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TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch.
Please click on the "Send More Details" button at the end of the Telius SP-305 SCCM description, if you'd like to get more details, photos and specifications of this Dielectric Etch, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This TEL Tokyo Electron Telius SP-305 SCCM Dielectric Etch is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


TEL Tokyo Electron Telius SP-305 SCCM Equipment Details

SDI ID: 97817
Manufacturer: TEL Tokyo Electron
Model: Telius SP-305 SCCM
Description: Dielectric Etch
Version: 300 mm
Vintage: 01.06.2007
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price: 300,000 USD
Comments:

EQUIPMENT DETAILS:

Tool is configured with 3 chamber

Standard Specifications

Software Revision: Linux 6.75 Rev 000-VSTD6.75a

Lot Stability Dummy SW: Software for running lot stability wafer.

OEE WPH Software: SW only for OEE throughput upgrade.

Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch

Carrier: FOUP (Comply with SEMI E47.1 (25wafers))

Inter Face: 4 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS

assemblies

Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)

Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO),

He/SQMICRO(VERIFLO)

Utility Box: Manual Valve : OGD20V-6RM-K/OGD10V-4RM-K(CKD)

Utility Box: Pressure Gauge : Bourdon Gauge

Loader Mod Corrosion Prevent: SUS Parts, Ball screw & Liner guide : PTFE Coating

Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)

Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)

Load Lock Pressure Monitor: CM : 626A01TDE (MKS)

Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)

Water Leak Detector: 4 (LM;1, each PS;1)

Signal Tower: Red / White / Green / Blue

EMO: 7(Front:2, Rear:5)

Cable Length: 20m (Interconnection), 19 (Top RF cables),20m(Btm RF cables)

Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)

Fittings: No Brass Fittings

 

Supporting Remote Units

Chiller: Daikin UBRPD5A-2T2

* stopped production

Coolant: Lower:FC3283, Upper:FC40

Chiller Hose: BRINE HOSE Top/Btm : 18/19M

Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A

RF Generator TOP: AGA-50B2

RF Matcher TOP: AMN-50B2

RF Generator Bottom: WGA-50E

Matching Controller: WMN-50H2(2MHZ/5KW)

Pen Record Box: N/A

Loader Module: SELME2112ZS2-AR5(M)

BX80-071026-15

LOAD PORT: SELOP12F25-30B-14

BX80-070965-14

DRIVE UNIT: SBX92102926

BX80-070974-21

READER OPTICAL: None

Carrier ID Reader: N/A

APC: 10 INCH (250MM)

 

Hardware Configuration

Proc Chbr 1,2,3: SCCM Oxide; Y203 Coating

Chamber hardware: FCC

Endpoint type: SE2000ii

ESC type: Ceramics ESCwith STD Vpp

Focus ring: 3.4mm

Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins.

Polished focus ring: N/A

FC lower insulator: INSULATOR,LOWER (RE)

3D10-250542-11"

 

Magnet Shield: O

Oring for Chbr Body-Depos: Armorcrystal

Chemraz SC657"

CEL Body ASSY: Upper electrode constant temperature control

TMP: FT-3301

(MITSUBISHI)"

TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)

Dry Pump: ESR100WN:Ebara

Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)

Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)

APC: 10 INCH (250MM)

Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa

Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa

Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa

Pressure Monitor: ATM Switch : 41A13DGA2AA040 (MKS)

Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas

 

Gas Box Configuration

Gas Line 1: (01) NONE / F300

Gas Line 2: (02) CH2F2 / F80

Gas Line 3: (03) C4F8 / F122

Gas Line 4: (04) C4F6 / F180

Gas Line 5: (05) Ar / F2000

Gas Line 6: (06) O2 / F1300

Gas Line 7: (07) O2 / F65

Gas Line 8: (08) CO / F200

Gas Line 9: (09) CHF3 / F200

Gas Line 10: (10) CF4 / F300

Gas Line 11: (11) NONE / F50

Gas Line 12: (12) NONE / F500

Gas Line 13: (13) C4F6 / F39

Gas Line 14: (14) CHF3 / F50

Gas Line 15: (15) Ar / F110

Gas Line 16: (16) O2 / F10

Purge: One line serves up to 16 lines per box

Filter: CNF1004USG4(Nihon Pall)

GTMF3200F4A-VM4(Nihon Pall)

Regulator: N2-Purge: 12-1A21IGS2W(TESCOM)

Filter (N2): CNF1004USG4(Nihon Pall)

GTMF3200F4A-VM4(Nihon Pall)

Valve: Primary Side(Utility - FCS) :

Mega mini(FUJIKIN)

Valve: Secondary Side(FCS - PC) :

Mega One (FUJIKIN)

Piping: Dual piping at gas line from gas box to Final Valve & exhaust through gas box

Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok type)

Final Pressure Switch: 51A (MKS)

Pressure Gauge: Bourdon Gauge(0.2Mpa)

(GAS1: Digital Gauge)

Pressure Gauge: Bourdon Gauge(0.4Mpa)

SP3 Gas Line Connection: Single Line Drop

GBROR: None

 

Process Kit Configuration

WINDOW, SHIELD DEPO(DRM2) QRTZ: WINDOW, SHIELD DEPO (DRM2) QUARTZ

(ES1D05-400022-14)

WINDOW DEPO SAF0.5(DRM2) SAPPh: WINDOW DEPO SAF0.5(DRM2) SAPPHIRE

(ES1D10-406499-11)

SHIELD, UP 300MM RING-Qrtz: SHIELD, UPPER 300MM RING - Quartz (ES3D05-

200094-12)

Insulator, ESC Enclosure (COC): Insulator, ESC Enclosure (COC) - Quartz (ES3D05-300142-

13)

Cover Ring, 360- L (M) - Qrtz: Cover Ring, 360- L (M) - Quartz (ES3D05-300243-11)

RING, BTM SHIELD Y-AL, SE: RING, BTM SHIELD Y-AL, SE (ES3D10-100844-11)

PLATE,EXHAUST Y-AL, SE: PLATE,EXHAUST Y-AL, SE (ES3D10-100845-11)

SHUTTER,BTM TYPE Y-AL, SE: SHUTTER, BTM TYPE Y-AL, SE (ES3D10-101152-13)

SHIELD,DEPO: SHIELD,DEPO (ES3D10-100910-12)

Focus Rg, 360-302-COC: Focus Rg, 360-302-COC (ES3D10-250007-11)

Insultr, lwr T32-R6-BL-NC: Insulator, lower T32-BI-NC

WINDOW,DEPO CLP: WINDOW,DEPO CLP/Y2O3-100P(N) (ES3D10-350344-12)

SCREW PIN LOCK, Cerazol: Ceramic (ES3D10-404821-11)

Si Upper Electrode: Si Upper Electrode (ES3D10-302020-11)

CEL ASSY: CEL ASSY (ES3D87-003411-14)

ESC ASSY: ESC ASSY (with ceramic pusher pins) (ES3D87-052854-11)

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The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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