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CANON FPA2500i3 i-Line Stepper for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used CANON FPA2500i3 i-Line Stepper.
Please click on the "Get Quote" button at the end of the FPA2500i3 description, if you'd like to get a quotation, photos and specifications of this i-Line Stepper, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This CANON FPA2500i3 i-Line Stepper is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


CANON FPA2500i3 Equipment Details

SDI ID: 95427
Manufacturer: CANON
Model: FPA2500i3
Description: i-Line Stepper
Version: 150 mm
Vintage: 01.05.1995
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Configured for 6 inch Wafer, 5 inch reticle use.
-Was in working condition before removal.
-Currently stored in clean warehouse, the system will be consigned to you EXW Incoterms.
-Inspection is available by appointment.
Reticle Size: 6”, 0.25”t, [5”, 0.09”t option]
Wafer Size: 6”, 8” [ 4”, 5” option ]
Magnification: X 1/5
Numerical Aperture: 0.60 / 0.52
Image Field: 20 mm [(X)11.14mm x (Y)26mm)
Printing Wavelength: i-line (365 nm)
Resolution: 0.40 μm
Illumination Lamp: 1.5 kW super-high-pressure
mercury lamp
Illumination Uniformity: ≤ 1.2 %
Alignment Modes: TTL Off-Axis He-Ne TV
TTL Off-Axis Broad Band TV
Alignment Light Source: He-Ne laser (633 nm)
Broad Band (Halogen lamp)
Alignment Accuracy: ≤ 0.1 μm (mean + 3 σ)
Throughput: ≥ 68 wafers / hour (6”, 32 shots)
≥ 44 wafers / hour (8”, 60 shot)
Wafer Leveling: Die-by-die tilt, Global tilt


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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