SDI fabsurplus.com is pleased to announce the availability of the following listed used FCI SYSTEM Acid Auto Wet Station.
Please click on the "Send More Details" button at the end of the Acid Auto description, if you'd like to get more details, photos and specifications of this Wet Station, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This FCI SYSTEM Acid Auto Wet Station is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Version:||4 AND 6 INCH|
|Sales Condition:||as is where is|
-Still installed in the fab. -Shut down and powered off. -Can be inspected by appointemnt. -The equipment is in excellent condition, with no missing parts. -The equipment was lightly used in an R and D environment for around 2-3 years. -The equipment ran 4 inch Sapphire wafers , but 6 inch can also be run.
Please check pictures below.
More specifications available on request.
Auto Acid Wet Station Configuration
4” or 6” Cassette Processing System
Automatic System with 1 Transfer Robot
2 Cassette stock for loader & unloader
Local supply system for Chemical Bath
Auto Shutters to keep cross contamination
Chemical bath auto cover
Hot DI Pre heating tank for H2O4 process
Wafer: 4” and 6”
Treatment: 1 Cassette immersion type
Main body: Ivory PVC 8t (Frame SUS304 40*40*1.5t)
Chemical Supply: Locall Chemical Auto Supply
Temperature Control: Setting temp. +/- 2°C
Chemical Drain: Bottle drain
System Control: PLC control, Operation panel: Touch screen
Safety Interlock: Emergency switch, Over-heating interlock, Leak sensor Door, Transfer, Chemical Supply, etc
Chemical consumption minimization trough compact bath design
Using HT PVC sink & drain pipe (Acid)
Power : 3Φ AC220V 150A-1EA HEATER/ULTRSONIC/PLC N2 Supply 5Nℓ/min 0.5Kg/㎠
- 1EA N2 SENSOR 60Nℓ/min 4Kg/㎠
- 1EA N2 BUBBLE 50Nℓ/min 4Kg/㎠
- 1EA N2 GUN (SUS SWG 3/8" 1EALOCK TYPE)CDA Supply 800Nℓ/min 5Kg/㎠
- 1EA CIR CULATION PUMP 600Nℓ/min 5Kg/㎠
- 1 EA LOCAL SUPPLY PUMP (SUS SWG 1/2" 1EALOCK TYPE) 300Nℓ/min 5Kg/㎠
- 1 EA AIR VALVE / CY 'L (SUS SWG 3/8" 1EALOCK TYPE) DI.W Supply 60ℓ/min 2Kg/㎠
- INLET=1EA, RETURN=1EA (C-PVC UNION 50A 2EA) Cooling water Supply 40ℓ/min 2Kg/㎠
- INLET=4EA, RETURN=4EA (SUS SWG 1/2" 8EALOCK TYPE)
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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