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SVS MSX1000 Spin Coater & Developer for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used SVS MSX1000 Spin Coater & Developer.
Please click on the "Send More Details" button at the end of the MSX1000 description, if you'd like to get more details, photos and specifications of this Spin Coater & Developer, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This SVS MSX1000 Spin Coater & Developer is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


SVS MSX1000 Equipment Details

SDI ID: 96618
Manufacturer: SVS
Model: MSX1000
Description: Spin Coater & Developer
Version: 2 inch and 4 inch
Vintage: 01.10.2010
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Still installed in the fab.
-Shut down and powered off.
-Can be inspected by appointment.
-The equipment is in excellent condition, with no missing parts.
-The equipment was lightly used in an R and D environment for around 2-3 years.
-The equipment ran 4 inch Sapphire wafers

-For the detailed configuration and the gas panel configuration, please refer to the attached photos and PDFs.

-Further information from the system manuals is available on specific request.

SVS-MSX 1000 - Specifications

Dimensions: 1,630(W) * 1,366(D) * 1,882(H) mm

Power Supply: AC208~230, Single-Phase, 50/60 Hz, 50A

CDA Supply: 3~5 kgf/cm² , 3/8”, Max 300SLM

N2 Supply: 2~5 kgf/cm² , 3/8”, Max 300SLM

DI Water: 1~2 kgf/cm² , 3/8”, 30SLM

PCW: 1~3 kgf/cm² , 3/8”, 20SLM

Main System Exhaust Port: Ø100 * 5Ports (Min Ø100/100scfm for all ports)

MTTR: below 2HR

MTBF: Over 400 HR

Weight: 750Kg

Throughput: 61WPH/Multi flow (Coater/Develop) process made

Coating Uniformity: 1,0um uniformity: range 50A within wafer

Categories:
Attachments: 39 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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