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LAM Research Vector Express PECVD Deposition system for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM Research Vector Express PECVD Deposition system.
Please click on the "Send More Details" button at the end of the Vector Express description, if you'd like to get more details, photos and specifications of this PECVD Deposition system, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM Research Vector Express PECVD Deposition system is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


LAM Research Vector Express Equipment Details

SDI ID: 91024
Manufacturer: LAM Research
Model: Vector Express
Description: PECVD Deposition system
Version: 300 mm
Vintage: 01.06.2003
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: 399,000 USD
Comments:

De-installed, warehoused. Inspection is available by appointment.The Lam Vector Express product is a PECVD (Plasma enhanced chemical vapor deposition) cluster tool platform, launched in 2007. The tool is designed for use at the 45 nm node and beyond. Features: multi-station sequential processing, 0.08 um particle size for 500 A TEOS oxide, 20% improved wafer handling speed, can be used for depositing all films used in the dual damascene process.

Configuration:-

Serial Number: D22xxxx Mfg. Date: 2011
Wafer Size: 300mm
Basic System (CARBON)
WTS(backbone) Facilities Connection Configuration: Bottom Facilities Installation
Factory Automation Interface (Over Head Transport): 04-146654-00 KIT,E84 COMPATABILITY,VCTR 2 FOUP or 3 FOUP Front End Interface: 2 FOUP (Brooks Fixports)
Fixload FOUP RF ID Reader: Omron V640 (2 FOUP) Fixload Firmware: Rev 2.8.2.9
IMM Ready (Integrated Metrology): IMM Ready Orientation Left, BUCVD00007A Left Mount
Front End (backbone):
ATM Robot & Controller
ATM Robot Firmware (for friction end effector): WAVE2, 1.0T, Use with Friction end effector, 75-294243-00 ATM Robot End Effector (Friction Type): 75-378690-00 (v 1.49 for use with Friction End Effector)
Loadlock Motion Controller/Firmware: CNTRLR,TWO-AXIS,TRUST,2.84S,C3VCTR AHM Loadlock Pump: 04-322836-00 KIT,SINGLE KASHIYAMA NV60 LL PUMP,C3VCTR AHM XT
Loadlock to Atmosphere Valve (VAT L-Motion): 60-376512-00 VALVE,GATE,MONOVAT,50X336,LL,OUTER DR,WT VAT L-motion Oring Type: Viton (Bonded, replace entire door)
Loadlock to Chamber Valve (SMC Valve): 63-335469-00 VALVE,GATE,300MM,PNEU,BONDED GT 639,SMC SMC Chamber Oring Type: 60-300514-00 GATE,BONDED,300MM,SMC L-MOTION, CHEMRAZ
Cooling Pedestals in Loadlocks: 02-277727-01 Right 02-277727-02 Left Active Wafer Centering with IMM Mount: 02-269945-00 (LED type)
EBR cool Ped: 02-376062-00 PED ASSY,COOL,EBR 1.5,C3VCTR AHM EBR IOC: 02-303084-00 ASSY,HDSIOC3,EBR,C3VCTR
EBR Deflector: 15-322724-02 FORK,MTG,DEFLECTOR,EBR,SLOT
EBR Deflector Quartz: 15-374248-00 COVER,DFLCTR,QUARTZ,NO HOLES,VCTR,EBR EBR Gen: 27-366349-00 GEN,GAS,8.0KW,AX7690X,EBR
Required Software Revisions:
Module Controller Type: 02-321865-00 MC3R System Controller Type: 02-321865-00 MC3R System Software (Proteus): Ver 2.625 B27 System Software (QNX): Ver_6.05_B29
SIOC #0: 02-321646-00 ASSY,HDSIOC0,VECTOR
SIOC #0 Firmware: Version 5.0
SIOC #1: 02-321647-00 ASSY,HDSIOC1,VECTOR
SIOC #1 Firmware: Version 5.0
SIOC #2: 02-321648-00 ASSY,HDSIOC2,VECTOR
SIOC #2 Firmware: Version 5.0 Windows Version: Windows 2000 Hardware Configuration:
Shower Head Assembly (13 inch): 16-366826-00 SHWRHD,300MM,15" DIA,TC,SNGL PC STM,AHM Pedestal Position #1: 02-317598-00 PED ASSY,ST1-4,HI TEMP,ALN CERAMIC,C3VCT
Pedestal Position #2-4 (w/o lift pin holes): 02-375616-00 PED ASSY,CERAMIC,2 ZN,NO PINS,C3VCTR AHM
Captured Lift-Pin Assembly: 15-324069-00 PLATE,LIFT PIN,CAPTURED,AHM
Remote Plasma Clean Power Supply: 27-324553-00 GENERATOR,PLASMA SOURCE,400KHZ,HF-S,CDA IR Endpoint Controller: 27-356649-00 CNTRLR,RMU,IREPD,PROC SNS,VIRTWL
RF HF Generator: 2 Kilowatt: 27-372675-00 13.5MHZ,AXR-2000III-B-NVLK
RF LF Generator: 2.75 Kilowatt : 27-316462-00 LOW FREQUENCY,2750.0W,CLX2750, HF RF Match Network: 27-367855-00 MATCH,13.56MHZ,5KW,COMET,24V DC
LF RF Match Network: 27-359860-00 MATCH,400 KHZ,FIXED, RESISTIVE+CAPACITIVE High Speed Spindle: 02-381489-00 SPINDLE ASSY,WATER+GAS COOL,C3VCTR AHM
Leak Check Shutoff Valve for Process Module: 04-166504-00 KIT,LEAK CHECK PORT,VECTOR Transfer Plate: 15-287724-00 FORK,XFER PLATE,ALN PED
Pendulum Valve Assembly (Pressure Control Valve): 04-146459-00 KIT,HEATED PENDULUM VALVE,VCTR
Pendulum (Controller/Firmware): 65PM-3K.12
Pendulum Valve Oring Type: 04-274919-00 (Chemraz 8085 gate oring * 2; sealing Viton orings) Baratron: Loadlocks: 27-126062-00 MANO,10 TORR,DSUB,1/2 VCR
Baratron 1: Process Module: 27-10343-00 MKS 627A11TBC (27-10343-00), 10T heated Baratron 2: Process Module: 27-126667-00 MKS 750B13TCE2GK, 1000T
Pressure Digital Display: 02-261354-00
ASSY,HASTINGS GAUGE,  DIGITAL METER
Gas Panel:
MFC 1: Aera TC-FCD980C SiH4 1.5 SLM MFC 2: Aera TC-FCD981SBC N2 10SLM MFC 3: Aera TC-FCD981SBC C2H2 5.5 SLM MFC 4: Aera TC-FCD981SBC H2 10 SLM MFC 5: Aera TC-FCD981SBC He 20 SLM MFC 7: Aera TC-FCD982C N2O 25 SLM MFC 8: Aera TC-FCD981SBC O2 25SLM MFC 9: Aera TC-FCD980C NF3 3 SLM
MFC B: Aera TC-FCD981SBC N2 10 SLM MFC C: Aera TC-FCD982C Ar 35SLM MFC D: Aera TC-FCD980C Ar 5SLM
Abatement System: Model: 4x-inlet Vendor: DAS
Heat wrap: YES(100℃)
Ozonator:
Ozonator Model: N/A Ozonator Vendor: N/A Ozonator Controller: N/A
Neslab Vendor: N/A Heat Exchanger: Model: N/A
Vendor: N/A
Process Chamber Pump: Model: iXH3030T Vendor: BOC Edwards
Heater Jacket @foreline: YES
Heater Jacket @ exhaust to scrubber: YES

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