0.09 | -0.42 | 1.06 | -0.00 | | 4 | -4.24 | -0.42 | -0.38 | -0.13 | -0.29 | 2.65 | -0.24 | | 5 | -2.12 | -0.43 | -0.29 | 0.06 | -0.35 | 3.04 | -0.02 | | 6 | -0.00 | -0.30 | -0.40 | 0.05 | -0.42 | 3.08 | -0.17 | | 7 | 2.12 | -0.31 | -0.18 | -0.25 | -0.72 | 3.30 | -0.50 | | 8 | 4.24 | -0.11 | -0.21 | 0.13 | -0.54 | 3.09 | -0.69 | | 9 | 6.36 | -0.06 | -0.44 | -0.15 | -0.58 | 1.81 | -0.65 | | 10 | 8.48 | 0.04 | 0.25 | -0.61 | -0.62 | 2.15 | -0.78 | | 11 | 10.60 | 0.68 | 0.67 | -0.71 | -0.17 | 1.72 | -0.79 | | 12 | 12.72 | 0.87 | 0.78 | 0.09 | 0.17 | 1.82 | -1.08 | +----+--------+-------+-------+-------+-------+------+-------+
+----+--------+-------+-------+-------+-------+-------+-------+ | | X | Z14 | Z15 | Z16 | Z17 | Z18 | Z19 | | | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+=======+=======+ | 0 | -12.72 | 1.20 | -0.03 | 1.05 | -1.83 | 0.24 | 1.23 | | 1 | -10.60 | 0.23 | 0.11 | 0.65 | -2.21 | 0.18 | -0.07 | | 2 | -8.48 | 0.43 | 0.05 | 0.64 | -2.20 | 0.42 | 0.36 | | 3 | -6.36 | -0.42 | -0.04 | 0.60 | -2.74 | 0.13 | 0.36 | | 4 | -4.24 | -1.36 | -0.17 | -0.27 | -2.22 | -0.05 | 0.01 | | 5 | -2.12 | -1.11 | -0.17 | -0.97 | -2.34 | 0.10 | 0.15 | | 6 | -0.00 | -0.50 | -0.05 | -1.37 | -2.45 | 0.01 | -0.15 | | 7 | 2.12 | 0.52 | 0.06 | -1.29 | -2.07 | -0.35 | -0.21 | | 8 | 4.24 | 1.20 | 0.12 | -0.57 | -1.95 | -0.30 | 0.01 | | 9 | 6.36 | 0.63 | 0.20 | 0.08 | -2.45 | 0.10 | -0.37 | | 10 | 8.48 | 0.31 | 0.09 | 0.01 | -1.71 | 0.45 | -0.10 | | 11 | 10.60 | 0.28 | 0.08 | -0.05 | -1.78 | 0.59 | 0.27 | | 12 | 12.72 | -0.62 | 0.18 | -0.02 | -1.94 | 0.70 | -0.86 | +----+--------+-------+-------+-------+-------+-------+-------+
+----+--------+-------+-------+-------+-------+-------+-------+ | | X | Z20 | Z21 | Z22 | Z23 | Z24 | Z25 | | | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+=======+=======+ | 0 | -12.72 | -0.45 | 0.69 | -0.24 | 1.40 | 0.15 | -0.72 | | 1 | -10.60 | -0.34 | 0.76 | -0.38 | 1.29 | 0.08 | -1.34 | | 2 | -8.48 | 0.04 | 1.06 | -0.44 | 0.38 | -0.03 | -1.09 | | 3 | -6.36 | 0.10 | 1.15 | -0.50 | 0.57 | 0.06 | -0.34 | | 4 | -4.24 | -0.16 | -0.15 | -0.43 | 0.63 | 0.02 | 0.34 | | 5 | -2.12 | -0.25 | -1.03 | -0.33 | 0.82 | -0.04 | 0.85 | | 6 | -0.00 | -0.08 | -1.57 | -0.39 | 0.97 | -0.08 | 1.30 | | 7 | 2.12 | -0.17 | -1.27 | -0.37 | 0.78 | -0.05 | 1.00 | | 8 | 4.24 | -0.23 | -0.13 | -0.42 | 1.02 | -0.14 | 0.47 | | 9 | 6.36 | -0.10 | 0.97 | -0.37 | 0.64 | -0.13 | -0.08 | | 10 | 8.48 | -0.08 | 0.97 | -0.27 | 0.48 | -0.14 | -0.81 | | 11 | 10.60 | -0.20 | 0.59 | -0.51 | -0.43 | -0.02 | -1.20 | | 12 | 12.72 | -0.16 | 0.27 | -0.53 | -0.55 | -0.10 | -0.55 | +----+--------+-------+-------+-------+-------+-------+-------+
+----+--------+-------+-------+------+-------+-------+-------+ | | X | Z26 | Z27 | Z28 | Z29 | Z30 | Z31 | | | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+======+=======+=======+=======+ | 0 | -12.72 | 0.20 | -0.62 | 1.36 | 0.28 | 1.11 | -0.01 | | 1 | -10.60 | -0.52 | -0.57 | 1.05 | 0.15 | 0.58 | -0.30 | | 2 | -8.48 | -0.25 | -0.06 | 1.19 | -0.06 | -0.25 | -0.29 | | 3 | -6.36 | 0.06 | 0.23 | 1.76 | -0.04 | -0.05 | -0.14 | | 4 | -4.24 | 0.40 | -0.16 | 1.68 | -0.02 | -0.00 | -0.27 | | 5 | -2.12 | 0.50 | -0.37 | 1.99 | 0.08 | 0.19 | -0.19 | | 6 | -0.00 | 0.02 | -0.25 | 1.94 | -0.04 | 0.05 | -0.16 | | 7 | 2.12 | -0.08 | -0.10 | 2.01 | 0.08 | -0.21 | -0.11 | | 8 | 4.24 | -0.11 | -0.12 | 1.97 | 0.05 | 0.14 | 0.03 | | 9 | 6.36 | -0.23 | 0.10 | 1.80 | 0.27 | 0.12 | 0.09 | | 10 | 8.48 | 0.12 | 0.18 | 1.18 | 0.20 | 0.47 | 0.07 | | 11 | 10.60 | 0.39 | 0.14 | 1.04 | 0.14 | -0.37 | 0.04 | | 12 | 12.72 | 0.04 | 0.01 | 1.13 | 0.13 | -0.78 | -0.16 | +----+--------+-------+-------+------+-------+-------+-------+
+----+--------+-------+-------+-------+-------+-------+------+ | | X | Z32 | Z33 | Z34 | Z35 | Z36 | Z37 | | | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+=======+======+ | 0 | -12.72 | 0.14 | -0.29 | 1.33 | 0.04 | 0.01 | 1.56 | | 1 | -10.60 | -0.23 | -0.20 | 1.43 | 0.08 | -0.51 | 1.69 | | 2 | -8.48 | -0.12 | -0.19 | 1.10 | 0.15 | -0.88 | 1.71 | | 3 | -6.36 | -0.15 | -0.23 | 0.28 | 0.03 | -0.56 | 1.57 | | 4 | -4.24 | -0.05 | -0.15 | 0.23 | -0.00 | -0.11 | 1.63 | | 5 | -2.12 | 0.18 | -0.29 | 0.02 | -0.06 | 0.21 | 1.90 | | 6 | -0.00 | 0.36 | -0.09 | 0.38 | -0.10 | 0.43 | 2.20 | | 7 | 2.12 | 0.39 | -0.09 | 1.01 | 0.02 | 0.32 | 1.85 | | 8 | 4.24 | 0.11 | 0.08 | 0.51 | 0.01 | 0.21 | 1.67 | | 9 | 6.36 | 0.22 | 0.07 | 0.50 | 0.03 | -0.27 | 1.64 | | 10 | 8.48 | -0.04 | -0.01 | -0.36 | 0.05 | -0.41 | 1.73 | | 11 | 10.60 | -0.05 | -0.04 | -0.63 | 0.00 | -0.19 | 1.85 | | 12 | 12.72 | 0.47 | 0.08 | -0.70 | 0.05 | 0.53 | 1.87 | +----+--------+-------+-------+-------+-------+-------+------+
Non-integrated non-correctable aberration data (cycle averaged)
+----+--------+-------+------+------+------+-------+-------+-------+ | | X | Y | Z2 | Z3 | Z4 | Z5 | Z6 | Z7 | | | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+======+======+======+=======+=======+=======+ | 0 | -12.72 | 3.60 | | | | 1.99 | 0.56 | -0.48 | | 1 | -10.60 | 3.60 | | | | -0.04 | 0.51 | -0.27 | | 2 | -8.48 | 3.60 | | | | -1.03 | 0.91 | 0.27 | | 3 | -6.36 | 3.60 | | | | -1.61 | 0.06 | 0.15 | | 4 | -4.24 | 3.60 | | | | -2.67 | 0.94 | 1.12 | | 5 | -2.12 | 3.60 | | | | -3.15 | 0.45 | 1.03 | | 6 | -0.00 | 3.60 | | | | -2.96 | 0.93 | 0.51 | | 7 | 2.12 | 3.60 | | | | -3.28 | 1.15 | 0.02 | | 8 | 4.24 | 3.60 | | | | -2.86 | 0.70 | -0.13 | | 9 | 6.36 | 3.60 | | | | -1.96 | 1.28 | 0.33 | | 10 | 8.48 | 3.60 | | | | -0.81 | 0.15 | -0.09 | | 11 | 10.60 | 3.60 | | | | 0.12 | -0.19 | 0.13 | | 12 | 12.72 | 3.60 | | | | -0.03 | -0.98 | -0.92 | | 13 | -12.72 | 1.80 | | | | 0.86 | -1.06 | -0.50 | | 14 | -10.60 | 1.80 | | | | 0.11 | -0.29 | -0.52 | | 15 | -8.48 | 1.80 | | | | -1.67 | 1.50 | -0.65 | | 16 | -6.36 | 1.80 | | | | -2.90 | 0.98 | 0.21 | | 17 | -4.24 | 1.80 | | | | -4.44 | 0.52 | 0.79 | | 18 | -2.12 | 1.80 | | | | -4.63 | 0.25 | 0.54 | | 19 | -0.00 | 1.80 | | | | -4.80 | 0.87 | 0.30 | | 20 | 2.12 | 1.80 | | | | -4.28 | 1.02 | -0.01 | | 21 | 4.24 | 1.80 | | | | -3.83 | 0.46 | 0.26 | | 22 | 6.36 | 1.80 | | | | -2.79 | 0.28 | 0.14 | | 23 | 8.48 | 1.80 | | | | -1.56 | 0.84 | 0.22 | | 24 | 10.60 | 1.80 | | | | -0.27 | 1.20 | -0.05 | | 25 | 12.72 | 1.80 | | | | -1.64 | -0.83 | -0.54 | | 26 | -12.72 | -0.00 | | | | -0.44 | 0.42 | 0.13 | | 27 | -10.60 | -0.00 | | | | 0.65 | 0.22 | -0.04 | | 28 | -8.48 | -0.00 | | | | -0.46 | 0.56 | -0.83 | | 29 | -6.36 | -0.00 | | | | -2.78 | 0.53 | -0.02 | | 30 | -4.24 | -0.00 | | | | -4.42 | 0.61 | 0.64 | | 31 | -2.12 | -0.00 | | | | -4.50 | 0.36 | 0.75 | | 32 | -0.00 | -0.00 | | | | -4.59 | 1.32 | 0.42 | | 33 | 2.12 | -0.00 | | | | -3.89 | 0.67 | -0.58 | | 34 | 4.24 | -0.00 | | | | -3.46 | 0.65 | 0.27 | | 35 | 6.36 | -0.00 | | | | -2.40 | 0.65 | 0.16 | | 36 | 8.48 | -0.00 | | | | -0.93 | 0.57 | 0.12 | | 37 | 10.60 | -0.00 | | | | 0.07 | 0.48 | -0.40 | | 38 | 12.72 | -0.00 | | | | -1.10 | -0.28 | -0.17 | | 39 | -12.72 | -1.80 | | | | 1.18 | 2.46 | -0.75 | | 40 | -10.60 | -1.80 | | | | 1.06 | 1.24 | 0.05 | | 41 | -8.48 | -1.80 | | | | -0.57 | -0.35 | -0.26 | | 42 | -6.36 | -1.80 | | | | -2.10 | -0.32 | -0.19 | | 43 | -4.24 | -1.80 | | | | -3.53 | 0.55 | 0.26 | | 44 | -2.12 | -1.80 | | | | -4.05 | 1.08 | 0.55 | | 45 | -0.00 | -1.80 | | | | -3.85 | 0.41 | 0.19 | | 46 | 2.12 | -1.80 | | | | -4.09 | -0.07 | -0.19 | | 47 | 4.24 | -1.80 | | | | -3.14 | 1.28 | 0.03 | | 48 | 6.36 | -1.80 | | | | -2.19 | 1.63 | 0.03 | | 49 | 8.48 | -1.80 | | | | -0.55 | 0.75 | 0.19 | | 50 | 10.60 | -1.80 | | | | 1.12 | 0.26 | -0.13 | | 51 | 12.72 | -1.80 | | | | 0.58 | 0.42 | -0.35 | | 52 | -12.72 | -3.60 | | | | 3.87 | 1.62 | -1.90 | | 53 | -10.60 | -3.60 | | | | 1.74 | 0.26 | -0.24 | | 54 | -8.48 | -3.60 | | | | 0.57 | 0.11 | 0.69 | | 55 | -6.36 | -3.60 | | | | 0.30 | 0.82 | -0.18 | | 56 | -4.24 | -3.60 | | | | -0.77 | -0.01 | 0.05 | | 57 | -2.12 | -3.60 | | | | -1.20 | 0.72 | 0.69 | | 58 | -0.00 | -3.60 | | | | -1.37 | 0.44 | 0.50 | | 59 | 2.12 | -3.60 | | | | -1.30 | 0.32 | -0.47 | | 60 | 4.24 | -3.60 | | | | -0.17 | 0.98 | -0.36 | | 61 | 6.36 | -3.60 | | | | 0.50 | 0.40 | 0.13 | | 62 | 8.48 | -3.60 | | | | 1.16 | 1.05 | -0.56 | | 63 | 10.60 | -3.60 | | | | 2.45 | 0.81 | -0.51 | | 64 | 12.72 | -3.60 | | | | 2.90 | 1.32 | -0.42 | +----+--------+-------+------+------+------+-------+-------+-------+
+----+--------+-------+-------+-------+-------+-------+-------+-------+ | | X | Y | Z8 | Z9 | Z10 | Z11 | Z12 | Z13 | | | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+=======+=======+=======+ | 0 | -12.72 | 3.60 | -0.59 | 0.71 | 0.36 | 2.18 | 1.30 | -0.61 | | 1 | -10.60 | 3.60 | -0.19 | 0.51 | 0.77 | 1.18 | 1.58 | -0.14 | | 2 | -8.48 | 3.60 | 0.66 | 0.03 | -0.00 | 0.58 | 1.94 | 0.37 | | 3 | -6.36 | 3.60 | 0.89 | -0.71 | -0.46 | 0.16 | 1.98 | 1.48 | | 4 | -4.24 | 3.60 | 0.44 | -0.30 | -0.16 | -0.86 | 3.33 | 0.64 | | 5 | -2.12 | 3.60 | 0.57 | -0.07 | 0.07 | -1.10 | 3.43 | 0.40 | | 6 | -0.00 | 3.60 | 0.41 | -0.23 | -0.05 | -0.95 | 2.90 | 0.23 | | 7 | 2.12 | 3.60 | 0.27 | -0.06 | 0.03 | -1.46 | 3.35 | -0.12 | | 8 | 4.24 | 3.60 | 0.37 | -0.03 | 0.60 | -1.48 | 3.43 | -1.07 | | 9 | 6.36 | 3.60 | 0.96 | -0.22 | 0.33 | -0.99 | 2.63 | -1.66 | | 10 | 8.48 | 3.60 | 0.79 | 0.43 | -0.06 | -1.18 | 2.70 | -1.77 | | 11 | 10.60 | 3.60 | 0.50 | 0.72 | 0.09 | -0.81 | 2.64 | -1.38 | | 12 | 12.72 | 3.60 | 0.15 | 0.42 | 1.00 | -0.74 | 2.77 | -0.95 | | 13 | -12.72 | 1.80 | 1.17 | 0.80 | -0.16 | 0.41 | 0.93 | 0.26 | | 14 | -10.60 | 1.80 | 0.45 | 0.22 | 1.03 | 0.28 | 1.26 | 0.68 | | 15 | -8.48 | 1.80 | 0.19 | -0.32 | 0.72 | 0.08 | 1.75 | -0.10 | | 16 | -6.36 | 1.80 | 0.57 | -1.04 | 0.43 | -0.66 | 1.49 | 0.53 | | 17 | -4.24 | 1.80 | 0.87 | -0.47 | 0.19 | -0.78 | 3.25 | 0.28 | | 18 | -2.12 | 1.80 | 0.86 | -0.58 | 0.35 | -1.29 | 3.92 | -0.14 | | 19 | -0.00 | 1.80 | 0.63 | -1.01 | 0.02 | -1.78 | 3.75 | 0.05 | | 20 | 2.12 | 1.80 | 1.21 | -0.46 | -0.75 | -1.61 | 3.93 | -0.37 | | 21 | 4.24 | 1.80 | 1.31 | -0.19 | -0.01 | -1.16 | 3.66 | -0.63 | | 22 | 6.36 | 1.80 | 0.76 | -0.55 | -0.22 | -1.11 | 1.95 | -1.37 | | 23 | 8.48 | 1.80 | 0.30 | 0.16 | -0.60 | -0.94 | 2.55 | -1.02 | | 24 | 10.60 | 1.80 | 1.06 | 0.40 | -0.58 | -0.25 | 2.48 | -0.88 | | 25 | 12.72 | 1.80 | 0.56 | 0.41 | 0.43 | -0.20 | 2.53 | -0.60 | | 26 | -12.72 | -0.00 | 1.09 | 0.62 | -1.75 | -0.38 | 1.05 | 0.28 | | 27 | -10.60 | -0.00 | 0.82 | 0.57 | -0.24 | -0.13 | 0.75 | -0.03 | | 28 | -8.48 | -0.00 | 0.17 | -0.21 | 0.87 | -0.49 | 1.20 | 0.38 | | 29 | -6.36 | -0.00 | -0.01 | -0.96 | 0.93 | -0.94 | 0.88 | -0.27 | | 30 | -4.24 | -0.00 | 0.02 | -0.55 | 0.42 | -0.53 | 2.83 | -0.13 | | 31 | -2.12 | -0.00 | -0.20 | -0.77 | -0.00 | -0.83 | 3.19 | 0.14 | | 32 | -0.00 | -0.00 | 0.01 | -0.74 | -0.02 | -0.74 | 3.62 | -0.23 | | 33 | 2.12 | -0.00 | 0.14 | -0.64 | -0.25 | -1.04 | 3.43 | -0.89 | | 34 | 4.24 | -0.00 | 0.35 | -0.33 | -0.49 | -0.81 | 3.30 | -0.99 | | 35 | 6.36 | -0.00 | 0.45 | -0.52 | -1.03 | -0.83 | 1.49 | -0.53 | | 36 | 8.48 | -0.00 | 0.23 | 0.17 | -0.87 | -0.65 | 2.00 | -0.25 | | 37 | 10.60 | -0.00 | 0.75 | 0.55 | -0.89 | 0.00 | 1.36 | -0.63 | | 38 | 12.72 | -0.00 | 0.85 | 0.83 | -0.02 | 0.77 | 1.71 | -1.13 | | 39 | -12.72 | -1.80 | 0.10 | 0.80 | -1.58 | 0.31 | 1.04 | 0.13 | | 40 | -10.60 | -1.80 | 0.13 | 0.39 | -0.35 | 0.84 | 0.74 | 0.20 | | 41 | -8.48 | -1.80 | -0.49 | 0.08 | 0.14 | 0.10 | 0.74 | -0.20 | | 42 | -6.36 | -1.80 | -1.04 | -0.90 | 0.08 | -0.46 | 0.45 | -0.91 | | 43 | -4.24 | -1.80 | -1.45 | -0.48 | -0.32 | -0.05 | 2.25 | -0.65 | | 44 | -2.12 | -1.80 | -1.38 | -0.21 | 0.16 | 0.48 | 2.62 | 0.29 | | 45 | -0.00 | -1.80 | -1.16 | -0.40 | 0.38 | 0.50 | 3.15 | -0.46 | | 46 | 2.12 | -1.80 | -1.61 | -0.18 | -0.47 | -0.09 | 3.21 | -0.94 | | 47 | 4.24 | -1.80 | -1.26 | -0.41 | -0.08 | -0.16 | 2.82 | -0.71 | | 48 | 6.36 | -1.80 | -0.63 | -0.76 | -0.58 | -0.04 | 1.43 | -0.04 | | 49 | 8.48 | -1.80 | -0.04 | -0.01 | -1.29 | -0.51 | 1.96 | -0.66 | | 50 | 10.60 | -1.80 | 0.50 | 0.69 | -1.42 | 0.04 | 1.08 | -0.31 | | 51 | 12.72 | -1.80 | 1.05 | 0.95 | -0.31 | 0.89 | 1.05 | -0.98 | | 52 | -12.72 | -3.60 | -0.14 | 0.88 | -1.70 | -0.92 | 0.40 | -0.35 | | 53 | -10.60 | -3.60 | -0.37 | 1.13 | -0.83 | 0.35 | -0.29 | -0.54 | | 54 | -8.48 | -3.60 | -1.27 | 0.61 | -0.65 | 0.41 | -0.04 | -0.39 | | 55 | -6.36 | -3.60 | -2.46 | -0.15 | -0.54 | -0.18 | 0.50 | -0.84 | | 56 | -4.24 | -3.60 | -1.99 | -0.12 | -0.76 | 0.76 | 1.61 | -1.32 | | 57 | -2.12 | -3.60 | -1.98 | 0.16 | -0.28 | 1.00 | 2.02 | -0.82 | | 58 | -0.00 | -3.60 | -1.39 | 0.39 | -0.08 | 0.87 | 1.98 | -0.45 | | 59 | 2.12 | -3.60 | -1.54 | 0.42 | 0.20 | 0.61 | 2.56 | -0.18 | | 60 | 4.24 | -3.60 | -1.34 | -0.07 | 0.62 | 0.90 | 2.24 | -0.04 | | 61 | 6.36 | -3.60 | -1.84 | -0.17 | 0.78 | 0.07 | 1.55 | 0.37 | | 62 | 8.48 | -3.60 | -1.08 | 0.50 | -0.24 | 0.17 | 1.54 | -0.18 | | 63 | 10.60 | -3.60 | 0.61 | 0.97 | -0.76 | 0.17 | 1.04 | -0.74 | | 64 | 12.72 | -3.60 | 1.72 | 1.30 | -0.67 | 0.14 | 1.06 | -1.73 | +----+--------+-------+-------+-------+-------+-------+-------+-------+
+----+--------+-------+-------+-------+-------+-------+-------+-------+ | | X | Y | Z14 | Z15 | Z16 | Z17 | Z18 | Z19 | | | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+=======+=======+=======+ | 0 | -12.72 | 3.60 | 1.03 | -0.17 | 1.17 | -2.59 | 0.86 | 1.36 | | 1 | -10.60 | 3.60 | 0.39 | -0.11 | 0.60 | -2.59 | 1.32 | 0.51 | | 2 | -8.48 | 3.60 | 0.30 | -1.14 | 0.43 | -2.70 | 1.00 | 0.63 | | 3 | -6.36 | 3.60 | -0.13 | -1.00 | 0.55 | -3.34 | 0.48 | 0.11 | | 4 | -4.24 | 3.60 | -1.33 | -0.49 | 0.03 | -2.54 | 0.77 | 0.08 | | 5 | -2.12 | 3.60 | -0.86 | -0.05 | -0.64 | -2.68 | 0.15 | 0.39 | | 6 | -0.00 | 3.60 | -0.32 | 0.07 | -1.00 | -2.38 | -0.32 | -0.13 | | 7 | 2.12 | 3.60 | 0.66 | -0.02 | -0.96 | -1.96 | -0.84 | -0.71 | | 8 | 4.24 | 3.60 | 1.13 | 0.15 | -0.63 | -1.78 | -1.13 | -0.33 | | 9 | 6.36 | 3.60 | 0.50 | -0.44 | 0.09 | -2.16 | -0.26 | -0.41 | | 10 | 8.48 | 3.60 | 0.19 | -0.73 | -0.35 | -1.76 | -0.17 | -0.28 | | 11 | 10.60 | 3.60 | 0.33 | -0.40 | -0.25 | -1.57 | 0.09 | -0.03 | | 12 | 12.72 | 3.60 | -0.86 | -0.01 | 0.05 | -1.39 | 0.37 | -1.11 | | 13 | -12.72 | 1.80 | 1.21 | -0.12 | 0.80 | -2.80 | 0.48 | 0.70 | | 14 | -10.60 | 1.80 | 0.94 | -0.29 | 0.33 | -2.63 | 0.56 | -0.68 | | 15 | -8.48 | 1.80 | 0.79 | -0.17 | 0.59 | -2.51 | 0.45 | 0.15 | | 16 | -6.36 | 1.80 | -0.67 | -0.52 | 0.44 | -3.41 | 1.05 | 0.63 | | 17 | -4.24 | 1.80 | -1.36 | -0.30 | -0.49 | -3.25 | 0.71 | -0.30 | | 18 | -2.12 | 1.80 | -0.99 | -0.43 | -1.33 | -3.18 | 0.42 | -0.20 | | 19 | -0.00 | 1.80 | -0.45 | -0.04 | -1.68 | -2.94 | -0.14 | -0.18 | | 20 | 2.12 | 1.80 | 0.30 | 0.06 | -1.71 | -2.86 | -0.46 | 0.02 | | 21 | 4.24 | 1.80 | 1.34 | 0.07 | -0.86 | -2.78 | -1.08 | 0.21 | | 22 | 6.36 | 1.80 | 0.90 | 0.07 | -0.32 | -3.16 | -1.01 | -0.34 | | 23 | 8.48 | 1.80 | 0.37 | -0.08 | -0.47 | -2.11 | 0.11 | -0.17 | | 24 | 10.60 | 1.80 | 0.20 | -0.17 | -0.50 | -1.99 | -0.00 | 0.43 | | 25 | 12.72 | 1.80 | -1.13 | 0.19 | -0.27 | -2.27 | 0.34 | -0.33 | | 26 | -12.72 | -0.00 | 1.36 | -0.17 | 0.96 | -2.20 | 0.14 | 0.76 | | 27 | -10.60 | -0.00 | 0.36 | 0.21 | 0.71 | -2.75 | 0.14 | -0.49 | | 28 | -8.48 | -0.00 | 0.78 | 0.51 | 0.70 | -1.97 | 0.35 | 0.21 | | 29 | -6.36 | -0.00 | -0.89 | 0.42 | 0.37 | -3.21 | -0.13 | 0.45 | | 30 | -4.24 | -0.00 | -1.41 | 0.15 | -0.67 | -2.88 | 0.04 | -0.28 | | 31 | -2.12 | -0.00 | -0.98 | 0.33 | -1.39 | -2.46 | 0.15 | -0.14 | | 32 | -0.00 | -0.00 | -0.38 | 0.37 | -2.03 | -2.89 | 0.19 | -0.19 | | 33 | 2.12 | -0.00 | 0.27 | 0.53 | -1.69 | -2.40 | -0.07 | 0.17 | | 34 | 4.24 | -0.00 | 1.08 | 0.44 | -0.85 | -2.66 | 0.03 | 0.56 | | 35 | 6.36 | -0.00 | 1.03 | 0.43 | -0.07 | -2.80 | 0.04 | -0.20 | | 36 | 8.48 | -0.00 | 0.18 | 0.36 | 0.28 | -1.87 | 0.06 | 0.04 | | 37 | 10.60 | -0.00 | 0.25 | 0.83 | 0.06 | -1.94 | 0.44 | 0.60 | | 38 | 12.72 | -0.00 | -0.59 | 0.45 | -0.13 | -2.40 | 0.54 | -0.49 | | 39 | -12.72 | -1.80 | 1.38 | 0.43 | 1.02 | -1.64 | 0.15 | 1.22 | | 40 | -10.60 | -1.80 | -0.10 | 0.59 | 0.75 | -2.01 | -0.24 | -0.16 | | 41 | -8.48 | -1.80 | 0.27 | 0.63 | 0.76 | -2.08 | 0.30 | 0.53 | | 42 | -6.36 | -1.80 | -0.44 | 0.51 | 0.70 | -2.30 | -0.72 | 0.29 | | 43 | -4.24 | -1.80 | -1.65 | 0.13 | -0.19 | -1.65 | -0.98 | 0.28 | | 44 | -2.12 | -1.80 | -1.31 | 0.29 | -1.07 | -2.24 | -0.03 | 0.05 | | 45 | -0.00 | -1.80 | -0.59 | 0.42 | -1.43 | -2.40 | 0.25 | -0.14 | | 46 | 2.12 | -1.80 | 0.66 | 0.45 | -1.40 | -2.15 | -0.18 | -0.07 | | 47 | 4.24 | -1.80 | 1.36 | 0.27 | -0.47 | -1.89 | 0.55 | -0.14 | | 48 | 6.36 | -1.80 | 0.64 | 0.70 | 0.30 | -2.28 | 1.12 | -0.58 | | 49 | 8.48 | -1.80 | 0.20 | 0.62 | 0.35 | -1.43 | 0.85 | 0.24 | | 50 | 10.60 | -1.80 | -0.12 | 0.47 | 0.13 | -1.90 | 1.04 | 0.80 | | 51 | 12.72 | -1.80 | -0.24 | 0.17 | -0.02 | -1.94 | 0.98 | -1.19 | | 52 | -12.72 | -3.60 | 1.01 | -0.10 | 1.29 | 0.09 | -0.43 | 2.14 | | 53 | -10.60 | -3.60 | -0.42 | 0.18 | 0.84 | -1.04 | -0.90 | 0.45 | | 54 | -8.48 | -3.60 | 0.04 | 0.41 | 0.72 | -1.75 | 0.00 | 0.27 | | 55 | -6.36 | -3.60 | 0.06 | 0.39 | 0.94 | -1.46 | -0.03 | 0.33 | | 56 | -4.24 | -3.60 | -1.05 | -0.31 | -0.04 | -0.77 | -0.79 | 0.29 | | 57 | -2.12 | -3.60 | -1.40 | -0.97 | -0.43 | -1.13 | -0.20 | 0.62 | | 58 | -0.00 | -3.60 | -0.73 | -1.07 | -0.73 | -1.61 | 0.06 | -0.11 | | 59 | 2.12 | -3.60 | 0.68 | -0.74 | -0.68 | -0.98 | -0.22 | -0.48 | | 60 | 4.24 | -3.60 | 1.11 | -0.35 | -0.05 | -0.63 | 0.15 | -0.27 | | 61 | 6.36 | -3.60 | 0.08 | 0.23 | 0.40 | -1.84 | 0.62 | -0.30 | | 62 | 8.48 | -3.60 | 0.61 | 0.26 | 0.26 | -1.40 | 1.38 | -0.31 | | 63 | 10.60 | -3.60 | 0.74 | -0.30 | 0.29 | -1.48 | 1.37 | -0.44 | | 64 | 12.72 | -3.60 | -0.27 | 0.10 | 0.27 | -1.71 | 1.25 | -1.20 | +----+--------+-------+-------+-------+-------+-------+-------+-------+
+----+--------+-------+-------+-------+-------+-------+-------+-------+ | | X | Y | Z20 | Z21 | Z22 | Z23 | Z24 | Z25 | | | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+=======+=======+=======+ | 0 | -12.72 | 3.60 | -0.96 | 0.42 | -1.73 | 1.22 | -0.28 | -0.42 | | 1 | -10.60 | 3.60 | 0.31 | 0.44 | -1.78 | 1.23 | 0.17 | -1.26 | | 2 | -8.48 | 3.60 | 0.28 | 0.71 | -2.40 | 0.42 | 0.24 | -1.02 | | 3 | -6.36 | 3.60 | -0.25 | 0.65 | -2.95 | 0.84 | 0.69 | -0.34 | | 4 | -4.24 | 3.60 | 0.29 | -0.50 | -2.68 | 0.29 | 0.60 | 0.34 | | 5 | -2.12 | 3.60 | 0.69 | -1.53 | -2.00 | 1.00 | 0.26 | 0.70 | | 6 | -0.00 | 3.60 | 0.67 | -2.25 | -0.53 | 0.76 | -0.12 | 1.26 | | 7 | 2.12 | 3.60 | 0.66 | -1.76 | 0.83 | 0.74 | -0.18 | 0.80 | | 8 | 4.24 | 3.60 | 0.69 | -0.44 | 1.38 | 1.05 | -0.07 | 0.50 | | 9 | 6.36 | 3.60 | -0.24 | 0.76 | 2.25 | 0.79 | -0.47 | -0.05 | | 10 | 8.48 | 3.60 | 0.02 | 0.66 | 1.73 | -0.09 | -0.43 | -0.83 | | 11 | 10.60 | 3.60 | 0.18 | 0.15 | 0.86 | -0.48 | -0.35 | -0.84 | | 12 | 12.72 | 3.60 | -1.04 | 0.49 | 0.55 | -0.57 | -0.36 | -0.21 | | 13 | -12.72 | 1.80 | -0.23 | 1.00 | -1.17 | 1.32 | -0.10 | -0.63 | | 14 | -10.60 | 1.80 | -0.02 | 1.29 | -1.06 | 1.07 | -0.03 | -1.28 | | 15 | -8.48 | 1.80 | 0.31 | 1.71 | -1.60 | 0.37 | -0.16 | -0.90 | | 16 | -6.36 | 1.80 | -0.06 | 1.98 | -2.09 | 0.71 | -0.18 | -0.38 | | 17 | -4.24 | 1.80 | 0.42 | 0.50 | -1.89 | 0.73 | -0.07 | 0.37 | | 18 | -2.12 | 1.80 | 0.23 | -0.45 | -0.84 | 0.87 | -0.36 | 1.03 | | 19 | -0.00 | 1.80 | 0.57 | -1.06 | -0.31 | 0.95 | -0.03 | 1.52 | | 20 | 2.12 | 1.80 | 0.62 | -0.44 | -0.03 | 0.86 | -0.59 | 1.24 | | 21 | 4.24 | 1.80 | 0.40 | 0.68 | 0.98 | 1.02 | -0.68 | 0.47 | | 22 | 6.36 | 1.80 | -0.23 | 2.00 | 1.19 | 0.65 | -0.53 | -0.14 | | 23 | 8.48 | 1.80 | -0.01 | 1.87 | 0.99 | 0.45 | -0.87 | -0.86 | | 24 | 10.60 | 1.80 | -0.09 | 1.23 | -0.48 | -0.68 | -0.86 | -1.22 | | 25 | 12.72 | 1.80 | -0.21 | 0.78 | 0.19 | -0.32 | -0.56 | -0.62 | | 26 | -12.72 | -0.00 | -0.51 | 1.20 | 0.33 | 1.71 | 0.17 | -0.96 | | 27 | -10.60 | -0.00 | -0.29 | 1.30 | -0.58 | 1.01 | -0.24 | -1.56 | | 28 | -8.48 | -0.00 | 0.29 | 1.60 | -0.62 | 0.45 | -0.61 | -1.17 | | 29 | -6.36 | -0.00 | -0.26 | 1.95 | -0.46 | 0.59 | -0.24 | -0.32 | | 30 | -4.24 | -0.00 | -0.71 | 0.64 | -0.39 | 0.72 | -0.27 | 0.32 | | 31 | -2.12 | -0.00 | -0.56 | -0.34 | -0.43 | 0.82 | -0.30 | 1.16 | | 32 | -0.00 | -0.00 | -0.22 | -0.78 | -0.36 | 1.18 | -0.40 | 1.34 | | 33 | 2.12 | -0.00 | -0.36 | -0.75 | -0.17 | 1.05 | -0.17 | 1.24 | | 34 | 4.24 | -0.00 | -0.37 | 0.75 | -0.19 | 0.89 | -0.08 | 0.62 | | 35 | 6.36 | -0.00 | -0.18 | 1.67 | -0.30 | 0.51 | -0.25 | 0.07 | | 36 | 8.48 | -0.00 | -0.42 | 1.50 | -0.45 | 0.60 | -0.00 | -0.94 | | 37 | 10.60 | -0.00 | -0.53 | 0.87 | -0.67 | -0.48 | -0.00 | -1.37 | | 38 | 12.72 | -0.00 | -0.19 | 0.35 | -0.45 | -0.80 | -0.46 | -1.05 | | 39 | -12.72 | -1.80 | -0.57 | 0.43 | 0.56 | 1.13 | 0.52 | -0.97 | | 40 | -10.60 | -1.80 | -0.82 | 0.68 | 0.22 | 1.77 | 0.12 | -1.40 | | 41 | -8.48 | -1.80 | -0.14 | 1.00 | 0.77 | 0.17 | 0.20 | -1.25 | | 42 | -6.36 | -1.80 | 0.27 | 1.25 | 1.04 | 0.47 | -0.14 | -0.39 | | 43 | -4.24 | -1.80 | -0.86 | -0.11 | 0.89 | 0.78 | 0.06 | 0.34 | | 44 | -2.12 | -1.80 | -1.06 | -0.92 | 0.31 | 0.85 | 0.30 | 1.01 | | 45 | -0.00 | -1.80 | -0.90 | -1.26 | -0.61 | 1.03 | -0.18 | 1.58 | | 46 | 2.12 | -1.80 | -0.93 | -1.28 | -0.59 | 0.68 | 0.50 | 1.13 | | 47 | 4.24 | -1.80 | -1.34 | -0.42 | -1.74 | 1.03 | 0.14 | 0.47 | | 48 | 6.36 | -1.80 | -0.33 | 0.71 | -2.05 | 0.70 | 0.34 | -0.01 | | 49 | 8.48 | -1.80 | -0.26 | 0.91 | -1.36 | 0.89 | 0.34 | -0.66 | | 50 | 10.60 | -1.80 | -0.25 | 0.66 | -1.09 | -0.08 | 0.35 | -1.41 | | 51 | 12.72 | -1.80 | -0.15 | 0.20 | -1.56 | -0.81 | 0.15 | -0.71 | | 52 | -12.72 | -3.60 | 0.03 | 0.38 | 0.83 | 1.62 | 0.43 | -0.60 | | 53 | -10.60 | -3.60 | -0.88 | 0.06 | 1.27 | 1.38 | 0.39 | -1.21 | | 54 | -8.48 | -3.60 | -0.55 | 0.30 | 1.64 | 0.49 | 0.17 | -1.13 | | 55 | -6.36 | -3.60 | 0.80 | -0.07 | 1.96 | 0.25 | 0.14 | -0.27 | | 56 | -4.24 | -3.60 | 0.05 | -1.30 | 1.93 | 0.64 | -0.21 | 0.35 | | 57 | -2.12 | -3.60 | -0.53 | -1.91 | 1.32 | 0.54 | -0.11 | 0.37 | | 58 | -0.00 | -3.60 | -0.53 | -2.50 | -0.14 | 0.90 | 0.33 | 0.83 | | 59 | 2.12 | -3.60 | -0.82 | -2.12 | -1.92 | 0.59 | 0.21 | 0.60 | | 60 | 4.24 | -3.60 | -0.51 | -1.22 | -2.53 | 1.08 | -0.02 | 0.28 | | 61 | 6.36 | -3.60 | 0.47 | -0.30 | -2.96 | 0.56 | 0.25 | -0.29 | | 62 | 8.48 | -3.60 | 0.25 | -0.09 | -2.25 | 0.54 | 0.24 | -0.78 | | 63 | 10.60 | -3.60 | -0.31 | 0.06 | -1.17 | -0.41 | 0.76 | -1.15 | | 64 | 12.72 | -3.60 | 0.81 | -0.46 | -1.37 | -0.27 | 0.70 | -0.13 | +----+--------+-------+-------+-------+-------+-------+-------+-------+
+----+--------+-------+-------+-------+------+-------+-------+-------+ | | X | Y | Z26 | Z27 | Z28 | Z29 | Z30 | Z31 | | | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+======+=======+=======+=======+ | 0 | -12.72 | 3.60 | -0.28 | -0.89 | 1.44 | -0.19 | 1.38 | -1.18 | | 1 | -10.60 | 3.60 | -0.45 | -0.17 | 1.33 | 0.62 | 0.53 | -0.26 | | 2 | -8.48 | 3.60 | 0.20 | 0.79 | 1.78 | 0.71 | 0.02 | 0.11 | | 3 | -6.36 | 3.60 | -0.12 | -0.19 | 2.16 | 0.79 | 0.31 | 0.12 | | 4 | -4.24 | 3.60 | 0.05 | -0.65 | 1.94 | 0.31 | 0.33 | -0.25 | | 5 | -2.12 | 3.60 | 0.18 | -0.54 | 2.14 | -0.03 | 0.54 | -0.28 | | 6 | -0.00 | 3.60 | -0.00 | -0.41 | 2.04 | 0.04 | 0.40 | -0.37 | | 7 | 2.12 | 3.60 | 0.09 | -0.35 | 1.97 | 0.52 | 0.03 | -0.25 | | 8 | 4.24 | 3.60 | 0.32 | -0.29 | 2.13 | 0.21 | 0.03 | 0.05 | | 9 | 6.36 | 3.60 | 0.27 | -0.29 | 2.13 | -0.16 | 0.15 | 0.19 | | 10 | 8.48 | 3.60 | 0.30 | 0.57 | 2.11 | -0.74 | 0.55 | -0.15 | | 11 | 10.60 | 3.60 | 0.35 | 0.21 | 1.15 | -0.33 | -0.31 | -0.03 | | 12 | 12.72 | 3.60 | -0.03 | -0.34 | 0.93 | 0.25 | -0.91 | -1.12 | | 13 | -12.72 | 1.80 | 0.27 | -0.98 | 0.94 | 0.34 | 1.29 | -0.62 | | 14 | -10.60 | 1.80 | -0.52 | -0.31 | 0.64 | 0.36 | 0.88 | -0.18 | | 15 | -8.48 | 1.80 | -0.13 | 0.14 | 0.64 | 0.70 | -0.10 | -0.19 | | 16 | -6.36 | 1.80 | 0.57 | -0.11 | 1.53 | 0.25 | -0.21 | 0.20 | | 17 | -4.24 | 1.80 | 0.58 | -0.67 | 1.41 | -0.08 | -0.25 | 0.09 | | 18 | -2.12 | 1.80 | 0.47 | -0.80 | 1.72 | -0.04 | 0.16 | -0.17 | | 19 | -0.00 | 1.80 | 0.08 | -0.59 | 1.48 | -0.07 | -0.13 | -0.05 | | 20 | 2.12 | 1.80 | -0.17 | -0.61 | 1.76 | 0.13 | -0.19 | -0.13 | | 21 | 4.24 | 1.80 | -0.45 | -0.47 | 1.51 | 0.12 | 0.25 | 0.47 | | 22 | 6.36 | 1.80 | -0.49 | -0.28 | 1.45 | 0.14 | 0.13 | 0.64 | | 23 | 8.48 | 1.80 | 0.22 | 0.26 | 0.72 | -0.26 | 1.01 | 0.51 | | 24 | 10.60 | 1.80 | 0.36 | 0.32 | 0.70 | -0.37 | 0.01 | -0.10 | | 25 | 12.72 | 1.80 | -0.25 | -0.26 | 0.74 | 0.46 | -0.76 | -0.41 | | 26 | -12.72 | -0.00 | 0.84 | -0.69 | 1.55 | 0.18 | 1.25 | 0.15 | | 27 | -10.60 | -0.00 | -0.43 | -0.67 | 0.70 | 0.01 | 0.63 | -0.36 | | 28 | -8.48 | -0.00 | -0.31 | -0.38 | 0.56 | 0.26 | -0.32 | 0.02 | | 29 | -6.36 | -0.00 | 0.29 | 0.05 | 1.37 | -0.13 | -0.12 | 0.38 | | 30 | -4.24 | -0.00 | 0.74 | -0.03 | 1.37 | -0.19 | -0.26 | 0.14 | | 31 | -2.12 | -0.00 | 0.70 | -0.60 | 1.69 | -0.02 | 0.32 | 0.27 | | 32 | -0.00 | -0.00 | 0.02 | -0.21 | 1.71 | -0.09 | -0.16 | 0.17 | | 33 | 2.12 | -0.00 | -0.25 | -0.17 | 1.71 | -0.02 | -0.41 | 0.01 | | 34 | 4.24 | -0.00 | -0.47 | -0.30 | 1.75 | -0.32 | 0.35 | 0.22 | | 35 | 6.36 | -0.00 | -0.83 | 0.22 | 1.51 | 0.15 | 0.13 | 0.20 | | 36 | 8.48 | -0.00 | -0.09 | 0.41 | 0.28 | 0.51 | 0.29 | 0.34 | | 37 | 10.60 | -0.00 | 0.41 | -0.39 | 0.78 | 0.24 | 0.11 | 0.34 | | 38 | 12.72 | -0.00 | -0.07 | -0.11 | 1.59 | 0.46 | -0.62 | -0.26 | | 39 | -12.72 | -1.80 | 0.53 | -0.06 | 1.52 | 0.29 | 1.03 | 0.59 | | 40 | -10.60 | -1.80 | -0.58 | -0.93 | 1.14 | -0.33 | 0.26 | -0.37 | | 41 | -8.48 | -1.80 | -0.67 | -0.55 | 1.03 | -0.67 | -0.41 | -0.60 | | 42 | -6.36 | -1.80 | -0.16 | 0.56 | 1.76 | -0.21 | -0.35 | -0.52 | | 43 | -4.24 | -1.80 | 0.66 | 0.40 | 1.66 | -0.00 | 0.08 | -0.64 | | 44 | -2.12 | -1.80 | 0.67 | -0.04 | 2.06 | 0.20 | -0.29 | -0.20 | | 45 | -0.00 | -1.80 | 0.11 | -0.02 | 2.00 | -0.09 | 0.06 | -0.44 | | 46 | 2.12 | -1.80 | -0.06 | 0.25 | 2.29 | -0.17 | -0.12 | 0.13 | | 47 | 4.24 | -1.80 | -0.33 | 0.32 | 2.00 | -0.11 | 0.15 | -0.42 | | 48 | 6.36 | -1.80 | -0.47 | 0.64 | 1.78 | 0.35 | 0.32 | -0.33 | | 49 | 8.48 | -1.80 | 0.17 | 0.14 | 1.08 | 0.84 | 0.46 | -0.08 | | 50 | 10.60 | -1.80 | 0.49 | 0.15 | 1.08 | 0.42 | -0.84 | 0.01 | | 51 | 12.72 | -1.80 | -0.07 | 0.28 | 1.10 | 0.09 | -0.59 | 0.42 | | 52 | -12.72 | -3.60 | -0.35 | -0.46 | 1.35 | 0.76 | 0.60 | 1.00 | | 53 | -10.60 | -3.60 | -0.60 | -0.76 | 1.43 | 0.08 | 0.60 | -0.34 | | 54 | -8.48 | -3.60 | -0.34 | -0.33 | 1.92 | -1.27 | -0.43 | -0.81 | | 55 | -6.36 | -3.60 | -0.30 | 0.85 | 1.96 | -0.90 | 0.14 | -0.88 | | 56 | -4.24 | -3.60 | -0.03 | 0.17 | 2.03 | -0.13 | 0.10 | -0.66 | | 57 | -2.12 | -3.60 | 0.51 | 0.16 | 2.33 | 0.30 | 0.20 | -0.55 | | 58 | -0.00 | -3.60 | -0.10 | -0.03 | 2.48 | 0.04 | 0.08 | -0.08 | | 59 | 2.12 | -3.60 | -0.01 | 0.39 | 2.30 | -0.04 | -0.36 | -0.29 | | 60 | 4.24 | -3.60 | 0.35 | 0.15 | 2.48 | 0.36 | -0.06 | -0.16 | | 61 | 6.36 | -3.60 | 0.38 | 0.19 | 2.14 | 0.89 | -0.13 | -0.26 | | 62 | 8.48 | -3.60 | 0.03 | -0.47 | 1.72 | 0.65 | 0.04 | -0.28 | | 63 | 10.60 | -3.60 | 0.35 | 0.41 | 1.46 | 0.74 | -0.85 | -0.03 | | 64 | 12.72 | -3.60 | 0.64 | 0.48 | 1.27 | -0.61 | -1.05 | 0.59 | +----+--------+-------+-------+-------+------+-------+-------+-------+
+----+--------+-------+-------+-------+-------+-------+-------+------+ | | X | Y | Z32 | Z33 | Z34 | Z35 | Z36 | Z37 | | | [mm] | [mm] | [nm] | [nm] | [nm] | [nm] | [nm] | [nm] | +====+========+=======+=======+=======+=======+=======+=======+======+ | 0 | -12.72 | 3.60 | 0.64 | -0.02 | 1.12 | -0.14 | 0.22 | 1.58 | | 1 | -10.60 | 3.60 | -0.55 | 0.21 | 1.51 | -0.17 | -0.16 | 1.44 | | 2 | -8.48 | 3.60 | -0.24 | 0.63 | 0.92 | 0.35 | -0.96 | 1.40 | | 3 | -6.36 | 3.60 | -0.46 | 0.45 | 0.27 | -0.11 | -0.61 | 1.55 | | 4 | -4.24 | 3.60 | -0.33 | 0.39 | 0.06 | 0.22 | -0.23 | 1.71 | | 5 | -2.12 | 3.60 | 0.05 | 0.41 | 0.06 | 0.33 | 0.10 | 1.58 | | 6 | -0.00 | 3.60 | 0.21 | -0.03 | 0.37 | 0.28 | 0.31 | 1.90 | | 7 | 2.12 | 3.60 | 0.24 | -0.59 | 0.89 | 0.41 | 0.10 | 1.76 | | 8 | 4.24 | 3.60 | 0.15 | -0.17 | 0.54 | 0.40 | -0.04 | 1.30 | | 9 | 6.36 | 3.60 | -0.12 | -0.51 | 0.22 | 0.47 | -0.24 | 1.61 | | 10 | 8.48 | 3.60 | -0.30 | -0.59 | -0.27 | 0.19 | -0.22 | 1.91 | | 11 | 10.60 | 3.60 | -0.09 | -0.68 | -0.66 | -0.18 | -0.03 | 1.67 | | 12 | 12.72 | 3.60 | -0.08 | 0.11 | -0.48 | -0.03 | 0.72 | 1.91 | | 13 | -12.72 | 1.80 | -0.16 | -0.14 | 1.00 | 0.14 | -0.11 | 1.48 | | 14 | -10.60 | 1.80 | -0.63 | -0.05 | 1.69 | 0.15 | -0.45 | 1.74 | | 15 | -8.48 | 1.80 | -0.25 | 0.17 | 1.33 | 0.09 | -0.76 | 1.88 | | 16 | -6.36 | 1.80 | -0.07 | 0.06 | 0.19 | 0.25 | -0.26 | 1.48 | | 17 | -4.24 | 1.80 | -0.13 | 0.38 | 0.39 | -0.01 | 0.01 | 1.68 | | 18 | -2.12 | 1.80 | -0.04 | -0.15 | -0.27 | 0.37 | 0.43 | 2.23 | | 19 | -0.00 | 1.80 | -0.12 | 0.05 | 0.47 | 0.35 | 0.62 | 2.23 | | 20 | 2.12 | 1.80 | 0.41 | -0.01 | 0.95 | 0.50 | 0.44 | 1.99 | | 21 | 4.24 | 1.80 | 0.03 | -0.20 | 0.48 | -0.03 | 0.28 | 1.76 | | 22 | 6.36 | 1.80 | 0.34 | -0.32 | 0.68 | -0.21 | 0.05 | 1.84 | | 23 | 8.48 | 1.80 | 0.02 | -0.52 | -0.52 | -0.01 | -0.22 | 1.83 | | 24 | 10.60 | 1.80 | 0.03 | -0.26 | -0.34 | 0.17 | -0.18 | 2.06 | | 25 | 12.72 | 1.80 | 0.10 | -0.13 | -0.53 | 0.31 | 0.46 | 1.91 | | 26 | -12.72 | -0.00 | 0.49 | -0.61 | 1.64 | -0.07 | -0.15 | 1.36 | | 27 | -10.60 | -0.00 | 0.05 | 0.18 | 1.17 | -0.11 | -0.74 | 1.79 | | 28 | -8.48 | -0.00 | -0.02 | -0.09 | 1.29 | -0.10 | -0.89 | 1.82 | | 29 | -6.36 | -0.00 | -0.18 | -0.14 | 0.27 | -0.17 | -0.68 | 1.72 | | 30 | -4.24 | -0.00 | 0.02 | -0.28 | 0.13 | -0.27 | -0.03 | 1.73 | | 31 | -2.12 | -0.00 | 0.51 | -0.45 | 0.00 | -0.28 | 0.27 | 2.12 | | 32 | -0.00 | -0.00 | 0.92 | 0.13 | 0.27 | -0.48 | 0.56 | 2.83 | | 33 | 2.12 | -0.00 | 0.63 | -0.05 | 1.17 | -0.15 | 0.17 | 1.90 | | 34 | 4.24 | -0.00 | 0.33 | 0.09 | 0.57 | -0.47 | 0.43 | 1.91 | | 35 | 6.36 | -0.00 | 0.45 | 0.13 | 0.42 | -0.44 | -0.60 | 1.54 | | 36 | 8.48 | -0.00 | 0.07 | -0.26 | -0.35 | -0.38 | -0.69 | 1.72 | | 37 | 10.60 | -0.00 | 0.28 | -0.12 | -0.61 | -0.47 | -0.63 | 2.03 | | 38 | 12.72 | -0.00 | 0.69 | -0.09 | -0.97 | -0.26 | 0.28 | 1.91 | | 39 | -12.72 | -1.80 | 0.18 | -0.56 | 1.53 | 0.02 | -0.15 | 1.73 | | 40 | -10.60 | -1.80 | 0.23 | -0.27 | 1.14 | -0.21 | -0.67 | 1.91 | | 41 | -8.48 | -1.80 | -0.07 | -0.60 | 1.11 | -0.08 | -1.09 | 1.55 | | 42 | -6.36 | -1.80 | 0.16 | -0.61 | 0.18 | 0.03 | -0.56 | 1.56 | | 43 | -4.24 | -1.80 | 0.09 | -0.70 | 0.37 | -0.16 | -0.17 | 1.55 | | 44 | -2.12 | -1.80 | 0.05 | -0.34 | 0.03 | -0.64 | 0.14 | 1.79 | | 45 | -0.00 | -1.80 | 0.14 | -0.34 | 0.36 | -0.40 | 0.47 | 2.19 | | 46 | 2.12 | -1.80 | 0.09 | -0.06 | 1.09 | -0.36 | 0.53 | 1.98 | | 47 | 4.24 | -1.80 | -0.11 | 0.46 | 0.47 | -0.07 | 0.11 | 1.75 | | 48 | 6.36 | -1.80 | 0.31 | 0.36 | 0.68 | -0.27 | -0.29 | 1.46 | | 49 | 8.48 | -1.80 | -0.05 | 0.46 | -0.32 | 0.05 | -0.47 | 1.65 | | 50 | 10.60 | -1.80 | 0.06 | 0.26 | -0.68 | 0.07 | -0.33 | 2.02 | | 51 | 12.72 | -1.80 | 0.91 | 0.03 | -0.90 | 0.25 | 0.51 | 1.92 | | 52 | -12.72 | -3.60 | -0.43 | -0.14 | 1.35 | 0.27 | 0.23 | 1.65 | | 53 | -10.60 | -3.60 | -0.23 | -1.07 | 1.65 | 0.75 | -0.53 | 1.57 | | 54 | -8.48 | -3.60 | -0.04 | -1.04 | 0.85 | 0.48 | -0.69 | 1.91 | | 55 | -6.36 | -3.60 | -0.19 | -0.91 | 0.50 | 0.14 | -0.70 | 1.57 | | 56 | -4.24 | -3.60 | 0.10 | -0.53 | 0.21 | 0.20 | -0.14 | 1.47 | | 57 | -2.12 | -3.60 | 0.32 | -0.91 | 0.28 | -0.06 | 0.12 | 1.76 | | 58 | -0.00 | -3.60 | 0.67 | -0.28 | 0.43 | -0.26 | 0.20 | 1.88 | | 59 | 2.12 | -3.60 | 0.59 | 0.28 | 0.97 | -0.30 | 0.36 | 1.64 | | 60 | 4.24 | -3.60 | 0.15 | 0.21 | 0.47 | 0.20 | 0.26 | 1.61 | | 61 | 6.36 | -3.60 | 0.14 | 0.70 | 0.51 | 0.62 | -0.28 | 1.76 | | 62 | 8.48 | -3.60 | 0.04 | 0.86 | -0.34 | 0.39 | -0.45 | 1.52 | | 63 | 10.60 | -3.60 | -0.53 | 0.61 | -0.87 | 0.43 | 0.23 | 1.44 | | 64 | 12.72 | -3.60 | 0.72 | 0.46 | -0.63 | -0.02 | 0.69 | 1.71 | +----+--------+-------+-------+-------+-------+-------+-------+------+
Operator:ASML Machine:6xxx Release:4.1.0 Date:04/01/2016 Time:13:30
Report Filename : LUPI.27 Report Path : TM/Illumination/Performance/LUPI.log/ Machine Type : 1250D
Testname : ILIAS Pupil Measurement Start Time : Mon, 04 Jan 2016 13:25:59 273037us +0800 Stop Time : Mon, 04 Jan 2016 13:30:26 094390us +0800 Execution Time : 00:04:26 Test Run Result : OK Test Status : Test is Finished Results Validation : In Limits Measurement Quality : OK Comment :
+----------------------+------------+-----------+----------+----------------+ | Step | Start Time | Stop Time | Status | Execution Time | +======================+============+===========+==========+================+ | Initialize Drivers | 13:25:59 | 13:26:09 | Finished | 00:00:09 | | Prepare Machine | 13:26:09 | 13:27:48 | Finished | 00:01:38 | | Perform Measurements | 13:27:48 | 13:29:51 | Finished | 00:02:03 | | Perform Analysis | 13:29:51 | 13:30:25 | Finished | 00:00:33 | +----------------------+------------+-----------+----------+----------------+
Scenario Inputs
Selected Scenario : ATP-1 Verification Set : Final Verification Overrule Inputs : No Manual Scenario Selected : No
Measurement input values
Measurement mode : Static Image size : 256 x 256 Pupil Shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Polarization mode : Unpolarized Start beam Beam Mode : Automatic Beam Positioning Position x : -3.000 [mm] Position y : 0.000 [mm] Pointing x : 0.450 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 50 [uRad] Measurement sequence : 5x1 Auto reticle Perform measurement : Yes Perform analysis : Yes Raw data file : service_data/LU/LUPI/LUPI_RAW_m6xxx.355 Save avg pupil as picture file : No sigma correction : Yes Pupil Qualification Method : Automatic Pupil Qualification Pupil Numbers Method : Center of Gravity Method
verification_type : Final Verification Average Sigma Outer minimum : 0.000 maximum : 1.000 Average Sigma Inner minimum : 0.000 maximum : 1.000 Sigma Outer Range minimum : 0.000 maximum : 1.000 Sigma Inner Range minimum : 0.000 maximum : 1.000 Deviation Sigma Outer (set - get) minimum : -1.000 maximum : 1.000 Deviation Sigma Inner (set - get) minimum : -1.000 maximum : 1.000 Average Sigma variation minimum : 0.000 maximum : 0.012 Show Ellipticity : No Average Range Sigma Inner Range minimum : 0.000 maximum : 1.000 Average Range Sigma Outer Range minimum : 0.000 maximum : 1.000 Average Ellipticity minimum : -3.000e+00 [%] maximum : 3.000 [%] Minimum Ellipticity minimum : 0.000e+00 [%] maximum : 100.000 [%] Maximum Ellipticity minimum : 0.000e+00 [%] maximum : 100.000 [%] Ellipticity Range minimum : 0.000e+00 [%] maximum : 100.000 [%] Average Ellipticity (45 deg) minimum : -1.000e+02 [%] maximum : 100.000 [%] Minimum Ellipticity (45 deg) minimum : 0.000e+00 [%] maximum : 100.000 [%] Maximum Ellipticity (45 deg) minimum : 0.000e+00 [%] maximum : 100.000 [%] Ellipticity Range (45 deg) minimum : 0.000e+00 [%] maximum : 100.000 [%] Show COG : No COG X field variation minimum : 0.0000 maximum : 1.0000 COG Y field variation minimum : 0.0000 maximum : 1.0000 Balance type : None Average Balance minimum : 0.000e+00 [%] maximum : 100.000 [%] Balance Range minimum : 0.000e+00 [%] maximum : 100.000 [%] Balance Minimum minimum : 0.000e+00 [%] maximum : 100.000 [%] Balance Maximum minimum : 0.000e+00 [%] maximum : 100.000 [%]
Avg Pole Width +---+---------+---------+ | | minimum | maximum | | | [deg] | [deg] | +===+=========+=========+ | 0 | 0.0 | 180.0 | | 1 | 0.0 | 180.0 | | 2 | 0.0 | 180.0 | | 3 | 0.0 | 180.0 | +---+---------+---------+
Avg Pole Width variation +---+---------+---------+ | | minimum | maximum | | | [deg] | [deg] | +===+=========+=========+ | 0 | 0.0 | 180.0 | | 1 | 0.0 | 180.0 | | 2 | 0.0 | 180.0 | | 3 | 0.0 | 180.0 | +---+---------+---------+
Measurement Result values
Picture file : Pupil data to analyse Test_identifier : LUPI Time of measurement : Mon, 04 Jan 2016 13:29:49 098907us +0800 mach_info Machine number : 6xxx Machine type : 1250D Machine architecture : XT Machine Architecture Machine specification : pep-D Specification Lightsource type : Cymer Laser: XLA 165 Illuminator type : 120 Software release : 4.1.0.c Lens number : 0122xxxx
DOE data +----+--------+-------------------+----------------+------------------+ | | DOE ID | Illumination mode | DOE Table name | DOE File version | +====+========+===================+================+==================+ | 0 | 2 | Quasar | cQuad20 | 2.0.1 | | 1 | 15 | Conventional | conventional | 2.0.1 | | 2 | 14 | Quasar | cQuad 60 | 2.0.1 | | 3 | 18 | Quasar | Dipole40 Y | 2.0.1 | | 4 | 15 | Annular | annular | 2.0.1 | | 5 | 0 | Conventional | | | | 6 | 0 | Conventional | | | | 7 | 0 | Conventional | | | | 8 | 0 | Conventional | | | | 9 | 0 | Conventional | | | | 10 | 0 | Conventional | | | | 11 | 0 | Conventional | | | | 12 | 0 | Conventional | | | | 13 | 0 | Conventional | | | | 14 | 0 | Conventional | | | | 15 | 0 | Conventional | | | | 16 | 0 | Conventional | | | +----+--------+-------------------+----------------+------------------+
mach_settings Pupil shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 DOE Table name : annular DOE File version : 2.0.1 Actual beam position and pointing Beam Mode : Automatic Beam Positioning Position x : -2.741 [mm] Position y : -0.171 [mm] Pointing x : 0.472 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 50 [uRad] VAT Compensation : No Uniformity Improvement Package mode : UIP mode on Actual Pupicom setting Mode : Automatic Angle : 0.8 [deg] Actual Unicom setting Mode : Automatic Position : 47.145 [mm] Reticle information Reticle ID : 45563154P009 Reticle chrome y-offset (WS coordinates) : 0.901 [mm] Chrome offset direction : Positive direction Number of pinholes : 5 ILIAS sensor type on chuck1 : None ILIAS sensor type on chuck 2 : Multiple scan grid Sensor used for measurement : ILIAS on chuck 2 mode : Static Values all pinholes
Average Pupil Values +--------------------------+---------+---------+--------+---------+ | | Minimum | Maximum | Range | Average | +==========================+=========+=========+========+=========+ | Sigma Inner [10%] | 0.6689 | 0.6756 | 0.0067 | 0.6727 | | Sigma Outer [90%] | 0.9375 | 0.9403 | 0.0028 | 0.9393 | | Ellipticity [%] | -1.598 | 1.385 | 2.983 | -0.252 | | Ellipticity (45 Deg) [%] | -0.801 | 0.464 | 1.266 | -0.144 | | Quadrant balance [%] | 0.250 | 2.928 | 2.679 | 1.417 | | cQuadrant balance [%] | 0.949 | 2.961 | 2.012 | 1.733 | | Balance X [%] | 0.219 | 2.528 | 2.309 | 1.201 | | Balance Y [%] | 0.031 | 0.289 | 0.258 | 0.120 | +--------------------------+---------+---------+--------+---------+
Average Pole Information Pole 1 Pole 2 Pole 3 Pole 4 Pole 5 Pole 6 Pole 7 Pole 8
Pole group info Group 1 Group 2 Group 3 Inter Group Max. value
Values per pinhole +----+-------------------------------------------+-------------------+ | | Pinhole position (Waferstage coordinates) | Pupil values | | +-------------+-------------+---------------+-------------------+ | | Position X | Position Y | Slit y-offset | Sigma inner [10%] | | | [mm] | [mm] | [mm] | | +====+=============+=============+===============+===================+ | 0 | -12.72 | -11.00 | 0.00 | 0.6691 | | 1 | -6.36 | -11.00 | 0.00 | 0.6756 | | 2 | 0.00 | -11.00 | 0.00 | 0.6756 | | 3 | 6.36 | -11.00 | 0.00 | 0.6746 | | 4 | 12.72 | -11.00 | 0.00 | 0.6689 | | 5 | 0.00 | 0.00 | 0.00 | 0.0000 | | 6 | 0.00 | 0.00 | 0.00 | 0.0000 | | 7 | 0.00 | 0.00 | 0.00 | 0.0000 | | 8 | 0.00 | 0.00 | 0.00 | 0.0000 | | 9 | 0.00 | 0.00 | 0.00 | 0.0000 | | 10 | 0.00 | 0.00 | 0.00 | 0.0000 | | 11 | 0.00 | 0.00 | 0.00 | 0.0000 | | 12 | 0.00 | 0.00 | 0.00 | 0.0000 | | 13 | 0.00 | 0.00 | 0.00 | 0.0000 | | 14 | 0.00 | 0.00 | 0.00 | 0.0000 | | 15 | 0.00 | 0.00 | 0.00 | 0.0000 | | 16 | 0.00 | 0.00 | 0.00 | 0.0000 | | 17 | 0.00 | 0.00 | 0.00 | 0.0000 | | 18 | 0.00 | 0.00 | 0.00 | 0.0000 | | 19 | 0.00 | 0.00 | 0.00 | 0.0000 | +----+-------------+-------------+---------------+-------------------+ +----+---------------------------------------------------------------------------+ | | Pupil values | | +-------------------+-------------+----------------------+------------------+ | | Sigma outer [90%] | Ellipticity | Ellipticity (45 Deg) | Quadrant balance | | | | [%] | [%] | [%] | +====+===================+=============+======================+==================+ | 0 | 0.9393 | 1.4 | -0.8 | 2.9 | | 1 | 0.9399 | -0.7 | -0.3 | 0.6 | | 2 | 0.9403 | -1.6 | -0.1 | 0.7 | | 3 | 0.9394 | -1.5 | -0.0 | 0.2 | | 4 | 0.9375 | 1.1 | 0.5 | 2.6 | | 5 | 0.0000 | 0.0 | 0.0 | 0.0 | | 6 | 0.0000 | 0.0 | 0.0 | 0.0 | | 7 | 0.0000 | 0.0 | 0.0 | 0.0 | | 8 | 0.0000 | 0.0 | 0.0 | 0.0 | | 9 | 0.0000 | 0.0 | 0.0 | 0.0 | | 10 | 0.0000 | 0.0 | 0.0 | 0.0 | | 11 | 0.0000 | 0.0 | 0.0 | 0.0 | | 12 | 0.0000 | 0.0 | 0.0 | 0.0 | | 13 | 0.0000 | 0.0 | 0.0 | 0.0 | | 14 | 0.0000 | 0.0 | 0.0 | 0.0 | | 15 | 0.0000 | 0.0 | 0.0 | 0.0 | | 16 | 0.0000 | 0.0 | 0.0 | 0.0 | | 17 | 0.0000 | 0.0 | 0.0 | 0.0 | | 18 | 0.0000 | 0.0 | 0.0 | 0.0 | | 19 | 0.0000 | 0.0 | 0.0 | 0.0 | +----+-------------------+-------------+----------------------+------------------+ +----+----------------------------------------------------------+------------------+ | | Pupil values | COG | | +-------------------+-----------+-----------+--------------+---------+--------+ | | cQuadrant balance | Balance X | Balance Y | Nr. of poles | cog X | cog Y | | | [%] | [%] | [%] | | [-] | [-] | +====+===================+===========+===========+==============+=========+========+ | 0 | 3.0 | 2.5 | 0.1 | 0 | -0.0295 | 0.0062 | | 1 | 1.0 | 0.5 | 0.1 | 0 | -0.0017 | 0.0023 | | 2 | 1.0 | 0.4 | 0.3 | 0 | 0.0014 | 0.0037 | | 3 | 0.9 | 0.2 | 0.0 | 0 | 0.0036 | 0.0031 | | 4 | 2.7 | 2.3 | 0.1 | 0 | 0.0230 | 0.0067 | | 5 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 6 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 7 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 8 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 9 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 10 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 11 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 12 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 13 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 14 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 15 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 16 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 17 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 18 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | | 19 | 0.0 | 0.0 | 0.0 | 0 | 0.0000 | 0.0000 | +----+-------------------+-----------+-----------+--------------+---------+--------+ +----+-----------+----------+ | | | | | | | | | | Nr pulses | Dose | | | | [mJ] | +====+===========+==========+ | 0 | 68 | 29584.74 | | 1 | 69 | 29836.71 | | 2 | 66 | 28325.13 | | 3 | 65 | 28088.92 | | 4 | 65 | 28332.11 | | 5 | 0 | 0.00 | | 6 | 0 | 0.00 | | 7 | 0 | 0.00 | | 8 | 0 | 0.00 | | 9 | 0 | 0.00 | | 10 | 0 | 0.00 | | 11 | 0 | 0.00 | | 12 | 0 | 0.00 | | 13 | 0 | 0.00 | | 14 | 0 | 0.00 | | 15 | 0 | 0.00 | | 16 | 0 | 0.00 | | 17 | 0 | 0.00 | | 18 | 0 | 0.00 | | 19 | 0 | 0.00 | +----+-----------+----------+
Pole pos. and orientation per pinhole
pole_orient_matrix +----+--------+--------+--------+--------+--------+--------+--------+--------+ | | Pole 1 | Pole 2 | Pole 3 | Pole 4 | Pole 5 | Pole 6 | Pole 7 | Pole 8 | +====+========+========+========+========+========+========+========+========+ | 0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 1 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 2 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 3 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 4 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 5 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 6 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 7 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 8 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 9 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 10 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 11 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 12 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 13 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 14 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 15 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 16 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 17 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 18 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 19 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 20 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 21 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 22 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 23 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 24 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 25 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 26 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | +----+--------+--------+--------+--------+--------+--------+--------+--------+
pole_width_matrix +----+--------+--------+--------+--------+--------+--------+--------+--------+ | | Pole 1 | Pole 2 | Pole 3 | Pole 4 | Pole 5 | Pole 6 | Pole 7 | Pole 8 | +====+========+========+========+========+========+========+========+========+ | 0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 1 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 2 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 3 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 4 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 5 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 6 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 7 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 8 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 9 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 10 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 11 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 12 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 13 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 14 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 15 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 16 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 17 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 18 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 19 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 20 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 21 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 22 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 23 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 24 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 25 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | | 26 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | 0.0 | +----+--------+--------+--------+--------+--------+--------+--------+--------+
Verification Results +-------------------------+---------+---------+----------+-----------+ | | Minimum | Maximum | Measured | In Limits | +=========================+=========+=========+==========+===========+ | Sigma Inner | 0.000 | 1.000 | 0.673 | Ok | | Sigma Outer | 0.000 | 1.000 | 0.939 | Ok | | Sigma Variation | 0.000 | 0.012 | 0.007 | Ok | | Range Sigma Inner | 0.000 | 1.000 | 0.007 | Ok | | Range Sigma Outer | 0.000 | 1.000 | 0.003 | Ok | | Average Ellipticity [%] | -3.000 | 3.000 | -0.252 | Ok | +-------------------------+---------+---------+----------+-----------+
sigma correction pupil_shape Illumination mode : Conventional NA : 0.000 DOE ID : 0 Sigma inner : 0.000 outer : 0.000 offset inner : 0.000 outer : 0.000
Operator:ASML Machine:6xxx Release:4.1.0 Date:13/01/2016 Time:17:46
Report Filename : LUSL.99 Report Path : TM/Projection/StrayLightMonitoring/LUSL.log/ Machine Type : 1250D
File name of logfile(s) : service_data/LU/LUSL/LUSL.0352.log
Testname : Uniformity Stray Light Measurement Start Time : Wed, 13 Jan 2016 17:45:44 039008us +0800 Stop Time : Wed, 13 Jan 2016 17:46:49 102252us +0800 Execution Time : 00:01:05 Test Run Result : Finished Test Status : Test is Finished Results Validation : In Limits Measurement Quality : OK Comment : Scheduled execution (m-action)
+----------------------+------------+-----------+----------+----------------+ | Step | Start Time | Stop Time | Status | Execution Time | +======================+============+===========+==========+================+ | Initialize drivers | 17:45:44 | 17:45:46 | Finished | 00:00:02 | | Prepare machine | 17:45:46 | 17:46:12 | Finished | 00:00:25 | | Perform measurements | 17:46:12 | 17:46:48 | Finished | 00:00:36 | | Calculate results | 17:46:48 | 17:46:49 | Finished | 00:00:00 | +----------------------+------------+-----------+----------+----------------+
Scenario Inputs
Selected Scenario : Monitoring Verification Set : Single Verification Overrule Inputs : No Manual Scenario Selected : No
Input parameters
pupil_shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Image Field Size X : 26.00 [mm] Image Field Size Y : 26.00 [mm] Steps in X : 11 Steps in Y : 1 No. of Pulses : 200 Pulse Frequency : 4000 Attenuator Transmission : 100 [%] spot_sensor : Non-Leading Reticle used : No REMA settings Rema use : Spot disable_BBS : No Unicom Mode : Automatic Position : 47.153 [mm] Use Nominal Pulse Frequency : Yes
Verification data
verification_type : Single Verification
Results
Machine information Machine Type : 1250D Lens number : 0122xxxx UNICOM position : 47.15 [mm] Stray light results Maximum Stray Light Value : 0.530 [%] X position : 2.588 [mm] Y position : 0.000 [mm] At (0,0) Stray Light Value : 0.516 [%] X position : -0.000 [mm] Y position : 0.000 [mm] Max. Centre-to-edge Stray Light Value : 0.252 [%] X position : -12.939 [mm] Y position : 0.000 [mm] Slit Average Stray Light Value : 0.445 [%] Y position : 0.000 [mm] Result with UNICOM at centre position UNICOM centre position : 35.1 [mm] Stray Light at (0,0) Stray Light Value : 0.571 [%] X position : 0.000 [mm] Y position : 0.000 [mm]
Stray light results per point on the line y=0 +----+-------------------+------------+------------+ | | Stray Light Value | X position | Y position | | | [%] | [mm] | [mm] | +====+===================+============+============+ | 0 | 0.264 | -12.939 | 0.000 | | 1 | 0.434 | -10.351 | 0.000 | | 2 | 0.455 | -7.763 | 0.000 | | 3 | 0.484 | -5.175 | 0.000 | | 4 | 0.506 | -2.588 | 0.000 | | 5 | 0.516 | -0.000 | 0.000 | | 6 | 0.530 | 2.588 | 0.000 | | 7 | 0.514 | 5.175 | 0.000 | | 8 | 0.465 | 7.763 | 0.000 | | 9 | 0.430 | 10.351 | 0.000 | | 10 | 0.293 | 12.939 | 0.000 | | 11 | 0.000 | 0.000 | 0.000 | | 12 | 0.000 | 0.000 | 0.000 | | 13 | 0.000 | 0.000 | 0.000 | | 14 | 0.000 | 0.000 | 0.000 | | 15 | 0.000 | 0.000 | 0.000 | | 16 | 0.000 | 0.000 | 0.000 | | 17 | 0.000 | 0.000 | 0.000 | | 18 | 0.000 | 0.000 | 0.000 | | 19 | 0.000 | 0.000 | 0.000 | | 20 | 0.000 | 0.000 | 0.000 | | 21 | 0.000 | 0.000 | 0.000 | | 22 | 0.000 | 0.000 | 0.000 | | 23 | 0.000 | 0.000 | 0.000 | | 24 | 0.000 | 0.000 | 0.000 | | 25 | 0.000 | 0.000 | 0.000 | | 26 | 0.000 | 0.000 | 0.000 | | 27 | 0.000 | 0.000 | 0.000 | | 28 | 0.000 | 0.000 | 0.000 | | 29 | 0.000 | 0.000 | 0.000 | | 30 | 0.000 | 0.000 | 0.000 | | 31 | 0.000 | 0.000 | 0.000 | | 32 | 0.000 | 0.000 | 0.000 | | 33 | 0.000 | 0.000 | 0.000 | | 34 | 0.000 | 0.000 | 0.000 | | 35 | 0.000 | 0.000 | 0.000 | | 36 | 0.000 | 0.000 | 0.000 | | 37 | 0.000 | 0.000 | 0.000 | | 38 | 0.000 | 0.000 | 0.000 | | 39 | 0.000 | 0.000 | 0.000 | | 40 | 0.000 | 0.000 | 0.000 | | 41 | 0.000 | 0.000 | 0.000 | | 42 | 0.000 | 0.000 | 0.000 | | 43 | 0.000 | 0.000 | 0.000 | | 44 | 0.000 | 0.000 | 0.000 | | 45 | 0.000 | 0.000 | 0.000 | | 46 | 0.000 | 0.000 | 0.000 | | 47 | 0.000 | 0.000 | 0.000 | | 48 | 0.000 | 0.000 | 0.000 | | 49 | 0.000 | 0.000 | 0.000 | | 50 | 0.000 | 0.000 | 0.000 | +----+-------------------+------------+------------+
Operator:ASML Machine:6xxx Release:4.1.0 Date:12/01/2016 Time:20:12
Report Filename : LUSU.65 Report Path : TM/Illumination/Performance/LUSU.log/ Machine Type : 1250D
File name of logfile(s) : service_data/LU/LUSU/LUSU.1637.log
Testname : Slit Uniformity Start Time : Tue, 12 Jan 2016 20:10:33 598505us +0800 Stop Time : Tue, 12 Jan 2016 20:12:51 657772us +0800 Execution Time : 00:02:18 Test Run Result : OK Test Status : Test is Finished Results Validation : In Limits Measurement Quality : OK Comment :
+---------------------+------------+-----------+----------+----------------+ | Step | Start Time | Stop Time | Status | Execution Time | +=====================+============+===========+==========+================+ | Initialize Drivers | 20:10:33 | 20:10:33 | Finished | 00:00:00 | | Prepare Machine | 20:10:33 | 20:10:53 | Finished | 00:00:19 | | Perform Measurement | 20:10:53 | 20:12:47 | Finished | 00:01:54 | | Generate Results | 20:12:47 | 20:12:50 | Finished | 00:00:03 | +---------------------+------------+-----------+----------+----------------+
Scenario Inputs
Selected Scenario : m-action Verification Set : Single Verification Overrule Inputs : No Manual Scenario Selected : No
Measurement mode : Stepping Slit Uniformity X Size : 26.000 [mm] Slit Uniformity Y Size : 11.000 [mm] Field Uniformity X Size : 26.000 [mm] Field Uniformity Y Size : 7.000 [mm] Field Shift X : 0.000 [mm] Field Shift Y : 0.000 [mm] Steps in X Direction : 11 Steps in Y Direction : 51 Number of pulses : 100 Number of pre-expose pulses : 0 Attenuator transmission laser : 1.00 Pulse frequency : 4000 Use the nominal pulse frequency as pulse frequency : Yes Pupil shape Illumination mode : Annular NA : 0.850 DOE ID : 15 Sigma inner : 0.690 outer : 0.930 Polarization mode : Unpolarized Spot sensor : Leading REMA window REMA window X centre : 0.00000 [m] REMA window Y centre : 0.00000 [m] REMA window X size : 0.00000 [m] REMA window Y size : 0.00000 [m] REMA set_ps Rema use : Spot disable_BBS : No Unicom Mode : Automatic Position : 47.152 [mm] Pupicom Mode : Automatic Angle : 0.8 [deg] Beam Beam Mode : Automatic Beam Positioning Position x : -3.000 [mm] Position y : 0.000 [mm] Pointing x : 0.450 [mRad] Pointing y : 0.000 [mRad] Beam Window Beam position control window : 300 [um] Beam pointing control window : 50 [uRad] UIP on : Yes
type : Single Verification
slit_uniformity_limits minimum : 0.00 [%] maximum : 20.00 [%]
average spot sensor light intensity limits minimum : 0.00 [mW/cm^2] maximum : 10000.00 [mW/cm^2]
av_ss_light_int_1_bp_limits minimum : 0.00 [mW/cm^2] maximum : 10000.00 [mW/cm^2]
av_point_ratio_limits minimum : 0.00 [%] maximum : 10.00 [%]
tilt_x_limits minimum : -20.00 [%] maximum : 20.00 [%]
tilt_y_limits minimum : -20.00 [%] maximum : 20.00 [%]
field_uniformity_limits minimum : 0.00 [%] maximum : 20.00 [%]
slit_uni_tilt_x_limits minimum : 0.00 [%] maximum : 20.00 [%]
slit_uni_sym_limits minimum : 0.00 [%] maximum : 20.00 [%]
slit_uni_tilt_x_sym_limits minimum : 0.00 [%] maximum : 20.00 [%]
symmetrical_error_limits minimum : -20.00 [%] maximum : 20.00 [%]
unicom_position_limits minimum : 0.0 [mm] maximum : 100.0 [mm]
pupicom_position_limits minimum : -60.0 [deg] maximum : 60.0 [deg]
beam_pos_x_limits minimum : -10.000 [mm] maximum : 10.000 [mm]
beam_pos_y_limits minimum : -10.000 [mm] maximum : 10.000 [mm]
beam_poi_x_limits minimum : -5.000 [mrad] maximum : 5.000 [mrad]
beam_poi_y_limits minimum : -5.000 [mrad] maximum : 5.000 [mrad]
Main Results Slit Uniformity : 0.93 [%] Tilt X : -0.12 [%] Symmetrical Error : 0.69 [%] UNICOM correctable : 0.42 [%] Selected Chuck : Spot sensor WS chuck 1 Corrected Slit Uniformities Slit Uniformity if corrected for Tilt X : 0.90 [%] Slit Uniformity if corrected for Symmetrical Error : 0.35 [%] Slit Uniformity if corrected for Tilt X and Symmetrical Error : 0.36 [%] Slit Uniformity if corrected for UNICOM : 0.51 [%] Slit Uniformity if corrected for UNICOM and Tilt X : 0.56 [%] Light Source Properties Number of Laser Pulses emitted since installation [*10^6] : 31030 Illumination Properties DOE data file name : annular DOE data file version : 2.0.1 Beam Position and Pointing Beam position X : -2.68 [mm] Beam position Y : 0.08 [mm] Beam pointing X : 0.446 [mrad] Beam pointing Y : 0.012 [mrad] Beam data valid : Yes Beam drift during measurement Beam position X : -0.74 [mm] Beam position Y : -0.08 [mm] Beam pointing X : -0.001 [mrad] Beam pointing Y : -0.013 [mrad] Beam drift during measurement valid : Yes Field Uniformity Results Field Uniformity : 2.46 [%] Tilt Y : -1.02 [%] Field Value Statistics Average Spot Sensor Light Intensity : 1826.93 [mW/cm2] Standard Deviation of the Spot Sensor Light Intensity : 25.17 [mW/cm2] Average Energy Sensor Light Intensity : 1790.55 [mW/cm2] Standard Deviation of the Energy Sensor Light Intensity : 13.58 [mW/cm2] Average Point Ratio : 1.0203 Standard Deviation of the Point Ratio : 0.0115 Corrected Intensities Average Spot Sensor Light Intensity Corrected to 1 external BP : 2003.15 [mW/cm2] Intensity constants ATP Intensity Specification : 2000 [mW/cm2] Number of Bending Points : 3 Greyfilter Coefficients Comment : Calculated a0 : -0.00000e+00 a2 : -7.71078e-02 [1/mm2] a4 : 1.93402e-03 [1/mm4] a6 : -1.81279e-05 [1/mm6] a8 : 5.27786e-08 [1/mm8]
Slit Profile +----+--------+---------------+----------------------+---------+----------+ | | X | Average Ratio | Ratio per run (0..4) | (5..14) | (15..24) | | | [mm] | [%] | [%] | [%] | [%] | +====+========+===============+======================+=========+==========+ | 0 | -12.94 | 80.350 | | | | | 1 | -10.35 | 79.461 | | | | | 2 | -7.77 | 79.189 | | | | | 3 | -5.18 | 79.439 | | | | | 4 | -2.59 | 79.269 | | | | | 5 | 0.00 | 79.166 | | | | | 6 | 2.59 | 78.864 | | | | | 7 | 5.18 | 78.915 | | | | | 8 | 7.77 | 79.151 | | | | | 9 | 10.35 | 79.952 | | | | | 10 | 12.94 | 80.066 | | | | +----+--------+---------------+----------------------+---------+----------+
Verification Results +-------------------------------------------+--------------------+-----------+----------+ | | limits | | | | +---------+----------+ | | | | minimum | maximum | In Limits | Measured | +===========================================+=========+==========+===========+==========+ | Slit uniformity [%] | 0.00 | 20.00 | OK | 0.93 | | Avg SS light intensity [mW/cm^2] | 0.00 | 10000.00 | OK | 1826.93 | | Avg SS light intensity corr 1BP [mW/cm^2] | 0.00 | 10000.00 | OK | 2003.15 | | Average point ratio [%] | 0.00 | 10.00 | OK | 1.02 | | Tilt X [%] | -20.00 | 20.00 | OK | -0.12 | | Tilt Y [%] | -20.00 | 20.00 | OK | -1.02 | | Field uniformity [%] | 0.00 | 20.00 | OK | 2.46 | | Slit uniformity tilt X [%] | 0.00 | 20.00 | OK | 0.90 | | Slit uniformity symmetrical [%] | 0.00 | 20.00 | OK | 0.35 | | Slit uniformity tilt X & symmetrical [%] | 0.00 | 20.00 | OK | 0.36 | | Symmetrical error [%] | -20.00 | 20.00 | OK | 0.69 | | Unicom position [mm] | 0.0 | 100.0 | OK | 47.2 | | Pupicom position [deg] | -60.0 | 60.0 | OK | 0.0 | | Beam position X [mm] | -10.000 | 10.000 | OK | -2.685 | | Beam position Y [mm] | -10.000 | 10.000 | OK | 0.084 | | Beam pointing X [mrad] | -5.000 | 5.000 | OK | 0.446 | | Beam pointing Y [mrad] | -5.000 | 5.000 | OK | 0.012 | +-------------------------------------------+---------+----------+-----------+----------+
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