SDI fabsurplus.com is pleased to announce the availability of the following listed used SVS MSX1000 Spin Coater & Developer.
Please click on the "Send More Details" button at the end of the MSX1000 description, if you'd like to get more details, photos and specifications of this Spin Coater & Developer, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SVS MSX1000 Spin Coater & Developer is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Spin Coater & Developer|
|Version:||2 inch and 4 inch|
|Sales Condition:||as is where is|
-Still installed in the fab.
SVS-MSX 1000 - Specifications
Dimensions: 1,630(W) * 1,366(D) * 1,882(H) mm
Power Supply: AC208~230, Single-Phase, 50/60 Hz, 50A
CDA Supply: 3~5 kgf/cm² , 3/8”, Max 300SLM
N2 Supply: 2~5 kgf/cm² , 3/8”, Max 300SLM
DI Water: 1~2 kgf/cm² , 3/8”, 30SLM
PCW: 1~3 kgf/cm² , 3/8”, 20SLM
Main System Exhaust Port: Ø100 * 5Ports (Min Ø100/100scfm for all ports)
MTTR: below 2HR
MTBF: Over 400 HR
Throughput: 61WPH/Multi flow (Coater/Develop) process made
Coating Uniformity: 1,0um uniformity: range 50A within wafer
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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