SDI fabsurplus.com is pleased to announce the availability of the following listed used SVS MSX1000 Spin Coater & Developer.
Please click on the "Send More Details" button at the end of the MSX1000 description, if you'd like to get more details, photos and specifications of this Spin Coater & Developer, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SVS MSX1000 Spin Coater & Developer is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Spin Coater & Developer|
|Version:||2 inch and 4 inch|
|Sales Condition:||as is where is|
-Still installed in the fab.
SVS-MSX 1000 - Specifications
Dimensions: 1,630(W) * 1,366(D) * 1,882(H) mm
Power Supply: AC208~230, Single-Phase, 50/60 Hz, 50A
CDA Supply: 3~5 kgf/cm² , 3/8”, Max 300SLM
N2 Supply: 2~5 kgf/cm² , 3/8”, Max 300SLM
DI Water: 1~2 kgf/cm² , 3/8”, 30SLM
PCW: 1~3 kgf/cm² , 3/8”, 20SLM
Main System Exhaust Port: Ø100 * 5Ports (Min Ø100/100scfm for all ports)
MTTR: below 2HR
MTBF: Over 400 HR
Throughput: 61WPH/Multi flow (Coater/Develop) process made
Coating Uniformity: 1,0um uniformity: range 50A within wafer
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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