ASML XT-1700Fi Immersion ArF Scanner for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used ASML XT-1700Fi Immersion ArF Scanner.
Please click on the "Send More Details" button at the end of the XT-1700Fi description, if you'd like to get more details, photos and specifications of this Immersion ArF Scanner, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ASML XT-1700Fi Immersion ArF Scanner is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

ASML XT-1700Fi Equipment Details

SDI ID: 95949
Manufacturer: ASML
Model: XT-1700Fi
Description: Immersion ArF Scanner
Version: 300 mm
Vintage: 01.08.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

The TWINSCAN XT:1700Fi scanner is a high-throughput, 2 stage, immersion lithography tool for 300-mm wafer production at 50-nm resolution and below. The 1.2-NA in-line catadioptric lens. is mechanically stable lens design with the same image orientation as refractive lenses, permitting the use of refractive reticle sets. The illuminator has polarization at maximum throughput, with homogeneous pupil fill, for use with ultra low-k1 pupil shapes. Standard as well as customized illumination modes can be optimized using the polarization mode, allowing a maximization of the contrast whilst reducing the mask error factor per application.

The stage has faster acceleration and reduced immersion-related slowing, allowing a throughput of 122 wph.
The XT:1700Fi has an extended Ultra-k1 package, consisting of QUASAR XL, LithoGuide, ILIAS, DoseMapper, Reticle Shape Correction, CDFEC and Focus Spot Monitor.
Key Features and Benefits.

1.2-NA 193-nm Catadioptric Projection Lens
Production resolution down to 50 nm (annular) and 45 nm (dipole). In-line catadioptric lens design, supporting full 26x33-mm field, 4X reduction and reticle compatibility with existing refractive sets.

Immersion Dual-Stage Technology
Dual-stage with high-speed closing disk supports continuous water flow during stage swap with minimum slowing.

AERIAL XP Polarized Illuminator
Extended range of conventional and off-axis illumination. Polarization reduces the mask error factor, and can lower the resolution by up to 5 nm, at full throughput.

6-kHz ArF Laser Technology
High laser power for high throughput and efficient use of laser pulses for lower laser cost of operation and optimum dose performance.

Performance Summary
Lens NA: Variable, 0.75-1.20
Resolution: Less than or equal to 45 nm
Field Size: 26 x 33 mm
Overlay: 16 point alignment: Less than or equal to 7 nm (Single machine overlay includes TOP package.).
Throughput:  greater than or equal to 122 wph (On 300 mm wafers, with 30 mJ/cm2/125 shots per wafer.).

Configuration: Gas line: CO2,F2/Ar/Ne,Ar/Xe/Ne

Status: Power down, Not packed

Condition: Not working

Missing Parts: None

Laser type: Gigaphoton GT60A4

Broken Parts: See accompanying worksheet

Description Status
PWR SUP +5V/+15V-15V 14/4/4A Broken & Not Repared
PSDC 250/25 PREMIUM 24VSAFE Broken & Not Repared
PAAC 450/20 R PPCA Broken & Not Repared
4-CH POWER AMP CTRL01 PPCA Broken & Not Repared
LISAF 3P ASSY Broken & Not Repared
PSDC 59/22 ASSY Broken & Not Repared
PADC 100/18 ASSY Broken & Not Repared
PAAC 550/25 1100V-FET ASSY Broken & Not Repared
ETHERNET SWITCH 10/100MB 24X Broken & Not Repared
MCCB2 P3M7448B MK2.1 ASSY Broken & Not Repared
WH PID MK3 PPCA Broken & Not Repared
RH LIOS LATCH MK3+PPCA SW4.1+ Broken & Not Repared
SHIFT-IN SHIFT-OUT CTRL3.1 Broken & Not Repared
RH IRIS XT PPD ASSY Broken & Not Repared
RS LNS COO (LCSA3) ASSY Broken & Not Repared
Attachments: 13 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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