Ultratech XLS 200 Wafer Stepper for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Ultratech XLS 200 Wafer Stepper.
Please click on the "Send More Details" button at the end of the XLS 200 description, if you'd like to get more details, photos and specifications of this Wafer Stepper, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Ultratech XLS 200 Wafer Stepper is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Ultratech XLS 200 Equipment Details

SDI ID: 95611
Manufacturer: Ultratech
Model: XLS 200
Description: Wafer Stepper
Version: 150mm / 6""
Vintage: 01.11.2001
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price: Inquire

-Still installed and operational in full working condition.

-The tool will be taken out of use at the end of August 2019

-4 x reduction ratio

-Max. resolution: 0.5 um

Year of manufacture;
Linear corse motors with final piezo drive
6 axis of freedom
Iso-dam for vibration control
VME bus controller ,Sun sparc-5 CPU
Cassette to cassette wafer handling
12 slot reticle library with bar code readers
4:1 reduction ratio
0.50um feature size
1um Depth of Focus
Wafer size(s) it can handle;
6” or 150mm wafer size
No missing parts.
It is currently installed and was recently used for a customer production request

Attachments: 7 Files
Send Me More Details about this item.

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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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