fabsurplus.com




Novellus Sabre XT Copper Electro-Plating for Sale


fabsurplus.com is pleased to announce the availability of the following listed used Novellus Sabre XT Copper Electro-Plating. This Novellus Sabre XT Copper Electro-Plating is available for immediate sale. Please click on the "More Details" button if you'd like to get more details, photos and specifications of this Copper Electro-Plating and your request will be forwarded to our customer representatives automatically. Crating, refurbishment and delivery can be quoted on request.


Novellus Sabre XT Equipment Details

SDI ID: 88539
Manufacturer: Novellus
Model: Sabre XT
Description: Copper Electro-Plating
Version: 200 MM
Vintage: 01.06.1999
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price (each): 250,000 USD
Comments:

De-installed, warehoused. Can be inspected by appointment. Further details are available on request.

Configuration:

Software  
PROTEUS NA
QNX NA
UI Proteus
System Controller Yes
Module Controller #1 Yes
Module Controller #2 Yes
Main System  
Tool Generation SABRE-XT
Wafer Size 200 MM
Wafer per Cassette 25
Module control system Type CTI 485 CARD
User Interface Front SIDE UI Panel(LEFT)
Signal Tower 3 colors
Mini-Environment None
GEM and Data Server GEM
Host Connection Type RS232
Chase Computer/Monitor Desktop PC / LCD
Tertiary Containment Tray None
Exhaust Kit Bottom
Drain Kit Bottom
Input Voltage 208VAC 50/60HZ 100Amps
Anneal Module (Cassette Handler)  
Load Port Ergo Cassette Loader, 3 Stations
Number of Anneal 5
Robot Type ATR 7 BROOKS
Gas Box YES
Mapping Type Rabbit Ear Thrubeam
H2 Gas Sensor Installed
Robot Firmware NA
Process Module  
Wafer Aligner Dual Sensor with Pneumatic Pusher
Robot Type AQR 7 BROOKS
End Effector SST with Vacuum Port(Dual EE)
Plating Cell Configuration Cell 1, Cell 2 and Cell 3
Clamshell Type Standard
Clamshell Cup Type POR
Diffuser Insert ID NA
Clamshell Cylinder Pressure-Vacuum Cylinder
ANODE Type Standard
Number of TI Cable 2
SAC Installed YES
Clamshell Lift IAI
ACR Installed NO
Active Top Hat YES
Plating Power Supply AE Pulse Power Supply
Post Plating Cell Configuration Cell 1, Cell 2 and Cell 3
Chuck Type PPS
Wafer Present Sensor Mount Standard
EBR YES
Bath Module  
Totalizer #1 Manufacturer Florite
Totalizer #2 Manufacturer Florite
Dosing Pump 1 Yes
Dosing Pump 2 Yes
Dosing Pump 3 Yes
Recirculation Pump Model #: Iwaki Walchem CMD-101
CDM Level Sensor Type Keyance
Heat Exchanger NESLAB HX-75

 

 

Attachments: 13 Files
Send Me More Details about this item.



Not the item you were looking for?

Ask SDI fabsurplus.com!

If you are looking for a specific piece of semiconductor equipment let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry

The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

sdi logo

Established in 1998, SDI has now built up an international network of sales agents and offices.

SDI has evolved into one of the largest semiconductor equipment brokerages by concentrating on professionalism, customer service and value for money.


Read more about us




View all Novellus items for sale
View all Sabre XT items for sale


Ask SDI fabsurplus.com! If you can't find what you need, or are looking for a specific piece of semiconductor equipment. Let us know what type of semiconductor manufacturing equipment you would like to buy, and we will conduct a search for what you are looking for.

Inquiry



sdi logo

Click here for all contact information.
SDI-Fabsurplus Srl Italy, and SDI-FABSURPLUS LLC. N. America




SDI fabsurplus.com works by using the latest technology to continuously monitor the used equipment market place.
If you want to join our mailing list, please send click on the button below to send an e-mail to subscribe to our monthly equipment news update.

Request monthly equipment news





We'd love to get your feedback about our website and our services!
Fill in the Feedback Form