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ULVAC EI-5K Batch Type High Vacuum Evaporation System for ITO for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used ULVAC EI-5K Batch Type High Vacuum Evaporation System for ITO.
Please click on the "Send More Details" button at the end of the EI-5K description, if you'd like to get more details, photos and specifications of this Batch Type High Vacuum Evaporation System for ITO, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This ULVAC EI-5K Batch Type High Vacuum Evaporation System for ITO is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


ULVAC EI-5K Equipment Details

SDI ID: 96628
Manufacturer: ULVAC
Model: EI-5K
Description: Batch Type High Vacuum Evaporation System for ITO
Version: 2 inch to 6 inch
Vintage: 01.06.2011
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire
Comments:

-Still installed in the fab. 
-Shut down and powered off. 
-Can be inspected by appointment. 
-The equipment is in excellent condition, with no missing parts. 
-The equipment was lightly used in an R and D environment for around 2-3 years. 
-The equipment ran 4 inch Sapphire wafers

-For the detailed configuration and the gas panel configuration, please refer to the attached photos and PDFs.

-Further information from the system manuals is available on specific request.

ULVAC EI-5K E-Beam (for ITO)

Type: Power Supply 

Main system: (Including Power supply) 

Used amount or use pressure: 3Ø200V±10% 50kVA

Connection: M8 terminal

Type: Cooling Water 

Main system: Main system 

Used amount or use pressure: 0.2~0.3MPa 8(L/min) or more

Connection: In:3/4Rc Out:3/4Rc

Condition: 20~28℃ 

Type: Cooling Water

Main system: Cryo compressor

Used amount or use pressure: 0.2~0.3Mpa 7(L/min) or more

Connection: In:3/8Rc Out:3/8Rc

Condition: 20~28℃

Type: Cooling Water

Main system: EB gun 

Used amount or use pressure: 0.35~0.7MPa 12(L/min) or more 

Connection: In:1/2Rc Out:1/2Rc 

Condition: 20~25℃ 

Type: DRY PUMP (LR 90) 

Used amount or use pressure: 0.2~0.3MPa 5L/min or more 

Connection: In:3/8Rc Out:3/8Rc .

Condition: 20~28℃

*Water back pressure : Less than 0.05MPa

Categories:
Attachments: 44 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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