SDI fabsurplus.com is pleased to announce the availability of the following listed used Aviza Technology RVP300 Vertical Diffusion Furnace.
Please click on the "Send More Details" button at the end of the RVP300 description, if you'd like to get more details, photos and specifications of this Vertical Diffusion Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Aviza Technology RVP300 Vertical Diffusion Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
|Description:||Vertical Diffusion Furnace|
|Sales Price:||135,000 USD|
System, General Specification
Heater element Model FURNACE,ATM -APL
Process Condition AP
Maximum Operating Temperature 1200c
N2 Load Lock Yes
Wafer Type 300 SEMI STD-Notch
Qty. of Production Wafers 120 slots Ladder
Boat Operation 2 Boat Type
Software Version AVP 2.7.1 V
Loading Area Light White 2
Force Air Cooiling system installed 1
Side Maintenance None None
O2 Density control 0-100ppm 1
N2 Boat shower wafer cooling None 1
Furnace Temperature Controller SSPC control 9
System, Wafer/Carrier Handling
Carrier Type 12" FOUP
Carrier Stage Capacity 16 FOUP
WTU Type GenMark
WTU alignment GenMark
WTU Teaching method Pre-aligner / dual beam
System, Gas Distribution
IGS Maker / Type Fujikin
IGS MFC Maker / Type AERA
IGS Press Transducer Maker / Type Mykrolis
System, Exhaust Specification
Vacuum Gage - 2 torr AP tool
Vacuum Gage - 10 torr AP tool
Vacuum Gage - 100 torr AP tool
Vacuum Gage - 1000 torr AP tool
Main Valve AP tool
Pump Maker/Model AP tool
Low vacuum valve AP tool
Trap AP tool
Vacuum Pressure Controller AP tool
Process Tube (LP) None
Outer/Inner Tube Material (LP) None
Inner Tube Type (AP) Quartz Single
Inner T/C 12FT/HONEYWELL
Boat Materail/Type Sic
Boat Rotation None
Pedestal Materail/Type Quartz
Auto Shutter installed
System, Power Distribution
Voltage 3phase 480VAC
Voltage Single-phase None
System, User Interface
Operation Panel Keyboard & Screen
Indicator Type Mouse
Operation software type Linux
Gas Leak Detector
Gas Leak Detector Materail/Type GasTech
System, Fixture List, Gas
IGS maintenance Fixture None
Vacuum Gauge None
Damage/Missing parts list
Dry pumps are not included with sales
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The data provided herein is not an offer capable of acceptance.
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Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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