HITACHI RS 4000 Defect Review SEM for Sale

Defect review SEM, fitted with qty 2 x 300 mm loadports.
The Hitachi RS-4000 In-line Defect Review SEM has been designed to meet production demands for devices in the 45-nm technology node and beyond.It performs at a high throughput rate of 1,200 DPH (defects per hour), which is about 3 times faster than the previous model, and performs defect review at a high speed and high defect capture rate thereby improving image resolution (3 nm) and enhancing image processing. Combined with ADC (automatic defect classification) to identify killer defects, the tool produces data directly linked with yield enhancement systems. Furthermore, the newly added function of tilt image observation by tilting the electron beam enables the tool to generate more defect information.

Note: This SEM is an RS3000 model that has been upgraded to RS4000 by the OEM.

Performance specifications:
1)REVIEW throughput: 5.14s/defect or less
2)Secondary electron image resolution: 4 nm
3)Minimum detectable defect size:0.07 μm
4)Specimen stage stopping precision: ±3 μm(for x and y)
5)Auto Review detection rate:90% minimum (Defect size:0.10-0.37μm )
6)Auto classification accuracy:85% minimum

Missing or damaged parts: None
Tool has been de-installed and is currently located in an inspection cleanroom
Please review the attached photos, showing the tool as originally installed, and also in the current storage location.