SDI fabsurplus.com is pleased to announce the availability of the following listed used ETEC /Applied Materials MEBES 4000 electron beam lithography mask writer / direct write wafer lithography.
Please click on the "Get Quote" button at the end of the MEBES 4000 description, if you'd like to get a quotation, photos and specifications of this electron beam lithography mask writer / direct write wafer lithography, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ETEC /Applied Materials MEBES 4000 electron beam lithography mask writer / direct write wafer lithography is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 87611 |
|---|---|
| Manufacturer: | ETEC /Applied Materials |
| Model: | MEBES 4000 |
| Description: | electron beam lithography mask writer / direct write wafer lithography |
| Version: | reticle / 150 mm |
| Vintage: | Inquire |
| Quantity: | 1 |
| Sales Condition: | as is where is |
| Lead Time: | immediately |
| Sales Price: | Inquire |
| Comments: | -Includes installation and calibration (Within Continental USA). -Includes 150 mm wafer pallets for direct write. -The system is currently fitted with an LaB6 gun. -TFE Gun upgrade also available (At extra cost). Please inquire for more details. Basic Specifications:- Parameter Specification Min Feature size: 0.2 um Positional accuracy: 0.08 um (3 sigma) Overlay accuracy: 0.05 um Stripe butting: 0.05 to 0.06 um (Mean plus 3 sigma) Write Scan linearity (max): 0.04 um System to system overlay: 0.10 um (3 sigma) Linewidth control (mean to nominal): 0.07 um Linewidth uniformity (mean to max): 0.07 um Line edge roughness : 0.05 um (3 sigma) Array placement accuracy: 150 um Resolution: 0.35 or 4 x address Writing rate: 160 MHz Spot size: 0.08 to 0.27 um |
Get Quote |
The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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