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Novellus Concept 3 Speed CVD System, 3 chamber, STI / IMD process for Sale


fabsurplus.com is pleased to announce the availability of the following listed used Novellus Concept 3 Speed CVD System, 3 chamber, STI / IMD process. This Novellus Concept 3 Speed CVD System, 3 chamber, STI / IMD process is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this CVD System, 3 chamber, STI / IMD process and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Novellus Concept 3 Speed Equipment Details

SDI ID: 83599
Manufacturer: Novellus
Model: Concept 3 Speed
Description: CVD System, 3 chamber, STI / IMD process
Version: 300 mm
Vintage: 01.06.2005
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price (each): Inquire
Comments:
-De-installed
-Warehoused
-Can be inspected by appointment
-Missing the hard disk drive from the computer
-Please refer to the attached photos for details regarding the condition of the tool.

Process type: STI (Shallow Trench Isolation)
Process type: IMD (Inter metal dielectric)
(The characteristic of the CVD step in both of the above process types is the deposition of a di-electric layer on the substrate.).

Number of loaders: 3 x foup, Brooks Fixload 6
Supply type: 208V 3 phase
Chamber Pump Type: Leybold MAG2000C
Butterfly Valve Controller: Intellisys
Chamber gate valve type: VAT
Number of process chambers: 3
PEC Station: present
Mainframe config:-
System power: 3 phase 5 wires 208V
System UPS Power: 3 phase 3 wires 120V
Process Module A: NeXT Process A: STI / IMD
Process Module B: NeXT Process A: STI / IMD
Process Module C: NeXT Process A: STI / IMD
Slit valve type: SMC L-motion
L/L baratron: MKS
Transfer module turbo pump: Pfieffer TMH261 PXS
Transfer module throttle valve: MKS
Transfer module Baratron: MKS
IOC version: V4.6
Transfer module robot: Brooks MAG 7
Transfer module robot blade: ceramic
Transfer module wafer sensor: existence
Fab installation: YES
EMO Type: Push button
Front monitor type: 12 inch LCD
Signal tower: Yes
Module controller type: MC3
Host interface: GEM
ATM Robot type: ATR8
Loadlock valve type: SMC
ATM loadlock valve type: VAT
Gas line config:
N2 PRG
O2
NF3
Ar
H2
He
SiH4
SiH4
N2 PRG
CHAMBER CONFIGURATION. MODULE A:
Module A Information
Chamber Type Chamber Process
Module Serial Number
Process Clean Type
NeXT SIT/IMD
D9413A, 57
NPP RPC
ESC Type Module Controller
Module Turbo Pump
Module Dry Pump

MC3
Leybold MAGW2000CT

Pendulum valve Throttle Valve
ESC / Dome Cooling
Temp Monitoring
MKS



NTM500
HF Generator MF Generator
LF Generator
RF Match
AE_10K AE PDX_5000 AE PDX_8000
AE NAVIGATOR 10013 L80
Heat exchanger IOC Version
Dual Clean Injector Kit
Injector Type

V4.72
Yes
Star short
Louvered Screen Pedestal Lift Type
Foreline Type
Injector Size
Yes Servo Motor Large
N/A
Chamber Gas Box



MFC Number Gas Name MFCSize MFC Model

MFC1 SiH4 100 sccm BROOKS SLA7950S

MFC2 SiH4 200 sccm BROOKS SLA7950S

MFC8 Ar 3000 sccm BROOKS SLA7950S

MFC5 H2 1500 sccm BROOKS GF125C

MFC3 NF3 5000 sccm BROOKS SLA7950S

MFC9 O2 500 sccm BROOKS SLA7950S

MFC6
Ar
500 sccm
BROOKS SLA7950S

MFC7 He 1000 sccm BROOKS SLA7950S













Module A Notes:




* Installed Black shield
* Top clean modified by NPP
-Installed EDP (Not used)

CHAMBER CONFIGURATION, MODULE B:
Module B Information
Chamber Type Chamber Process
Module Serial Number Process Clean Type
NeXT SIT/IMD
D9413A, 53 NPP RPC
ESC Type Module Controller
Module Turbo Pump Module Dry Pump

MC3
Leybold MAGW2000CT
Pendulum valve Throttle Valve
ESC / Dome Cooling Temp Monitoring
MKS


NTM500
HF Generator MF Generator
LF Generator RF Match
AE_10K AE PDX_5000 AE PDX_8000 AE NAVIGATOR 10013 L80
Heat exchanger IOC Version
Dual Clean Injector Kit Injector Type

V4.72
Yes Star short
Louvered Screen Pedestal Lift Type
Foreline Type Injector Size
Yes Servo Motor Large N/A
Chamber Gas Box
MFC Number Gas Name MFCSize MFC Model
MFC1 SiH4 100 sccm BROOKS SLA7950S
MFC2 SiH4 200 sccm BROOKS SLA7950S Deinstall
MFC8 Ar 3000 sccm BROOKS SLA7950S
MFC5 H2 1500 sccm BROOKS GF125C
MFC3 NF3 5000 sccm BROOKS SLA7950S
MFC9 O2 500 sccm BROOKS SLA7950S
MFC6
Ar
500 sccm
BROOKS SLA7950S Deinstall
MFC7 He 1000 sccm BROOKS SLA7950S

NOTES:
-INSTALLED BLACK SHIELD
-TOP CLEAN MODIFIED BY NPP
-INSTALLED EPD (NOT USED)

CHAMBER CONFIGURATION, MODULE C:
Module C Information
Chamber Type Chamber Process
Module Serial Number
Process Clean Type
NeXT SIT/IMD
D12181A
NPP RPC
ESC Type Module Controller
Module Turbo Pump
Module Dry Pump

MC3
Leybold MAGW2000CT

Pendulum valve Throttle Valve
ESC / Dome Cooling
Temp Monitoring
MKS



NTM DELTA C
HF Generator MF Generator
LF Generator
RF Match
AE_10K AE PDX_5000 AE PDX_8000
AE NAVIGATOR 10013 L80
Heat exchanger IOC Version
Dual Clean Injector Kit
Injector Type

V4.72
Yes
Star short
Louvered Screen Pedestal Lift Type
Foreline Type
Injector Size
Yes Servo Motor Large
N/A
Chamber Gas Box



MFC Number Gas Name MFCSize MFC Model

MFC1 SiH4 100 sccm BROOKS SLA7950S

MFC2 SiH4 200 sccm BROOKS SLA7950S

MFC8 Ar 3000 sccm BROOKS SLA7950S

MFC5 H2 1500 sccm BROOKS GF125C

MFC3 NF3 5000 sccm BROOKS SLA7950S

MFC9 O2 500 sccm BROOKS SLA7950S

MFC6
Ar
500 sccm
BROOKS SLA7950S

MFC7 He 1000 sccm BROOKS SLA7950S


NOTES:
-INSTALLED BLACK SHIELD
-TOP CLEAN MODIFIED BY NPP
-INSTALLED EPD (NOT USED)
Attachments: 29 Files
Send Me More Details about this item.



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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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