Aviza Technology RVP300 Vertical Diffusion Furnace for Sale

SDI fabsurplus.com is pleased to announce the availability of the following listed used Aviza Technology RVP300 Vertical Diffusion Furnace.
Please click on the "Send More Details" button at the end of the RVP300 description, if you'd like to get more details, photos and specifications of this Vertical Diffusion Furnace, and your request for this equipment will be forwarded to our SDI sales representatives automatically.
This Aviza Technology RVP300 Vertical Diffusion Furnace is available for immediate sale.
Crating, refurbishment and delivery for this equipment can be quoted on request.

Aviza Technology RVP300 Equipment Details

SDI ID: 99053
Manufacturer: Aviza Technology
Model: RVP300
Description: Vertical Diffusion Furnace
Version: 300 mm
Vintage: Inquire
Quantity: 1
Sales Condition:
Lead Time: Inquire
Sales Price: 135,000 USD

System, General Specification

Heater element Model FURNACE,ATM -APL

Process Condition AP

Maximum Operating Temperature 1200c

N2 Load Lock Yes

Wafer Type 300 SEMI STD-Notch

Qty. of Production Wafers 120 slots Ladder

Boat Operation 2 Boat Type

Software Version AVP 2.7.1 V

System, Furnace

Loading Area Light White 2

Force Air Cooiling system installed 1

Side Maintenance None None

O2 Density control 0-100ppm 1

N2 Boat shower wafer cooling None 1

Furnace Temperature Controller SSPC control 9

System, Wafer/Carrier Handling

Carrier Type 12" FOUP

Carrier Stage Capacity 16 FOUP

WTU Type GenMark

WTU alignment GenMark

WTU Teaching method Pre-aligner / dual beam

System, Gas Distribution

IGS Maker / Type Fujikin

IGS MFC Maker / Type AERA

IGS Press Transducer Maker / Type Mykrolis

System, Exhaust Specification

Vacuum Gage - 2 torr AP tool

Vacuum Gage - 10 torr AP tool

Vacuum Gage - 100 torr AP tool

Vacuum Gage - 1000 torr AP tool

Main Valve AP tool

Pump Maker/Model AP tool

Low vacuum valve AP tool

Trap AP tool

Vacuum Pressure Controller AP tool

System, Reactor

Process Tube (LP) None

Outer/Inner Tube Material (LP) None

Inner Tube Type (AP) Quartz Single


Boat Materail/Type Sic

Boat Rotation None

Pedestal Materail/Type Quartz

Auto Shutter installed

System, Power Distribution

Voltage 3phase 480VAC

Voltage Single-phase None

Frequency 60Hz

System, User Interface

Operation Panel Keyboard & Screen 

Indicator Type Mouse

Operation software type Linux

Gas Leak Detector

Gas Leak Detector Materail/Type GasTech

System, Fixture List, Gas

IGS maintenance Fixture None

Vacuum Gauge None

Damage/Missing parts list

Dry pumps are not included with sales

Attachments: 9 Files
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The data provided herein is not an offer capable of acceptance.
The information contained on this page is, to our knowledge and information, accurate, but it may contain errors and therefore we do not warrant the completeness or accuracy of the information contained on this page.
Any offer by you to purchase the equipment described on this page shall be subject to our standard terms and conditions of sale.

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