SDI fabsurplus.com is pleased to announce the availability of the following listed used ETEC /Applied Materials MEBES 4000 electron beam lithography mask writer / direct write wafer lithography.
Please click on the "Get Quote" button at the end of the MEBES 4000 description, if you'd like to get a quotation, photos and specifications of this electron beam lithography mask writer / direct write wafer lithography, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ETEC /Applied Materials MEBES 4000 electron beam lithography mask writer / direct write wafer lithography is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||ETEC /Applied Materials|
|Description:||electron beam lithography mask writer / direct write wafer lithography|
|Version:||reticle / 150 mm|
|Sales Condition:||as is where is|
-Includes installation and calibration (Within Continental USA).
-Includes 150 mm wafer pallets for direct write.
-The system is currently fitted with an LaB6 gun.
-TFE Gun upgrade also available (At extra cost). Please inquire for more details.
Min Feature size: 0.2 um
Positional accuracy: 0.08 um (3 sigma)
Overlay accuracy: 0.05 um
Stripe butting: 0.05 to 0.06 um (Mean plus 3 sigma)
Write Scan linearity (max): 0.04 um
System to system overlay: 0.10 um (3 sigma)
Linewidth control (mean to nominal): 0.07 um
Linewidth uniformity (mean to max): 0.07 um
Line edge roughness : 0.05 um (3 sigma)
Array placement accuracy: 150 um
Resolution: 0.35 or 4 x address
Writing rate: 160 MHz
Spot size: 0.08 to 0.27 um
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
Established in 1998, SDI has now built up an international network of sales agents and offices.
SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.
Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.
Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America
SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.
Request monthly equipment news
We'd love to get your feedback about our website and our services!
Fill in the Feedback Form