Canon FPA 5500 iZ i-line stepper for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Canon FPA 5500 iZ i-line stepper.
Please click on the "Get Quote" button at the end of the FPA 5500 iZ description, if you'd like to get a quotation, photos and specifications of this i-line stepper, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Canon FPA 5500 iZ i-line stepper is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Canon FPA 5500 iZ Equipment Details

SDI ID: 109105
Manufacturer: Canon
Model: FPA 5500 iZ
Description: i-line stepper
Version: 300 mm
Vintage: 01.06.2001
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

-Still installed
-Can be inspected by appointment

1) no Stepper Computer Workstation harddisk installed
2) No Hg-lamp installed
3) No UPS unit installed.
4) 1x Reticle SMIF pod indexer missing

End of Life status: all optical parts, exposure shutter unit, main shutter unit, wafer robot system, reticle robot system-Sales method: Closed bidding. If you would be interested to purchase this machine then, please submit your best offer for consideration. The offer is made subject to inspection (i.e. Following inspection of the tool, the offer can be revised.).

Basic performance Specification for the Canon FPA5500iZ:

Reticle Size: 6 inch, 1/4 inch thick
Wafer Size: 8” & 12” Capable
Magnification: X 1/4
Numerical Aperture: 0.57 to 0.45
Image Field: 26mm x 33mm
Printing Wavelength: i-line (365 nm)
Resolution: 0.35 um
Illumination Lamp: 4.5kW Ultra high pressure Hg lamp
Illumination Uniformity: <= 1.0%
Intensity: >= 14000W/m2
Alignment Modes: TTL Off-Axis He-Ne TV
                 TTL Off-Axis Broad Band TV
Alignment Light Source: He-Ne laser (633 nm)
                        Broad Band (Halogen lamp)
Alignment Accuracy: >= 0.40nm (mean + 3 sigma)
Throughput: >= 160 wafers/hour (8”, 30 shots)
            >= 100wafers/hour (12”, 64 shots)
Wafer Leveling: Die-by-die tilt
                Global tilt

Get Quote

Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.


The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

SDI-Fabsurplus has worked with determination and tenacity over the last 25 years to develop one of the largest semiconductor equipment databases and the best software.

We strive to provide our customers with the best equipment at the lowest prices using our unparalleled network of industry contacts.

We are truely devoted to become your professional , customer-oriented , efficient and value-for-money semiconductor equipment and parts source.

Read more about us

View all FAB Litho Exposure for sale

Search for Canon items for sale

Search for FPA 5500 iZ items for sale

Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.


sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy.

SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news

We'd love to get your feedback about our website and our services! If you can think of ways we can improve or other services you need, please feel free to send details.

Feedback Form