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ETEC /Applied Materials MEBES 4000 electron beam lithography mask writer / direct write wafer lithography for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ETEC /Applied Materials MEBES 4000 electron beam lithography mask writer / direct write wafer lithography. This ETEC /Applied Materials MEBES 4000 electron beam lithography mask writer / direct write wafer lithography is available for immediate sale. Please click on the "Send More Details" button if you'd like to get more details, photos and specifications of this electron beam lithography mask writer / direct write wafer lithography and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


ETEC /Applied Materials MEBES 4000 Equipment Details

SDI ID: 87611
Manufacturer: ETEC /Applied Materials
Model: MEBES 4000
Description: electron beam lithography mask writer / direct write wafer lithography
Version: reticle / 150 mm
Vintage:
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 399,000 USD
Comments:
-Includes installation and calibration (Within Continental USA).
-Includes 150 mm wafer pallets for direct write.
-The system is currently fitted with an LaB6 gun.
-TFE Gun upgrade also available (At extra cost). Please inquire for more details.

Basic Specifications:-
Parameter                    Specification
Min Feature size:        0.2 um
Positional accuracy:    0.08 um (3 sigma)
Overlay accuracy:        0.05 um
Stripe butting:                0.05 to 0.06 um (Mean  plus 3 sigma)
Write Scan linearity (max):    0.04 um
System to system overlay:    0.10 um (3 sigma)
Linewidth control (mean to nominal):    0.07 um
Linewidth uniformity (mean to max):    0.07 um
Line edge roughness :    0.05 um (3 sigma)
Array placement accuracy:    150 um
Resolution:                    0.35 or 4 x address

Writing rate: 160 MHz
Spot size:     0.08 to 0.27 um

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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