SDI fabsurplus.com is pleased to announce the availability of the following listed used ASML XT-1700Fi Immersion ArF Scanner.
Please click on the "Send More Details" button at the end of the XT-1700Fi description, if you'd like to get more details, photos and specifications of this Immersion ArF Scanner, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASML XT-1700Fi Immersion ArF Scanner is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Immersion ArF Scanner|
|Sales Condition:||as is where is|
The TWINSCAN XT:1700Fi scanner is a high-throughput, 2 stage, immersion lithography tool for 300-mm wafer production at 50-nm resolution and below. The 1.2-NA in-line catadioptric lens. is mechanically stable lens design with the same image orientation as refractive lenses, permitting the use of refractive reticle sets. The illuminator has polarization at maximum throughput, with homogeneous pupil fill, for use with ultra low-k1 pupil shapes. Standard as well as customized illumination modes can be optimized using the polarization mode, allowing a maximization of the contrast whilst reducing the mask error factor per application.
Configuration: Gas line: CO2,F2/Ar/Ne,Ar/Xe/Ne
Status: Power down, Not packed
Condition: Not working
Missing Parts: None
Laser type: Gigaphoton GT60A4
Broken Parts: See accompanying worksheet
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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