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CANON FPA 5000 ES6 248 NM SCANNER for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used CANON FPA 5000 ES6 248 NM SCANNER.
Please click on the "Get Quote" button at the end of the FPA 5000 ES6 description, if you'd like to get a quotation, photos and specifications of this 248 NM SCANNER, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This CANON FPA 5000 ES6 248 NM SCANNER is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


CANON FPA 5000 ES6 Equipment Details

SDI ID: 90687
Manufacturer: CANON
Model: FPA 5000 ES6
Description: 248 NM SCANNER
Version: 300 MM
Vintage: 01.06.2004
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

De-installed, warehoused, can be inspected by appointment.

-The equipment was de-installed by the OEM in 2015

-The equipment was working in good condition prior to removal

-The equipment has N2 lens purge installed during the storage at the warehouse .

-The equipment is stored in a temperature controlled warehousing facility.

Inspection Report:-

 

No Unit Inspected Item   Check Result
1 Console Console Linux Console, e-console e-console
    Main Version V**.*** -
    Front Console - Touch Screen Missing, No Missing No Missing Parts
    Front Console - USB Port Missing, No Missing No Missing Parts
    Front Console - Keyboard Missing, No Missing No Missing Parts
    Front Console - Mouse Missing, No Missing No Missing Parts
    Side Console - Touch Screen Missing, No Missing No Missing Parts
    Side Console - USB Port Missing, No Missing No Missing Parts
    Side Console - Keyboard Missing, No Missing No Missing Parts
    Side Console - Mouse Missing, No Missing No Missing Parts
2 RS Module (Uniformer) Missing, No Missing No Missing Parts
    EX A Scope Missing, No Missing No Missing Parts
    R/S Laser Head Missing, No Missing No Missing Parts
      Model Zygo 7714
    RA Unit Missing, No Missing No Missing Parts
    PRA Unit Missing, No Missing No Missing Parts
    Reticle Scan Stage Missing, No Missing No Missing Parts
    PCB, Part Missing Missing, No Missing No Missing Parts
3 PO Module U-Lens Missing, No Missing No Missing Parts
    OAS (OA Scope) Missing, No Missing No Missing Parts
    Scan OPTF Unit Missing, No Missing No Missing Parts
    W/S Laser Head Missing, No Missing No Missing Parts
      Model Zygo 7714
    Chuck Maintenance Unit Missing, No Missing No Missing Parts
4 WS Module Wafer Chuck Pin, Ring Chuck Pin Type Chuck
    Wafer Stage Part Missing Missing, No Missing No Missing Parts
5 BOOTH2 (Auto Feeder) A/F Type R Type, L Type R Type (Front)
    W/F size 8, 12" 12 Inch
    W/F Type Notch, Flat Notch
    Inline Relay Unit (FOUP Unit) Yes, No Yes (Relay Unit)
    Inline Unit (WTC) Yes, No Yes
    Open Cassette Yes, No Yes
    SCH ROBOT Yes, No Yes
6 BOOTH2 (Auto Feeder-PSR) PA Unit Yes, No Yes
    RCV Station Yes, No Yes
    SH Hand Yes, No Yes
    RH Hand Yes, No Yes
7 BOOTH2 (Reticle Changer ) R/C Type 6INCH, 5INCH 6INCH
    Cassette Type SMIF, CANON, NIKON SMIF
    SMIF POD Yes, No Yes
    RTH Robot (Reticle Robot) Yes, No Yes
    Reticle Stocker Yes, No Yes
    Barcode Reader Yes, No Yes
    PPC Yes, No Yes
8 Machine Room Upper C-Rack Missing, No Missing No Missing Parts
    Lower C-Rack Missing, No Missing No Missing Parts
    ALS Unit Missing, No Missing No Missing Parts
    Incohirent Missing, No Missing No Missing Parts
    Beam 도입부 Missing, No Missing No Missing Parts
9 BOOTH1 J-BOX L Missing, No Missing No Missing Parts
    J-BOX R Missing, No Missing No Missing Parts
    EWS Missing, No Missing No Missing Parts
10 CPSU Type 2 or 3 Division 2 Division
    Part Missing Missing, No Missing No Missing
    S/N    
11 LASER Maker Cymer, GIGAPHOTON GIGAPHOTON
    Model   G41K3-1
    S/N    
    Vintage   JUN, 2004

Lens performance data when the equipment was still installed:-

 

Item Condition Specification Result Judge
1.Image Quality                          
1 Open Frame Check NA0.85 σ0.80 1.02ETH No Dark Spot No Dark Spot OK
2. Distortion Performance                          
1 Distortion NA0.86 σ0.85
Up Scan
DX ≦±11nm 8.9 OK
  DY 4.3
  NA0.86 σ0.85
Down Scan
DX ≦±11nm 9.0 OK
  DY -8.6
  NA0.86 Annular
( 0.88 / 0.64 )
Up Scan
DX ≦±11nm 8.5 OK
  DY 4.4
  NA0.86 Annular
( 0.88 / 0.64 )
Down Scan
DX ≦±11nm 8.0 OK
  DY 6.4
  NA0.86 C-Quad
( 0.88 / 0.64 60deg )
Up Sccan
DX ≦±11nm 8.8 OK
  DY 4.3
  NA0.86 C-Quad
( 0.88 / 0.64 60deg )
Down Sccan
DX ≦±11nm 8.6 OK
  DY 6.4
  NA0.86 σ0.40
Up Scan
DX ≦±11nm 9.8 OK
  DY 5.7
  NA0.86 σ0.40
Down Scan
DX ≦±11nm 9.9 OK
  DY 5.4
2 Illumination Mode
Difference
σ0.40
vs
Annular ( 0.88 / 0.64 )
DX ≦±7nm 1.6 OK
  DY 1.1
  C-Quad (0.88/0.64 60deg)
vs
Annular ( 0.88 / 0.64 )
DX ≦±6nm 3.6 OK
  DY 0.7
  σ0.40
vs
C-Quad (0.88/0.64 60deg)
DX ≦±6nm 2.5 OK
  DY 1.3
                           
Item Condition Specification Result Judge
3. Illumination Performance                          
1 Illumination Intensity NA0.86 σ0.85 - ≧36000w/㎡ 46341.5 OK
  NA0.86 σ0.40 - ≧36000w/㎡ 46957.9 OK
  NA0.86 Annular
( 0.88 / 0.64 )
- ≧31000w/㎡ 44198.9 OK
  NA0.86 C-Quad
( 0.88 / 0.64 60deg )
- ≧20000w/㎡ 29012.2 OK
        NA0.86 Annular
( 0.93 / 0.74 )
- ≧25000w/㎡ 37147.7 OK
        NA0.78 Annular
( 0.85 / 0.57 )
- ≧31000w/㎡ 44352.1 OK
        NA0.70 Annular
( 0.85 / 0.55 )
- ≧31000w/㎡ 45331.0 OK
        NA0.80 Quad
( 0.88 / 0.67 25deg)
- ≧7000w/㎡ 10881.2 OK
        NA0.80 Quad
( 0.85 / 0.55 25deg)
- ≧8500w/㎡ 12564.5 OK
        NA0.80 Quad
( 0.80 / 0.55 25deg)
- ≧8500w/㎡ 12632.2 OK
        NA0.80 C-Quad
( 0.90 / 0.70 60deg )
- ≧17000w/㎡ 25452.6 OK
        NA0.80 C-Quad
( 0.92 / 0.72 60deg )
- ≧17000w/㎡ 25451.2 OK
        NA0.80 Dipole X
( 0.89 / 0.59 90deg )
- ≧15000w/㎡ 22014.4 OK
        NA0.80 Dipole Y
( 0.89 / 0.65 90deg )
- ≧15000w/㎡ 21986.2 OK
        NA0.80 Dipole Y
( 0.85 / 0.55 90deg )
- ≧15000W/㎡ 22427.3 OK
2 Illumination Uniformity NA0.86 σ0.85 - ≦0.7% 0.26 OK
  NA0.86 σ0.40 - ≦0.7% 0.29 OK
  NA0.86 Annular
( 0.88 / 0.64 )
- ≦0.7% 0.35 OK
  NA0.86 Annular
( 0.93 / 0.74 )
- ≦0.7% 0.16 OK
  NA0.78 Annular
( 0.85 / 0.57 )
- ≦0.8% 0.34 OK
  NA0.86 C-Quad
( 0.88 / 0.64 60deg )
- ≦0.7% 0.29 OK
        NA0.70 Annular
( 0.85 / 0.55 )
- ≦0.7% 0.16 OK
        NA0.80 Quad
( 0.88 / 0.67 25deg)
- ≦0.7% 0.35 OK
        NA0.80 Quad
( 0.85 / 0.55 25deg)
- ≦0.7% 0.24 OK
        NA0.80 Quad
( 0.80 / 0.55 25deg)
- ≦0.7% 0.26 OK
        NA0.80 C-Quad
( 0.90 / 0.70 60deg )
- ≦0.7% 0.38 OK
        NA0.80 C-Quad
( 0.92 / 0.72 60deg )
- ≦0.7% 0.36 OK
        NA0.80 Dipole X
( 0.89 / 0.59 90deg )
- ≦0.7% 0.41 OK
        NA0.80 Dipole Y
( 0.89 / 0.65 90deg )
- ≦0.7% 0.21 OK
        NA0.80 Dipole Y
( 0.85 / 0.55 90deg )
- ≦0.7% 0.15 OK
2 Leveling Drive
Measurement Repeatability
- - 3σ≦2.0ppm 1.7 OK
 
3 Wafer Chuck Flatness - LTV(26×8mm) ≦0.1μm 0.093 OK
  TTV ≦1.0μm 0.94 OK
4 ALFC Measurement
Repeatability
- L/R Average 3σ≦30nm 12.2 OK
      #4078318                 For Hynix  
Item Condition Specification Result Judge
6. X-Y Stage Performance                          
1 Stepping Accuracy NA0.86 σ0.80 X1-X 3σ≦10nm 5.0 OK
  X2-X 3.4
  X3-X 3.5
  X1-Y 7.3
  X2-Y 7.2
  X3-Y 6.7
  Y1-X 4.5
  Y2-X 4.4
  Y3-X 4.5
  Y1-Y 6.8
  Y2-Y 6.4
  Y3-Y 6.4
2 Stepping Repeatability NA0.86 σ0.80 X 3σ≦8nm 3.3 OK
  Y 4.1 OK
3 Scaling Accuracy - X ≦±0.1ppm -0.01 OK
  Y -0.01
4 Orthogonality - - ≦±0.1ppm -0.01 OK
7. Prealignment Performance                          
1 Mechanical
Prealignment Accuracy
( Normal )
- X 3σ≦20μm 5.1 OK
  Y 4.5
  θ 3σ≦120μrad 17.0 OK
2 TV Prealignment Accuracy - X Range ≦1.5μm 0.1 OK
  Y 0.2
  θ Range≦5μrad 0.4 OK
8. Throughput Performance                          
1 Throughput NA0.86 σ0.80
187shot
Exposure 500J/m2 ≧68w/h 68.7 OK
 
2 Reticle Changing Time - - ≦15sec 13.8 OK
      #4078318                 For Hynix  
Item Condition Specification Result Judge
9. Reliability                          
1 Wafer Cycling - ≧500Wafers No Trouble No Trouble OK
2 Reticle Cycling - ≧200Reticles No Trouble No Trouble OK
10.Others                          
1 Scan Synchronization
Accuracy
ScanSpeed
= 500mm/sec
MA X ≦3nm 1.5 OK
  Y 1.1
  MSD X ≦7nm 5.2 OK
  Y 2.8
2 Wafer Particle - 30shot 10particles
/≧0.2μm
6.6 OK
3 Pellicle
Particle
Checker
Sensitivity - Blank Side 15μm 15um OK
  Pellicle Side 20μm 20um
  Repeatability - Blank Side ≧95% 98.7 OK
  Pellicle Side ≧95% 99.8
  Measurement
area
- Blank Side 102×134mm 102×134mm OK
  Pellicle Side 102×134mm 102×134mm
4 Reticle Displacement
Inspection
- Xr ≦3nm 2.0 OK
  Yr 1.5
  Xl 1.1
  Yl 1.0

 

 

 

 

 

 

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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