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DNS SS-3100 WET Scrubber for Sale


SDI fabsurplus.com is pleased to announce the availability of the following listed used DNS SS-3100 WET Scrubber.
Please click on the "Get Quote" button at the end of the SS-3100 description, if you'd like to get a quotation, photos and specifications of this WET Scrubber, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This DNS SS-3100 WET Scrubber is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.


DNS SS-3100 Equipment Details

SDI ID: 98268
Manufacturer: DNS
Model: SS-3100
Description: WET Scrubber
Version: 300 mm
Vintage: 31.05.2012
Quantity: 1
Sales Condition: inquire
Lead Time: immediately
Sales Price: Inquire
Comments:

Software Version: YM200N

Process: 4F/4B

Hardware Configuration
Main System Main Body 1
SMIF System Shinko Selop Loadports 4
Handler System Indexer Robot 1
  Transfer Robot 1
  PASS transfer 1
  SS Chuck 4
  SSR Chuck 4
  Reverser 2
Process Chambers SC 1 1
  CO2 WATER 1
  Rinse/spin dry 1

 

Equipment Configuration
   
Front side Chamber 4 units
Vacuum chuck 4 set
SC1 Nozzle 4 set
CO2 rinse Dry each chamber 4 set
Brush clean scan 4 set
Bevel brush 4 set
Nanospray scan 4 set
Backside Chamber 4 units
Chuck pin chuck 4 units
SC1 Nozzle 4 set
CO2 rinse Dry each chamber 4 set
Brush clean scan 4 set
Nanospray scan 4 set
Reverser  
Reverser to flip wafers for backside processing 1 unit
Reverser to flip wafers for return to device side up 1 unit
Transport 1 unit
Kawasaki IR (indexer robot) 1 unit
PASS (between IR and CR) 1 unit
Kawasaki TR (transfer robot) 1 unit

Please check pictures below for more information


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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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