Gigaphoton GT60A4 193 NM excimer laser for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Gigaphoton GT60A4 193 NM excimer laser.
Please click on the "Send More Details" button at the end of the GT60A4 description, if you'd like to get more details, photos and specifications of this 193 NM excimer laser, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Gigaphoton GT60A4 193 NM excimer laser is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Gigaphoton GT60A4 Equipment Details

SDI ID: 98317
Manufacturer: Gigaphoton
Model: GT60A4
Description: 193 NM excimer laser
Version: Facilities
Vintage: 01.08.2006
Quantity: 1
Sales Condition: as is where is
Lead Time: immediately
Sales Price: Inquire

The GT60A is an injection lock ArF excimer laser with high power and high repetition rate: GT60A (60W, 6000Hz, 10mJ, 0.5pm).
The GT60A is a member of the "Gigatwin" platform. A higher laser power is needed for higher throughput and stable narrower spectral bandwidth is needed for higher NA. But high laser power and narrow spectrum are in the relation of the trade-off in a single chamber system. This is achived via use of the twin-chamber injection lock technology.
Specifications Summary
Typical Technology Node (nm): 50 nm
Wavelength (nm): 193 nm
Power (W): 60
Pulse Energy (mJ): 10
Repetition Rate (Hz): 6000
E95 (pm): 0.5
E95 stabilization: optional

Durability (Expected)
MO Chamber (B Pls): 20
PO Chamber (B Pls): 30
Monitor Module (B Pls): 30
Amp Front Mirror (B Pls): 12
Amp Rear Mirror (B Pls): 12

Attachments: 1 Files
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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