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Applied Materials Centura AP DPS2 Advantedge Carina Mesa Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Applied Materials Centura AP DPS2 Advantedge Carina Mesa Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS.
Please click on the "Get Quote" button at the end of the Centura AP DPS2 Advantedge Carina Mesa description, if you'd like to get a quotation, photos and specifications of this Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Applied Materials Centura AP DPS2 Advantedge Carina Mesa Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Applied Materials Centura AP DPS2 Advantedge Carina Mesa Equipment Details

SDI ID: 95928
Manufacturer: Applied Materials
Model: Centura AP DPS2 Advantedge Carina Mesa
Description: Dry Etch Cluster Tool - 2 CHAMBER - METAL ETCH PROCESS
Version: 300 mm
Vintage: 01.05.2013
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

EFEM/ TM Module/ DPS2 Chamber B / Mesa Chamber D / AC Rack/ Accessories

The equipment has been professionally de-installed, and inspection of the equipment is welcomed by appointment in the warehouse.
For details about the tool's condition, please refer to the attached photos.

Etch chamber gas box config:
Cl2 50
Cl2 20
HBr 50
SiCl4 50
H2 200
NF3 20
BCl3 40
O2 200
CHF3 300
CH2F2 100
N2 200
SF6 100
CF4 30
Ar 500

 

CHAMBER B

Model

CH AC DIST BOX DUAL HTR, ADVANTEDGE TSUBASA

AMAT P/N

-

MFG P/N

-

Serial Number

06278536

Voltage

208V

Nr. of Wires

Three + GND

Phase

-

Full load current

80A

Max. System Rating

-

Freq

50/60 Hz

Ampere Rating of the largest load

32 AMPS

Panel main protection device

100 A

Year of construction

-

Diagram #

0170-02572 REV. 04

 

 

 

AXIOM CHAMBER D

Model

CHAMBER AC DISTRIBUTION BOX AXIOM 300mm

AMAT P/N

0190-30702 REV. 03

MFG P/N

IATAMT019030702

Serial Number

11246109

Voltage

208V

Nr. of Wires

Three + GND

Phase

3Ø “∆”

Full load current

80 AMPS

Max. System Rating

36 KVA

Freq

50/60 Hz

Ampere Rating of the largest load

30 AMPS

Interrupting current

10K AMPS I.C

Year of construction

JUN 2011

Diagram #

0170-01579 REV. 4

 

 

Remote AC Rack

System Number

424973-XA-ACGR

Model

REMOTE AC RACK UVR, BASIC, CONDUCTOR/CLOSED COUPLE

AMAT P/N

0190-09581 REV. 002

C-H P/N

84-33087-4 REV 5

Serial Number

566604293-1

Voltage

208V

Nr. of Wires

FOUR

Phase

3Ø “∆”

Full load current

320A

Max. AMP rating of main OC device

400 A

Freq

50/60 Hz

Ampere Rating of the largest load

80A

Short-circuit interrupting Capacity of main overcurrent protective device

65K AMPS I.C

Year of construction

MAR 2012

Diagram #

0170-04191 REV 3

 


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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