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Axcelis Ultra HC3 High Current Implanter for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used Axcelis Ultra HC3 High Current Implanter.
Please click on the "Send More Details" button at the end of the Ultra HC3 description, if you'd like to get more details, photos and specifications of this High Current Implanter, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Axcelis Ultra HC3 High Current Implanter is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


Axcelis Ultra HC3 Equipment Details

SDI ID: 97066
Manufacturer: Axcelis
Model: Ultra HC3
Description: High Current Implanter
Version: 300 mm
Vintage: Inquire
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price: Inquire
Comments:

-still working condition

-can be demoed

-photos available on request.

-Configuration:-


Solaris
Software Version    2.10.3
Workstation    Primary ultra workstation/Secondary spark 5 upgraded
SECS/GEM    Cisco 2600 
Cell Controller    11053210 V6 Cell
    Dose Controller
DOSE DI    "1527672

    Source, Beamline
Source Assembly    110015520
Source Liner   
Source Mounting Flange    110005080
Source Bushing    white bushing
Extraction Manipulator   
Extraction electroced Head   
V2   
Beamguide   
Pole Pieces   
Beam Tunnel   
SRA    110012390
Flag Faraday    110002620
PEF-Xe    110024510
TSD Faraday    11038850
HV Realy Box   
Decel Harness   
Dual Range HVPS   
Extraction Suppression Supply   
    Chiller
Cooling    "AFFINITY
RWA-012T-BE07CBD4"
    End Station
Disk Vac DI w/ Beam and Digital Charge monitor   
Wafer Transfer    11047920
In Air Robot    Sankyo
Load Lock    11009950
Gyro   
Gyro Alph Drive    1196510
Y-Scan Controller    11049380
Load Port type    Fix load
300mm Wafer Handling   
Wafer Holder    110001490
In-Vac arm    look at BOM for 11030960
Process Disk   
    Audit Results
Gas Box    11038320
Mod Gas Box Modual   
MFC TYPE    1640 MKS
Filamant P.S.   
Cathode P.S   
Arc P.S.   
    Audit Results
Cryo Pump P3/P9    P3(Installed)/P9(0B-250F)
P1   
P2   
RP1   
RP2   

Categories:
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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