SDI fabsurplus.com is pleased to announce the availability of the following listed used Aviza Technology RVP300 Vertical Diffusion Furnace.
Please click on the "Send More Details" button at the end of the RVP300 description, if you'd like to get more details, photos and specifications of this Vertical Diffusion Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Aviza Technology RVP300 Vertical Diffusion Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.
| SDI ID: | 99053 |
|---|---|
| Manufacturer: | Aviza Technology |
| Model: | RVP300 |
| Description: | Vertical Diffusion Furnace |
| Version: | 300 mm |
| Vintage: | Inquire |
| Quantity: | 1 |
| Sales Condition: | |
| Lead Time: | Inquire |
| Sales Price: | 135,000 USD |
| Comments: | System, General Specification Heater element Model FURNACE,ATM -APL Process Condition AP Maximum Operating Temperature 1200c N2 Load Lock Yes Wafer Type 300 SEMI STD-Notch Qty. of Production Wafers 120 slots Ladder Boat Operation 2 Boat Type Software Version AVP 2.7.1 V System, Furnace Loading Area Light White 2 Force Air Cooiling system installed 1 Side Maintenance None None O2 Density control 0-100ppm 1 N2 Boat shower wafer cooling None 1 Furnace Temperature Controller SSPC control 9 System, Wafer/Carrier Handling Carrier Type 12" FOUP Carrier Stage Capacity 16 FOUP WTU Type GenMark WTU alignment GenMark WTU Teaching method Pre-aligner / dual beam System, Gas Distribution IGS Maker / Type Fujikin IGS MFC Maker / Type AERA IGS Press Transducer Maker / Type Mykrolis System, Exhaust Specification Vacuum Gage - 2 torr AP tool Vacuum Gage - 10 torr AP tool Vacuum Gage - 100 torr AP tool Vacuum Gage - 1000 torr AP tool Main Valve AP tool Pump Maker/Model AP tool Low vacuum valve AP tool Trap AP tool Vacuum Pressure Controller AP tool System, Reactor Process Tube (LP) None Outer/Inner Tube Material (LP) None Inner Tube Type (AP) Quartz Single Inner T/C 12FT/HONEYWELL Boat Materail/Type Sic Boat Rotation None Pedestal Materail/Type Quartz Auto Shutter installed System, Power Distribution Voltage 3phase 480VAC Voltage Single-phase None Frequency 60Hz System, User Interface Operation Panel Keyboard & Screen Indicator Type Mouse Operation software type Linux Gas Leak Detector Gas Leak Detector Materail/Type GasTech System, Fixture List, Gas IGS maintenance Fixture None Vacuum Gauge None Damage/Missing parts list Dry pumps are not included with sales |
| Categories: | |
| Attachments: | 9 Files |
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.
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