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LAM TCP9400SE Etcher for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used LAM TCP9400SE Etcher.
Please click on the "Send More Details" button at the end of the TCP9400SE description, if you'd like to get more details, photos and specifications of this Etcher, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This LAM TCP9400SE Etcher is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


LAM TCP9400SE Equipment Details

SDI ID: 91130
Manufacturer: LAM
Model: TCP9400SE
Description: Etcher
Version: 200mm SMIF
Vintage: 01.06.2018
Quantity: 2
Sales Condition: inquire
Lead Time: 4 months
Sales Price (each): 780,000 USD
Comments:

Refurbished TCP9400SE

 

Utilities Information                       : 208V / 3PH / 60 – 50 Hz ESC fixed drive gap hardware                : 200mm fixed GAP hardware

ESC Wafer sizing kit                     : 200mm Notch, Semi 2 PC QTZ/CER ESC gas injection ring kit  : ESC gas ring w/ceramic insert Endpoint detection TCP9400               : Universal window retainer (std) Mass Flow Controller TCP9400                      : Brooks GF100

 

1 : CL2                    200 SCCM

2 : 30%O2/He           20 SCCM

3 : HBR                300 SCCM

4 : He   500 SCCM

5 : CF4 100 SCCM

6 : SF6 100 SCCM

7 : O2   100 SCCM

8 : CH4F2            100 SCCM

(Gases shown as example, will configured to customer specification) In-line gas filter   : Nickel

Factory automation Hardware      : SMIF Ballroom 200mm

Control system software               : Envision 1.7 with SECS / GEM Turbo pump  : 1300 l/s

Turbo pump interlock board        : Turbo pump inhibits W/24V DC Pump cart EMO cable : 60 ft

Pump cart interface cable             : 60 ft

Chillers                                           : Customer supplied

TCU EMO Cable                            : 60 ft

TCU interface cable                       : 60 ft

Manuals TCP9400                         : Provided on USB

Wafer Transport courtesy kit       : Courtesy kit 6” and 8” W/O BSR

 

System to have all latest mandatory Lam Research safety upgrades fitted as standard Installation included.

Warranty Terms: 90 days parts warranty from Tier 1 acceptance, not to exceed 180 days from shipment. (Excludes consumable parts.)

Categories:
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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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