SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch.
Please click on the "Send More Details" button at the end of the Telius SP-305 SCCM description, if you'd like to get more details, photos and specifications of this Dielectric Etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Manufacturer:||TEL Tokyo Electron|
|Model:||Telius SP-305 SCCM|
|Sales Price:||300,000 USD|
Tool is configured with 3 chamber
Software Revision: Linux 6.75 Rev 000-VSTD6.75a
Lot Stability Dummy SW: Software for running lot stability wafer.
OEE WPH Software: SW only for OEE throughput upgrade.
Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 4 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS
Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO),
Utility Box: Manual Valve : OGD20V-6RM-K/OGD10V-4RM-K(CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Loader Mod Corrosion Prevent: SUS Parts, Ball screw & Liner guide : PTFE Coating
Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)
Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)
Load Lock Pressure Monitor: CM : 626A01TDE (MKS)
Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)
Water Leak Detector: 4 (LM;1, each PS;1)
Signal Tower: Red / White / Green / Blue
EMO: 7(Front:2, Rear:5)
Cable Length: 20m (Interconnection), 19 (Top RF cables),20m(Btm RF cables)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Fittings: No Brass Fittings
Supporting Remote Units
Chiller: Daikin UBRPD5A-2T2
* stopped production
Coolant: Lower:FC3283, Upper:FC40
Chiller Hose: BRINE HOSE Top/Btm : 18/19M
Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A
RF Generator TOP: AGA-50B2
RF Matcher TOP: AMN-50B2
RF Generator Bottom: WGA-50E
Matching Controller: WMN-50H2(2MHZ/5KW)
Pen Record Box: N/A
Loader Module: SELME2112ZS2-AR5(M)
LOAD PORT: SELOP12F25-30B-14
DRIVE UNIT: SBX92102926
READER OPTICAL: None
Carrier ID Reader: N/A
APC: 10 INCH (250MM)
Proc Chbr 1,2,3: SCCM Oxide; Y203 Coating
Chamber hardware: FCC
Endpoint type: SE2000ii
ESC type: Ceramics ESCwith STD Vpp
Focus ring: 3.4mm
Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins.
Polished focus ring: N/A
FC lower insulator: INSULATOR,LOWER (RE)
Magnet Shield: O
Oring for Chbr Body-Depos: Armorcrystal
CEL Body ASSY: Upper electrode constant temperature control
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)
Dry Pump: ESR100WN:Ebara
Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)
Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)
APC: 10 INCH (250MM)
Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor: ATM Switch : 41A13DGA2AA040 (MKS)
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas
Gas Box Configuration
Gas Line 1: (01) NONE / F300
Gas Line 2: (02) CH2F2 / F80
Gas Line 3: (03) C4F8 / F122
Gas Line 4: (04) C4F6 / F180
Gas Line 5: (05) Ar / F2000
Gas Line 6: (06) O2 / F1300
Gas Line 7: (07) O2 / F65
Gas Line 8: (08) CO / F200
Gas Line 9: (09) CHF3 / F200
Gas Line 10: (10) CF4 / F300
Gas Line 11: (11) NONE / F50
Gas Line 12: (12) NONE / F500
Gas Line 13: (13) C4F6 / F39
Gas Line 14: (14) CHF3 / F50
Gas Line 15: (15) Ar / F110
Gas Line 16: (16) O2 / F10
Purge: One line serves up to 16 lines per box
Filter: CNF1004USG4(Nihon Pall)
Regulator: N2-Purge: 12-1A21IGS2W(TESCOM)
Filter (N2): CNF1004USG4(Nihon Pall)
Valve: Primary Side(Utility - FCS) :
Valve: Secondary Side(FCS - PC) :
Mega One (FUJIKIN)
Piping: Dual piping at gas line from gas box to Final Valve & exhaust through gas box
Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok type)
Final Pressure Switch: 51A (MKS)
Pressure Gauge: Bourdon Gauge(0.2Mpa)
(GAS1: Digital Gauge)
Pressure Gauge: Bourdon Gauge(0.4Mpa)
SP3 Gas Line Connection: Single Line Drop
Process Kit Configuration
WINDOW, SHIELD DEPO(DRM2) QRTZ: WINDOW, SHIELD DEPO (DRM2) QUARTZ
WINDOW DEPO SAF0.5(DRM2) SAPPh: WINDOW DEPO SAF0.5(DRM2) SAPPHIRE
SHIELD, UP 300MM RING-Qrtz: SHIELD, UPPER 300MM RING - Quartz (ES3D05-
Insulator, ESC Enclosure (COC): Insulator, ESC Enclosure (COC) - Quartz (ES3D05-300142-
Cover Ring, 360- L (M) - Qrtz: Cover Ring, 360- L (M) - Quartz (ES3D05-300243-11)
RING, BTM SHIELD Y-AL, SE: RING, BTM SHIELD Y-AL, SE (ES3D10-100844-11)
PLATE,EXHAUST Y-AL, SE: PLATE,EXHAUST Y-AL, SE (ES3D10-100845-11)
SHUTTER,BTM TYPE Y-AL, SE: SHUTTER, BTM TYPE Y-AL, SE (ES3D10-101152-13)
SHIELD,DEPO: SHIELD,DEPO (ES3D10-100910-12)
Focus Rg, 360-302-COC: Focus Rg, 360-302-COC (ES3D10-250007-11)
Insultr, lwr T32-R6-BL-NC: Insulator, lower T32-BI-NC
WINDOW,DEPO CLP: WINDOW,DEPO CLP/Y2O3-100P(N) (ES3D10-350344-12)
SCREW PIN LOCK, Cerazol: Ceramic (ES3D10-404821-11)
Si Upper Electrode: Si Upper Electrode (ES3D10-302020-11)
CEL ASSY: CEL ASSY (ES3D87-003411-14)
ESC ASSY: ESC ASSY (with ceramic pusher pins) (ES3D87-052854-11)
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