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NOVELLUS Inova Next PVD - Copper Barrier / Seed Process for Sale


fabsurplus.com is pleased to announce the availability of the following listed used NOVELLUS Inova Next PVD - Copper Barrier / Seed Process. This NOVELLUS Inova Next PVD - Copper Barrier / Seed Process is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this PVD - Copper Barrier / Seed Process and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


NOVELLUS Inova Next Equipment Details

SDI ID: 87842
Manufacturer: NOVELLUS
Model: Inova Next
Description: PVD - Copper Barrier / Seed Process
Version: 300 mm
Vintage: 01.06.2012
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): Inquire
Comments:

De-installed, warehoused. Inspection is available by appointment.

INOVA NEXT 300 mm PVD Cu Barrier/Seed System
     
Features/Descriptions Status  
System Tool    
MODEL INOVA NEXT 300MM CU B/S  
VINTAGE 11/16/2010  
DESCRIPTION PVD CU, TA(N)  
     
DEGAS 2  
PRE-CLEAN ETCH 2  
HCM PVD TA(N) 2  
HCM PVD CU 2  
ACTIVE COOL STATION 1  
SMIF NONE  
AUTOMATION SECE Ⅰ/Ⅱ  
Y2K YES  
EFEM / WTS-HV 1  
WAFER TYPE NOTCH  
EFEM    
LOAD PORT 3 FOUP  
Primary User Interface Location RIGHT with keyboard and mouse, and monitor  
Primary User Interface Configuration Clean room wall interface  
WAFER/FOUP 25  
ROBOT ATM,  
PEC STATION YES  
PEC SLOT 17  
MKS Ionizer YES  
     
WTS-HV    
ROBOT Brooks Magnatran  
ROBOT BLADE CERAMIC, DUAL  
SIOC 0,1,2,3,4  
POWER SUPPLY(ASTEC) 2  
CRYO HUB 1  
CRYO PUMP(OBIS-8F) 1  
ISOLATION VALVE(VAT) 6  
SYSTEM CONTROLLER YES  
HANDLER CONTROLLER YES  
ETHERNET NETGEAR  
LOADLOCK(LEFT)    
(1) TURBO PUMP(TMH071P) YES  
(2) ISOLATION VALVE YES, VAT  
     
LOADLOCK(RIGHT)    
(1) TURBO PUMP(TMH071P) YES  
(2) ISOLATION VALVE YES, VAT  
     
DEGAS(LEFT)    
(1) TURBO PUMP(TMU521P) YES  
(2) ISOLATION VALVE YES, VAT  
DEGAS(RIGHT)    
(1) TURBO PUMP(TMU521P) YES  
(2) ISOLATION VALVE YES, VAT  
COOL    
(1) TURBO PUMP(TMH071P) YES  
(2) WAFER DETEC SENSOR YES  
PRE-CLEAN A    
DOME(CERAMIC) YES  
SHIELD KIT YES  
TURBO PUMP(TC750-E74) YES  
TURBO CONTROLLER YES  
RF MATCH BOX AE MERCURY 3013(27-265775- 00/3150274-009 A)  
GAS BOX YES  
LPB YES  
SIOC YES  
ESC RF PEDESTAL YES  
MFC(Ar, 100sccm) YES  
MFC(N2, 50sccm) YES  
UPC(300sccm) YES  
ION GAUGE YES  
     
PRE-CLEAN B EQUIP NO:  
DOME(CERAMIC) YES  
SHIELD KIT YES  
TURBO PUMP(TC750-E74) YES  
TURBO CONTROLLER YES  
RF MATCH BOX AE MERCURY 3013(27-265775- 00/3150274-009 A)  
GAS BOX YES  
LPB YES  
SIOC YES  
ESC RF PEDESTAL YES  
MFC(Ar, 100sccm) YES  
MFC(N2, 50sccm) YES  
UPC(300sccm) YES  
ION GAUGE YES  
     
HCM TAN A EQUIP NO:  
TARGET NA  
SHIELD KIT NA  
1 GAP ESC RF PEDESTAL YES  
ANODE NA  
RF MATCH BOX AE NAVIGATOR 2013 L70Z  
CRYO PUMP(OBIS-8F) YES  
LPB YES  
SIOC YES, Firmware Ver: 4.72  
MFC(Ar, 100sccm) YES  
MFC(N2, 50sccm) YES  
QUARTZ LAMP YES  
     
     
HCM TAN B EQUIP NO:  
TARGET NA  
SHIELD KIT NA  
1 GAP ESC RF PEDESTAL YES  
ANODE NA  
RF MATCH BOX AE NAVIGATOR 2013 L70Z  
CRYO PUMP(OBIS-8F) YES  
LPB YES  
SIOC YES, Firmware Ver: 4.72  
MFC(Ar, 100sccm) YES  
MFC(N2, 50sccm) YES  
QUARTZ LAMP YES  

 

 

INOVA NEXT 300 mm PVD Cu Barrier/Seed System  
RF GENERATOR  
(1) AE RFG5500(5KW) YES
(2) AE PDX5000 YES
   
RF RACK  
   
(1) AE RFG5500(5KW) YES
(2) AE PDX5000 YES
   
PVD5 TA, ALP, CPI, UPS  
RF GENERATOR(APEX 3013) YES
SIOC1 & SIOC2 YES
EM COIL POWER SUPPLY  
(1) LAMBDA(GENH 150-5) 2
(2) LAMBDA(GENH 60-12.5) 1
(3) SORENSEN(DLM 60-10) 8
ESC POWER SUPPLY  
(1) TREK INC(685-L-CE) 1
(2) P/N 27-250517-00
DC POWER SUPPLY  
CPI CPW2870B18 YES
PVD3 TA, ALP, CPI, UPS  
RF GENERATOR(APEX 3013) YES
SIOC1 & SIOC2 YES
EM COIL POWER SUPPLY  
(1) LAMBDA(GENH 150-5) 2
(2) LAMBDA(GENH 60-12.5) 1
(3) SORENSEN(DLM 60-10) 8
ESC POWER SUPPLY  
(1) TREK INC(685-L-CE) 1
(2) P/N 27-250517-00
DC POWER SUPPLY  
CPI CPW2870B18 YES
HCM CU A  
TARGET NA
SHIELD KIT NA
1 GAP ESC RF PEDESTAL YES
ANODE NA
RF MATCH BOX AE NAVIGATOR 2013 L70Z
CRYO PUMP(OBIS-8F) YES
LPB YES
SIOC YES, Firmware Ver: 4.72
MFC(Ar, 200sccm) YES
MFC(Ar, 10sccm) YES
ION GAUGE YES
QUARTZ LAMP YES
   
HCM CU B  
TARGET NA
SHIELD KIT NA
1 GAP ESC RF PEDESTAL YES
ANODE NA
RF MATCH BOX AE NAVIGATOR 2013 L70Z
CRYO PUMP(OBIS-8F) YES
LPB YES
SIOC YES, Firmware Ver: 4.72
MFC(Ar, 200sccm) YES
MFC(Ar, 10sccm) YES
ION GAUGE YES
QUARTZ LAMP YES
   
MISCELLANEOUS  
CHILLER(AFFINITY) 1
CHILLER(POLYCOLD)  
(1) 1XCL 2
(2) 2XCL 2
MPD EQIP NO:58249
(1) MODEL C3-MPD(UPS)
(3) MAIN 208VAC/3PH/50-60HZ/FULL
272AMP/TRIP 340AMP
(4) UPS 208VAC/3PH/50-60HZ/FULL
160AMP/TRIP 200AMP
He Compressor(IS-1000) 2

 

 

INOVA NEXT 300 mm PVD Cu Barrier/Seed System  
RF GENERATOR(RFG 1251) 3155107-101/R27-156759-00
SIOC1 YES
EM COIL POWER SUPPLY  
(1) SORENSEN(DLS80-13E) 1
(2) SORENSEN(DLM 60-10) 7
ESC POWER SUPPLY  
   
(2) P/N 02-344889-00 REV.B
DC POWER SUPPLY  
CPI CPW2870B18 YES
(2) P/N 27-358856-00
   
   
PVD7 RACK_CU HCM(UPS)  
RF GENERATOR(RFG 1251) 3155107-101/R27-156759-00
SIOC1 YES
EM COIL POWER SUPPLY  
(1) SORENSEN(DLS80-13E) 1
(2) SORENSEN(DLM 60-10) 7
ESC POWER SUPPLY  
(1) TREK INC(685-L-CE) 1
(2) P/N 02-344889-00 REV.B
DC POWER SUPPLY  
CPI CPW2870B18 YES
(2) P/N 27-358856-00
   

 

 

 

 

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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